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公开(公告)号：US20100219339A1
公开(公告)日：2010-09-02
申请号：US12712863
申请日：2010-02-25
IPC分类号： G01N23/225 , H01J3/14
CPC分类号： H01J37/08 , H01J37/28 , H01J2237/0807 , H01J2237/31749
摘要： The crystal structure of the emitter can be accurately grasped from a FIM image without being influenced by disturbances, such as contamination, and even if the rearrangement of atoms has been performed, whether or not the crystal structure of the emitter has returned to the original state can also be accurately determined. There is a provided a focused ion beam apparatus including an emitter 10, a gas source 11 which supplies gas G2, a cooling unit 12 which cools the emitter, a heating unit 13 which heats the tip of the emitter, an extraction power source unit 15 which applies an extraction voltage to ionize the gas into gas ions at the tip of the emitter, and then extract the gas ions, a beam optical system 16 which makes the extracted gas ions into a focused ion beam (FIB), and then radiates the focused ion beam onto a sample S, an image acquiring mechanism 17 which acquires a FIM image of the tip of the emitter, and a control unit 7 having a display unit and a storage unit 7b. A guide which displays an ideal crystal structure of the tip of the emitter is stored in advance in the storage unit. The control unit is enabled to display the guide in the state of overlapping the acquired FIM image on the display unit.
摘要翻译： 可以从FIM图像中精确地掌握发射体的晶体结构，而不受诸如污染等干扰的影响，即使原子的重排已经被执行，发射体的晶体结构是否已经恢复到初始状态 也可以准确确定。 提供了一种聚焦离子束装置，其包括发射极10，供应气体G2的气体源11，冷却发射极的冷却单元12，加热发射极顶端的加热单元13，提取电源单元15 其施加提取电压以将气体离子化为发射体顶端的气体离子，然后提取气体离子，使得提取的气体离子成为聚焦离子束（FIB）的束光学系统16，然后辐射 聚焦离子束到样本S上，获取发射器的尖端的FIM图像的图像获取机构17以及具有显示单元和存储单元7b的控制单元7。 将显示发射器顶端的理想晶体结构的引导件预先存储在存储单元中。 控制单元能够在显示单元上与获取的FIM图像重叠的状态下显示引导件。
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公开(公告)号：US20110233401A1
公开(公告)日：2011-09-29
申请号：US13065698
申请日：2011-03-28
IPC分类号： G01N23/225
CPC分类号： H01J37/08 , H01J37/265 , H01J2237/006 , H01J2237/0807 , H01J2237/0827
摘要： Provided is a focused ion beam apparatus including: a storage section for storing, for each gas type, a set temperature of an emitter, a gas pressure of an ion source gas, an extraction voltage to be applied to an extraction electrode, a set value of a contrast, and a set value of a brightness; an input section for selecting and inputting a gas type; and a control section for reading out, from the storage section, the set temperature, the gas pressure, the extraction voltage, and the set value of the contrast and the set value of the brightness, which correspond to the input gas type, and respectively setting a heater, a gas control section, a voltage control section, and an adjustment section for an observation image.
摘要翻译： 本发明提供一种聚焦离子束装置，其特征在于，包括：存储部，对于各气体类型，存储发光体的设定温度，离子源气体的气体压力，对提取电极施加的提取电压，设定值 的对比度和亮度的设定值; 用于选择和输入气体类型的输入部分; 以及控制部分，用于从存储部分读出对应于输入气体类型的对比度的设定温度，气体压力，提取电压和设定值以及亮度的设定值，并分别 设置加热器，气体控制部，电压控制部和用于观察图像的调整部。
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公开(公告)号：US08822945B2
公开(公告)日：2014-09-02
申请号：US13065698
申请日：2011-03-28
IPC分类号： G01N23/225 , H01J49/42 , H01J3/26
CPC分类号： H01J37/08 , H01J37/265 , H01J2237/006 , H01J2237/0807 , H01J2237/0827
摘要： A focused ion beam apparatus includes a gas field ion gun unit having an emitter, an ion source gas supply unit for supplying different ion source gases to the emitter, a heater for heating the emitter, and an extraction electrode. A storage section stores, for each gas of a plurality of different types, set values of emitter temperature, gas pressure, extraction voltage to be applied to an extraction electrode, image contrast and image brightness. An input section selects and inputs one of the gas types. A control section reads, from the storage section, the set values of emitter temperature, gas pressure, extraction voltage, image contrast and image brightness, which correspond to the input gas type, and sets a heater, a gas control section, a voltage control section, and an adjustment section for the contrast and brightness of the image.
摘要翻译： 聚焦离子束装置包括具有发射极的气体场离子枪单元，用于向发射极供给不同离子源气体的离子源气体供给单元，用于加热发射极的加热器和提取电极。 对于多种不同类型的每种气体，存储部分存储要施加到提取电极的发射体温度，气体压力，提取电压的设定值，图像对比度和图像亮度。 输入部分选择并输入气体类型之一。 控制部从存储部读取与输入气体类型相对应的发射极温度，气体压力，提取电压，图像对比度和图像亮度的设定值，并且设定加热器，气体控制部，电压控制 部分和用于图像的对比度和亮度的调整部分。
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公开(公告)号：US20110204252A1
公开(公告)日：2011-08-25
申请号：US12931993
申请日：2011-02-15
IPC分类号： H01J3/14
CPC分类号： H01J37/08 , H01J2237/0451 , H01J2237/0458 , H01J2237/0807 , H01J2237/083 , H01J2237/24535 , H01J2237/28 , H01J2237/31749
摘要： A focused ion beam apparatus includes an ion gun unit having an emitter tip, a gas supply unit that supplies gas to the tip, and an ion source gas supply source. An extracting electrode ionizes the gas adsorbed onto the surface of the tip and extracts ions by applying a voltage between the extracting electrode and the tip. A cathode electrode accelerates the ions toward a sample. An aperture member has an opening that passes therethrough a part of the ion beam ejected from the ion gun unit, and a lens system focuses the ion beam onto the sample.
摘要翻译： 聚焦离子束装置包括具有发射极尖端的离子枪单元，向尖端供应气体的气体供应单元和离子源气体供应源。 提取电极通过在提取电极和尖端之间施加电压使吸附在尖端表面上的气体电离并提取离子。 阴极将离子加速到样品。 孔部件具有从离子枪单元喷出的离子束的一部分通过的开口，透镜系统将离子束聚焦到样品上。
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公开(公告)号：US08513602B2
公开(公告)日：2013-08-20
申请号：US12712863
申请日：2010-02-25
IPC分类号： H01J37/00
CPC分类号： H01J37/08 , H01J37/28 , H01J2237/0807 , H01J2237/31749
摘要： The crystal structure of the emitter can be accurately grasped from a FIM image without being influenced by disturbances, such as contamination, and even if the rearrangement of atoms has been performed, whether or not the crystal structure of the emitter has returned to the original state can also be accurately determined. There is a provided a focused ion beam apparatus including an emitter 10, a gas source 11 which supplies gas G2, a cooling unit 12 which cools the emitter, a heating unit 13 which heats the tip of the emitter, an extraction power source unit 15 which applies an extraction voltage to ionize the gas into gas ions at the tip of the emitter, and then extract the gas ions, a beam optical system 16 which makes the extracted gas ions into a focused ion beam (FIB), and then radiates the focused ion beam onto a sample S, an image acquiring mechanism 17 which acquires a FIM image of the tip of the emitter, and a control unit 7 having a display unit and a storage unit 7b. A guide which displays an ideal crystal structure of the tip of the emitter is stored in advance in the storage unit. The control unit is enabled to display the guide in the state of overlapping the acquired FIM image on the display unit.
摘要翻译： 可以从FIM图像中精确地掌握发射体的晶体结构，而不受诸如污染等干扰的影响，即使原子的重排已经被执行，发射体的晶体结构是否已经恢复到初始状态 也可以准确确定。 提供了一种聚焦离子束装置，其包括发射极10，供应气体G2的气体源11，冷却发射极的冷却单元12，加热发射极顶端的加热单元13，提取电源单元15 其施加提取电压以将气体离子化为发射体顶端的气体离子，然后提取气体离子，使得提取的气体离子成为聚焦离子束（FIB）的束光学系统16，然后辐射 聚焦离子束到样本S上，获取发射器的尖端的FIM图像的图像获取机构17以及具有显示单元和存储单元7b的控制单元7。 将显示发射器顶端的理想晶体结构的引导件预先存储在存储单元中。 控制单元能够在显示单元上与获取的FIM图像重叠的状态下显示引导件。
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公开(公告)号：US08389953B2
公开(公告)日：2013-03-05
申请号：US12931993
申请日：2011-02-15
CPC分类号： H01J37/08 , H01J2237/0451 , H01J2237/0458 , H01J2237/0807 , H01J2237/083 , H01J2237/24535 , H01J2237/28 , H01J2237/31749
摘要： A focused ion beam apparatus includes an ion gun unit having an emitter tip, a gas supply unit that supplies gas to the tip, and an ion source gas supply source. An extracting electrode ionizes the gas adsorbed onto the surface of the tip and extracts ions by applying a voltage between the extracting electrode and the tip. A cathode electrode accelerates the ions toward a sample. An aperture member has an opening that passes therethrough a part of the ion beam ejected from the ion gun unit, and a lens system focuses the ion beam onto the sample.
摘要翻译： 聚焦离子束装置包括具有发射极尖端的离子枪单元，向尖端供应气体的气体供应单元和离子源气体供应源。 提取电极通过在提取电极和尖端之间施加电压使吸附在尖端表面上的气体电离并提取离子。 阴极将离子加速到样品。 孔部件具有从离子枪单元喷出的离子束的一部分通过的开口，透镜系统将离子束聚焦到样品上。
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公开(公告)号：US20110215256A1
公开(公告)日：2011-09-08
申请号：US12931987
申请日：2011-02-15
摘要： A focused ion beam apparatus includes an ion gun unit having an emitter tip, a gas supply unit including an ion source gas nozzle configured to supply gas to the tip and an ion source gas supply source. An extracting electrode ionizes the gas adsorbed onto the surface of the tip and extracts ions by applying a voltage between the extracting electrode and the tip. A cathode electrode accelerates the ions toward a sample, and a gun alignment electrode positioned on the side of the sample with respect to the ion gun unit and adjusts the direction of irradiation of the ion beam ejected from the ion gun unit. A lens system includes a focusing lens electrode and an objective lens electrode to focus the ion beam onto the sample.
摘要翻译： 聚焦离子束装置包括具有发射极尖端的离子枪单元，气体供给单元，其包括被配置为向尖端供应气体的离子源气体喷嘴和离子源气体供给源。 提取电极通过在提取电极和尖端之间施加电压使吸附在尖端表面上的气体电离并提取离子。 阴极电极将离子朝向样品加速，并且枪对准电极相对于离子枪单元位于样品侧，并调节从离子枪单元喷射的离子束的照射方向。 透镜系统包括聚焦透镜电极和用于将离子束聚焦到样品上的物镜电极。
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公开(公告)号：US20080308741A1
公开(公告)日：2008-12-18
申请号：US12046987
申请日：2008-03-12
IPC分类号： H01J3/14
CPC分类号： H01J37/08 , H01J37/28 , H01J2237/006 , H01J2237/061 , H01J2237/0817 , H01J2237/182 , H01J2237/188 , H01J2237/31749
摘要： A focused ion beam apparatus includes a plasma generator having a plasma torch therein, which lets plasma flow out while being kept inside, a differential exhaust chamber that is connected to the plasma torch via the torch orifice to cause adiabatic expansion of the plasma flowing out of the plasma torch to form a supersonic flow of the plasma, a drawing orifice provided at the differential exhaust chamber at a position facing the torch orifice to draw ions from the supersonic flow of the plasma, a drawing electrode that electrostatically accelerates ions having passed through the drawing orifice to further draw ions, and an ion optical system that focuses the ions drawn from the drawing electrode and causing the ions to enter the sample by optically manipulating the ions.
摘要翻译： 聚焦离子束装置包括等离子体发生器，其中具有等离子体焰炬，其允许等离子体在被保持在内部的同时流出;差动排气室，其通过炬孔连接到等离子体焰炬，以使等离子体流出的等离子体 等离子体焰炬以形成等离子体的超音速流动，在差动排气室处设置在面向炬孔的位置处以从等离子体的超音速流中吸引离子的抽吸孔，静电加速已经通过 拉伸孔以进一步拉伸离子;以及离子光学系统，其聚焦从拉伸电极吸取的离子并通过光学操作离子使离子进入样品。
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公开(公告)号：US07755065B2
公开(公告)日：2010-07-13
申请号：US12046987
申请日：2008-03-12
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J37/28 , H01J2237/006 , H01J2237/061 , H01J2237/0817 , H01J2237/182 , H01J2237/188 , H01J2237/31749
摘要： A focused ion beam apparatus includes a plasma generator having a plasma torch therein, which lets plasma flow out while being kept inside, a differential exhaust chamber that is connected to the plasma torch via the torch orifice to cause adiabatic expansion of the plasma flowing out of the plasma torch to form a supersonic flow of the plasma, a drawing orifice provided at the differential exhaust chamber at a position facing the torch orifice to draw ions from the supersonic flow of the plasma, a drawing electrode that electrostatically accelerates ions having passed through the drawing orifice to further draw ions, and an ion optical system that focuses the ions drawn from the drawing electrode and causing the ions to enter the sample by optically manipulating the ions.
摘要翻译： 聚焦离子束装置包括等离子体发生器，其中具有等离子体焰炬，其允许等离子体在被保持在内部的同时流出;差动排气室，其通过炬孔连接到等离子体焰炬，以使等离子体流出的等离子体 等离子体焰炬以形成等离子体的超音速流动，在差动排气室处设置在面向炬孔的位置处以从等离子体的超音速流中吸引离子的抽吸孔，静电加速已经通过 拉伸孔以进一步拉伸离子;以及离子光学系统，其聚焦从拉伸电极吸取的离子并通过光学操作离子使离子进入样品。
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