公开(公告)号：US06553833B1

公开(公告)日：2003-04-29

申请号：US09830183

申请日：2001-04-23

Applicant: Karsten Funk ,  Reinhard Neul ,  Gunar Lorenz

Inventor： Karsten Funk ,  Reinhard Neul ,  Gunar Lorenz

IPC: G01P904

CPC classification number: G01C19/5726 ,  G01C19/5712

Abstract: The invention relates to a device for generating bias voltages for the electrodes of a rotation rate sensor. By evaluating a rotation rate signal and a quadrature signal, control signals are generated, using an adaptive quadrature compensator, that are converted by means of a bias voltage generating arrangement into bias voltages that are delivered to the electrodes of an electrode arrangement disposed underneath the seismic mass or masses of the rotation rate sensor. As a result, the sensor structure can be inclined in such a way that the quadrature signal occurring at the output is minimized. In accordance with a further feature of the invention, the bias voltages generated by the bias voltage generating arrangement are modified, as a function of the output signal of a bandwidth adjusting circuit, in such a way that the amplitude frequency response of the detection motion has a desired bandwidth.

Abstract translation: 本发明涉及一种用于产生旋转速率传感器的电极的偏置电压的装置。 通过评估旋转速率信号和正交信号，使用自适应正交补偿器产生控制信号，该自适应正交补偿器通过偏置电压产生装置转换成偏置电压，该偏压被输送到设置在地震下的电极装置的电极 质量或质量的转速传感器。 结果，传感器结构可以以使输出端发生的正交信号最小化的方式倾斜。 根据本发明的另一特征，由偏置电压产生装置产生的偏置电压作为带宽调整电路的输出信号的函数被修改，使得检测运动的振幅频率响应具有 期望的带宽。

公开(公告)号：US06705164B2

公开(公告)日：2004-03-16

申请号：US10258336

申请日：2003-03-19

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01C1900

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Abstract translation: 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在 在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。

公开(公告)号：US20060107738A1

公开(公告)日：2006-05-25

申请号：US11328755

申请日：2006-01-09

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P15/08

CPC classification number: G01C19/5747

Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

Abstract translation: 本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。 微机电转速传感器的示例性实施例可以具有激活装置，第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。 微机电转速传感器的示例性实施例可以具有检测装置，通过该检测装置，第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测 的相应的科里奥利力量。 第一轴线和第二轴线可以平行于基板的表面延伸。 检测装置可以具有第一检测质量装置和第二检测质量装置。 当第一科里奥利质量元件，第二科里奥利质量元件，第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

公开(公告)号：US06654424B1

公开(公告)日：2003-11-25

申请号：US09520250

申请日：2000-03-07

Applicant: Andreas Thomae ,  Johannes Artzner ,  Reinhard Neul ,  Georg Bischopink ,  Karsten Funk ,  Markus Lutz

Inventor： Andreas Thomae ,  Johannes Artzner ,  Reinhard Neul ,  Georg Bischopink ,  Karsten Funk ,  Markus Lutz

IPC: H04L2500

CPC classification number: H03J7/02 ,  G01C19/56

Abstract: In the method and device for tuning a first oscillator with a second oscillator respective response signals of the first oscillator are produced from corresponding frequency-shifted and/or phase-shifted signals of the second oscillator. The first oscillator is tuned to the second oscillator according to the difference of the respective response signals. For amplitude correction a quotient is formed by dividing an output signal by the sum of the response signals. The method and device according to the invention are especially useful in a rotation rate sensor. The invention also includes a rotation rate sensor, which includes a device for determining rotation rate from the oscillations of a first and second oscillator and the device for tuning the first oscillator with the second oscillator.

Abstract translation: 在用第二振荡器调谐第一振荡器的方法和装置中，由第二振荡器的相应频移和/或相移信号产生第一振荡器的响应信号。 根据各个响应信号的差异，第一振荡器被调谐到第二振荡器。 对于幅度校正，通过将输出信号除以响应信号的和来形成商。 根据本发明的方法和装置在旋转速率传感器中特别有用。 本发明还包括旋转速率传感器，其包括用于从第一和第二振荡器的振荡确定转速的装置和用于利用第二振荡器调谐第一振荡器的装置。

公开(公告)号：US06691571B2

公开(公告)日：2004-02-17

申请号：US10258218

申请日：2003-05-29

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01C1900

CPC classification number: G01C19/5747

Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Abstract translation: 描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。 诱导科里奥利元件平行于第一轴振荡。 响应于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 提供证明元件以证明偏转。

公开(公告)号：US07134337B2

公开(公告)日：2006-11-14

申请号：US11328755

申请日：2006-01-09

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P9/04

CPC classification number: G01C19/5747

Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

公开(公告)号：US06752017B2

公开(公告)日：2004-06-22

申请号：US10258339

申请日：2003-03-19

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P1514

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Abstract translation: 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴振荡。 由于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。 因此，对于同相和反相振荡，两轴的振荡频率不同。

公开(公告)号：US07335971B2

公开(公告)日：2008-02-26

申请号：US10404567

申请日：2003-03-31

Applicant: Karsten Funk

Inventor： Karsten Funk

IPC: H01L23/02

CPC classification number: B81C1/00333 ,  B81B2207/095 ,  B81C2203/0136 ,  G01P1/023 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  H01L2224/05554 ,  H01L2224/16145 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/49171 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A method of protecting a micro-mechanical sensor structure embedded in a micro-mechanical sensor chip, in which the micro-mechanical sensor structure is fabricated with a protective membrane, the micro-mechanical sensor chip is arranged so that a surface of the protective membrane faces toward a second chip, and the micro-mechanical sensor chip is secured to the second chip.

公开(公告)号：US07307521B2

公开(公告)日：2007-12-11

申请号：US11077631

申请日：2005-03-10

Applicant: Karsten Funk ,  Bhaskar Srinivasan

Inventor： Karsten Funk ,  Bhaskar Srinivasan

IPC: G08B1/08 ,  H04Q7/00

CPC classification number: H04L29/12254 ,  G01N33/0073 ,  H04B5/0043 ,  H04B5/02 ,  H04L29/12783 ,  H04L61/2038 ,  H04L61/35 ,  H04L67/02 ,  H04L67/04 ,  H04L69/329

Abstract: A sensor node arrangement in a wireless network, includes a sensor to sense information, an RF transceiver to communicate the information to at least one element of the wireless network, and a coil to establish a secondary communications channel with a handheld device via inductive coupling, the secondary communications channel used, for example, to receive, during installation of the sensor node arrangement, a node identifier of the sensor node arrangement.

Abstract translation: 无线网络中的传感器节点布置包括感测信息的传感器，将RF信息传送到无线网络的至少一个元件的RF收发器以及通过电感耦合与手持设备建立辅助通信信道的线圈， 例如，在安装传感器节点装置期间使用的辅助通信信道是传感器节点装置的节点标识符。

公开(公告)号：US06672732B1

公开(公告)日：2004-01-06

申请号：US10070054

申请日：2002-07-17

Applicant: Andreas Niendorf ,  Wilhelm Frey ,  Karsten Funk

Inventor： Andreas Niendorf ,  Wilhelm Frey ,  Karsten Funk

IPC: G02B7182

CPC classification number: G02B26/0841

Abstract: A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsion axis and permitting a torsional vibration about the torsion axis to be induced in the vibrating structure, the spring structure also including at least one converter structure, which at least partially converts forces acting at least largely perpendicularly to the torsion axis on the torsion spring element into forces acting at least partially parallelly to the torsion axis on the torsion-spring element.

Abstract translation: 振动微型装置，例如振动微镜，包括振动结构，所述振动结构经由至少一个弹簧结构以至少大体上浮动的方式连接到支撑体，所述弹簧结构包括至少一个限定扭转的扭簧元件 所述弹簧结构还包括至少一个转换器结构，所述至少一个转换器结构至少部分地将至少大部分地垂直于所述扭转轴线上的力作用力转换成所述扭转弹簧元件上的扭转轴线 至少部分地平行于扭转弹簧元件上的扭转轴线作用的力。