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公开(公告)号：US07302848B2
公开(公告)日：2007-12-04
申请号：US11076649
申请日：2005-03-10
IPC分类号： G01C19/00
CPC分类号： G01C19/5719 , G01P15/125 , H02N1/008
摘要： A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.
摘要翻译： 用于微机电系统的力补偿梳驱动器包括用于提供代表物理量的输出信号的MEMS机构; 用于致动MEMS机构的梳齿驱动器; 梳状驱动电路，用于向梳状驱动器提供驱动信号，用于将由梳状驱动器施加的预定位移显影到MEMS机构; 响应于力的变化的自动增益控制，以向梳状驱动电路提供校正信号以维持预定的运动; 以及响应于校正信号的补偿装置，用于调整MEMS机构的输出信号，以补偿由于预定力的变化导致的输出信号中的误差。
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2.发明授权Tuning fork gyroscopes, accelerometers, and other sensors with improved scale factor 有权调谐叉式陀螺仪，加速度计和其他具有改进的比例因子的传感器公开(公告)号：US07426861B2
公开(公告)日：2008-09-23
申请号：US11153664
申请日：2005-06-15
申请人： Marc S. Weinberg , Jonathan Bernstein , Jeffrey T. Borenstein , Richard Elliott , Gregory Kirkos , Anthony S. Kourepenis
发明人： Marc S. Weinberg , Jonathan Bernstein , Jeffrey T. Borenstein , Richard Elliott , Gregory Kirkos , Anthony S. Kourepenis
IPC分类号： G01P9/04 , G01P15/125
CPC分类号： G01C19/5733 , G01P15/125
摘要： A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.
摘要翻译： 音叉陀螺仪设计，其中至少一个检测质量被支撑在基板上方。 至少一个驱动电极也被支撑在与基体相邻的衬底上。 通常，检测质量块和驱动电极包括交错的电极指。 在证明物质下方的基底上的感应板或屏蔽电极在证明质量的电极指的范围内完全延伸。
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公开(公告)号：US06862934B2
公开(公告)日：2005-03-08
申请号：US10264887
申请日：2002-10-04
申请人： Marc S. Weinberg , Anthony S. Kourepenis , William D. Sawyer , Jeffrey T. Borenstein , James H. Connelly , Amy E. Duwel , Christopher M. Lento , James R. Cousens
发明人： Marc S. Weinberg , Anthony S. Kourepenis , William D. Sawyer , Jeffrey T. Borenstein , James H. Connelly , Amy E. Duwel , Christopher M. Lento , James R. Cousens
IPC分类号： B81B3/00 , B81C1/00 , G01C19/5719 , H01L21/683 , G01P15/08
CPC分类号： H01L21/6835 , G01C19/5719 , H01L2924/19041 , H01L2924/30105 , H01L2924/3025
摘要： A tuning fork gyroscope typically including at least one proof mass with an upper sense plate disposed above the proof mass and a lower sense plate disposed below the proof mass and means for sensing changes in the nominal gaps between the sense plate and the proof mass and for outputting a signal indicative of the gyroscope angular rate.
摘要翻译： 音叉陀螺仪通常包括至少一个检验质量块，其中布置在检测质量块上方的上感测板和布置在检验质量下方的下感测板，以及用于感测感测板和检测质量块之间的标称间隙的变化的装置， 输出表示陀螺仪角速度的信号。
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4.发明授权Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices 失效拆分电极以最小化电荷瞬变，电机幅度失配误差，以及音叉陀螺仪和其他设备中垂直平移的灵敏度
公开(公告)号：US5911156A
公开(公告)日：1999-06-08
申请号：US805013
申请日：1997-02-24
IPC分类号： G01C19/5719 , G01C19/00
CPC分类号： G01C19/5719
摘要： A micromechanical tuning fork gyroscope having two center electrodes is disclosed. The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes are equal, and hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does effect sense axis output signals.
摘要翻译： 公开了一种具有两个中心电极的微机械音叉陀螺仪。 两个中心电极被相反极性的偏置电位激发。 相对偏置的中心电极在陀螺仪之间提供电对称性，从而减少电荷瞬变和对垂直平移的敏感性。 直接注入到质量块中的电流相等且相反，从而取消。 作用在证明质量块和交错电极上的电动机提升力相等，因此证明质量块以纯平移运动，从而减少同相偏差。 此外，垂直于陀螺仪平面的任何纯平移都会影响感测轴输出信号。
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5.发明授权Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope 失效绝缘子导体陀螺仪陀螺仪中的电机幅度控制电路
公开(公告)号：US06064169A
公开(公告)日：2000-05-16
申请号：US540809
申请日：1995-10-11
IPC分类号： G01C19/5719 , H03B5/30 , G05D15/00
CPC分类号： G01C19/5719
摘要： A control system for a tuning fork gyroscope uses motor frequency to control motor amplitude. The tuning fork gyroscope has a drive signal input and an output signal from which motor frequency is determined. A phase/frequency detector generates an error signal by comparing the actual oscillation phase of the output signal with the phase of a reference signal from a crystal controlled frequency synthesizer. The error signal is filtered in a feedback loop control to reduce phase detector ripple. The output of the loop controller is then used to determine the appropriate drive signal to drive the error signal to a constant and maintain a predetermined oscillation frequency.
摘要翻译： 音叉陀螺仪的控制系统使用电机频率来控制电机振幅。 音叉陀螺仪具有驱动信号输入和确定电机频率的输出信号。 相位/频率检测器通过将输出信号的实际振荡相位与来自晶体控制频率合成器的参考信号的相位进行比较来产生误差信号。 误差信号在反馈回路控制中进行滤波，以减少相位检测器的纹波。 然后使用环路控制器的输出来确定适当的驱动信号以将误差信号驱动到恒定并保持预定的振荡频率。
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6.发明授权Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors 失效减少充电效应和控制音叉陀螺仪和其他传感器的平面外灵敏度的沟槽
公开(公告)号：US5952574A
公开(公告)日：1999-09-14
申请号：US841224
申请日：1997-04-29
申请人： Marc S. Weinberg , Steven T. Cho , Ralph E. Hopkins, III , Lance C. Niles , Anthony S. Kourepenis , Eric M. Hildebrant , Paul A. Ward
发明人： Marc S. Weinberg , Steven T. Cho , Ralph E. Hopkins, III , Lance C. Niles , Anthony S. Kourepenis , Eric M. Hildebrant , Paul A. Ward
IPC分类号： G01C19/5719 , G01C19/00
CPC分类号： G01C19/5719
摘要： Trenches which reduce or eliminate force and sensitivity associated with proof mass motion normal to the substrate as a result of voltage transients is disclosed. The trenches provide increased separation between interleaved comb electrodes and the substrate, and thereby also reduce the comb lift to drive ratio. The trenches are typically formed directly below the interleaved comb electrodes, but may also be formed below other suspended portions. Trench depth is from 6-10 microns and provides a comb electrode to substrate separation of approximately 8.5-12.5 microns.
摘要翻译： 公开了减少或消除由于电压瞬变而与基板垂直的质量运动相关联的力和灵敏度的沟槽。 沟槽提供了交错的梳状电极和衬底之间的增加的分离，从而也将梳子升高减小到驱动比。 沟槽通常直接形成在交错梳状电极的正下方，但也可以形成在其它悬置部分的下面。 沟渠深度为6-10微米，并提供梳状电极至约8.5-12.5微米的基底分离。
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7.发明授权Temperature insensitive silicon oscillator and precision voltage reference formed therefrom 失效温度不敏感的硅振荡器和由此形成的精密电压基准
公开(公告)号：US5783973A
公开(公告)日：1998-07-21
申请号：US804796
申请日：1997-02-24
CPC分类号： G01C19/574 , H03H9/02448 , H03H9/2405 , H03H9/2426 , H03L1/02 , H03L7/099 , H03H2009/02496 , H03H2009/02511
摘要： Micromachined, thermally insensitive silicon resonators are provided having accuracy equivalent or superior to that of quartz resonators, and are fabricated from a micromechanical, silicon-on-glass process. In one embodiment, such a resonator is realized using a tuning fork gyroscope. Radiation-hard precision voltage references (PVRs) are enabled using the silicon resonators. Thermal sensitivity is reduced relative to that of a silicon-on-silicon process oscillator, providing a thermal sensitivity comparable to that of a quartz oscillator. By employing a micromechanical device based upon a tuning fork gyroscope, resonators are made from either or both of the gyro drive and sense axes. A resonator constructed as an oscillator loop whose resonant frequency is compared to a frequency standard provides a bias voltage as a reference voltage.
摘要翻译： 提供微机械加热的不敏感的硅谐振器，其具有与石英谐振器相当或优于石英谐振器的精度，并且由微机械的硅 - 玻璃工艺制造。 在一个实施例中，使用音叉陀螺仪实现这种谐振器。 使用硅谐振器启用辐射硬精密电压基准（PVR）。 相对于硅硅工艺振荡器的热敏感性降低，提供与石英振荡器相当的热敏感性。 通过采用基于音叉陀螺仪的微机械装置，谐振器由陀螺仪驱动和感测轴中的一个或两者制成。 构成谐振频率与频率标准相比较的振荡器环路的谐振器提供偏置电压作为参考电压。
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公开(公告)号：US07172919B2
公开(公告)日：2007-02-06
申请号：US10970067
申请日：2004-10-20
申请人： Marc S. Weinberg , Anthony S. Kourepenis , William D. Sawyer , Jeffrey T. Borenstein , James H. Connelly , Amy E. Duwel , Christopher M. Lento , James R. Cousens
发明人： Marc S. Weinberg , Anthony S. Kourepenis , William D. Sawyer , Jeffrey T. Borenstein , James H. Connelly , Amy E. Duwel , Christopher M. Lento , James R. Cousens
IPC分类号： H01L21/00
CPC分类号： H01L21/6835 , G01C19/5719 , H01L2924/19041 , H01L2924/30105 , H01L2924/3025
摘要： A method for reducing errors in a tuning fork gyroscope includes determining a first distance, gt, between an upper sense plate and a proof mass and a second distance, gb, between a lower sense plate and the proof mass. The method further includes applying a first voltage, Vt, to the upper sense plate and a second voltage, Vb, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance.
摘要翻译： 一种用于减少音叉陀螺仪中的误差的方法包括确定上感测板和检测质量之间的第一距离g i，以及第二距离g b， 在下感测板和检测质量之间。 所述方法还包括向所述下感测板施加第一电压V sub至所述上感测板，并将第二电压V SUB施加到所述下感测板，其中， 第一电压和第二电压是第一距离和第二距离的函数。
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公开(公告)号：US07216036B2
公开(公告)日：2007-05-08
申请号：US10621097
申请日：2003-07-16
IPC分类号： G01C21/00
CPC分类号： G01C21/165 , B64G1/288 , B64G1/361 , B64G1/363 , G01C21/025
摘要： An integrated inertial stellar attitude sensor for an aerospace vehicle includes a star camera system, a gyroscope system, a controller system for synchronously integrating an output of said star camera system and an output of said gyroscope system into a stream of data, and a flight computer responsive to said stream of data for determining from the star camera system output and the gyroscope system output the attitude of the aerospace vehicle.
摘要翻译： 用于航空航天车辆的集成的惯性恒星姿态传感器包括星形摄像机系统，陀螺仪系统，用于将所述星形摄像机系统的输出和所述陀螺仪系统的输出同步地集成为数据流的控制器系统，以及飞行计算机 响应于所述数据流，用于从星形摄像机系统输出确定并且陀螺仪系统输出航空航天车辆的姿态。
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10.发明授权Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors 失效音叉电机位置检测方案用于音叉陀螺仪等传感器
公开(公告)号：US5747961A
公开(公告)日：1998-05-05
申请号：US541079
申请日：1995-10-11
IPC分类号： G01C19/5719 , G01P15/14
CPC分类号： G01C19/5719 , G01P15/14
摘要： A tuning fork gyroscope has an in-plane position sensitive pick-off to which an AC or AC+DC bias is applied. Intermodulation is exploited to produce beat-notes between the applied frequency and the motor frequency at amplitudes proportional to motor amplitude, but unaffected by error sources such as spurious substrate charge accumulation. The beat-notes are used to control motor amplitude without the effects of charge accumulation.
摘要翻译： 音叉陀螺仪具有应用AC或AC + DC偏置的平面内位置敏感拾取器。 互调被用来在施加的频率和电动机频率之间产生与电机幅度成比例的幅度上的节拍，但不受诸如伪衬底电荷积累的误差源的影响。 节拍是用来控制电机振幅而不会产生电荷积累的影响。
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