公开(公告)号：US20240188307A1

公开(公告)日：2024-06-06

申请号：US18441204

申请日：2024-02-14

申请人： Kioxia Corporation

发明人： Masahiro KIYOTOSHI ,  Akihito YAMAMOTO ,  Yoshio OZAWA ,  Fumitaka ARAI ,  Riichiro SHIROTA

IPC分类号： H10B63/00 ,  H01L21/02 ,  H01L21/28 ,  H01L21/306 ,  H01L21/3105 ,  H01L21/321 ,  H01L21/3213 ,  H01L21/762 ,  H01L27/105 ,  H01L29/51 ,  H10B43/27 ,  H10B43/30 ,  H10B43/35 ,  H10B43/40 ,  H10B69/00 ,  H10B99/00 ,  H10N70/00 ,  H10N70/20

CPC分类号： H10B63/845 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/30604 ,  H01L21/31055 ,  H01L21/3212 ,  H01L21/32136 ,  H01L21/762 ,  H01L27/105 ,  H01L29/40117 ,  H01L29/513 ,  H01L29/518 ,  H10B43/27 ,  H10B43/30 ,  H10B43/35 ,  H10B43/40 ,  H10B63/00 ,  H10B63/20 ,  H10B63/30 ,  H10B69/00 ,  H10B99/00 ,  H10N70/021 ,  H10N70/231 ,  H10N70/801 ,  H10N70/882 ,  H10N70/028 ,  H10N70/20 ,  H10N70/823 ,  H10N70/8413 ,  H10N70/8828 ,  H10N70/8833

摘要： A semiconductor memory includes a plurality of stripe-like active areas formed by stacking, in a direction perpendicular to a substrate, a plurality of layers extending parallel to the substrate, a first gate electrode formed on first side surfaces of the active areas, the first side surfaces being perpendicular to the substrate, a second gate electrode formed on second side surfaces of the active areas, the second side surfaces being perpendicular to the substrate. The layers are patterned in self-alignment with each other, intersections of the active areas and the first gate electrode form a plurality of memory cells, and the plurality of memory cells in an intersecting plane share the first gate electrode.