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公开(公告)号:US20170088415A1
公开(公告)日:2017-03-30
申请号:US14872123
申请日:2015-09-30
Applicant: MEMS DRIVE, INC.
Inventor: ROMAN GUTIERREZ , TONY TANG , XIAOLEI LIU , GUIQIN WANG , MATTHEW NG
CPC classification number: H01L21/76816 , B81B3/0045 , B81B7/0029 , B81B2203/0353 , B81C1/00674 , B81C1/00682 , B81C2201/0112 , B81C2201/0135 , H01L21/768 , H01L21/76898 , H01L23/485 , H01L2924/00 , H01L2924/00014 , H01L2924/0002 , H01L2924/1461 , H01L2924/181
Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.
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公开(公告)号:US20170040909A1
公开(公告)日:2017-02-09
申请号:US14818086
申请日:2015-08-04
Applicant: MEMS DRIVE, INC.
Inventor: XIAOLEI LIU , ROMAN GUTIERREZ , MATTHEW NG , GUIQIN WANG
IPC: H02N1/00
CPC classification number: H02N1/008
Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.
Abstract translation: 提供了一种装置。 该装置包括双向梳驱动致动器。 该装置还可以包括悬臂。 悬臂包括连接到双向梳状驱动致动器的第一端和连接到内框架的第二端。 此外,悬臂可以包括用于布置电信号的第一和第二导电层。 可以包括多维致动器的所公开的装置的实施例允许将更多数量的电信号路由到致动器。 此外,所公开的设备允许致动多个方向,这可以提供增加的控制,精确度和运动的灵活性。 因此,所公开的实施例提供了关于光学图像稳定和自动聚焦能力的显着益处,例如在尺寸和功率受限的环境中。
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公开(公告)号:US20150321900A1
公开(公告)日:2015-11-12
申请号:US14677730
申请日:2015-04-02
Applicant: MEMS DRIVE, INC.
Inventor: XIAOLEI LIU , ROMAN GUTIERREZ , GUIQIN WANG , BENSON MAI , MATTHEW NG
IPC: B81B3/00
CPC classification number: B81B3/0051 , B81B3/007 , B81B2203/0163 , Y10T74/20
Abstract: A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.
Abstract translation: 挠性件包括连接到第一框架的支撑件第一端; 连接到第二框架的支撑件第二端; 以及将第一支撑端连接到第二支撑端的弯曲部分。 挠曲的长度基本上大于其宽度,并且挠曲件的宽度基本上大于其厚度。 在操作过程中,挠曲保持在弯曲状态,其中挠曲刚度明显小于未弯曲状态。 在一个实施方案中,舞台包括接合第一框架和第二框架的挠曲阵列,其中:第一框架和第二框架基本上在平面上; 弯曲阵列在由弯曲阵列的挠曲弯曲之前基本上在平面上; 并且挠曲阵列在由弯曲部弯曲之后基本上被弯曲成平面。
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公开(公告)号:US20170359003A1
公开(公告)日:2017-12-14
申请号:US15182389
申请日:2016-06-14
Applicant: MEMS DRIVE, INC.
Inventor: XIAOLEI LIU , KEGANG HUANG , GUIQIN WANG , MATTHEW NG , BENSON MAI , CHANGGENG LIU
CPC classification number: B81B3/0062 , B81B2203/0109 , B81B2203/0163 , B81B2203/019 , B81B2203/053 , H01L41/0993 , H02N2/028
Abstract: Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.
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5.
公开(公告)号:US20160268927A1
公开(公告)日:2016-09-15
申请号:US14656618
申请日:2015-03-12
Applicant: MEMS DRIVE, INC.
Inventor: XIAOLEI LIU , GUIQIN WANG , ROMAN GUTIERREZ
CPC classification number: H02N1/008 , B81B3/0086 , B81B2201/033 , B81B2203/0136 , B81B2203/019
Abstract: A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.
Abstract translation: 梳状驱动器包括不活动的梳状指状阵列和相对的有源梳状指阵列,定位成与非活性梳状指状阵列相对并配置为相对于非活性梳状指状阵列在非线性路径中移动,其中每个梳齿阵列包括梳子 脊和从其梳脊延伸的多个梳齿,并且活动梳指阵列上的每个梳指被成形为匹配非平行轮廓。 非平行轮廓可以是渐缩的,弯曲的或选择的,以便当来自主动梳齿阵列的梳齿移动穿过间隙时,使来自无源梳指阵列的相邻梳齿之间的间隙中的电容线性化。
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公开(公告)号:US20180076740A1
公开(公告)日:2018-03-15
申请号:US15699306
申请日:2017-09-08
Applicant: MEMS Drive, Inc.
Inventor: XIAOLEI LIU , Matthew Ng , Guiqin Wang
IPC: H02N1/00
Abstract: A micro-electrical-mechanical system (MEMS) actuator includes: a MEMS actuation core, and a multi-piece MEMS electrical connector assembly electrically coupled to the MEMS actuation core and configured to be electrically coupled to a printed circuit board, wherein the multi-piece MEMS electrical connector includes: a plurality of subcomponents, and a plurality of coupling assemblies configured to couple the plurality of subcomponents together.
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公开(公告)号:US20170190569A1
公开(公告)日:2017-07-06
申请号:US15165893
申请日:2016-05-26
Applicant: MEMS DRIVE, INC.
Inventor: XIAOLEI LIU , MATTHEW NG , ROBERT CALVET , GERARDO MORABITO
CPC classification number: B81B3/0051 , B81B7/0016 , B81B2201/033 , B81B2203/0118 , B81B2203/0136 , H02N1/006
Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
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公开(公告)号:US20170088418A1
公开(公告)日:2017-03-30
申请号:US14872094
申请日:2015-09-30
Applicant: MEMS DRIVE, INC.
Inventor: ROMAN GUTIERREZ , TONY TANG , XIAOLEI LIU , MATTHEW NG , GUIQIN WANG
IPC: B81C1/00
CPC classification number: B81C1/00476 , B81B2201/033 , B81C1/00619 , B81C99/0095 , B81C2201/0132 , B81C2201/056
Abstract: A simplified MEMS fabrication process and MEMS device is provided that allows for cheaper and lighter-weight MEMS devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a MEMS device, and then etching away the underlying wafer such that, after the etching process, the MEMS device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. By etching trenches into the substrate wafer and filling them with a MEMS base material, sophisticated taller MEMS devices with larger force may be made.
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公开(公告)号:US20150350500A1
公开(公告)日:2015-12-03
申请号:US14692662
申请日:2015-04-21
Applicant: MEMS Drive, Inc.
Inventor: ROMAN GUTIERREZ , GUIQIN WANG , XIAOLEI LIU
CPC classification number: H04N5/2253 , H05K1/182 , H05K2201/10083 , H05K2201/10121 , Y10T29/4913
Abstract: A moving image sensor package is provided that may be used to provide optical image stabilization (OIS) in the same form factor as non-OIS enabled image sensors utilized in portable/mobile devices. The moving image sensor package includes an image sensor attached to a MEMS actuator mounted within a cutout in a circuit board, wherein the MEMS actuator has substantially the same thickness as the circuit board.
Abstract translation: 提供了一种运动图像传感器封装,其可用于以与便携式/移动设备中使用的非OIS启用的图像传感器相同的形状因数提供光学图像稳定(OIS)。 运动图像传感器封装包括附接到安装在电路板中的切口内的MEMS致动器的图像传感器,其中MEMS致动器具有与电路板基本相同的厚度。
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公开(公告)号:US20150334277A1
公开(公告)日:2015-11-19
申请号:US14631782
申请日:2015-02-25
Applicant: MEMS DRIVE, INC.
Inventor: XIAOLEI LIU , ROMAN GUTIERREZ
CPC classification number: H04N5/2253 , G02B27/0006 , H04N5/2171 , H04N5/2252 , H04N5/2257
Abstract: Systems and methods provide dust removal on an image sensor surface of a digital camera. Dust removal can be achieved by either imparting vibrational movement on a stage upon which the image sensor is mounted and/or by moving the stage towards one or more impact stops. The vibrational movement may shake loose any contaminants present on the image sensor. The impact of the stage at the one or more impact stops also may shake loose any contaminants present on the image sensor.
Abstract translation: 系统和方法在数码相机的图像传感器表面上提供除尘。 除尘可以通过在安装图像传感器的台上施加振动运动和/或通过将台子朝向一个或多个冲击挡块移动来实现。 振动可能会抖动图像传感器上存在的任何污染物。 舞台在一个或多个冲击挡块上的冲击也可能会抖动图像传感器上存在的任何污染物。
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