Displacement detecting device
    1.
    发明授权
    Displacement detecting device 失效
    位移检测装置

    公开(公告)号:US5656936A

    公开(公告)日:1997-08-12

    申请号:US588329

    申请日:1996-01-18

    CPC分类号: G01D5/147 G01P3/488

    摘要: A displacement detector to obtain high-precision displacement detection with a small-sized, low-cost apparatus. A displacement detector comprises rectangular teeth formed on the outer circumference surface at a pitch of .lambda., a gearwheel made of a magnetic material, a magnet having a width larger than the pitch .lambda. of the gearwheel and so disposed that the N-pole thereof faces the teeth, and a pair of MREs constructed by alternately connecting the long strip portions and short strip portions thereof to have a zigzag shape. A uniform cyclic magnet field from the magnet to the gearwheel is formed within a gap between the gearwheel and the magnet. On the same phase of the magnet field are disposed the pair of MREs so that the directions of the long strip portions thereof and the directions of the magnetic force lines make angles of approximately 45.degree. and approximately 135.degree., respectively.

    摘要翻译: 一种位移检测器,用小型,低成本的装置获得高精度位移检测。 位移检测器包括以λ的间距形成在外圆周表面上的矩形齿,由磁性材料制成的齿轮,具有大于齿轮的间距λ的宽度的磁体,并且被布置成使得其N极面向 齿,以及通过交替地将长带部分和短条带部分交替地连接以形成锯齿形的一对MRE。 在磁体和磁体之间的间隙内形成有从磁体到齿轮的均匀的循环磁场。 在磁场的相同相位上设置一对MRE,使得其长条状部分的方向和磁力线的方向分别为大约45度和大约135度的角度。

    Apparatus for optically detecting an extraneous matter on a translucent
shield
    2.
    发明授权
    Apparatus for optically detecting an extraneous matter on a translucent shield 失效
    用于光学检测半透明屏蔽上的外来物质的装置

    公开(公告)号:US4867561A

    公开(公告)日:1989-09-19

    申请号:US87168

    申请日:1987-08-18

    IPC分类号: B60H1/00 B60S1/08

    摘要: An apparatus for optically detecting the attachment state of extraneous matters to a translucent shield member. The optically detecting apparatus comprises a light-emitting unit having a plurality of light-emitting elements each emitting a light ray toward the translucent shield member, a photoelectric transducer unit having a plurality of transducer elements each receiving each of the light rays reflected on the translucent shield member, and a data processing unit coupled to the transducer unit. The transducer unit generates detection signals corresponding to the quantities of the received light rays and the data processing unit successively compares the level of each of the detection signals with a predetermined level to produce binary signals in accordance with the results of the comparison so that a binary signal pattern is defined at the respective transducer elements. The data processing unit determines the attachment state of the extraneous matters to the translucent shield member by comparing the defined binary signal pattern with a reference pattern.

    摘要翻译: 一种用于光学地检测外来物质到半透明屏蔽构件的附着状态的装置。 光学检测装置包括具有多个发光元件的发光单元,每个发光元件朝向半透明屏蔽构件发射光线;光电变换器单元,具有多个换能器元件,每个换能器元件接收在半透明屏蔽构件上反射的每个光线 屏蔽构件和耦合到换能器单元的数据处理单元。 换能器单元产生对应于接收光线的量的检测信号,并且数据处理单元根据比较结果将每个检测信号的电平与预定电平连续地进行比较,以产生二进制信号,使得二进制 在相应的换能器元件处限定信号图案。 数据处理单元通过将定义的二进制信号模式与参考模式进行比较来确定外部物质对半透明屏蔽构件的附着状态。

    Semiconductor device with a nickel alloy protective resistor
    3.
    发明授权
    Semiconductor device with a nickel alloy protective resistor 失效
    具有镍合金保护电阻的半导体器件

    公开(公告)号:US5262666A

    公开(公告)日:1993-11-16

    申请号:US831094

    申请日:1992-02-10

    摘要: A semiconductor device including a substrate, a semiconductor element formed on the substrate, a terminal formed on the substrate and electrically connected to the semiconductor element, and a protective resistor formed on the substrate and electrically connected between the semiconductor element and the terminal. The resistor is composed of a ferromagnetic magnetoresistive material including Ni alloy. The device may be extended to detect magnetism by adding a magnetoresistive element composed of a ferromagnetic magnetoresistive material including the same Ni alloy as for the protective resistor and deposited at the same time. The device is superior in an anti-noise characteristic and is integrated. Furthermore, the device for detecting magnetism is formed with a lower cost.

    摘要翻译: 一种半导体器件,包括基板,形成在基板上的半导体元件,形成在基板上并与半导体元件电连接的端子,以及形成在基板上并电连接在半导体元件和端子之间的保护电阻。 电阻由包含Ni合金的铁磁磁阻材料构成。 可以通过添加由包含与保护电阻器相同的Ni合金并且同时沉积的铁磁性磁阻材料构成的磁阻元件来扩展器件以检测磁性。 该器件具有优越的抗噪声特性并集成。 此外,以较低的成本形成用于检测磁性的装置。

    Method for manufacturing an electromagnetic conversion device and a
displacement detector which uses an electromagnetic conversion device
    5.
    发明授权
    Method for manufacturing an electromagnetic conversion device and a displacement detector which uses an electromagnetic conversion device 失效
    一种使用电磁转换装置的电磁转换装置和位移检测器的制造方法

    公开(公告)号:US5551586A

    公开(公告)日:1996-09-03

    申请号:US293966

    申请日:1994-08-24

    摘要: A method of manufacturing a magneto-electric conversion device having a large rate of change of magnetic resistance and which is easy to position with respect to a magnetized surface, and a moving subject displacement detector using a magneto-electric conversion device manufactured by that method. A magnet which rotates together with the rotation of a drive gear is magnetized in alternately differing north and south poles, arranged in an equal sized section from a center portion thereof. An IC chip is positioned opposite to and at a distance from the magnetized surface of the magnet. Magneto-electric conversion devices are located on the IC chip. These magneto-electric conversion devices are formed by repeated alternate depositions, onto a surface of a single-crystal silicon substrate, of magnetic cobalt films having a thickness of several to several tens of angstroms and non-magnetic copper films having a thickness of several to several tens of angstroms.

    摘要翻译: 一种制造磁阻变化率大且相对于磁化面容易定位的磁电转换装置的方法,以及使用该方法制造的磁电转换装置的移动体位移检测器。 与驱动齿轮的旋转一起旋转的磁体被磁化为交替不同的北极和南极,其中心部分以相同的尺寸设置。 IC芯片位于与磁体的磁化表面相对且距离磁化表面一定距离处。 磁电转换装置位于IC芯片上。 这些磁电转换装置通过重复交替沉积形成在单晶硅衬底的表面上,具有几个至几十埃厚度的磁性钴膜和非磁性铜膜,其厚度为几个至几十 几十埃。

    Position detecting apparatus for detecting a signal magnetic field
indicative of a desired position
    7.
    发明授权
    Position detecting apparatus for detecting a signal magnetic field indicative of a desired position 失效
    位置检测装置,用于检测指示期望位置的信号磁场

    公开(公告)号:US4754221A

    公开(公告)日:1988-06-28

    申请号:US807023

    申请日:1985-12-09

    CPC分类号: G01D5/145

    摘要: When applying a bias field in the direction of the easy axis of magnetization of a signal field-detecting MR element assembly, a leakage magnetic field of a magnetic recording medium adapted to generate a signal field is applied as the desired bias field without using any exclusive bias field application device. The magnetic recording medium and the thin-film MR element assembly are arranged in a manner that they make a predetermined angle.

    摘要翻译: 当在信号场检测MR元件组件的易磁化轴的方向上施加偏置场时,适用于产生信号场的磁记录介质的泄漏磁场被施加作为期望的偏置场,而不使用任何排他的 偏置场应用装置。 磁记录介质和薄膜MR元件组件以它们形成预定角度的方式布置。

    Manufacturing method for magnetoresistance elements
    9.
    发明授权
    Manufacturing method for magnetoresistance elements 失效
    磁阻元件的制造方法

    公开(公告)号:US5618738A

    公开(公告)日:1997-04-08

    申请号:US404147

    申请日:1995-03-14

    摘要: A method of manufacturing a magnetoresistance element that can accurately sort out truely defective products from apparently defective products due to the manufacturing processes. Manufacturing processes for MR elements includes a MR element formation process, a magnetic field application process and an electric inspection process. In the magnetic field process, the magnetic field application is limited to a range within 75.degree. to the longitudinal direction of a MR element pattern. By performing the magnetic field application process before the electric inspection process, the anisotropic magnetic field due to a shape magnetic anisotropy of the MR element can be aligned almost in a fixed direction, defective products due to the manufacturing processes can exactly be sorted out from the apparently defective products in the electric inspection process, so that the yield rate can be improved.

    摘要翻译: 一种制造磁阻元件的方法,其可以由于制造工艺而精确地排除来自明显缺陷的产品的真实缺陷产品。 MR元件的制造过程包括MR元件形成处理,磁场施加处理和电检查过程。 在磁场处理中,磁场施加被限制在与MR元件图案的纵向方向成75°的范围内。 通过在电检测过程之前执行磁场施加处理,由于MR元件的形状磁各向异性而产生的各向异性磁场可以几乎在固定方向上排列,由于制造过程而导致的缺陷产物可以从 在电气检查过程中显然有缺陷的产品,从而可以提高产量。

    Magnetoresistive element and manufacturing method therefor
    10.
    发明授权
    Magnetoresistive element and manufacturing method therefor 失效
    磁阻元件及其制造方法

    公开(公告)号:US5471084A

    公开(公告)日:1995-11-28

    申请号:US94142

    申请日:1993-07-30

    IPC分类号: H01L43/08 H01L27/22

    CPC分类号: H01L43/08

    摘要: This invention relates to a magnetoresistive element used for a magnetic sensor, etc. A ferromagnetic magnetoresistive element thin film is formed so as to be electrically connected to and so as to overlap the upper end portion of an aluminum wiring metal on a substrate. Through using a vacuum heat treatment with a temperature between 350.degree. and 450.degree. C., a Ni--Al-based alloy is formed at the overlapping portion. Therefore, even when a surface protection film of silicon nitride is subsequently formed by plasma CVD on the substrate, the alloy prevents the nitriding of the upper end portion of the aluminum wiring metal. Accordingly, the surface can be protected from moisture by the silicon nitride film without increasing the contact resistance between the magnetoresistive element thin film and the wiring metal. Instead of the Ni--Al-based alloy, other conductive metals such as TiW, TiN, Ti, Zr, or the like may be used. Also, the surface protection film may be a multi-layered film having a first film containing no nitrogen, such as a silicon oxide film, and a second film of silicon nitride film formed on the first film.

    摘要翻译: PCT No.PCT / JP92 / 01581 Sec。 371日期:1993年7月30日 102(e)日期1993年7月30日PCT提交1992年12月3日PCT公布。 公开号WO93 / 11569 日本特许公报1993年6月10日。本发明涉及用于磁传感器等的磁阻元件。铁磁磁阻元件薄膜形成为与铝布线的上端部电连接并与其重叠 金属在基板上。 通过使用350〜450℃的真空热处理,在重叠部分形成Ni-Al系合金。 因此,即使在基板上随后通过等离子体CVD形成氮化硅的表面保护膜,合金也能防止铝布线金属的上端部的氮化。 因此,可以防止表面被氮化硅膜防止湿气,而不增加磁阻元件薄膜和布线金属之间的接触电阻。 可以使用TiW,TiN,Ti,Zr等其他导电性金属代替Ni-Al系合金。 此外,表面保护膜也可以是具有不含氮的第一膜的多层膜,例如氧化硅膜,以及形成在第一膜上的第二氮化硅膜。