公开(公告)号：US5983906A

公开(公告)日：1999-11-16

申请号：US918665

申请日：1997-08-22

申请人： Jun Zhao ,  Lee Luo ,  Jia-Xiang Wang ,  Xiao Liang Jin ,  Stefan Wolff ,  Talex Sajoto ,  Mei Chang ,  Paul Frederick Smith

发明人： Jun Zhao ,  Lee Luo ,  Jia-Xiang Wang ,  Xiao Liang Jin ,  Stefan Wolff ,  Talex Sajoto ,  Mei Chang ,  Paul Frederick Smith

IPC分类号： C23C14/00 ,  C23C16/44 ,  C23C16/458 ,  C23C16/52 ,  H01J37/32 ,  H01L21/203 ,  H01L21/205 ,  H01L21/285 ,  H01L21/31 ,  C23F1/00

CPC分类号： H01J37/3244 ,  C23C16/4401 ,  C23C16/4405 ,  C23C16/4412 ,  C23C16/4586 ,  C23C16/52 ,  H01J37/32082 ,  H01J2237/2001 ,  H01J2237/3321 ,  Y10S438/905

摘要： The present invention provides systems, methods and apparatus for depositing titanium films at rates up to 200 .ANG./minute on semiconductor substrates from a titanium tetrachloride source. In accordance with an embodiment of the invention, a ceramic heater assembly with an integrated RF plane for bottom powered RF capability allows PECVD deposition at a temperature of at least 400.degree. C. for more efficient plasma treatment. A thermal choke isolates the heater from its support shaft, reducing the thermal gradient across the heater to reduce the risk of breakage and improving temperature uniformity of the heater. A deposition system incorporates a flow restrictor ring and other features that allow a 15 liters/minute flow rate through the chamber with minimal backside deposition and minimized deposition on the bottom of the chamber, thereby reducing the frequency of chamber cleanings, and reducing clean time and seasoning. Deposition and clean processes are also further embodiments of the present invention.

摘要翻译： 本发明提供了用于从四氯化钛源在半导体衬底上以高达200安培/分钟的速率沉积钛膜的系统，方法和装置。 根据本发明的实施例，具有用于底部供电RF能力的集成射频平面的陶瓷加热器组件允许在至少400℃的温度下进行PECVD沉积以用于更有效的等离子体处理。 热扼流器将加热器与其支撑轴隔离，减少了加热器两端的热梯度，以减少加热器断裂的危险并改善加热器的温度均匀性。 沉积系统包括限流器环和其它特征，其允许15升/分钟的流速通过室，具有最小的背侧沉积并且最小化在室底部上的沉积，从而降低室清洁的频率，并且减少清洁时间和 调味料。 沉积和清洁过程也是本发明的进一步的实施方案。

公开(公告)号：US07026238B2

公开(公告)日：2006-04-11

申请号：US10052681

申请日：2002-01-17

申请人： Ming Xi ,  Paul Frederick Smith ,  Ling Chen ,  Michael X. Yang ,  Mei Chang ,  Fusen Chen ,  Christophe Marcadal ,  Jenny C. Lin

发明人： Ming Xi ,  Paul Frederick Smith ,  Ling Chen ,  Michael X. Yang ,  Mei Chang ,  Fusen Chen ,  Christophe Marcadal ,  Jenny C. Lin

IPC分类号： H01L21/4763

CPC分类号： H01L21/76804 ,  C25D5/02 ,  H01L21/2855 ,  H01L21/28556 ,  H01L21/28562 ,  H01L21/76831 ,  H01L21/76843 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76877 ,  H01L23/5226 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

摘要： Embodiments of the present invention provide a process sequence and related hardware for filling a patterned feature on a substrate with a metal, such as copper. The sequence comprises first forming a reliable barrier layer in the patterned feature to prevent diffusion of the metal into the dielectric layer through which the patterned feature is formed. One sequence comprises forming a generally conformal barrier layer over a patterned dielectric, etching the barrier layer at the bottom of the patterned feature, depositing a second barrier layer, and then filling the patterned feature with a metal, such as copper.

公开(公告)号：US5671141A

公开(公告)日：1997-09-23

申请号：US43192

申请日：1993-04-05

申请人： Paul Frederick Smith ,  John Frederick Armitage ,  Eric Blaine Ferch

发明人： Paul Frederick Smith ,  John Frederick Armitage ,  Eric Blaine Ferch

IPC分类号： G01M17/007 ,  B60R16/02 ,  B60R16/03 ,  F02D41/22 ,  G06F11/27 ,  G06F11/32 ,  G01M15/00

CPC分类号： G06F11/2242 ,  B60W10/04 ,  B60W50/0205 ,  F02D41/22 ,  B60R16/0315 ,  B60W2050/0006 ,  B60W2050/021 ,  F02D2041/1411 ,  G06F11/326

摘要： A computer program architecture for a motor vehicle on-board diagnostic system includes a plurality of monitor modules for monitoring vehicle systems or components and issuing a malfunction subroutine call to a diagnostic executive upon detecting a system or component malfunction. The executive includes a plurality of software objects or modules for carrying out malfunction indicator light control and fault code storage strategies. A diagnostic scheduler module implemented as a finite state machine, controls and coordinates the sequence of the test to be run by the monitor modules as well as on-demand self tests. A malfunction indicator light (MIL) control module implements four distinct light control strategies through finite machines for illuminating and extinguishing the light and for storing and erasing fault codes under predetermined conditions.

摘要翻译： 用于机动车辆车载诊断系统的计算机程序架构包括用于监视车辆系统或部件的多个监视器模块，并且在检测到系统或部件故障时向诊断执行器发出故障子程序调用。 主管包括用于执行故障指示灯控制和故障代码存储策略的多个软件对象或模块。 作为有限状态机实现的诊断调度器模块，控制和协调由监控模块运行的测试顺序以及按需自检。 故障指示灯（MIL）控制模块通过有限机器实现四种不同的灯光控制策略，用于照明和熄灭灯光，并在预定条件下存储和擦除故障代码。

公开(公告)号：US20180130639A1

公开(公告)日：2018-05-10

申请号：US15571478

申请日：2016-04-29

申请人： Michael Nicholas Vranich ,  Paul Frederick Smith

发明人： Michael Nicholas Vranich ,  Paul Frederick Smith

IPC分类号： H01J37/32 ,  H05H1/46

CPC分类号： H01J37/32357 ,  H01J37/32082 ,  H01J37/32522 ,  H05H1/46 ,  H05H2001/4667

摘要： Methods and systems for generating a plasma using an external plasma system are described. The plasma system may include an energy coupling device (e.g., an electromagnetic coil or capacitor) that is submersed within a liquid coolant and powered by an RF source. In some embodiments, a C-shaped magnetic core may be submersed within the liquid coolant and one or more plasma tubes may be arranged within an opening of the C-shaped magnetic core between the ends of the C-shaped magnetic core. To generate a plasma in a first tube of the one or more plasma tubes, a gas may be inserted into the first tube while the RF source drives a coil surrounding a portion of the C-shaped magnetic core to couple electromagnetic energy into the gas within the first tube.