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公开(公告)号：US20170094419A1
公开(公告)日：2017-03-30
申请号：US15373011
申请日：2016-12-08
发明人： Yoshihiro HIGASHI , Yoshihiko FUJI , Michiko HARA , Akiko YUZAWA , Shiori KAJI , Tomohiko NAGATA , Akio HORI , Hideaki FUKUZAWA
摘要： According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.
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公开(公告)号：US20160258824A1
公开(公告)日：2016-09-08
申请号：US14925494
申请日：2015-10-28
发明人： Yoshihiko FUJI , Akio HORI , Kei MASUNISHI , Hideaki FUKUZAWA , Akiko YUZAWA , Kazuaki OKAMOTO
IPC分类号： G01L1/12
CPC分类号： G01L1/12 , G01B7/24 , G01L1/125 , G01L1/20 , G01L9/0051 , G01L9/007 , H04R19/04 , H04R2201/003
摘要： According to one embodiment, a strain sensing element provided at a deformable film part, includes a stacked body, a first electrode, and a second electrode. The stacked body includes a first magnetic layer, a second magnetic layer, and an intermediate layer provided between the first magnetic layer and the second magnetic layer. A magnetization direction of the first magnetic layer changes in accordance with a deformation of the film part. The first electrode includes a first alloy layer including a first alloy including Ta and Mo. The first electrode is electrically connected to the stacked body. The second electrode is electrically connected to the stacked body.
摘要翻译： 根据一个实施例，设置在可变形膜部分处的应变感测元件包括堆叠体，第一电极和第二电极。 层叠体包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的中间层。 第一磁性层的磁化方向根据膜部的变形而变化。 第一电极包括包括包括Ta和Mo的第一合金的第一合金层。第一电极电连接到层叠体。 第二电极与层叠体电连接。
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3.发明申请STRAIN DETECTION ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 审中-公开应变检测元件，压力传感器，麦克风，血压传感器和触控面板公开(公告)号：US20160009545A1
公开(公告)日：2016-01-14
申请号：US14755633
申请日：2015-06-30
发明人： Yoshihiko FUJI , Hideaki FUKUZAWA , Akio HORI , Shiori KAJI
IPC分类号： B81B3/00
CPC分类号： G01L9/16 , G01L9/0042 , G01L9/0044
摘要： A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu—Ag alloy.
摘要翻译： 应变检测元件设置在可变形膜的上方。 此外，该应变检测元件包括电极和层叠体，该层叠体包括：第一磁性层，其磁化方向根据膜的变形而变化; 设置成面向所述第一磁性层的第二磁性层; 以及设置在这些第一磁性层和第二磁性层之间的中间层，并且第一磁性层的至少一部分是无定形的，并且电极包括由Cu-Ag合金构成的金属层。
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4.发明申请PRESSURE SENSOR, MICROPHONE, ULTRASONIC SENSOR, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权压力传感器，麦克风，超声波传感器，血压传感器和触控面板公开(公告)号：US20150338293A1
公开(公告)日：2015-11-26
申请号：US14721497
申请日：2015-05-26
CPC分类号： G01L1/22 , A61B5/021 , A61B5/02141 , A61B5/05 , A61B5/6898 , A61B5/7475 , A61B2562/0204 , A61B2562/0247 , A61B2562/028 , G01L1/125 , G01L9/007
摘要： According to an embodiment, a pressure sensor includes a substrate, a support part, a flexible membrane part, and a magnetoresistive element. The support part is adhered on the substrate by using a first adhesive material with a first Young's modulus and a second adhesive material with a second Young's modulus different from the first Young's modulus. The membrane part is supported by the support part. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.
摘要翻译： 根据实施例，压力传感器包括基板，支撑部分，柔性膜部分和磁阻元件。 通过使用具有第一杨氏模量的第一粘合材料和具有与第一杨氏模量不同的第二杨氏模量的第二粘合材料将支撑部分附着在基底上。 膜部由支撑部支撑。 磁阻元件设置在膜部分上，并且包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的间隔层。
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5.发明申请PRESSURE SENSOR, ACCELERATION SENSOR, AND METHOD FOR MANUFACTURING PRESSURE SENSOR 有权压力传感器，加速度传感器和制造压力传感器的方法公开(公告)号：US20150204739A1
公开(公告)日：2015-07-23
申请号：US14565755
申请日：2014-12-10
IPC分类号： G01L1/22 , G01P15/105
CPC分类号： G01L1/2287 , G01L1/12 , G01L1/125 , G01L5/16 , G01L9/16 , G01P15/105
摘要： According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.
摘要翻译： 根据一个实施例，压力传感器包括设置在基座上的底座和传感器单元。 传感器单元包括具有第一表面的转换薄膜，设置在第一表面上的第一应变感测元件和设置在第一表面上的第二应变感测元件。 第一应变传感元件包括第一磁性层，具有第一氧浓度的第一膜，设置在第一磁性层和第一膜之间的第二磁性层以及设置在第一和第二磁性层之间的第一中间层。 第二应变传感元件包括第三磁性层，具有不同于第一浓度的第二氧浓度的第二膜，设置在第三磁性层和第二膜之间的第四磁性层，以及设置在第三和第二膜之间的第二中间层， 第四磁性层。
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公开(公告)号：US20150177286A1
公开(公告)日：2015-06-25
申请号：US14582769
申请日：2014-12-24
CPC分类号： G01R19/0092 , G01R15/205 , G01R22/06 , G01R33/0005 , G01R33/09 , G01R33/091
摘要： A current sensor comprises a plurality of magnetoresistance elements and a first magnetic body. The plurality of magnetoresistance elements each have their resistance value change by being applied with an current-induced magnetic field from a current to be measured. The first magnetic body applies a first offset magnetic field substantially parallel to the current-induced magnetic field applied to a first magnetoresistance element of the plurality of magnetoresistance elements. Moreover, a smart meter according to an embodiment of the present invention has, for example, the current sensor according to the present embodiment installed therein.
摘要翻译： 电流传感器包括多个磁阻元件和第一磁体。 多个磁阻元件通过施加来自被测量电流的电流感应磁场而各自具有其电阻值变化。 第一磁体施加基本上平行于施加到多个磁阻元件的第一磁阻元件的电流感应磁场的第一偏移磁场。 此外，根据本发明的实施例的智能电表例如具有安装在其中的根据本实施例的电流传感器。
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公开(公告)号：US20150088008A1
公开(公告)日：2015-03-26
申请号：US14469876
申请日：2014-08-27
发明人： Yoshihiko FUJI , Hideaki FUKUZAWA , Michiko HARA , Tomohiko NAGATA , Akio HORI , Shiori KAJI , Yoshihiro HIGASHI , Akiko YUZAWA
CPC分类号： G01L9/16 , A61B5/021 , A61B5/02141 , A61B5/6824 , A61B2562/0247 , G01L9/0001 , G06F3/0414 , H04R19/005 , H04R19/04 , H04R31/00
摘要： According to one embodiment, a pressure sensor includes a support, a film unit supported by the support, having an upper surface, and capable of being deformed, and a first sensing element provided on the upper surface. The first sensing element includes a first magnetic layer, a second magnetic layer provided apart from the first magnetic layer and a first intermediate unit including a first intermediate layer including a portion provided between the first and second magnetic layers. The first magnetic layer extends in a first direction parallel to the upper surface, and a first major axis length of the first magnetic layer is longer than a first minor axis length. The second magnetic layer extends in a second direction parallel to the upper surface and crossing the first direction, and a second major axis length of the second magnetic layer is longer than a second minor axis length.
摘要翻译： 根据一个实施例，压力传感器包括支撑件，由支撑件支撑的膜单元，具有上表面并且能够变形，以及设置在上表面上的第一感测元件。 第一感测元件包括第一磁性层，与第一磁性层分开设置的第二磁性层和包括第一中间层的第一中间单元，第一中间层包括设置在第一和第二磁性层之间的部分。 第一磁性层在平行于上表面的第一方向上延伸，第一磁性层的第一长轴长度比第一短轴长度长。 第二磁性层在平行于上表面并与第一方向相交的第二方向上延伸，第二磁性层的第二长轴长度比第二短轴长度长。
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8.发明申请STRAIN SENSING ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权应变感应元件，压力传感器，麦克风，血压传感器和触控面板公开(公告)号：US20150082918A1
公开(公告)日：2015-03-26
申请号：US14471694
申请日：2014-08-28
发明人： Yoshihiko FUJI , Hideaki FUKUZAWA , Shiori KAJI , Akio HORI , Tomohiko NAGATA , Michiko HARA , Yoshihiro HIGASHI , Akiko YUZAWA
CPC分类号： A61B5/02141 , A61B5/6824 , A61B2562/0247 , G01L1/125 , G01L9/0041 , G01L9/16
摘要： According to one embodiment, a strain sensing element is provided on a film unit configured to be deformed. The strain sensing element includes a functional layer, a first magnetic layer, a second magnetic layer, and a spacer layer. The functional layer includes at least one of an oxide and a nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. A magnetization of the second magnetic layer is variable in accordance with a deformation of the film unit. The spacer layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and includes boron.
摘要翻译： 根据一个实施例，应变感测元件设置在被配置为变形的胶片单元上。 应变感测元件包括功能层，第一磁性层，第二磁性层和间隔层。 功能层包括氧化物和氮化物中的至少一种。 第二磁性层设置在功能层和第一磁性层之间。 第二磁性层的磁化根据膜单元的变形而变化。 间隔层设置在第一磁性层和第二磁性层之间。 第二磁性层的至少一部分是无定形的并且包括硼。
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公开(公告)号：US20150082888A1
公开(公告)日：2015-03-26
申请号：US14465300
申请日：2014-08-21
发明人： Kenji OTSU , Hideaki FUKUZAWA , Michiko HARA , Tomio ONO
CPC分类号： G01H11/02 , G01B7/24 , G01N29/12 , G01N29/14 , G01N29/245 , G01N29/28 , G01N2291/0234 , G01N2291/0238 , G01N2291/0258
摘要： According to one embodiment, an acoustic sensor includes a base and a first strain sensing element. The base includes a support and a first film unit supported by the support. The first film unit is flexible. The first strain sensing element is provided on a first surface of the first film unit. The first strain sensing element includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first magnetic layer and the second magnetic layer. An angle between a magnetization of the first magnetic layer and a magnetization of the second magnetic layer is variable by an acoustic wave. The acoustic wave is transmitted to a first film unit by a first transmitting material in contact with the first film unit.
摘要翻译： 根据一个实施例，声学传感器包括基座和第一应变传感元件。 基座包括支撑件和由支撑件支撑的第一胶片单元。 第一个电影单位是灵活的。 第一应变传感元件设置在第一胶片单元的第一表面上。 第一应变传感元件包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的第一中间层。 第一磁性层的磁化和第二磁性层的磁化之间的角度可以通过声波而变化。 声波通过与第一胶片单元接触的第一透射材料传输到第一胶片单元。
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公开(公告)号：US20140207007A1
公开(公告)日：2014-07-24
申请号：US14219878
申请日：2014-03-19
发明人： Alexander Devin GIDDINGS , Hideaki FUKUZAWA , Yoshihiko FUJI , Hiromi YUASA , Mlchiko HARA , Shuichi MURAKAMI
CPC分类号： A61B5/021 , A61B5/02108 , G01B7/24 , G01L1/125
摘要： A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.
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