-
公开(公告)号：US20120031883A1
公开(公告)日：2012-02-09
申请号：US13264640
申请日：2010-05-14
申请人： Kenji Kumamoto , Yushi Takenaka , Kazuki Kuba , Toru Murai , Taira Ogita , Junichi Nishimae , Keisuke Furuta
发明人： Kenji Kumamoto , Yushi Takenaka , Kazuki Kuba , Toru Murai , Taira Ogita , Junichi Nishimae , Keisuke Furuta
CPC分类号： B23K26/38 , B23K26/0648 , B23K26/0665 , B23K26/073 , B23K2101/18 , B23K2103/04 , H01S2301/206
摘要： The machining device is equipped with a fiber laser oscillator for oscillating laser light of a top hat shape, and a light collecting lens and a machining head for collecting the laser light of the top hat shape and emitting the laser light onto a machining target such that the beam diameter of the laser light of the top hat shape at a position where light intensity becomes the one corresponding to a machining threshold of the machining target is about three times the size of the beam diameter of laser light in a Gaussian mode at the same position, when the laser light in the Gaussian mode has a beam quality substantially the same as that of the laser light of the top hat shape.
摘要翻译： 该加工装置配备有用于振荡顶帽形状的激光的光纤激光振荡器，以及聚光透镜和用于收集顶帽形状的激光并将激光发射到加工对象上的加工头，使得 在光强度成为与加工对象的加工阈值相对应的位置的顶帽形状的激光的光束直径为相同高斯模式的激光的光束直径的大小的三倍 当高斯模式的激光具有与顶帽形状的激光基本相同的光束质量时，
-
公开(公告)号：US5125001A
公开(公告)日：1992-06-23
申请号：US598622
申请日：1990-10-15
CPC分类号： H01S3/081 , H01S3/0606 , H01S3/08081 , H01S2301/20 , H01S2301/203 , H01S3/0407 , H01S3/08059 , H01S3/08072 , H01S3/08095 , H01S3/092
摘要： This invention relates to a solid laser device with a slab-shaped laser medium. One example of a solid laser device according to the invention, comprises: a slab-shaped laser medium having one pair of optically smooth surfaces confronting each other through the optical path; first and second mirrors arranged on the optical path in such a manner that the first and second mirrors are confronted with each other through the laser medium; a resonator which forms an unstable resonator in the direction of width of the laser medium, and a low order stable resonator in the direction of thickness of the laser medium; and laser beam emergence medium for taking a laser beam out of the a resonator and outputting the laser beam from the device. Another example comprises: a slab-shaped laser medium having a pair of optically smooth surfaces confronting each other through the optical path; first and second mirrors arranged on the optical path in such a manner that the first and second mirrors are confronted with each other through the laser medium; a resonator which forms unstable resonators in the direction of width of the laser medium and in the direction of thickness of the same; and laser beam emergence medium for taking a laser beam out of the a resonator and outputting the laser beam from the device. Accordingly, the solid laser devices can output a high power laser beam excellent in convergence, thus being applicable to precision laser machining operations.
摘要翻译： PCT No.PCT / JP90 / 00182 Sec。 371 1990年10月15日第 102（e）1990年10月15日日期PCT提交1990年2月15日PCT公布。 WO90 / 09690 PCT出版物 日本1990年8月23日。本发明涉及具有板状激光介质的固体激光装置。 根据本发明的固体激光装置的一个实例包括：具有通过光路彼此相对的一对光学平滑表面的板状激光介质; 第一和第二反射镜以这样的方式布置在光路上，使得第一和第二反射镜通过激光介质相互面对; 在激光介质的宽度方向上形成不稳定谐振器的谐振器，以及在激光介质的厚度方向上的低阶稳定谐振器; 以及用于将激光束从谐振器中取出并从该器件输出激光束的激光束出射介质。 另一实例包括：具有通过光路彼此面对的一对光学平滑表面的板状激光介质; 第一和第二反射镜以这样的方式布置在光路上，使得第一和第二反射镜通过激光介质相互面对; 谐振器，其在激光介质的宽度方向和其厚度方向上形成不稳定的谐振器; 以及用于将激光束从谐振器中取出并从该器件输出激光束的激光束出射介质。 因此，固体激光装置能够输出收敛性优异的高功率激光束，因此适用于精密激光加工操作。
-
公开(公告)号：US5479428A
公开(公告)日：1995-12-26
申请号：US339234
申请日：1994-11-10
CPC分类号： H01S3/0975 , H01S3/0315 , H01S3/041 , H01S3/0602 , H01S3/07 , H01S3/076
摘要： According to the present invention there is provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein discharge is obliquely generated within the rectangular section of a discharge space. There is also provided a laser apparatus with a pair of preliminary discharge excitation electrodes which can readily initiate discharge. There is further provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein provided is a pair of discharge excitation electrodes located in the major side direction of discharge space whose length is more than three times as long as that of minor side direction thereof. There is further provided a laser apparatus with a pair of discharge excitation electrodes whose dimension is smaller than that of a pair of dielectric plates, which apparatus can prevent undesirable discharge. There is also provided a laser apparatus with more than three discharge spaces at least one of which is given a lower electric field having the apparatus oscillate efficiently. There is further provided a laser apparatus with an improved oscillation efficiency wherein furnished are dielectric double pipes creating a substantially large discharge space.
摘要翻译： 根据本发明，提供一种能够以较低频率的激励电源进行有效振荡的激光装置，其特征在于，在放电空间的矩形截面内倾斜地产生放电。 还提供了具有一对可以容易地启动放电的初步放电激励电极的激光装置。 另外，还提供一种能够以较低频率的激励电源进行有效振荡的激光装置，其特征在于，设置有放电空间的长边方向的长度大于所述放电空间长度的三倍以上的一对放电激励电极 的小方向。 还提供一种具有一对放电激励电极的激光装置，其尺寸小于一对电介质板的尺寸，该装置可以防止不期望的放电。 还提供了具有三个以上放电空间的激光装置，其中至少一个放电空间被给予具有该装置有效振荡的较低电场。 还提供了具有改善的振荡效率的激光装置，其中所述的激光装置被设置为产生基本上大的放电空间的电介质双管。
-
公开(公告)号：US5373528A
公开(公告)日：1994-12-13
申请号：US7231
申请日：1993-01-21
CPC分类号： H01S3/0975 , H01S3/0315 , H01S3/041 , H01S3/0602 , H01S3/07 , H01S3/076
摘要： According to the present invention there is provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein discharge is obliquely generated within the rectangular section of a discharge space. There is also provided a laser apparatus with a pair of preliminary discharge excitation electrodes which can readily initiate discharge. There is further provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein provided is a pair of discharge excitation electrodes located in the major side direction of discharge space whose length is more than three times as long as that of minor side direction thereof. There is further provided a laser apparatus with a pair of discharge excitation electrodes whose dimension is smaller than that of a pair of dielectric plates, which apparatus can prevent undesirable discharge. There is also provided a laser apparatus with more than three discharge spaces at least one of which is given a lower electric field having the apparatus oscillate efficiently. There is further provided a laser apparatus with an improved oscillation efficiency wherein furnished are dielectric double pipes creating a substantially large discharge space.
摘要翻译： 根据本发明，提供一种能够以较低频率的激励电源进行有效振荡的激光装置，其特征在于，在放电空间的矩形截面内倾斜地产生放电。 还提供了具有一对可以容易地启动放电的初步放电激励电极的激光装置。 另外，还提供一种能够以较低频率的激励电源进行有效振荡的激光装置，其特征在于，设置有放电空间的长边方向的长度大于所述放电空间长度的三倍以上的一对放电激励电极 的小方向。 还提供一种具有一对放电激励电极的激光装置，其尺寸小于一对电介质板的尺寸，该装置可以防止不期望的放电。 还提供了具有三个以上放电空间的激光装置，其中至少一个放电空间被给予具有该装置有效振荡的较低电场。 还提供了具有改善的振荡效率的激光装置，其中所述的激光装置被设置为产生基本上大的放电空间的电介质双管。
-
公开(公告)号：US5586139A
公开(公告)日：1996-12-17
申请号：US525198
申请日：1995-09-08
申请人： Yushi Takenaka , Masaki Kuzumoto , Kenji Yoshizawa , Takashi Yamamoto , Masato Matsubara , Junichi Nishimae , Koji Yasui , Akihiro Otani
发明人： Yushi Takenaka , Masaki Kuzumoto , Kenji Yoshizawa , Takashi Yamamoto , Masato Matsubara , Junichi Nishimae , Koji Yasui , Akihiro Otani
IPC分类号： B23K26/06 , H01S3/036 , H01S3/06 , H01S3/07 , H01S3/08 , H01S3/0975 , H01S3/098 , H01S3/13 , H01S3/23 , H01S3/139
CPC分类号： B23K26/0608 , B23K26/06 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , B23K26/123 , H01S3/08059 , H01S3/036 , H01S3/076 , H01S3/08068 , H01S3/0975 , H01S3/2366
摘要： A laser system wherein, in order that a high-output and high-quality single mode of a cross sectional area larger than the beam diameter determined by the construction of a resonator can be obtained stably, although this has heretofore been impossible, there is used a coupling mirror provided with a partial reflection film and an antireflecting film, a laser beam mode is selected using the partial reflection film, a phase difference between laser beam portions caused by a difference in construction between the partial reflection film and the antireflecting film is compensated using a phase difference compensating means, and there is formed an aperture whose diameter is set to a value of not larger than four times the diameter of the partial reflection film.
摘要翻译： 一种激光系统，其中为了稳定地获得横截面积大于通过谐振器结构确定的光束直径的高输出和高质量的单一模式，尽管迄今为止已经不可能使用 设置有部分反射膜和抗反射膜的耦合镜，使用部分反射膜选择激光束模式，补偿由部分反射膜和抗反射膜之间的结构差引起的激光束部分之间的相位差 使用相位差补偿装置，并且形成直径设定为不大于部分反射膜的直径的四倍的孔径。
-
公开(公告)号：US5506858A
公开(公告)日：1996-04-09
申请号：US121347
申请日：1993-09-15
申请人： Yushi Takenaka , Masaki Kuzumoto , Kenji Yoshizawa , Takashi Yamamoto , Masato Matsubara , Junichi Nishimae , Koji Yasui , Akihiro Otani
发明人： Yushi Takenaka , Masaki Kuzumoto , Kenji Yoshizawa , Takashi Yamamoto , Masato Matsubara , Junichi Nishimae , Koji Yasui , Akihiro Otani
IPC分类号： B23K26/06 , H01S3/036 , H01S3/06 , H01S3/07 , H01S3/08 , H01S3/0975 , H01S3/098 , H01S3/13 , H01S3/23 , H01S3/139
CPC分类号： B23K26/0608 , B23K26/06 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , B23K26/123 , H01S3/08059 , H01S3/036 , H01S3/076 , H01S3/08068 , H01S3/0975 , H01S3/2366
摘要： A laser system wherein, in order that a high-output and high-quality single mode of a cross sectional area larger than the beam diameter determined by the construction of a resonator can be obtained stably, although this has heretofore been impossible, there is used a coupling mirror provided with a partial reflection film and an antireflecting film, a laser beam mode is selected using the partial reflection film, a phase difference between laser beam portions caused by a difference in construction between the partial reflection film and the antireflecting film is compensated using a phase difference compensating apparatus, and there is formed an aperture whose diameter is set to a value of not larger than four times the diameter of the partial reflection film.
摘要翻译： 一种激光系统，其中为了稳定地获得横截面积大于通过谐振器结构确定的光束直径的高输出和高质量的单一模式，尽管迄今为止已经不可能使用 设置有部分反射膜和抗反射膜的耦合镜，使用部分反射膜选择激光束模式，补偿由部分反射膜和抗反射膜之间的结构差引起的激光束部分之间的相位差 使用相位差补偿装置，形成直径设定为不大于部分反射膜直径的4倍的孔径。
-
公开(公告)号：US20100163537A1
公开(公告)日：2010-07-01
申请号：US12594733
申请日：2008-04-04
申请人： Keisuke FURUTA , Susumu Konno , Masaki Seguchi , Junichi Nishimae
发明人： Keisuke FURUTA , Susumu Konno , Masaki Seguchi , Junichi Nishimae
IPC分类号： B23K26/00
CPC分类号： G02B6/266 , B23K26/066 , B23K26/38 , G02B6/02066 , G02B6/03622 , G02B6/243 , G02B6/262 , G02B6/32 , G02B6/4296 , H01S3/0675 , H01S3/2383
摘要： A laser machining device includes a laser oscillator, a laser machining head, an optical fiber transmitting the laser beam oscillated by the laser oscillator to the laser machining head, and an assist gas supply supplying an assist gas of oxygen to the laser machining head. The optical fiber includes a remover removing a clad transmitting beam or reducer for reducing the beam. The laser beam leaked from the core of the optical fiber into the clad is absorbed by a beam absorber at the remover. The structure ensures a high quality surface with no irregularity on the metal surface cut by the laser beam projected from the machining head.
摘要翻译： 激光加工装置包括激光振荡器，激光加工头，将由激光振荡器振荡的激光束传输到激光加工头的光纤，以及向激光加工头供应氧辅助气体的辅助气体供给。 光纤包括去除用于减小光束的包层发射光束或减光器的去除器。 从光纤的核心泄漏到包层中的激光束被去除剂上的吸收体吸收。 该结构确保了由加工头突出的激光束切割的金属表面上没有不规则性的高质量表面。
-
8.发明授权Optical system and apparatus for laser heat treatment and method for producing semiconductor devices by using the same 有权用于激光热处理的光学系统和设备以及使用该半导体器件的半导体器件的制造方法公开(公告)号：US06437284B1
公开(公告)日：2002-08-20
申请号：US09599645
申请日：2000-06-23
申请人： Tatsuki Okamoto , Tetsuya Ogawa , Keisuke Furuta , Hidetada Tokioka , Tomohiro Sasagawa , Junichi Nishimae , Mitsuo Inoue , Yukio Sato
发明人： Tatsuki Okamoto , Tetsuya Ogawa , Keisuke Furuta , Hidetada Tokioka , Tomohiro Sasagawa , Junichi Nishimae , Mitsuo Inoue , Yukio Sato
IPC分类号： B23K2606
CPC分类号： B23K26/0732 , B23K2101/40 , H01L21/02675 , H01L21/2026
摘要： An optical system that controls laser beam spot profile for forming a high performance thin film by a laser heat treatment process is provided. In the optical system that irradiates a rectangular laser beam on a film formed on a substrate, intensity distribution forming, apparatus makes the intensity distribution uniform in the longitudinal direction while maintaining the properties of the laser beam 2 such as directivity in the direction of shorter side, making it possible to concentrate the light to a limit permitted by the nature of the laser beam and achieve the maximum intensity gradient on the film disposed on the substrate. Thus a steep temperature distribution can be generated on the film disposed on the substrate and, as a result, high performance thin film can be formed.
摘要翻译： 提供了通过激光热处理工艺控制用于形成高性能薄膜的激光束光斑轮廓的光学系统。 在形成在基板上的膜上照射矩形激光束的光学系统中，强度分布形成装置使得强度分布沿长度方向均匀，同时保持激光束2的特性，例如沿短边方向的方向性 ，使得可以将光集中到由激光束的性质允许的极限，并且在设置在基板上的膜上实现最大强度梯度。 因此，可以在设置在基板上的膜上产生陡峭的温度分布，结果，可以形成高性能的薄膜。
-
公开(公告)号：US5392309A
公开(公告)日：1995-02-21
申请号：US120754
申请日：1993-09-15
IPC分类号： H01S3/08
CPC分类号： H01S3/08081
摘要： A laser apparatus includes an unstable resonator having a total reflection mirror and a take-out mirror, and further includes shading means for shading a disturbed phase portion of a laser beam so as to derive exclusively a light having a uniform phase by shading the disturbed phase portion of the beam emitted from the resonator or the beam in the resonator.
摘要翻译： 激光装置包括具有全反射镜和取出镜的不稳定谐振器，并且还包括用于遮蔽激光束的干涉相位部分的遮蔽装置，以便仅通过遮蔽干扰相位而导出具有均匀相位的光 从谐振器或谐振器中的光束发射的光束的部分。
-
公开(公告)号：US08885684B2
公开(公告)日：2014-11-11
申请号：US14123903
申请日：2011-06-20
CPC分类号： H01S3/041 , H01S3/03 , H01S3/036 , H01S3/076 , H01S3/081 , H01S3/0816 , H01S3/0971 , H01S3/2232
摘要： A CO2 gas laser device according to the present invention amplifies CO2 laser light that oscillates repeatedly in short pulses having a pulse width of 100 ns or less, and cools a CO2 laser gas which is excited by continuous discharge by circulating the CO2 laser gas by means of forced convection. Therein, an angle θ defined by the optical axis of the amplified CO2 laser beam and the flow direction of the CO2 laser gas caused by the forced convection is determined by both a discharge cross sectional area and a discharge length of a volume in which the CO2 laser gas is excited by discharge, whereby increasing the gain of pulsed laser to achieve pulsed laser light having an extremely high average output power.
摘要翻译： 根据本发明的二氧化碳气体激光装置放大以脉冲宽度为100ns以下的短脉冲重复振荡的CO 2激光，并通过循环CO 2激光气体的方式冷却通过连续放电而激发的CO 2激光气体 的强制对流。 其中，角度和角度; 由放大的CO 2激光束的光轴限定，并且由强制对流引起的CO 2激光气体的流动方向由放电截面积和其中激发CO 2激光气体的体积的放电长度 从而增加脉冲激光器的增益以实现具有极高平均输出功率的脉冲激光。
-
-
-
-
-
-
-
-
-
搜索结果
40 条记录 (耗时 0.025 秒)