Three-dimensional nanostructures and method for fabricating the same
    5.
    发明授权
    Three-dimensional nanostructures and method for fabricating the same 有权
    三维纳米结构及其制造方法

    公开(公告)号:US09180519B2

    公开(公告)日:2015-11-10

    申请号:US14511992

    申请日:2014-10-10

    Abstract: A three-dimensional nanostructures and a method for fabricating the same, and more particularly to three-dimensional structures of various shapes having high aspect ratio and uniformity in large area and a method of fabricating the same by attaching a target material to the outer surface of patterned polymer structures using an ion bombardment phenomenon occurring during a physical ion etching process to form target material-polymer composite structures, and then removing the polymer from the target material-polymer structures. A three-dimensional nanostructures with high aspect ratio and uniformity can be fabricated by a simple process at low cost by using the ion bombardment phenomenon occurring during physical ion etching. Also, nanostructures of various shapes can be easily fabricated by controlling the pattern and shape of polymer structures. In addition, uniform fine nanostructures having a thickness of 10 nm or less can be formed in a large area.

    Abstract translation: 一种三维纳米结构及其制造方法,更具体地涉及具有高纵横比和大面积均匀性的各种形状的三维结构及其制造方法,其目的是将目标材料附着到 使用在物理离子蚀刻工艺期间发生的离子轰击现象形成靶材料 - 聚合物复合结构,然后从目标材料 - 聚合物结构中除去聚合物的图案化聚合物结构。 通过使用在物理离子蚀刻期间发生的离子轰击现象,可以通过简单的方法以低成本制造具有高纵横比和均匀性的三维纳米结构。 此外,通过控制聚合物结构的图案和形状,可以容易地制造各种形状的纳米结构。 此外,可以大面积地形成厚度为10nm以下的均匀的微细纳米结构体。

    METHOD FOR FABRICATING COLUMNAR OR LAMELLAR STRUCTURES OF ORGANIC MOLECULES ALIGNED INTO LARGE-AREA SINGLE DOMAIN
    8.
    发明申请
    METHOD FOR FABRICATING COLUMNAR OR LAMELLAR STRUCTURES OF ORGANIC MOLECULES ALIGNED INTO LARGE-AREA SINGLE DOMAIN 审中-公开
    用于制备适用于大面积单一领域的有机分子的色谱柱或者LAMELLAR结构的方法

    公开(公告)号:US20160200068A1

    公开(公告)日:2016-07-14

    申请号:US14991959

    申请日:2016-01-10

    Abstract: The present invention relates to a method for fabricating columnar or lamellar structures of organic molecules aligned into a large-area single domain, and more particularly, to a method for fabricating columnar or lamellar structures of organic molecules aligned into a large-area single domain, in which organic molecules having a random alignment due to their poly-domain structure are spatially confined between a bottom substrate and a top substrate, and then heated above the isotropic transition temperature of the organic molecules, thereby allowing the organic molecules to have a new alignment different from the initial alignment. Columnar or lamellar structures of organic molecules aligned into a large-area single domain, which are fabricated by the fabrication of the present invention, are large-area single domains having a perfectly columnar shape. Also, because the organic molecules are spatially confined between flat substrates regardless of the properties of the substrates and are subjected to a heat-treatment process, the fabrication method according to the present invention enables nanostructures to be formed in a rapid and efficient manner compared to alignments methods employing high temperatures or solvents.

    Abstract translation: 本发明涉及一种用于制造排列成大面积单结构域的有机分子的柱状或层状结构的方法,更具体地,涉及一种用于制造排列成大面积单结构域的有机分子的柱状或层状结构的方法, 其中由于其多畴结构而具有随机取向的有机分子在空间上限制在底部基板和顶部基板之间,然后被加热到有机分子的各向同性转变温度以上,从而使有机分子具有新的取向 不同于初始对齐。 通过本发明的制造制造的排列成大面积单结构域的有机分子的柱状或层状结构是具有完全柱状形状的大面积单畴。 另外,由于有机分子在空间上被限制在平面基板之间,而与基板的性质无关,并且进行热处理工艺,根据本发明的制造方法使纳米结构能够以快速和有效的方式与 采用高温或溶剂的比对方法。

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