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101 条记录 (耗时 0.03 秒)

    LASER TRACKING INTERFEROMETER
    5.
    发明申请
    LASER TRACKING INTERFEROMETER 有权
    激光跟踪干涉仪

    公开(公告)号：US20070024861A1

    公开(公告)日：2007-02-01

    申请号：US11458533

    申请日：2006-07-19

    申请人： Shinichirou Yanaka ,  Makoto Abe ,  Shinichi Hara ,  Naoyuki Taketomi

    发明人： Shinichirou Yanaka ,  Makoto Abe ,  Shinichi Hara ,  Naoyuki Taketomi

    IPC分类号： G01B11/02

    CPC分类号： G01S17/36 ,  G01B11/03 ,  G01S7/4812 ,  G01S7/497 ,  G01S17/42 ,  G01S17/66

    摘要： A laser tracking interferometer; a carriage rotatable about a center of the reference sphere; a laser interferometer that provides a retroreflector displacement signal, and a displacement gage that provides a displacement signal. A data processing apparatus computes displacement of the retroreflector with respect to the reference sphere. A position sensitive detector provides a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis. A controller controls rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero.

    摘要翻译： 激光跟踪干涉仪; 可围绕参考球的中心旋转的托架; 提供后向反射器位移信号的激光干涉仪和提供位移信号的位移计。 数据处理装置计算回射器相对于参考球的位移。 当激光束从后向反射器反射回激光干涉仪并偏离与其光轴正交的方向时，位置敏感检测器提供对应于激光束偏离量的位置信号。 控制器基于来自位置检测器的位置信号控制滑架的旋转，使得偏差量变为零。

    Holding mechanism in exposure apparatus, and device manufacturing method
    6.
    发明授权
    Holding mechanism in exposure apparatus, and device manufacturing method 有权
    曝光装置中的保持机构和装置制造方法

    公开(公告)号：US07158209B2

    公开(公告)日：2007-01-02

    申请号：US11360496

    申请日：2006-02-24

    申请人： Shinichi Hara

    发明人： Shinichi Hara

    IPC分类号： G03B27/52 ,  G03B27/42 ,  G02B7/02

    CPC分类号： G03F7/70825 ,  G03B27/42 ,  G03F7/70891

    摘要： Disclosed is a holding system and an exposure apparatus having the same, wherein deformation of an optical member resulting from its thermal expansion and causing degradation of imaging performance can be reduced to assure desired imaging performance. The holding system for holding an optical member includes a barrel for at least partially surrounding the optical member and/or a heat source, an average of radiation coefficient of an inside surface of the barrel is not less than 0.8.

    摘要翻译： 公开了一种保持系统和具有该保持系统的曝光设备，其中可以减少由其热膨胀引起的光学部件的变形并导致成像性能的降低，以确保期望的成像性能。 用于保持光学构件的保持系统包括用于至少部分地围绕光学构件和/或热源的筒，筒的内表面的辐射系数的平均值不小于0.8。

    Apparatus and method for removing contaminant on original, method of manufacturing device, and original
    8.
    发明申请
    Apparatus and method for removing contaminant on original, method of manufacturing device, and original 失效
    用于去除原始污染物的装置和方法，制造装置的方法和原件

    公开(公告)号：US20060082743A1

    公开(公告)日：2006-04-20

    申请号：US11250072

    申请日：2005-10-12

    申请人： Masami Yonekawa ,  Shinichi Hara ,  Ryo Edo

    发明人： Masami Yonekawa ,  Shinichi Hara ,  Ryo Edo

    IPC分类号： G03B27/52

    CPC分类号： G03F7/70925

    摘要： At least one exemplary embodiment is directed to an apparatus which includes an original stage, to hold an original, which moves in a scan direction, an illumination optical system configured to illuminate the original held by the original stage with exposure light, a substrate stage configured to hold a substrate and to move in a scan direction, a projection optical system configured to project a pattern of the original onto the substrate with the exposure light, and an irradiation unit configured to irradiate the original held by the original stage. Irradiation by the irradiation unit and movement of the original stage in the scan direction are carried out substantially in parallel with each other so as to remove a contaminant on the original.

    摘要翻译： 至少一个示例性实施例涉及一种装置，其包括原始台，用于保持沿扫描方向移动的原件，配置成用曝光灯照亮由原始台保持的原件的照明光学系统，衬底台配置 保持基板并沿扫描方向移动;投影光学系统，被配置为利用曝光光将原稿的图案投影到基板上;以及照射单元，被配置为照射由原始台保持的原稿。 通过照射单元的照射和原始台沿扫描方向的移动基本上彼此平行地进行，以便去除原件上的污染物。

    Jetting apparatus for mixed flow of gas and liquid
    9.
    发明授权
    Jetting apparatus for mixed flow of gas and liquid 有权
    用于混合气体和液体的喷射装置

    公开(公告)号：US06843471B2

    公开(公告)日：2005-01-18

    申请号：US10077930

    申请日：2002-02-20

    申请人： Shinichi Hara

    发明人： Shinichi Hara

    IPC分类号： B05B1/04 ,  B01F3/04 ,  B01F5/04 ,  B01F5/06 ,  B05B7/04 ,  B05B7/08

    CPC分类号： B01F5/0426 ,  B01F3/04099 ,  B01F5/0415 ,  B01F5/0646 ,  B01F2005/0446 ,  B01F2215/004 ,  B05B7/0475 ,  B05B7/0846 ,  B05B7/0884

    摘要： A jetting apparatus for mixing at least liquid and gas to create the mixed flow of the gas and the liquid to thereby jet the mixed flow is provided. The jetting apparatus has a passage of the mixed flow of the gas and the liquid, the passage including at least one partition and a plurality of sub-passages divided by the partition, and liquid injection ports being provided in correspondence with the divided sub-passages. Mass flow per sectional area of the mixed flow of the gas and the liquid passing through the respective sub-passages is substantially equal.

    摘要翻译： 提供一种用于混合至少液体和气体以产生气体和液体的混合流从而喷射混合流的喷射装置。 喷射装置具有气体和液体的混合流动的通道，通道包括至少一个分隔件和由分隔件分隔的多个子通道，并且液体注入口与分开的子通道相对应地设置 。 气体和通过各个子通道的液体的混合流的每个截面面积的质量流量基本相等。

    X-ray projection exposure apparatus and a device manufacturing method
    10.
    发明授权
    X-ray projection exposure apparatus and a device manufacturing method 失效
    X射线投影曝光装置和装置制造方法

    公开(公告)号：US06836531B2

    公开(公告)日：2004-12-28

    申请号：US10679278

    申请日：2003-10-07

    申请人： Shinichi Hara ,  Masami Tsukamoto

    发明人： Shinichi Hara ,  Masami Tsukamoto

    IPC分类号： G21K500

    CPC分类号： G03F7/70708 ,  G03F7/70875 ,  G21K5/10

    摘要： An exposure apparatus includes a chuck for holding an object and an optical system for directing light from a light source to the object held by the chuck. The optical system includes a multilayer film mirror which has a concave reflecting surface, wherein an area of contacting portions of the chuck is set so that the contact portions area of the chuck is at most 10% of an area of the object held by the chuck.

    摘要翻译： 曝光装置包括用于保持物体的卡盘和用于将来自光源的光引导到由卡盘保持的物体的光学系统。 该光学系统包括具有凹面反射面的多层膜反射镜，其中卡盘的接触部分的面积被设定为使得卡盘的接触部分面积达到由卡盘保持的物体的面积的至多10％ 。