公开(公告)号：US20110109327A1

公开(公告)日：2011-05-12

申请号：US12925067

申请日：2010-10-12

申请人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

发明人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01R27/26

CPC分类号： G01C19/5755 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2203/0136 ,  G01D5/24 ,  G01P15/125 ,  G01P2015/0814

摘要： A sensor for capacitive detection of a mechanical deflection includes a substrate having a first substrate electrode and a second substrate electrode; and a mass movable relative to the substrate. The mass is divided into: a first electrically separate region having a first ground electrode; and a second electrically separate region of the mass having a second ground electrode. At least one portion of the first ground electrode is situated in a first region between the first substrate electrode and the second substrate electrode, and forms a first differential capacitor. At least one portion of the second ground electrode is situated in a second region between the first substrate electrode and the second substrate electrode, and forms a second differential capacitor.

摘要翻译： 用于电容式检测机械偏转的传感器包括具有第一基板电极和第二基板电极的基板; 以及相对于基板移动的质量。 质量分为：具有第一接地电极的第一电分离区域; 以及具有第二接地电极的所述质量体的第二电分离区域。 第一接地电极的至少一部分位于第一基板电极和第二基板电极之间的第一区域中，并且形成第一差分电容器。 第二接地电极的至少一部分位于第一基板电极和第二基板电极之间的第二区域中，并形成第二差分电容器。

公开(公告)号：US20110140692A1

公开(公告)日：2011-06-16

申请号：US12927259

申请日：2010-11-09

申请人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

发明人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC分类号： G01R33/02 ,  G01P15/105

CPC分类号： G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

摘要： A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

摘要翻译： 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US08833135B2

公开(公告)日：2014-09-16

申请号：US13197084

申请日：2011-08-03

申请人： Axel Franke ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

发明人： Axel Franke ,  Mirko Hattass ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01P15/125 ,  G01P21/00 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass.

摘要翻译： 描述了具有基板和相对于基板可移动地悬挂的质量块的传感器系统，该传感器系统包括用于沿着偏转方向检测地震质体相对于基底的偏转的检测装置，该检测装置包括第一测量 固定在基板上的电极和固定在基板上的第二测量电极，以及沿偏转方向在第一测量电极和地震块之间垂直于偏转方向的第一重叠大于第二重叠， 垂直于偏转方向，在第二测量电极和地震质量之间。

公开(公告)号：US08493078B2

公开(公告)日：2013-07-23

申请号：US12925067

申请日：2010-10-12

申请人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

发明人： Axel Franke ,  Alexander Buhmann ,  Marian Keck

IPC分类号： G01R27/26

CPC分类号： G01C19/5755 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2203/0136 ,  G01D5/24 ,  G01P15/125 ,  G01P2015/0814

摘要： A sensor for capacitive detection of a mechanical deflection includes a substrate having a first substrate electrode and a second substrate electrode; and a mass movable relative to the substrate. The mass is divided into: a first electrically separate region having a first ground electrode; and a second electrically separate region of the mass having a second ground electrode. At least one portion of the first ground electrode is situated in a first region between the first substrate electrode and the second substrate electrode, and forms a first differential capacitor. At least one portion of the second ground electrode is situated in a second region between the first substrate electrode and the second substrate electrode, and forms a second differential capacitor.

摘要翻译： 用于电容式检测机械偏转的传感器包括具有第一基板电极和第二基板电极的基板; 以及相对于基板移动的质量。 质量分为：具有第一接地电极的第一电分离区域; 以及具有第二接地电极的所述质量体的第二电分离区域。 第一接地电极的至少一部分位于第一基板电极和第二基板电极之间的第一区域中，并且形成第一差分电容器。 第二接地电极的至少一部分位于第一基板电极和第二基板电极之间的第二区域中，并形成第二差分电容器。

公开(公告)号：US08461833B2

公开(公告)日：2013-06-11

申请号：US12927259

申请日：2010-11-09

申请人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

发明人： Johannes Classen ,  Arnd Kaelberer ,  Hans-Joerg Faisst ,  Axel Franke ,  Mirko Hattass ,  Holger Rank ,  Robert Sattler ,  Alexander Buhmann ,  Ramona Maas ,  Marian Keck

IPC分类号： G01R33/02 ,  G01R33/00

CPC分类号： G01R33/0286 ,  B81C99/003 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

摘要： A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

摘要翻译： 用于确定传感器的灵敏度的方法提供以下步骤：a）分别将第一和第二偏转电压施加到传感器的第一和第二电极系统，并且第一和第二静电力施加在弹性悬浮的地震块 分别由第一和第二电极系统的传感器和由于质量的弹性而对质量施加回复力，并且在第一和第二静电力和恢复力之间建立力平衡，并且 质量呈现力平衡特性的偏转位置，并且测量力平衡和偏转位置的特征的输出信号; 以及b）基于第一和第二偏转电压来计算传感器的灵敏度。

公开(公告)号：US08566057B2

公开(公告)日：2013-10-22

申请号：US12806316

申请日：2010-08-09

申请人： Axel Franke ,  Alexander Buhmann

发明人： Axel Franke ,  Alexander Buhmann

IPC分类号： G01P21/00

CPC分类号： G01P21/00

摘要： A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

摘要翻译： 在运行过程中三轴加速度传感器的自调节方法包括：校准传感器; 通过测量方程和灵敏度和偏移的估计值来检查干扰加速度的自调整; 如果识别到干扰加速度则重复该调整; 并且如果不识别到干扰加速度，则接受灵敏度和偏移的估计值作为校准值。 检查自我调整的步骤包括：估计灵敏度和/或偏移及其方差; 将创新确定为测量方程的测量值与测量方程式的估计值之差; 测试创新正常分配; 并且在偏离正态分布的情况下识别干扰加速度。

公开(公告)号：US20110060543A1

公开(公告)日：2011-03-10

申请号：US12806316

申请日：2010-08-09

申请人： Axel Franke ,  Alexander Buhmann

发明人： Axel Franke ,  Alexander Buhmann

IPC分类号： G01P21/00

CPC分类号： G01P21/00

摘要： A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

摘要翻译： 在运行过程中三轴加速度传感器的自调节方法包括：校准传感器; 通过测量方程和灵敏度和偏移的估计值来检查干扰加速度的自调整; 如果识别到干扰加速度则重复该调整; 并且如果不识别到干扰加速度，则接受灵敏度和偏移的估计值作为校准值。 检查自我调整的步骤包括：估计灵敏度和/或偏移及其方差; 将创新确定为测量方程的测量值与测量方程式的估计值之差; 测试创新正常分配; 并且在偏离正态分布的情况下识别干扰加速度。

公开(公告)号：US09081027B2

公开(公告)日：2015-07-14

申请号：US12734228

申请日：2008-10-02

申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC分类号： G01C19/56 ,  G01P3/44 ,  G01C19/574 ,  F16F1/02

CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

摘要翻译： 具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡 在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率， 提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20130299927A1

公开(公告)日：2013-11-14

申请号：US13888920

申请日：2013-05-07

申请人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

发明人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0075 ,  B81C1/00626 ,  B81C1/00674 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2203/0109

摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.

摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。

公开(公告)号：US08427031B2

公开(公告)日：2013-04-23

申请号：US12645120

申请日：2009-12-22

申请人： Axel Franke

发明人： Axel Franke

IPC分类号： H02N1/00

CPC分类号： B81B3/0021 ,  B81B2203/0136 ,  B81B2203/04 ,  G02B5/284 ,  G02B26/001 ,  G02B26/0841 ,  G09G3/3433 ,  H02N1/008 ,  H03H9/02275

摘要： A drive element is provided having a substrate, a seismic mass, a drive electrode and a counter-electrode, one of the two electrodes being connected to the substrate and the other of the two electrodes being connected to the seismic mass; and the drive electrode and the counter-electrodes being provided for the excitation of motion of the seismic mass in a main direction of motion; and in addition, the drive electrode includes a first and a second partial electrode, which are switchable separately from each other.

摘要翻译： 提供具有基板，地震块，驱动电极和对电极的驱动元件，两个电极中的一个连接到基板，并且两个电极中的另一个连接到地震块; 并且所述驱动电极和所述对置电极被设置为用于激励所述地震块在主运动方向上的运动; 此外，驱动电极包括可彼此分开切换的第一和第二部分电极。