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公开(公告)号：US4440107A
公开(公告)日：1984-04-03
申请号：US397190
申请日：1982-07-12
IPC分类号： H01L31/04 , C23C16/54 , H01J37/34 , H01L21/205 , H01L21/677 , C23C13/10
CPC分类号： H01L21/67709 , C23C16/545 , H01J37/3277 , H01J37/34 , H01L21/6776
摘要： An apparatus for producing improved large area photovoltaic devices by substantially reducing the warpage of relatively large area, relatively thin webs of magnetic substrate material which travel through a plurality of high temperature, low pressure glow discharge deposition chambers. As the web of the substrate material moves through the deposition chambers, it assumes a normal, elongated path of travel. Due to the elevated deposition temperature, the elongated path of travel, the force of gravity, etc., the web has a tendency to warp. Warpage of the web is undesirable as it promotes the deposition of non-uniform semiconductor alloy layers. The improvement of the present invention contemplates the establishment of at least one magnetic field within each deposition chamber which is adapted to urge the web of substrate material out of its normal path of travel into a flat, substantially planar path of travel. The new flat path of travel serves to substantially reduce warpage of the web which permits uniform amorphous semiconductor alloy layers to be deposited. In alternate embodiments, the web of substrate material may be urged into sliding contact with a plurality of stationary ceramic magnets or the web may be urged into rolling contact with a plurality of rotatable magnetic elements which may either be hollow, ceramic magnets or electromagnets.
摘要翻译： 通过大幅减少行进通过多个高温，低压辉光放电沉积室的较大面积的，相对较薄的磁性基片材料的网状物的翘曲来制造改进的大面积光伏器件的装置。 当衬底材料的网状物移动通过沉积室时，其呈现正常的，延长的行进路径。 由于沉积温度升高，延伸的行进路径，重力等，纤网具有翘曲的倾向。 纤维网的翘曲是不期望的，因为其促进非均匀半导体合金层的沉积。 本发明的改进设想在每个沉积室内建立至少一个磁场，该磁场适于将衬底材料幅材推出其正常行进路径进入平坦的基本上平行的行进路径。 新的平行路径用于大幅度地减少网状物的翘曲，这允许沉积均匀的非晶半导体合金层。 在替代实施例中，衬底材料的网可以被推动成与多个固定的陶瓷磁体滑动接触，或者可以将卷材推动成与可以是中空的，陶瓷磁体或电磁体的多个可旋转的磁性元件滚动接触。
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公开(公告)号：US06878207B2
公开(公告)日：2005-04-12
申请号：US10368835
申请日：2003-02-19
申请人： Joachim Doehler , Vincent Cannella
发明人： Joachim Doehler , Vincent Cannella
IPC分类号： B01J3/02 , B01J19/22 , B07B20060101 , B07B1/00 , C23C14/00 , C23C14/56 , C23C16/00 , C23C16/54 , C23F1/00 , C25B13/00 , C25C7/04 , F16J15/34 , H01L21/02
CPC分类号： B01J3/02 , B01J19/22 , C23C14/562 , C23C14/564 , C23C16/545 , F16J15/3452
摘要： Disclosed herein is an improved gas gate for interconnecting regions of differing gaseous composition and/or pressure, more particularly between atmosphere and a vacuum. The gas gate includes a cylinder within a housing situated between the regions of differing gaseous pressure, wherein the gas gate provides for choke mode transonic flow of air leaks between the regions. A web of substrate material is adapted to move between the regions with at least one roller in a first region and at least one roller in a second region. The rollers are positioned to create sufficient tension as the web advances over the top peripheral portion of the cylinder between the two regions or under the bottom peripheral portion of the cylinder between the two regions.
摘要翻译： 本文公开了一种改进的气门，用于互连不同气体成分和/或压力的区域，更特别地在大气和真空之间。 气门包括在位于不同气体压力的区域之间的壳体内的气缸，其中气门提供区域之间的空气泄漏的扼流模式跨音速流动。 衬底材料的网状物适于在区域之间在第一区域中具有至少一个辊和在第二区域中的至少一个辊之间移动。 当纸幅在两个区域之间的两个区域之间或在圆筒的底部周边部分之间在两个区域之间前进到圆柱体的顶部周边部分时，辊被定位成产生足够的张力。
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公开(公告)号：US20120107487A1
公开(公告)日：2012-05-03
申请号：US12912844
申请日：2010-10-27
申请人： Vincent Cannella , Raymond Crucet
发明人： Vincent Cannella , Raymond Crucet
CPC分类号： C23C14/562 , C23C14/042 , H01L51/5231 , H01L51/56
摘要： A continuous roll-to-roll apparatus for providing a patterned deposit of a material onto a moving substrate web includes a payout station for feeding out a substrate web, a take-up station for taking up the substrate web, and a web transport system for advancing the web through the apparatus from the payout station to the take-up station. The apparatus includes at least one deposition station disposed between the payout station and the take-up station, and the deposition station is operative to deposit a material onto the web as it moves therethrough. The apparatus includes a masking system associated with a deposition station. The masking system is operative to dispose a deposition mask in registry with a portion of the length of the moving web. The deposition mask is comprised of a plurality of filaments which are aligned with the longitudinal axis of the web. The filaments are spaced from one another in a direction transverse to the longitudinal axis, and the masking system is further operative to move the filaments along the longitudinal axis, and the filaments function to selectively mask longitudinal portions of the moving web so as to prevent the deposition of material thereupon. Also disclosed are methods for utilizing the system.
摘要翻译： 用于将材料图案化沉积到移动的基材幅材上的连续的卷对卷设备包括用于馈送基板幅材的支付站，用于卷取基板幅材的卷取站，以及用于 将卷筒纸通过装置从支付台推到卷取台。 该装置包括至少一个沉积站，该沉积站设置在所述分配站和所述卷取站之间，并且所述沉积站可操作以将材料沉积在所述幅材上。 该装置包括与沉积站相关联的掩蔽系统。 掩蔽系统可操作地将沉积掩模配置成与移动幅材的长度的一部分对准。 沉积掩模由与纤维网的纵向轴线对准的多根长丝组成。 长丝在横向于纵向轴线的方向上彼此间隔开，并且掩蔽系统进一步操作以沿着纵向轴线移动细丝，并且细丝用于选择性地掩蔽移动幅材的纵向部分，以防止 沉积材料。 还公开了利用该系统的方法。
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公开(公告)号：US20050259004A1
公开(公告)日：2005-11-24
申请号：US10348737
申请日：2003-01-22
CPC分类号： H01Q3/22 , H01Q1/36 , H01Q3/01 , H01Q21/205
摘要： A substrate is provided with a multiplicity of electrically conductive elements, and the elements are interconnected to form an antenna structure for desired application. Either the antenna pattern itself may be altered according to the invention, or one or more feed points may be changed, or all of the above. As such, the electrically conductive elements may be interconnected to change the directionality of the antenna pattern, the gain, the frequency response, or other operational characteristics. The electrically conductive elements may be arranged in the form of an inchoate antenna pattern or regular array. Switches at key points of the structure enable the pattern to be changed dynamically. Such switching may be carried out in real time in accordance with transmissions/reception characteristics, or in advance using simulations associated with the switched elements.
摘要翻译： 衬底设置有多个导电元件，并且元件互连以形成用于期望应用的天线结构。 根据本发明可以改变天线图案本身，或者可以改变一个或多个馈送点，或者全部。 因此，导电元件可以互连以改变天线方向性，增益，频率响应或其他操作特性的方向性。 导电元件可以以前卫天线图案或规则阵列的形式布置。 在结构的关键点的切换使得能够动态地改变模式。 这种切换可以根据传输/接收特性实时地进行，或者可以使用与切换的元件相关联的模拟来预先执行。
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公开(公告)号：US20100200409A1
公开(公告)日：2010-08-12
申请号：US12369054
申请日：2009-02-11
申请人： Shengzhong Liu , Chaolan Hu , Yanhua Zhou , Kais Younan , Bud Dotter, II , Vincent Cannella , Arindam Banerjee , Jeffrey Yang , Subhendu Guha
发明人： Shengzhong Liu , Chaolan Hu , Yanhua Zhou , Kais Younan , Bud Dotter, II , Vincent Cannella , Arindam Banerjee , Jeffrey Yang , Subhendu Guha
摘要： A metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device. The deposition may be carried out in conjunction with a masking member which operates to restrict the deposition of the metal and oxygen material to specific portions of the substrate. In particular instances the deposition may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.
摘要翻译： 在溶液沉积工艺中，将诸如透明导电氧化物材料的金属和氧材料电沉积到衬底上。 控制工艺参数以便沉积适合用于高效光伏器件的背反射器结构的高质量材料层。 沉积可以与掩模构件一起进行，掩模构件用于限制金属和氧气材料沉积到衬底的特定部分。 在特定情况下，沉积可以以连续的卷对卷方式实施。 还公开了通过本方法制造的半导体器件和半导体器件的部件以及用于执行该过程的装置。
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6.发明申请METHOD AND APPARATUS FOR THE SOLUTION DEPOSITION OF HIGH QUALITY OXIDE MATERIAL 审中-公开用于高品质氧化物材料沉积的方法和装置公开(公告)号：US20100200408A1
公开(公告)日：2010-08-12
申请号：US12369045
申请日：2009-02-11
申请人： Shengzhong Liu , Chaolan Hu , Yanhua Zhou , Kais Younan , Bud Dotter, II , Vincent Cannella , Arindam Banerjee , Jeffrey Yang , Subhendu Guha
发明人： Shengzhong Liu , Chaolan Hu , Yanhua Zhou , Kais Younan , Bud Dotter, II , Vincent Cannella , Arindam Banerjee , Jeffrey Yang , Subhendu Guha
摘要： A metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device. The deposition may be carried out in conjunction with a masking member which operates to restrict the deposition of the metal and oxygen material to specific portions of the substrate. In particular instances the deposition may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.
摘要翻译： 在溶液沉积工艺中，将诸如透明导电氧化物材料的金属和氧材料电沉积到衬底上。 控制工艺参数以便沉积适合用于高效光伏器件的背反射器结构的高质量材料层。 沉积可以与掩模构件一起进行，掩模构件用于限制金属和氧气材料沉积到衬底的特定部分。 在特定情况下，沉积可以以连续的卷对卷方式实施。 还公开了通过本方法制造的半导体器件和半导体器件的部件以及用于执行该过程的装置。
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公开(公告)号：US20090068344A1
公开(公告)日：2009-03-12
申请号：US12220934
申请日：2008-07-30
申请人： Vincent Cannella , George Uzoni , Buddie Dotter
发明人： Vincent Cannella , George Uzoni , Buddie Dotter
CPC分类号： C23C16/545 , C23C14/562 , C23C16/4401 , H01L21/67201
摘要： A system for manufacturing a thin film electrical device is provided in accordance with an exemplary embodiment. The system includes a chamber and a gas gate. The chamber includes accumulating apparatus therein configured for gathering a portion of the substrate within the chamber. The gas gate provides fluid communication between a pressure region of the chamber and a second pressure region.
摘要翻译： 根据示例性实施例提供了一种用于制造薄膜电气装置的系统。 该系统包括一个室和一个气门。 该腔室包括其中构成用于收集该腔室内部分基底的积聚装置。 气门提供腔室的压力区域和第二压力区域之间的流体连通。
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