公开(公告)号：US07172184B2

公开(公告)日：2007-02-06

申请号：US10912348

申请日：2004-08-04

申请人： Luca Pavani ,  Neil Kaminar ,  Pongsthorn Uralwong ,  Thomas Phu ,  Douglas H. Rose ,  Thomas Pass

发明人： Luca Pavani ,  Neil Kaminar ,  Pongsthorn Uralwong ,  Thomas Phu ,  Douglas H. Rose ,  Thomas Pass

IPC分类号： B25B11/02 ,  C25D17/06

CPC分类号： C25D17/08 ,  H01L21/2885 ,  Y10S269/90

摘要： A carrier for use in processing of a plurality of wafers or other substrates includes a support frame on which the wafers are mounted and in one embodiment at least one auxiliary frame for holding the substrates on the support frame. A plurality of clips extend from the auxiliary frame and engage the substrates in pressure engagement, and fasteners retain the auxiliary frame in position with respect to the support frame. In one embodiment two auxiliary frames can be employed for holding wafers on opposing surfaces of the support frame. The support frame has electrically non-conducting surfaces whereby the processing does not affect the support frame, and the auxiliary frame is made of electrically non-conductive material. The clips are electrically conductive and bridge current from the support frame to the wafers during plating operations. In another embodiment, auxiliary frame are not used and the wafer retention clips are mounted on the support frame. In use, the carrier can support a high number of units for processing with no significant mechanical stress being transferred to the wafers during loading and unloading from the carrier. The carriers and wafers can be transferred easily for different chemical baths and can be handled safely during rinsing and drying steps.

摘要翻译： 用于处理多个晶片或其它基板的载体包括其上安装晶片的支撑框架，并且在一个实施例中，至少一个用于将基板保持在支撑框架上的辅助框架。 多个夹子从辅助框架延伸并且以压力接合方式接合基板，并且紧固件将辅助框架相对于支撑框架保持在适当的位置。 在一个实施例中，可以使用两个辅助框架来将晶片保持在支撑框架的相对表面上。 支撑框架具有非导电表面，由此该处理不影响支撑框架，并且辅助框架由非导电材料制成。 在电镀操作期间，夹子是导电的并且桥接电流从支撑框架到晶片。 在另一个实施例中，不使用辅助框架，并且将晶片固定夹安装在支撑框架上。 在使用中，载体可以支撑大量用于加工的单元，在从载体装载和卸载期间，没有明显的机械应力转移到晶片。 载体和晶片可以容易地转移到不同的化学浴中，并且可以在漂洗和干燥步骤期间安全地处理。

公开(公告)号：US20050061665A1

公开(公告)日：2005-03-24

申请号：US10912348

申请日：2004-08-04

申请人： Luca Pavani ,  Neil Kaminar ,  Pongsthorn Uralwong ,  Thomas Phu ,  Douglas Rose ,  Thomas Pass

发明人： Luca Pavani ,  Neil Kaminar ,  Pongsthorn Uralwong ,  Thomas Phu ,  Douglas Rose ,  Thomas Pass

IPC分类号： C25D17/06 ,  C25D17/08 ,  H01L20060101 ,  H01L21/288

CPC分类号： C25D17/08 ,  H01L21/2885 ,  Y10S269/90

摘要： A carrier for use in processing of a plurality of wafers or other substrates includes a support frame on which the wafers are mounted and in one embodiment at least one auxiliary frame for holding the substrates on the support frame. A plurality of clips extend from the auxiliary frame and engage the substrates in pressure engagement, and fasteners retain the auxiliary frame in position with respect to the support frame. In one embodiment two auxiliary frames can be employed for holding wafers on opposing surfaces of the support frame. The support frame has electrically non-conducting surfaces whereby the processing does not affect the support frame, and the auxiliary frame is made of electrically non- conductive material. The clips are electrically conductive and bridge current from the support frame to the wafers during plating operations. In another embodiment, auxiliary frame are not used and the wafer retention clips are mounted on the support frame. In use, the carrier can support a high number of units for processing with no significant mechanical stress being transferred to the wafers during loading and unloading from the carrier. The carriers and wafers can be transferred easily for different chemical baths and can be handled safely during rinsing and drying steps.

摘要翻译： 用于处理多个晶片或其它基板的载体包括其上安装晶片的支撑框架，并且在一个实施例中，至少一个用于将基板保持在支撑框架上的辅助框架。 多个夹子从辅助框架延伸并且以压力接合方式接合基板，并且紧固件将辅助框架相对于支撑框架保持在适当的位置。 在一个实施例中，可以使用两个辅助框架来将晶片保持在支撑框架的相对表面上。 支撑框架具有非导电表面，由此处理不影响支撑框架，辅助框架由非导电材料制成。 在电镀操作期间，夹子是导电的并且桥接电流从支撑框架到晶片。 在另一个实施例中，不使用辅助框架，并且将晶片固定夹安装在支撑框架上。 在使用中，载体可以支撑大量用于加工的单元，在从载体装载和卸载期间，没有明显的机械应力转移到晶片。 载体和晶片可以容易地转移到不同的化学浴中，并且可以在漂洗和干燥步骤期间安全地处理。

公开(公告)号：US20050022862A1

公开(公告)日：2005-02-03

申请号：US10633212

申请日：2003-08-01

申请人： Michael Cudzinovic ,  Neil Kaminar ,  Luca Pavani ,  David Smith

发明人： Michael Cudzinovic ,  Neil Kaminar ,  Luca Pavani ,  David Smith

IPC分类号： H01L21/308 ,  H01L31/18 ,  H01L31/00

CPC分类号： H01L31/1804 ,  H01L21/3086 ,  H01L31/0682 ,  Y02E10/547 ,  Y02P70/521

摘要： In one embodiment, a solar cell is fabricated using an ink pattern as a mask for a processing step. The ink pattern may comprise an ink that is substantially devoid of particles that may scratch a surface on which the ink pattern is formed. The ink pattern may be formed by screen printing. In one embodiment, the ink pattern is formed on an oxide layer and comprises an ink that is substantially free of silicon dioxide particles. The ink pattern may be employed as an etching or deposition mask, for example.

摘要翻译： 在一个实施例中，使用油墨图案作为处理步骤的掩模制造太阳能电池。 油墨图案可以包括基本上没有可能划伤形成油墨图案的表面的颗粒的油墨。 油墨图案可以通过丝网印刷形成。 在一个实施例中，油墨图案形成在氧化物层上并且包括基本上不含二氧化硅颗粒的油墨。 油墨图案可以用作例如蚀刻或沉积掩模。

公开(公告)号：US20090202745A1

公开(公告)日：2009-08-13

申请号：US12069043

申请日：2008-02-07

申请人： Luca Pavani ,  Emmanuel Abas

发明人： Luca Pavani ,  Emmanuel Abas

IPC分类号： H05B6/00 ,  C23C14/00

CPC分类号： B05D1/002 ,  B05C1/006 ,  B05C1/0873 ,  B05C13/02 ,  B05D1/28 ,  H01L21/30 ,  H01L31/02161 ,  H01L31/186 ,  Y02E10/50 ,  Y02P70/521

摘要： A non-contact edge coating apparatus includes an applicator for applying a coating material on an edge of a solar cell substrate and a control system configured to drive the applicator. The control system may drive the applicator along an axis to maintain a distance with an edge of the substrate as the substrate is rotated to have the edge coated with a coating material. The applicator may include a recessed portion into which the edge of the substrate is received for edge coating. For example, the applicator may be a roller with a groove. Coating material may be introduced into the groove for application onto the edge of the substrate. A variety of coating materials may be employed with the apparatus including hot melt ink and UV curable plating resist.

摘要翻译： 非接触式边缘涂覆装置包括用于在太阳能电池基板的边缘上涂覆涂料的涂布器和构造成驱动涂布器的控制系统。 控制系统可以沿着轴线驱动施加器，以在衬底旋转以使其边缘涂覆有涂层材料的同时保持与衬底的边缘的距离。 施加器可以包括凹入部分，其中接收衬底的边缘用于边缘涂覆。 例如，施加器可以是具有凹槽的辊。 可以将涂料引入凹槽中以施加到基底的边缘上。 可以使用各种涂料，该装置包括热熔油墨和UV固化电镀抗蚀剂。

公开(公告)号：US08322300B2

公开(公告)日：2012-12-04

申请号：US12069043

申请日：2008-02-07

申请人： Luca Pavani ,  Emmanuel Abas

发明人： Luca Pavani ,  Emmanuel Abas

IPC分类号： B05B13/02 ,  B05C5/00 ,  B05D5/00 ,  B05D5/12

CPC分类号： B05D1/002 ,  B05C1/006 ,  B05C1/0873 ,  B05C13/02 ,  B05D1/28 ,  H01L21/30 ,  H01L31/02161 ,  H01L31/186 ,  Y02E10/50 ,  Y02P70/521

摘要： A non-contact edge coating apparatus includes an applicator for applying a coating material on an edge of a solar cell substrate and a control system configured to drive the applicator. The control system may drive the applicator along an axis to maintain a distance with an edge of the substrate as the substrate is rotated to have the edge coated with a coating material. The applicator may include a recessed portion into which the edge of the substrate is received for edge coating. For example, the applicator may be a roller with a groove. Coating material may be introduced into the groove for application onto the edge of the substrate. A variety of coating materials may be employed with the apparatus including hot melt ink and UV curable plating resist.

摘要翻译： 非接触式边缘涂覆装置包括用于在太阳能电池基板的边缘上涂覆涂料的涂布器和构造成驱动涂布器的控制系统。 控制系统可以沿着轴线驱动施加器，以在衬底旋转以使其边缘涂覆有涂层材料的同时保持与衬底的边缘的距离。 施加器可以包括凹入部分，其中接收衬底的边缘用于边缘涂覆。 例如，施加器可以是具有凹槽的辊。 可以将涂料引入凹槽中以施加到基底的边缘上。 可以使用各种涂料，该装置包括热熔油墨和UV固化电镀抗蚀剂。

公开(公告)号：US08662008B2

公开(公告)日：2014-03-04

申请号：US12069030

申请日：2008-02-07

申请人： Emmanuel Abas ,  Luca Pavani

发明人： Emmanuel Abas ,  Luca Pavani

IPC分类号： B05B13/02 ,  B05C5/00 ,  B05D5/00 ,  B05D5/12

CPC分类号： B05C1/0804 ,  B05C1/006 ,  B05C1/0808 ,  B05C1/0813 ,  B05C1/0821 ,  B05C9/10 ,  B05C11/1021 ,  B05C13/02 ,  H01L31/02161 ,  H01L31/186 ,  Y02E10/50 ,  Y02P70/521

摘要： A non-contact edge coating apparatus applies coating material to an edge of a non-circular solar cell substrate without physical contact. The apparatus may include a rotatable substrate support configured to hold the substrate. The apparatus may further include an applicator configured to receive a coating material and apply the coating material to an edge of the substrate while the substrate is rotated without any portion of the applicator physically touching the edge of the substrate. The substrate support may be mechanically coupled to a cam, which contacts a follower mechanically coupled to the applicator. A variety of coating materials may be employed with the apparatus including hot melt ink and UV curable plating resist.

摘要翻译： 非接触边缘涂覆装置将涂层材料施加到非圆形太阳能电池基板的边缘，而无需物理接触。 该设备可以包括被配置为保持衬底的可旋转衬底支撑件。 该设备还可以包括施用器，其构造成接收涂层材料并将涂层材料施加到衬底的边缘，同时衬底旋转而没有施加器的任何部分物理地接触衬底的边缘。 衬底支撑件可以机械地联接到凸轮，该凸轮接触机械地联接到施加器的随动件。 可以使用各种涂料，该装置包括热熔油墨和UV固化电镀抗蚀剂。

公开(公告)号：US20090202727A1

公开(公告)日：2009-08-13

申请号：US12069030

申请日：2008-02-07

申请人： Emmanuel Abas ,  Luca Pavani

发明人： Emmanuel Abas ,  Luca Pavani

IPC分类号： B05D5/00 ,  B05C5/00

CPC分类号： B05C1/0804 ,  B05C1/006 ,  B05C1/0808 ,  B05C1/0813 ,  B05C1/0821 ,  B05C9/10 ,  B05C11/1021 ,  B05C13/02 ,  H01L31/02161 ,  H01L31/186 ,  Y02E10/50 ,  Y02P70/521

摘要： A non-contact edge coating apparatus applies coating material to an edge of a non-circular solar cell substrate without physical contact. The apparatus may include a rotatable substrate support configured to hold the substrate. The apparatus may further include an applicator configured to receive a coating material and apply the coating material to an edge of the substrate while the substrate is rotated without any portion of the applicator physically touching the edge of the substrate. The substrate support may be mechanically coupled to a cam, which contacts a follower mechanically coupled to the applicator. A variety of coating materials may be employed with the apparatus including hot melt ink and UV curable plating resist.

摘要翻译： 非接触边缘涂覆装置将涂层材料施加到非圆形太阳能电池基板的边缘，而无需物理接触。 该设备可以包括被配置为保持衬底的可旋转衬底支撑件。 该设备还可以包括施用器，其构造成接收涂层材料并将涂层材料施加到衬底的边缘，同时衬底旋转而没有施加器的任何部分物理地接触衬底的边缘。 衬底支撑件可以机械地联接到凸轮，该凸轮接触机械地联接到施加器的随动件。 可以使用各种涂料，该装置包括热熔油墨和UV固化电镀抗蚀剂。

公开(公告)号：US20090092745A1

公开(公告)日：2009-04-09

申请号：US11973094

申请日：2007-10-05

申请人： Luca Pavani ,  Bo Li

发明人： Luca Pavani ,  Bo Li

IPC分类号： B05D5/12 ,  C09K3/00

CPC分类号： H01L31/0288 ,  C30B29/06 ,  C30B31/04 ,  C30B31/185 ,  H01L21/2225 ,  H01L21/2254 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： One embodiment relates to a dopant material for manufacturing solar cells. The dopant material includes a primary carrier and a dopant system. The primary carrier is a solid at a lower temperature, a liquid at an elevated temperature, and decomposes at a third temperature higher than the elevated temperature. The dopant material is dispensible in a controlled manner at the elevated temperature to a defined area of a silicon substrate at the lower temperature. The dopant system includes a dopant carrier and dopant source. The dopant source is stable at the third temperature. Other embodiments, aspects and features are also disclosed.

摘要翻译： 一个实施方案涉及用于制造太阳能电池的掺杂剂材料。 掺杂剂材料包括初级载体和掺杂剂系统。 主载体在较低温度下为固体，在升高的温度下为液体，并在高于升高温度的第三温度下分解。 掺杂剂材料以可控的方式在较高温度下以可控的方式分配到较低温度下的硅衬底的限定区域。 掺杂剂系统包括掺杂剂载体和掺杂剂源。 掺杂剂源在第三温度下是稳定的。 还公开了其它实施例，方面和特征。