摘要:
Water-repellent porous silica having uniform pores, which comprises silica skeleton wherein fluorine atoms are fixed through covalent bonds and which has an alkali metal content of not more than 10 ppb, is synthesized. By the water-repellent porous silica, a water-repellent porous silica film having uniform pores, which is applicable to a light functional material or an electron functional material, a process for preparing the same and uses thereof can be provided.
摘要:
The present invention relates to a method for modifying a porous film mainly having Si—O bonds wherein a thermal treatment is conducted without using a metal catalyst by bringing an organic silicon compound into contact with the porous film. The organic silicon compound includes one or more Si—X—Si bond unit (wherein X represents O, NR, CnH2n, or C6H4; R represents CmH2m+1 or C6H5; m is an integer between 1 and 6; and n is 1 or 2) and two or more Si-A bond units (wherein A represents H, OH, OCeH2e+1 or a halogen atom and can be the same or different within a single molecule; and e is an integer between 1 and 6). Since the porous film obtained by this method is excellent in the hydrophobic property and the mechanical strength, it can be used as an optically functional material or an electronically functional material. The porous film is especially useful as a semiconductor material, and can be preferably used as an interlayer insulating film in a semiconductor device.
摘要翻译:本发明涉及一种用于改性主要具有Si-O键的多孔膜的方法,其中通过使有机硅化合物与多孔膜接触而不使用金属催化剂进行热处理。 有机硅化合物包括一个或多个Si-X-Si键单元(其中X表示O,NR,C n H 2n H 2n或C 6, R 4表示C m H 2 m + 1或C 6 H 5, m是1和6之间的整数; n是1或2)和两个或更多个Si-A键单元(其中A表示H,OH,OC 2e + 1或卤素原子,并且可以在单分子内相同或不同; e为1至6之间的整数)。 由于通过该方法获得的多孔膜的疏水性和机械强度优异,因此可以用作光学功能材料或电子功能材料。 多孔膜特别可用作半导体材料,并且可以优选用作半导体器件中的层间绝缘膜。
摘要:
The present invention relates to a method for modifying a porous film mainly having Si—O bonds wherein a thermal treatment is conducted without using a metal catalyst by bringing an organic silicon compound into contact with the porous film. The organic silicon compound includes one or more Si—X—Si bond unit (wherein X represents O, NR, CnH2n, or C6H4; R represents CmH2m+1 or C6H5; m is an integer between 1 and 6; and n is 1 or 2) and two or more Si-A bond units (wherein A represents H, OH, OCeH2e+1 or a halogen atom and can be the same or different within a single molecule; and e is an integer between 1 and 6). Since the porous film obtained by this method is excellent in the hydrophobic property and the mechanical strength, it can be used as an optically functional material or an electronically functional material. The porous film is especially useful as a semiconductor material, and can be preferably used as an interlayer insulating film in a semiconductor device.
摘要翻译:本发明涉及一种用于改性主要具有Si-O键的多孔膜的方法,其中通过使有机硅化合物与多孔膜接触而不使用金属催化剂进行热处理。 有机硅化合物包括一个或多个Si-X-Si键单元(其中X表示O,NR,C n H 2n或C 6 H 4; R表示C m H 2n + 1或C 6 H 5; m为1至6的整数; n为1或 2)和两个或更多个Si-A键单元(其中A表示H,OH,OCeH 2e + 1或卤素原子,并且在单分子内可以相同或不同; e为1至6之间的整数)。 由于通过该方法获得的多孔膜的疏水性和机械强度优异,因此可以用作光学功能材料或电子功能材料。 多孔膜特别可用作半导体材料,并且可以优选用作半导体器件中的层间绝缘膜。
摘要:
A hydrophobic compound having at least one each of hydrophobic group (an alkyl group having 1 to 6 carbon atoms or a —C6H5 group) and polymerizable group (a hydrogen atom, a hydroxyl group or a halogen atom) is allowed to undergo a gas-phase polymerization reaction, under reduced pressure (of not more than 30 kPa), in the presence of a raw porous silica film and to thus form a modified porous silica film wherein a hydrophobic polymer thin film is formed on the inner walls of holes present in the raw porous silica film. The resulting porous silica film has a low relative dielectric constant and a low refractive index and the silica film is likewise improved in the mechanical strength and hydrophobicity. A semiconductor device is produced using the porous silica film.
摘要翻译:具有疏水性基团(具有1〜6个碳原子的烷基或-C 6 H 5基团)和可聚合基团(氢原子,羟基或卤素原子)中的至少一种的疏水化合物被允许进行气 - 在减压(不大于30kPa)的条件下,在原料多孔二氧化硅膜的存在下进行相聚合反应,从而形成改性多孔二氧化硅膜,其中在存在于孔中的孔的内壁上形成疏水性聚合物薄膜 原料多孔二氧化硅膜。 所得到的多孔二氧化硅膜的相对介电常数低,折射率低,二氧化硅膜的机械强度和疏水性同样提高。 使用多孔二氧化硅膜制造半导体器件。
摘要:
The coating liquid for forming porous silica according to the present invention is characterized by preferably containing a partial hydrolysis-condensation product of an alkoxysilane compound, a surfactant and an organic ampholyte, and by having a metal content of not more than 50 ppb. Conventional coating liquids for forming porous silica have such a problem that porous silica films formed therefrom may have poor regularity in micropore alignment when the shelf life of the coating liquids are long. On the contrary, the coating liquid for forming porous silica of the present invention is excellent in self-life stability. Namely, the quality of porous silica formed therefrom is hardly affected by the length of self-life period of the coating liquid. Consequently, the coating liquid is expected to contribute to the stable preparation of porous silica films which cause no shift in capacitance or voltage when exposed to an electric field, have regularly aligned uniform micropores, and are preferably used as an optically functional material or an electronically functional material.
摘要:
The coating liquid for forming porous silica according to the present invention is characterized by preferably containing a partial hydrolysis-condensation product of an alkoxysilane compound, a surfactant and an organic ampholyte, and by having a metal content of not more than 50 ppb. Conventional coating liquids for forming porous silica have such a problem that porous silica films formed therefrom may have poor regularity in micropore alignment when the shelf life of the coating liquids are long. On the contrary, the coating liquid for forming porous silica of the present invention is excellent in self-life stability. Namely, the quality of porous silica formed therefrom is hardly affected by the length of self-life period of the coating liquid. Consequently, the coating liquid is expected to contribute to the stable preparation of porous silica films which cause no shift in capacitance or voltage when exposed to an electric field, have regularly aligned uniform micropores, and are preferably used as an optically functional material or an electronically functional material.
摘要:
A steel having a predetermined composition is hot-rolled so as to form a steel strip, the steel strip is subjected to first cold-rolling, the steel strip is subjected to intermediate annealing, the steel strip is subjected to second cold-rolling, and the steel strip is subjected to finish annealing. A finish temperature in the hot-rolling is 900° C. or less, annealing is not performed between the hot-rolling and the first cold-rolling, and a rolling reduction in the second cold-rolling is not less than 40% nor more than 85%.
摘要:
A developer stirring unit is rotated and driven without driving an electrophotographic photosensitive drum according to output information of a temperature detection unit of an image forming apparatus during a non-image formation period, thereby cooling a developer near a developing roller.
摘要:
A magnetic resonance imaging apparatus includes a plurality of coil elements for receiving magnetic resonance signals of a subject in a plurality of selectable combinations. The magnetic resonance imaging apparatus also includes a sensitive region storage device for storing respective sensitive regions for the combinations of the coil elements, a setting device for setting scan regions, a calculation device for calculating a scan volume rate indicating each of proportions of overlap regions between the scan regions and the sensitive regions to the scan regions, and a sensitivity volume rate indicating each of proportions of the overlap regions to the sensitive regions, and a selection device for selecting each combination of the coil elements used to receive the magnetic resonance signals of the subject, out of the combinations of the coil elements, based on the scan volume rate and the sensitivity volume rate.
摘要:
In a multiple view liquid crystal display, occurrence of a reverse view phenomenon and a reverse view crosstalk are suppressed. A black matrix is formed on the opposed surface of a counter substrate to a TFT substrate in a liquid crystal panel, and a parallax barrier is provided on the black matrix with a gap layer having a predetermined thickness interposed therebetween. The black matrix includes a first light blocking part disposed immediately below an opening in the parallax barrier, and a second light blocking part with a portion immediate thereabove covered by the parallax barrier. The second light blocking part includes a low refractive-index film (reverse view preventive film), having a lower refractive index than that of a liquid crystal, at the end thereof which is in contact with a pixel opening between the second light blocking part and the adjacent first light blocking part.