摘要:
A spindle motor has a rotor supported by a stator through a thrust bearing and a radial bearing. At least the thrust bearing is a hydrodynamic bearing. The spindle motor is provided with a device for adjusting the thrust laod that is applied to the thrust bearing. The load adjusting device has an electromagnet that is provided on the stator and a permanent magnet that is provided on the rotor in opposing relation to the electromagnet. Either the repelling force or the attraction force, which acts between the electromagnet and the permanent magnet, is controlled by changing the current supplied to the electromagnet.
摘要:
A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.
摘要:
A turbo molecular pump includes a magnetic bearing system which includes a rotor having an impeller connected to a shaft and a motor. A stator is positioned between the shaft and the impeller. Radial magnetic bearings, an active axial magnetic bearing and emergency bearings are each provided between the rotor and the stator. The radial magnetic bearings include passive magnetic bearings provided on the rotor and the stator respectively. The axial magnet bearing is disposed in the vicinity where the impeller is connected to the shaft. The emergency bearings are disposed on a low vacuum side with one emergency bearing being positioned near the axial magnetic bearing. A diameter of the shaft is made smaller than an inside diameter of the emergency bearing near the axial magnetic bearing. By this arrangement, only one control axis is necessary for controlling the position of the rotor. Disassembling of the shaft and impeller is easy and contamination of the high vacuum side can be prevented.
摘要:
An inductance-type displacement sensor which can measure the displacement of a measured object of magnetic material without any contact with the object. A pair of series connected coils is provided adjacent to the object so that the inductance of the coils varies in response to a displacement of the object from a predetermined position. The inductance, the number of windings, the direction of the windings and the section of each of the cores are so set that the magnetic flux produced by one of the coils runs in a direction opposite to that of the magnetic flux produced by the other coil and the densities of the respective magnetic fluxes are identical with each other.
摘要:
A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要:
A waste gas treatment system having a burner part and a combustion chamber provided at a downstream side of the burner part. Combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.
摘要:
A combustor for waste gas treatment having a flame stabilizing zone surrounded by a peripheral wall and closed with a bottom wall. The flame stabilizing zone is provided to face a combustion chamber. Burner ports for auxiliary combustible gas are provided in the peripheral wall to inject an auxiliary combustible gas into the flame stabilizing zone so as to produce swirling flows. Burner ports for waste gas are provided in the bottom wall to inject a gas into the flame stabilizing zone.
摘要:
A combustor for waste gas treatment having a flame stabilizing zone 15 surrounded by a peripheral wall 13 and closed with a bottom wall 14. The flame stabilizing zone 15 is provided to face a combustion chamber 11. Burner ports 23 for auxiliary combustible gas are provided in the peripheral wall 13 to inject an auxiliary combustible gas B into the flame stabilizing zone 15 so as to produce swirling flows. Burner ports 22 for waste gas are provided in the bottom wall 14 to inject a waste gas A into the flame stabilizing zone 15.
摘要:
A radial magnetic bearing apparatus suspends a rotating shaft and stably operates at a level exceeding a bending intrinsic vibration value of the rotating shaft by controlling magnetic forces generated by control coils wound around control magnetic poles. Grooves are provided on the surface of each control magnetic pole facing the rotating shaft, and sensor coils are wound to pass through the grooves in order to detect the position of the rotating shaft in the radial direction. A part of each control magnetic pole may be used as magnetic poles of an inductance-type displacement sensor.
摘要:
An apparatus for treating an exhaust gas that includes a pre-treatment section that removes a powdery component, a water-soluble component or a hydrolytic component from the exhaust gas. The exhaust gas contains a fluorine compound and CO. A heating oxidative decomposing section performs heating oxidative decomposition of at least one of the fluorine compound and CO to detoxify the exhaust gas. The apparatus also has a post-treatment section for post-treating an acid gas such as HF which has been produced by the heating oxidative decomposition.