Microprobe array structure and method for manufacturing the same
    1.
    发明授权
    Microprobe array structure and method for manufacturing the same 有权
    微阵列阵列结构及其制造方法

    公开(公告)号:US07941201B2

    公开(公告)日:2011-05-10

    申请号:US11599303

    申请日:2006-11-15

    IPC分类号: A61B5/04

    摘要: A microprobe array structure with self-stabilization capability and a method for manufacturing the same are proposed. The microprobe array structure is used to sense various biopotential signals, and is characterized in that the etching parameters are controlled during etching to manufacture a microprobe structure with a reduced bottom cross section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a conducting layer is formed on the microprobe to sense signals. A design of electric isolation between microprobes is also proposed. The microprobe array can therefore be used for the measurement of various biopotential signals, and can also be used as a stimulus.

    摘要翻译: 提出了具有自稳定能力的微探针阵列结构及其制造方法。 微探针阵列结构用于感测各种生物电位信号,其特征在于在蚀刻期间控制蚀刻参数以制造具有减小的底部横截面的微探针结构,使得微探针能够牢固地稳定在皮肤组织中。 此外,在微探针上形成导电层以感测信号。 还提出了微型笔之间的电隔离设计。 因此,微探针阵列可以用于各种生物电位信号的测量,并且也可以用作刺激。

    Method for fabricating microneedle array and method for fabricating embossing mold of microneedle array
    2.
    发明授权
    Method for fabricating microneedle array and method for fabricating embossing mold of microneedle array 有权
    微针阵列的制造方法和微针阵列压花模具的制造方法

    公开(公告)号:US07429333B2

    公开(公告)日:2008-09-30

    申请号:US11691573

    申请日:2007-03-27

    IPC分类号: B44C1/22 C25F3/00

    CPC分类号: B29C33/40 B29C33/3878

    摘要: The present invention discloses a method for fast fabricating microneedle arrays with an embossing process and a method for fabricating an embossing mold of a microneedle array, wherein a master pattern of a high aspect ratio silicon microneedle array is fabricated with a microelectromechanical technology, and the master pattern is used to fabricate an embossing mold; a thermosetting material is filled into the embossing mold; then, baking, pressing and mold-stripping are undertaken; thereby, disposable solid polymer microneedle arrays can be batch-fabricated.

    摘要翻译: 本发明公开了一种用压花工艺快速制造微针阵列的方法和一种用于制造微针阵列的压花模具的方法,其中利用微机电技术制造高纵横比硅微针阵列的母模, 图案用于制造压花模具; 将热固性材料填充到压花模具中; 然后进行烘烤,压制和脱模; 从而可以批量制造一次性固体聚合物微针阵列。

    Microprobe array structure and method for manufacturing the same
    3.
    发明申请
    Microprobe array structure and method for manufacturing the same 有权
    微阵列阵列结构及其制造方法

    公开(公告)号:US20080009763A1

    公开(公告)日:2008-01-10

    申请号:US11599303

    申请日:2006-11-15

    IPC分类号: A61B5/04

    摘要: A microprobe array structure with self-stabilization capability and a method for manufacturing the same are proposed. The microprobe array structure is used to sense various biopotential signals, and is characterized in that the etching parameters are controlled during etching to manufacture a microprobe structure with a reduced bottom cross section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a conducting layer is formed on the microprobe to sense signals. A design of electric isolation between microprobes is also proposed. The microprobe array can therefore be used for the measurement of various biopotential signals, and can also be used as a stimulus.

    摘要翻译: 提出了具有自稳定能力的微探针阵列结构及其制造方法。 微探针阵列结构用于感测各种生物电位信号,其特征在于在蚀刻期间控制蚀刻参数以制造具有减小的底部横截面的微探针结构,使得微探针能够牢固地稳定在皮肤组织中。 此外,在微探针上形成导电层以感测信号。 还提出了微型笔之间的电隔离设计。 因此,微探针阵列可以用于各种生物电位信号的测量,并且也可以用作刺激。

    Three-dimensional microprobe array
    4.
    发明授权
    Three-dimensional microprobe array 有权
    三维微探针阵列

    公开(公告)号:US07946050B2

    公开(公告)日:2011-05-24

    申请号:US12128804

    申请日:2008-05-29

    IPC分类号: G01D13/00 G01R31/00

    CPC分类号: G01R1/07321 G01R31/2891

    摘要: The present invention discloses a three-dimensional microprobe array assembly structure, wherein spacers are used in assembling edge-type microprobe arrays to form a three-dimensional structure, and the spacers reveal conductive pads of the edge-type microprobe arrays to benefit wire bonding. The present invention detects depths and angles and thus increases detection reliability. Besides, in the present invention, the related IC is integrated with the spacer to achieve circuit integration and reduce cost.

    摘要翻译: 本发明公开了一种三维微探针阵列组合结构,其中使用间隔件来组装边缘型微探针阵列以形成三维结构,并且间隔物显示边缘型微探针阵列的导电焊盘以有益于引线接合。 本发明检测深度和角度,从而提高检测可靠性。 此外,在本发明中,相关IC与间隔器集成以实现电路集成并降低成本。

    Integration structure of semiconductor circuit and microprobe sensing elements and method for fabricating the same
    5.
    发明授权
    Integration structure of semiconductor circuit and microprobe sensing elements and method for fabricating the same 有权
    半导体电路和微探针感测元件的集成结构及其制造方法

    公开(公告)号:US07875479B2

    公开(公告)日:2011-01-25

    申请号:US12382587

    申请日:2009-03-19

    IPC分类号: H01L21/00 H01L23/48 H01L23/52

    摘要: The present invention discloses an integration structure of a semiconductor circuit and microprobe sensing elements and a method for fabricating the same. In the method of the present invention, a semiconductor circuit is fabricated on one surface of a semiconductor substrate, and the other surface of the semiconductor substrate is etched to form a microprobe structure for detect physiological signals. Next, a deposition method is used to sequentially form an electrical isolated layer and an electrical conductive layer on the microprobes. Then, an electrical conductive material is used to electrically connect the electrical conductive layer with the electrical pads of the semiconductor circuit. Thus is achieved the integration of a semiconductor circuit and microprobe sensing elements in an identical semiconductor substrate with the problem of electric electrical isolated being solved simultaneously. Thereby, the voltage level detected by the microprobes will not interfere with the operation of the semiconductor circuit.

    摘要翻译: 本发明公开了一种半导体电路和微探针感测元件的集成结构及其制造方法。 在本发明的方法中,在半导体衬底的一个表面上制造半导体电路,蚀刻半导体衬底的另一个表面以形成用于检测生理信号的微探针结构。 接下来,使用沉积方法在微探针上依次形成电隔离层和导电层。 然后,使用导电材料将导电层与半导体电路的电焊盘电连接。 从而实现半导体电路和微探针感测元件在相同的半导体衬底中的集成,同时解决了电隔离的问题。 由此,微探针检测的电压电平不会干扰半导体电路的动作。

    THREE-DIMENSIONAL MICROPROBE ARRAY
    6.
    发明申请
    THREE-DIMENSIONAL MICROPROBE ARRAY 有权
    三维微阵列阵列

    公开(公告)号:US20090120216A1

    公开(公告)日:2009-05-14

    申请号:US12128804

    申请日:2008-05-29

    IPC分类号: G01D21/00

    CPC分类号: G01R1/07321 G01R31/2891

    摘要: The present invention discloses a three-dimensional microprobe array assembly structure, wherein spacers are used in assembling edge-type microprobe arrays to form a three-dimensional structure, and the spacers reveal conductive pads of the edge-type microprobe arrays to benefit wire bonding. The present invention detects depths and angles and thus increases detection reliability. Besides, in the present invention, the related IC is integrated with the spacer to achieve circuit integration and reduce cost.

    摘要翻译: 本发明公开了一种三维微探针阵列组合结构,其中使用间隔件来组装边缘型微探针阵列以形成三维结构,并且间隔物显示边缘型微探针阵列的导电焊盘以有益于引线接合。 本发明检测深度和角度,从而提高检测可靠性。 此外,在本发明中,相关IC与间隔器集成以实现电路集成并降低成本。

    Physiological signal collection unit and detector thereof
    7.
    发明授权
    Physiological signal collection unit and detector thereof 有权
    生理信号采集单元及其检测器

    公开(公告)号:US09420961B2

    公开(公告)日:2016-08-23

    申请号:US13473523

    申请日:2012-05-16

    摘要: A physiological signal collection unit is for use with a physiological signal measuring apparatus to measure physiological signals from an anatomical part of a test subject, in which the anatomical part is covered with hair. The physiological signal collection unit includes a detector and a wearable member. The detector includes a circuit substrate defining a substrate-through-hole to permit hair strands to extend through, an electrical connector, and at least one signal collecting component. The wearable member is to be worn on the anatomical part of the test subject, and is formed with a through-hole having a size smaller than size of the circuit substrate. The through-hole permits the hair strands extending through the circuit substrate to extend through the wearable member.

    摘要翻译: 生理信号收集单元用于与生理信号测量装置一起使用,以测量来自测试对象的解剖部分的生理信号,其中解剖部分被毛发覆盖。 生理信号收集单元包括检测器和可穿戴构件。 检测器包括限定通孔的电路基板,以允许发丝穿过,电连接器和至少一个信号收集部件。 可穿戴构件将被佩戴在测试对象的解剖部分上,并且形成有尺寸小于电路基板的尺寸的通孔。 通孔允许延伸穿过电路基板的发条延伸穿过可穿戴构件。

    MICROSCANNING SYSTEM AND RELATED METHOD
    8.
    发明申请
    MICROSCANNING SYSTEM AND RELATED METHOD 失效
    微波系统及相关方法

    公开(公告)号:US20120120394A1

    公开(公告)日:2012-05-17

    申请号:US13101681

    申请日:2011-05-05

    IPC分类号: G01J3/40 G01J3/28

    摘要: A microscanning system including a microscope, a relay lens device, a stepping motor and a hyper-spectrometer is disclosed. The microscope is adapted to acquire and enlarge an image of an object to generate an enlarged image which is a 2D image distributed along the first direction and second direction. The relay lenses device disposed behind the microscope receives and transfers the enlarged image outputted by the microscope. The stepping motor electrically connected to the relay lens device reciprocates the relay lens linearly in the first direction device in a stepwise manner along the second direction. . The hyper-spectrometer disposed behind the rely lens device receives the partial enlarged images of the object along the first direction that are transferred by the relay lens device sequentially along the second direction, and transform the partially enlarged images into the corresponding spectrum information.

    摘要翻译: 公开了一种包括显微镜,中继透镜装置,步进电机和超光谱仪的显微系统。 显微镜适于获取和放大对象的图像以产生作为沿着第一方向和第二方向分布的2D图像的放大图像。 设置在显微镜后面的中继透镜装置接收并传送由显微镜输出的放大图像。 电连接到中继透镜装置的步进电机沿着第二方向以逐步方式使中继透镜沿第一方向装置线性地往复运动。 。 设置在依赖透镜装置后面的超光谱仪沿着第一方向接收由中继透镜装置沿着第二方向传送的物体的部分放大图像,并将部分放大的图像变换成相应的光谱信息。

    Micro-optical image stabilizer
    9.
    发明申请
    Micro-optical image stabilizer 有权
    微光图像稳定器

    公开(公告)号:US20090213236A1

    公开(公告)日:2009-08-27

    申请号:US12435418

    申请日:2009-05-05

    IPC分类号: H04N5/228

    摘要: The optical image stabilizer includes a substrate, a carrier movably disposed on the substrate for carrying an image sensor, an anchor fixed on the substrate, a conducting pad fixed on the anchor for coupling an image processing circuit, a flexible suspension disposed between the conducting pad and the carrier, a conducting line disposed on the flexible suspension coupled to the conducting pad and protruding over the carrier for coupling the image sensor, and a micro actuator disposed between the substrate and the carrier for adjusting the position of the carrier according to control signals from an actuator control circuit.

    摘要翻译: 光学图像稳定器包括:基板,可移动地设置在用于承载图像传感器的基板上的载体,固定在基板上的锚固体,固定在锚固件上用于耦合图像处理电路的导电垫,设置在导电垫 载体,布置在柔性悬臂上的导线,耦合到导电垫并突出在载体上用于耦合图像传感器;以及微型致动器,其布置在基板和载体之间,用于根据控制信号调整载体的位置 来自致动器控制电路。

    Micro-optical image stabilizer
    10.
    发明申请
    Micro-optical image stabilizer 有权
    微光图像稳定器

    公开(公告)号:US20080273092A1

    公开(公告)日:2008-11-06

    申请号:US11780483

    申请日:2007-07-20

    IPC分类号: H04N5/228

    摘要: A micro-optical image stabilizer is disclosed. The optical image stabilizer includes a substrate, a carrier movably disposed on the substrate for carrying an image sensor, an anchor fixed on the substrate, a conducting pad fixed on the anchor for coupling an image processing circuit, a flexible suspension disposed between the conducting pad and the carrier, a conducting line disposed on the flexible suspension coupled to the conducting pad and protruding over the carrier for coupling the image sensor, and a micro actuator disposed between the substrate and the carrier for adjusting the position of the carrier according to control signals from an actuator control circuit.

    摘要翻译: 公开了一种微光学图像稳定器。 光学图像稳定器包括:基板,可移动地设置在用于承载图像传感器的基板上的载体,固定在基板上的锚固体,固定在锚固件上用于耦合图像处理电路的导电垫,设置在导电垫 载体,布置在柔性悬臂上的导线,耦合到导电垫并突出在载体上用于耦合图像传感器;以及微型致动器,其布置在基板和载体之间,用于根据控制信号调整载体的位置 来自致动器控制电路。