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公开(公告)号：US07674112B2
公开(公告)日：2010-03-09
申请号：US11617373
申请日：2006-12-28
IPC分类号： H01R31/02
CPC分类号： H01R31/02 , G01R1/06733 , G01R1/07342 , G01R3/00
摘要： Embodiments of resilient contact elements and methods for fabricating same are provided herein. In one embodiment, a resilient contact element for use in a probe card includes a lithographically formed resilient beam having a first end and an opposing second end; and a tip disposed proximate the first end of the beam and configured to break through an oxide layer of a surface of a device to be tested to establish a reliable electrical connection therewith; wherein at least a central portion of the beam has a continuous sloped profile defining, in a relaxed state, a height measured between the beam and a plane representing an upper surface of a device to be tested that is greater near the second end of the beam than near the first end of the beam.
摘要翻译： 弹性接触元件的实施例及其制造方法在本文中提供。 在一个实施例中，用于探针卡的弹性接触元件包括光刻形成的弹性梁，其具有第一端和相对的第二端; 以及设置在所述梁的第一端附近并且被构造成突破待测试装置的表面的氧化物层以与其建立可靠的电连接的尖端; 其中所述梁的至少中心部分具有连续的倾斜轮廓，所述连续倾斜轮廓在松弛状态下限定在所述梁与表示待测试装置的上表面的平面之间测量的高度，其在所述梁的第二端附近较大 比梁的第一端附近。
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公开(公告)号：US20120242363A1
公开(公告)日：2012-09-27
申请号：US13288925
申请日：2011-11-03
申请人： Keith J. Breinlinger , Benjamin N. Eldridge , Eric D. Hobbs , Michael J. Armstrong , John K. Gritters
发明人： Keith J. Breinlinger , Benjamin N. Eldridge , Eric D. Hobbs , Michael J. Armstrong , John K. Gritters
CPC分类号： G01R1/06716 , G01R1/06733 , G01R1/07357 , H01R13/2407 , H01R43/16 , Y10T29/49204
摘要： An electrically conductive contact element can include a first base and a second base with elongate, spaced apart leaves between the bases. A first end of each leaf can be coupled to the first base and an opposite second end of the leaf can be coupled to the second base. A body of the leaf between the first end and the second end can be sufficiently elongate to respond to a force through said contact element substantially parallel with the first axis and the second axis by first compressing axially while said force is less than a buckling force and then bending while said force is greater than the buckling force.
摘要翻译： 导电接触元件可以包括第一基部和在基部之间具有细长间隔开的叶片的第二基部。 每个叶片的第一端可以联接到第一基部，并且叶片的相对的第二端可以联接到第二基部。 在第一端和第二端之间的叶片的主体可以是足够伸长的，以响应于通过所述接触元件的力，所述力通过在所述力小于屈曲力的同时第一轴向压缩而基本上平行于第一轴线和第二轴线，并且 然后在所述力大于屈曲力时弯曲。
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公开(公告)号：US09702904B2
公开(公告)日：2017-07-11
申请号：US13288925
申请日：2011-11-03
申请人： Keith J. Breinlinger , Benjamin N. Eldridge , Eric D. Hobbs , Michael J. Armstrong , John K. Gritters
发明人： Keith J. Breinlinger , Benjamin N. Eldridge , Eric D. Hobbs , Michael J. Armstrong , John K. Gritters
CPC分类号： G01R1/06716 , G01R1/06733 , G01R1/07357 , H01R13/2407 , H01R43/16 , Y10T29/49204
摘要： An electrically conductive contact element can include a first base and a second base with elongate, spaced apart leaves between the bases. A first end of each leaf can be coupled to the first base and an opposite second end of the leaf can be coupled to the second base. A body of the leaf between the first end and the second end can be sufficiently elongate to respond to a force through said contact element substantially parallel with the first axis and the second axis by first compressing axially while said force is less than a buckling force and then bending while said force is greater than the buckling force.
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公开(公告)号：US20080157799A1
公开(公告)日：2008-07-03
申请号：US11617373
申请日：2006-12-28
CPC分类号： H01R31/02 , G01R1/06733 , G01R1/07342 , G01R3/00
摘要： Embodiments of resilient contact elements and methods for fabricating same are provided herein. In one embodiment, a resilient contact element for use in a probe card includes a lithographically formed resilient beam having a first end and an opposing second end; and a tip disposed proximate the first end of the beam and configured to break through an oxide layer of a surface of a device to be tested to establish a reliable electrical connection therewith; wherein at least a central portion of the beam has a continuous sloped profile defining, in a relaxed state, a height measured between the beam and a plane representing an upper surface of a device to be tested that is greater near the second end of the beam than near the first end of the beam.
摘要翻译： 弹性接触元件的实施例及其制造方法在本文中提供。 在一个实施例中，用于探针卡的弹性接触元件包括光刻形成的弹性梁，其具有第一端和相对的第二端; 以及设置在所述梁的第一端附近并且被构造成突破待测试装置的表面的氧化物层以与其建立可靠的电连接的尖端; 其中所述梁的至少中心部分具有连续的倾斜轮廓，所述连续倾斜轮廓在松弛状态下限定在所述梁与表示待测试装置的上表面的平面之间测量的高度，其在所述梁的第二端附近较大 比梁的第一端附近。
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5.发明授权公开(公告)号：US07936177B2
公开(公告)日：2011-05-03
申请号：US12044893
申请日：2008-03-07
IPC分类号： G01R31/20
CPC分类号： G01R1/06772 , G01R1/06716 , G01R1/06744 , G01R1/07342 , Y10T29/49147
摘要： Devices and methods for providing, making, and/or using an electronic apparatus having a wall structure adjacent a resilient contact structure on a substrate. The electronic apparatus can include a substrate and a plurality of electrically conductive resilient contact structures, which can extend from the substrate. A first of the contact structures can be part of an electrical path through the electronic apparatus. A first electrically conductive wall structure can also extend from the substrate, and the first wall structure can be disposed adjacent one of the contact structures. The first wall structure can be electrically connected to a return current path within the electronic apparatus for an alternating current signal or power on the first contact structure.
摘要翻译： 用于提供，制造和/或使用具有邻近基板上的弹性接触结构的壁结构的电子设备的设备和方法。 电子设备可以包括基板和可从基板延伸的多个导电弹性接触结构。 接触结构中的第一个可以是通过电子设备的电路径的一部分。 第一导电壁结构也可以从衬底延伸，并且第一壁结构可以邻近一个接触结构设置。 第一壁结构可以电连接到电子设备内的回流电路，用于交流信号或第一接触结构上的功率。
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公开(公告)号：US07977956B2
公开(公告)日：2011-07-12
申请号：US12431271
申请日：2009-04-28
CPC分类号： G01R31/2891
摘要： Embodiments of methods and apparatus for aligning a probe card assembly in a test system are provided herein. In some embodiments, an apparatus for testing devices may include a probe card assembly having a plurality of probes, each probe having a tip for contacting a device to be tested, and having an identified set of one or more features that are preselected in accordance with selected criteria for aligning the probe card assembly within a prober after installation therein. In some embodiments, the identity of the identified set of one or more features may be communicated to the prober to facilitate a global alignment of the probe card assembly that minimizes an aggregate misalignment of all of the tips in the probe card assembly.
摘要翻译： 本文提供了在测试系统中对准探针卡组件的方法和装置的实施例。 在一些实施例中，用于测试装置的装置可以包括具有多个探针的探针卡组件，每个探针具有用于接触要测试的装置的尖端，并且具有根据本发明的预选的一组或多个特征 在探针卡组件安装在其中之后将探针卡组件对准的选择标准。 在一些实施例中，所识别的一个或多个特征集合的身份可以被传送到探测器，以促进探针卡组件的全局对准，其最小化探针卡组件中的所有尖端的聚集失准。
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公开(公告)号：US20100271062A1
公开(公告)日：2010-10-28
申请号：US12431271
申请日：2009-04-28
IPC分类号： G01R31/02
CPC分类号： G01R31/2891
摘要： Embodiments of methods and apparatus for aligning a probe card assembly in a test system are provided herein. In some embodiments, an apparatus for testing devices may include a probe card assembly having a plurality of probes, each probe having a tip for contacting a device to be tested, and having an identified set of one or more features that are preselected in accordance with selected criteria for aligning the probe card assembly within a prober after installation therein. In some embodiments, the identity of the identified set of one or more features may be communicated to the prober to facilitate a global alignment of the probe card assembly that minimizes an aggregate misalignment of all of the tips in the probe card assembly
摘要翻译： 本文提供了在测试系统中对准探针卡组件的方法和装置的实施例。 在一些实施例中，用于测试装置的装置可以包括具有多个探针的探针卡组件，每个探针具有用于接触要测试的装置的尖端，并且具有根据本发明的预选的一组或多个特征 在探针卡组件安装在其中之后将探针卡组件对准的选择标准。 在一些实施例中，所识别的一组一个或多个特征的身份可以被传送到探测器，以促进探针卡组件的全局对准，其最小化探针卡组件中的所有尖端的聚集失准
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8.发明申请公开(公告)号：US20090224785A1
公开(公告)日：2009-09-10
申请号：US12044893
申请日：2008-03-07
CPC分类号： G01R1/06772 , G01R1/06716 , G01R1/06744 , G01R1/07342 , Y10T29/49147
摘要： Devices and methods for providing, making, and/or using an electronic apparatus having a wall structure adjacent a resilient contact structure on a substrate. The electronic apparatus can include a substrate and a plurality of electrically conductive resilient contact structures, which can extend from the substrate. A first of the contact structures can be part of an electrical path through the electronic apparatus. A first electrically conductive wall structure can also extend from the substrate, and the first wall structure can be disposed adjacent one of the contact structures. The first wall structure can be electrically connected to a return current path within the electronic apparatus for an alternating current signal or power on the first contact structure.
摘要翻译： 用于提供，制造和/或使用具有邻近基板上的弹性接触结构的壁结构的电子设备的设备和方法。 电子设备可以包括基板和可从基板延伸的多个导电弹性接触结构。 接触结构中的第一个可以是通过电子设备的电路径的一部分。 第一导电壁结构也可以从衬底延伸，并且第一壁结构可以邻近一个接触结构设置。 第一壁结构可以电连接到电子设备内的回流电路，用于交流信号或第一接触结构上的功率。
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公开(公告)号：US07622935B2
公开(公告)日：2009-11-24
申请号：US11551545
申请日：2006-10-20
申请人： Eric D. Hobbs , Alexander H. Slocum , Benjamin N. Eldridge , Keith J. Breinlinger , Shawn Powell
发明人： Eric D. Hobbs , Alexander H. Slocum , Benjamin N. Eldridge , Keith J. Breinlinger , Shawn Powell
CPC分类号： G01R31/2893
摘要： A probe card assembly can comprise a probe head assembly and a wiring substrate. The probe head assembly can comprise a plurality of probes disposed to contact an electronic device disposed on a holder in a test housing. The wiring substrate can include an electrical interface to a test controller and a plurality of electrical wiring composing electrical paths between the electrical interface and ones of the probes, and the wiring substrate can comprise a first portion on which the electrical interface is disposed and a second portion composing the probe head assembly. The second portion of the wiring substrate can be moveable with respect to the first portion of the wiring substrate.
摘要翻译： 探针卡组件可以包括探针头组件和布线衬底。 探针头组件可以包括多个探针，其设置成接触设置在测试壳体中的保持器上的电子设备。 布线基板可以包括与测试控制器的电接口以及构成电接口和探针之间的电气路径的多个电线，并且布线基板可以包括其上设置有电接口的第一部分和第二部分 组成探头组件的部分。 布线基板的第二部分能够相对于布线基板的第一部分移动。
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10.发明授权Method and apparatus for providing active compliance in a probe card assembly 有权用于在探针卡组件中提供主动柔性的方法和装置公开(公告)号：US08513965B2
公开(公告)日：2013-08-20
申请号：US12938164
申请日：2010-11-02
申请人： Keith J. Breinlinger
发明人： Keith J. Breinlinger
IPC分类号： G01R31/20
CPC分类号： G01R31/2891
摘要： A probe card assembly can comprise a first source of compliance and a second source of compliance. The probe card assembly can further comprise a controller, which can be configured to apportion a total compliance demand placed on the probe card assembly between the first source of compliance and the second source of compliance.
摘要翻译： 探针卡组件可以包括第一顺应源和第二顺应源。 探针卡组件还可以包括控制器，其可以被配置为在第一合格源和第二符合源之间分配放置在探针卡组件上的总顺从性要求。
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