Thermally actuated optical fiber switch
    1.
    发明授权
    Thermally actuated optical fiber switch 失效
    热致动光纤开关

    公开(公告)号:US5446811A

    公开(公告)日:1995-08-29

    申请号:US212543

    申请日:1994-03-14

    Abstract: A micromachined device for selectively switching an optical fiber between a first and a second position includes a working leg that undergoes a greater degree of thermal expansion than a second leg with the conduction of an electrical current through the two legs. In a preferred embodiment, the working leg has a cross-sectional area that is less than that of the second leg, thereby presenting a greater electrical resistance to the current flow. The legs are each fixed to a substrate at first ends and are interconnected at second ends that are free to move relative to the substrate. The difference in electrical resistance provides a differential in thermal expansion, as the working leg lengthens to a greater degree than the second leg. The working leg deforms the second leg and the optical fiber is pressed into a second position until current flow is terminated. In another embodiment, the differential in thermal expansion is created by ensuring that the second leg has less thermal isolation from the substrate than the thermal isolation of the working leg from the substrate.

    Abstract translation: 用于在第一位置和第二位置之间选择性地切换光纤的微机械加工装置包括经过两条腿的电流传导而经受比第二腿部更大程度的热膨胀的工作腿部。 在优选实施例中,工作腿的横截面积小于第二腿的横截面积,从而对电流呈现更大的电阻。 腿在第一端各自固定到基底,并且在相对于基底自由移动的第二端处互连。 电阻的差异提供了热膨胀的差异,因为工作腿比第二条腿更大程度地延长。 工作腿使第二腿变形,并将光纤压入第二位置,直到电流流动终止。 在另一个实施例中,热膨胀差异是通过确保第二支腿与工作支脚与基板的热隔离相比具有比基板更小的热隔离来产生的。

    Thermally actuated micromachined microwave switch
    2.
    发明授权
    Thermally actuated micromachined microwave switch 失效
    热力微加工微波开关

    公开(公告)号:US5467067A

    公开(公告)日:1995-11-14

    申请号:US212544

    申请日:1994-03-14

    CPC classification number: H01H61/04 H01H1/0036 H01P1/10 H01H2061/006

    Abstract: An integration of a micromachined actuator and a signal transmission structure includes a thermal actuator on a side of a displaceable signal line opposite to a fixed signal line. The actuator includes first and second legs. The first leg has a cross-sectional area greater than the second leg, providing a differential in electrical resistance. As current is channeled through the legs, the second leg will elongate more and will deflect both of the legs. The deflection is in a direction to press the displaceable signal line into signal communication with the fixed signal line. Optionally, a thermally operated reset actuator can be positioned to provide a mechanical return of the displaceable signal line. In a preferred embodiment, a microwave transmission environment is provided.

    Abstract translation: 微加工致动器和信号传输结构的集成包括在与固定信号线相对的位移信号线的一侧上的热致动器。 致动器包括第一和第二腿。 第一支腿具有大于第二支腿的横截面积,提供电阻差。 当电流通过腿部引导时,第二条腿将伸长并且将使两条腿偏转。 偏转方向将可移动信号线按压到与固定信号线的信号通信。 可选地,热操作的复位致动器可以被定位成提供可移位信号线的机械返回。 在优选实施例中,提供微波传输环境。

    Micromachined bi-material signal switch
    3.
    发明授权
    Micromachined bi-material signal switch 失效
    微加工双材料信号开关

    公开(公告)号:US5467068A

    公开(公告)日:1995-11-14

    申请号:US271811

    申请日:1994-07-07

    CPC classification number: H01H1/0036 H01H1/18 H01H1/20 H01H2061/006 H01H61/04

    Abstract: A micromachined signal switch for vertical displacement includes a fixed substrate having at least one signal line and includes an actuator substrate that is thermally actuated to selectively connect a second signal line to the first signal line. The actuator substrate includes a plurality of legs constructed of materials having sufficiently different coefficients of thermal expansion to create stresses that arc the legs when the legs are subjected to elevated temperatures. In the preferred embodiment, a first material for forming the legs is silicon and a second material is a metal, such as electroplated nickel. A displaceable contact region may be formed integrally with the actuator substrate, but the contact region is preferably a region of an interposer substrate between the fixed substrate and the actuator substrate. The displaceable contact region has a raised position in which the signal line on the fixed substrate is "off" and has a lowered position in which a conductive member on the contact region is positioned to provide electrical communication to the signal line.

    Abstract translation: 用于垂直位移的微加工信号开关包括具有至少一个信号线的固定基板,并且包括热致动以便将第二信号线选择性地连接到第一信号线的致动器基板。 致动器基板包括由具有足够不同的热膨胀系数的材料构成的多个腿,以在腿受到升高的温度时产生围绕腿的应力。 在优选实施例中,用于形成腿部的第一材料是硅,第二材料是诸如电镀镍的金属。 可移动接触区域可以与致动器基板一体地形成,但是接触区域优选地是固定基板和致动器基板之间的插入物基板的区域。 可移动接触区域具有升高位置,其中固定基板上的信号线“断开”并且具有降低位置,在该位置中接触区域上的导电部件位于其中以提供与信号线的电通信。

    Temperature controlled acoustic resonator
    5.
    发明授权
    Temperature controlled acoustic resonator 有权
    温度控制声谐振器

    公开(公告)号:US09154103B2

    公开(公告)日:2015-10-06

    申请号:US13361724

    申请日:2012-01-30

    Inventor: Richard C. Ruby

    CPC classification number: H03H9/172 H03H3/02 H03H9/02102 H03H9/08 H03H9/54

    Abstract: An acoustic resonator device includes an annular acoustic resonator, a heater coil and a heat sensor. The annular acoustic resonator is positioned over a trench formed in a substrate of the acoustic resonator device. The heater coil is disposed around a perimeter of the annular acoustic resonator, the heater coil including a resistor configured to receive a heater current. The heat sensor is configured to adjust the heater current in response to a temperature of the heater coil.

    Abstract translation: 声谐振器装置包括环形声谐振器,加热器线圈和热传感器。 环形声谐振器位于形成在声谐振器装置的衬底中的沟槽之上。 加热器线圈围绕环形声谐振器的周边设置,加热器线圈包括被配置为接收加热器电流的电阻器。 热传感器被配置为响应于加热器线圈的温度来调节加热器电流。

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