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公开(公告)号：US06895032B2
公开(公告)日：2005-05-17
申请号：US10625529
申请日：2003-07-24
CPC分类号： H01L21/67751 , B30B11/001 , B30B11/002 , H01L21/67126 , Y10T83/9387 , Y10T83/9423
摘要： A high-pressure processing apparatus for supplying a pressure medium into a high-pressure processing chamber 4, which is formed in a pressure vessel 1 to treat a workpiece at a high pressure, is provided. The pressure vessel 1 includes a first vessel section 2 and a second vessel section 3, which can be separated from each other in the axial direction, wherein the high-pressure processing chamber 4 is formed between the first and second vessel sections 2 and 3. Furthermore, a face seal section 5 for tightly sealing the high-pressure processing chamber 4 is formed in the abutment of the first and second vessel sections 2 and 3. A press apparatus 7 for providing an axial force to the face seal section 5 is disposed and the press apparatus 7 has a space 15 for storing a supplementary apparatus, such as a stirrer or the like at a position corresponding to the axial center of the pressure vessel 1. Such a structural arrangement allows a face seal type high-pressure processing apparatus to be realized, onto which the supplementary apparatus, such as a stirrer or the like, can be mounted.
摘要翻译： 提供了一种用于将压力介质供应到形成在压力容器1中以高压处理工件的高压处理室4中的高压处理装置。 压力容器1包括第一容器部分2和第二容器部分3，其可以在轴向上彼此分离，其中高压处理室4形成在第一和第二容器部分2和3之间。 此外，在第一和第二容器部分2和3的邻接处形成用于紧密密封高压处理室4的面密封部分5。 设置用于向面部密封部5提供轴向力的按压装置7，压力装置7具有用于在与压力的轴心对应的位置例如搅拌器等存放辅助装置的空间15 船1。 这种结构布置允许实现面密封型高压处理装置，其上可以安装诸如搅拌器等的辅助装置。
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公开(公告)号：US06703316B2
公开(公告)日：2004-03-09
申请号：US10132212
申请日：2002-04-26
申请人： Yoichi Inoue , Yoshihiko Sakashita , Katsumi Watanabe , Nobuyuki Kawakami , Takahiko Ishii , Yusuke Muraoka , Kimitsugu Saito , Tomomi Iwata , Ikuo Mizobata , Takashi Miyake , Ryuji Kitakado
发明人： Yoichi Inoue , Yoshihiko Sakashita , Katsumi Watanabe , Nobuyuki Kawakami , Takahiko Ishii , Yusuke Muraoka , Kimitsugu Saito , Tomomi Iwata , Ikuo Mizobata , Takashi Miyake , Ryuji Kitakado
IPC分类号： H01L21302
CPC分类号： H01L21/02052 , H01L21/67028
摘要： A method and system for processing a substrate includes performing a wet process by supplying a working liquid to a substrate in a wet processing apparatus, transferring the substrate in a non-dry state from the wet processing apparatus to a drying apparatus, and subjecting the substrate to a supercritical drying by a supercritical fluid in the drying apparatus.
摘要翻译： 用于处理衬底的方法和系统包括通过在湿法处理设备中将工作液体供应到衬底来进行湿法处理，将非干燥状态的衬底从湿法处理设备转移到干燥设备，并对衬底 在干燥装置中通过超临界流体进行超临界干燥。
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公开(公告)号：US4629412A
公开(公告)日：1986-12-16
申请号：US639065
申请日：1984-08-09
申请人： Yoichi Inoue , Takahiko Ishii
发明人： Yoichi Inoue , Takahiko Ishii
CPC分类号： B22F3/15 , B30B11/002 , Y10S425/026
摘要： A hot isostatic pressing apparatus having a high pressure vessel, a heat insulating layer and a heater disposed inside the heat insulating layer, the heat insulating layer and the heater being disposed within a high pressure chamber defined by upper and lower covers. The heat insulating layer is composed of at least two inner and outer inverted cup-like casings, the outer casing being metallic and having a hermetic structure and the inner casing having a hermetic structure. A passage is formed in the upper surface of the outer casing and a valve capable of being opened and closed is provided therein. Further, a mechanism for opening and closing the valve is mounted on the upper cover, and a gas passage is formed in the lower portion of the het insulating layer. The above arrangement creates a convection of gas in the cooling step after the HIP treatment whereby a remarkable improvement can be attained in cooling efficiency, cooling time and productivity.
摘要翻译： 一种具有高压容器，绝热层和布置在隔热层内部的加热器的热等静压装置，隔热层和加热器设置在由上盖和下盖限定的高压室内。 绝热层由至少两个内部和外部倒置的杯状壳体组成，外部壳体是金属的并且具有密封结构，并且内部壳体具有密封结构。 在外壳的上表面形成通道，并且在其中设置能够打开和关闭的阀。 此外，在上盖上安装有用于打开和关闭阀的机构，并且在绝缘层的下部形成气体通道。 上述结构在HIP处理之后的冷却步骤中产生气体的对流，从而在冷却效率，冷却时间和生产率方面可以获得显着的改善。
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公开(公告)号：US4424696A
公开(公告)日：1984-01-10
申请号：US267387
申请日：1981-05-26
申请人： Akira Asari , Tatsuhiko Noyori , Masakazu Ueda , Takahiko Ishii
发明人： Akira Asari , Tatsuhiko Noyori , Masakazu Ueda , Takahiko Ishii
CPC分类号： B21C23/211 , B21C23/218 , B21C35/04
摘要： An indirect extrusion press including a press frame body of the Rahmen structure. The press frame body is formed of a press platen and a main cylinder frame, which are rigidly connected together. Movably disposed between the press platen and main cylinder frame is a container adapted to retain a billet therein. A die stem fixedly extends toward the container from the platen while a pressing stem slidably extends toward the container from the main cylinder frame. Hydraulic cylinders are provided with the platen to shift the container back and forth along the longitudinal center line of the press. Hydraulic coupling cylinders are also provided with a crosshead from which the pressing stem extends and the pistons of both cylinders are connected to their respective container holders. The relative position of the container and pressing stem is maintained constant during an extrusion stroke so that the container-shifting force is added to an extrusion force. An effective scalping operation of the container is performed by using not only the container-shifting cylinders but also the coupling cylinders. An intermediate frame may also be slidably provided on the die stem such that the shifting force for the intermediate frame may also be added to the extrusion force or scalping force. The extra extrusion force is received by the container and its related moving members, thereby enabling use of the press frame body without reinforcement and allowing a reduction in the total number of parts and weight necessary, and simplification of the press.
摘要翻译： 一种间接挤压机，包括Rahmen结构的压机框架。 压框框架由刚性连接在一起的压板和主缸架构成。 可移动地设置在压板和主缸框架之间的是适于将钢坯保持在其中的容器。 模具杆从压板固定地朝向容器延伸，而压力杆从主缸架可滑动地朝向容器延伸。 液压缸设置有压板，以沿容器的纵向中心线前后移动容器。 液压连接缸还设置有十字头，按压杆从该十字头延伸，并且两个气缸的活塞连接到它们各自的容器保持器。 在挤压冲程期间，容器和压力杆的相对位置保持恒定，从而将容器移动力加到挤压力上。 通过不仅使用容器移动缸，而且使用联接缸来进行容器的有效的刮除操作。 中间框架也可以可滑动地设置在模柄上，使得中间框架的移动力也可以被添加到挤压力或剥皮力。 额外的挤压力被容器及其相关的移动部件容纳，从而能够在不加固的情况下使用压框架体，并且允许减少所需部件的总数和所需的重量，并简化冲压机。
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公开(公告)号：US06328560B1
公开(公告)日：2001-12-11
申请号：US09496058
申请日：2000-02-02
IPC分类号： F27B504
CPC分类号： C23C14/5806 , C23C14/046 , C23C14/5886 , C30B33/005
摘要： An inner vessel 16 capable of hermetically surrounding a portion for disposing works W is disposed to the inside of a pressure vessel 4, the inner vessel 16 is provided with a gas introducing portion 18 at a lower position thereof free from the effect a high temperature atmosphere formed by heaters 11 and 12, a filter 20 is disposed to the gas introducing portion 18 and a check valve 19 is disposed to the inner vessel 16 for allowing a gas to flow unidirectionally from the inside to the outside thereof.
摘要翻译： 能够气密地围绕用于设置工件W的部分的内部容器16设置在压力容器4的内部，内部容器16在其下部设置有气体导入部18，而不产生高温气氛 由加热器11和12形成，过滤器20设置在气体导入部分18上，止回阀19设置在内部容器16上，用于允许气体从内部单向流动到外部。
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公开(公告)号：US5792271A
公开(公告)日：1998-08-11
申请号：US845821
申请日：1997-04-28
CPC分类号： F17C7/00 , B01J3/02 , B01J4/008 , F17C2205/0332 , F17C2205/0341 , F17C2221/011 , F17C2221/016 , F17C2221/05 , F17C2223/0123 , F17C2227/0348 , F17C2227/0386 , F17C2227/048 , F17C2270/0518
摘要： The present invention provides a system for supplying a high-pressure medium gas suitable for processing a semiconductor to be processed by heating under isostatic pressure in a short cycle. The system includes a gas holder containing a high-pressure medium gas, a compressor for pressurizing the high-pressure medium gas supplied from the gas holder, a high-pressure vessel having a heater, an accumulator for storing the high-pressure medium gas pressurized by the compressor, a first evacuation unit for evacuating the inside of a pipeline for the high-pressure medium gas, a vacuum casing for holding the opening of the high-pressure vessel in a vacuum, a second evacuation unit for evacuating the inside of the vacuum casing, and a valve unit for connecting the high-pressure vessel and the accumulator so that series connection and parallel connection can be switched on the outlet side of the compressor.
摘要翻译： 本发明提供了一种用于在短时间内以等压压力下加热适于处理待处理半导体的高压介质气体的系统。 该系统包括含有高压介质气体的气体保持器，用于对从气体保持器供给的高压介质气体进行加压的压缩机，具有加热器的高压容器，用于将高压介质气体进行加压的储液器 通过压缩机将用于排出高压介质气体的管道内部的第一抽空单元，用于将高压容器的开口保持在真空中的真空壳体，用于抽出高压介质气体的内部的第二抽空单元 真空壳体和用于连接高压容器和蓄能器的阀单元，使得可以在压缩机的出口侧上切换串联和并联连接。
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公开(公告)号：US4968009A
公开(公告)日：1990-11-06
申请号：US397881
申请日：1989-08-23
申请人： Akira Asari , Takahiko Ishii , Yutaka Narukawa
发明人： Akira Asari , Takahiko Ishii , Yutaka Narukawa
CPC分类号： F27D9/00 , B30B11/002
摘要： A cooling device for a high pressure vessel which is simple in construction and high in safety and has a high cooling faculty without the necessity of changing a design of the high pressure vessel. The cooling device has a cylindrical cooling medium jacket having a cooling medium passage formed therein. The cooling medium jacket is removably disposed in a high pressure chamber of the high pressure vessel between the high pressure vessel and an insulation mantle surrounding a heater in the high pressure chamber such that a gap may be left between the high pressure vessel and the cooling medium jacket. The cooling medium jacket has a passage hole formed therein for establishing communication between the gap and the high pressure chamber to allow pressure medium to be introduced into the gap. The cooling device further includes a pressure medium supply means provided in the gap for introducing therethrough pressure medium different from the pressure medium for the HIP process to support THE cooling medium jacket with a hydraulic pressure of the different pressure medium.
摘要翻译： 一种用于高压容器的冷却装置，其结构简单且安全性高，并且具有高冷却能力，而不需要改变高压容器的设计。 冷却装置具有在其中形成有冷却介质通道的圆柱形冷却介质套管。 冷却介质护套可移除地设置在高压容器的高压室中，在高压容器和围绕高压室中的加热器的绝缘套之间，使得高压容器和冷却介质之间可能留有间隙 夹克。 冷却介质套管具有形成在其中的通道孔，用于建立间隙和高压室之间的连通，以允许将压力介质引入到间隙中。 冷却装置还包括设置在间隙中的压力介质供给装置，用于引入不同于用于HIP工艺的压力介质的压力介质，以用不同压力介质的液压支撑冷却介质套管。
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公开(公告)号：US4471949A
公开(公告)日：1984-09-18
申请号：US484315
申请日：1983-04-12
申请人： Takahiko Ishii
发明人： Takahiko Ishii
CPC分类号： B30B11/002 , B22F3/15
摘要： A HIP system of the type which includes a high pressure vessel with top and bottom plugs for closing top and bottom open ends thereof or a high pressure vessel closed at one end and having a plug for closing the other open end thereof, and a high pressure and temperature processing chamber defined in the pressure vessel and having a heat insulating mantle and a heater disposed around the inner periphery thereof for subjecting a workpiece supported on the plug to sintering or other treatment in a high pressure and temperature gas atmosphere, the HIP system including: a removable shield casing hermetically engageable with the workpiece supporting plug and adapted to be loaded into and unloaded from the high pressure vessel along with the workpiece, holding the processing chamber in a sealed state; and a valve member provided in the shield casing for selectively establishing and blocking communication of the processing chamber with an exterior atmosphere such that the processing chamber is selectively placed in a vacuumized state, filled with a high pressure gas and evacuated to an atmospheric pressure.
摘要翻译： 一种HIP系统，其包括具有用于封闭其顶部和底部开放端的顶部和底部塞子的高压容器或在一端封闭并具有用于封闭其另一个开口端的塞子的高压容器，以及高压 和温度处理室，其限定在所述压力容器中并且具有隔热罩和设置在其内周周围的加热器，用于使被支撑在所述塞上的工件在高压和高温气体气氛中进行烧结或其它处理，所述HIP系统包括 ：可移动的屏蔽套管，其与工件支撑插塞气密接合并适于与工件一起装载和卸载高压容器，并将处理室保持在密封状态; 以及阀构件，其设置在所述屏蔽壳体中，用于选择性地建立和阻断所述处理室与外部气氛的连通，使得所述处理室选择性地置于被抽成气体的状态中，填充有高压气体并抽空到大气压。
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公开(公告)号：US20050051194A1
公开(公告)日：2005-03-10
申请号：US10915320
申请日：2004-08-11
IPC分类号： G03F7/42 , A01J11/04 , B08B5/04 , B08B7/00 , H01L21/027 , H01L21/304
CPC分类号： B08B7/0021 , G03F7/422
摘要： An object is subjected to high-pressure processing by bringing at least a high-pressure fluid into contact with the object under pressure in a high-pressure processing chamber, and then the high-pressure processing chamber is depressurized while the temperature in the chamber is controlled to be maintained above a temperature achieved by an adiabatic expansion, the adiabatic expansion starting from the pressure and temperature at the end of the high-pressure processing step. To control in such a way, the temperature in the high-pressure processing chamber is controlled so as to suppress or recover a temperature descent caused by an adiabatic expansion during the depressurizing step. This solves a problem in which the temperature is decreased to the vapor-liquid phase coexistence region or a region in which a solid is deposited.
摘要翻译： 通过在高压处理室中使至少一个高压流体与压力物体接触而对物体进行高压处理，然后高压处理室在室内的温度为 控制为保持高于通过绝热膨胀实现的温度，绝热膨胀从高压加工步骤结束时的压力和温度开始。 为了以这种方式进行控制，控制高压处理室中的温度以抑制或恢复在减压步骤期间由绝热膨胀引起的温度下降。 这解决了温度降低到气相共存区域或其中沉积固体的区域的问题。
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公开(公告)号：US5137755A
公开(公告)日：1992-08-11
申请号：US656691
申请日：1991-02-19
申请人： Takao Fujikawa , Takahiko Ishii
发明人： Takao Fujikawa , Takahiko Ishii
CPC分类号： C04B35/521 , C04B35/52 , C04B35/83
摘要： An impregnating carbonizing process and apparatus which permit reduction in cost of consumable goods and can operate at a reduced cost and a heating and vacuum impregnating operation which requires a very long period of time can be performed on the outside of an expensive high pressure vessel to accomplish rapid carbonization and baking. The process comprises of inserting a porous shaped body of carbon and a block of impregnant into a specimen case, discharging gas from within the specimen case, heating the impregnant into a molten condition under a reduced pressure, inserting the specimen case into a high pressure vessel, admitting high pressure gas into the high pressure vessel and also into the specimen case so as to penetrate the impregnant into the shaped body of carbon, heating the shaped body to a high temperature, and discharging the high pressure gas to lower the pressure within the specimen case at a controlled rate in response to a pressure within the high pressure vessel to carbonize the impregnant. The apparatus is constructed to suitably carry out the process.
摘要翻译： 可以在昂贵的高压容器的外部进行浸渍碳化方法和装置，其允许降低消耗品的成本并且可以以降低的成本运行并且需要非常长的时间段的加热和真空浸渍操作来完成 快速碳化和烘烤。 该方法包括将多孔成形体的碳和一块浸渍剂插入样品壳体中，从样品壳体内排出气体，将浸渍剂在减压下加热到熔融状态，将样品箱插入高压容器 将高压气体进入高压容器并进入样品箱，以便将浸渍剂渗透到成型体中，将成形体加热到高温，并排出高压气体以降低内部压力 样品盒以受控的速率响应于高压容器内的压力以使浸渍剂碳化。 该装置被构造成适当地执行该过程。
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