公开(公告)号：US09372399B2

公开(公告)日：2016-06-21

申请号：US13812459

申请日：2011-07-21

申请人： Martinus Bernardus Van Der Mark ,  Vadim Yevgenyevich Banine ,  Andre Bernardus Jeunink ,  Johan Frederik Dijksman ,  Sander Frederik Wuister ,  Emiel Andreas Godefridus Peeters ,  Johan Hendrik Klootwijk ,  Roelof Koole ,  Christianus Martinus Van Heesch ,  Ruediger Guenter Mauczok ,  Jacobus Bernardus Giesbers

发明人： Martinus Bernardus Van Der Mark ,  Vadim Yevgenyevich Banine ,  Andre Bernardus Jeunink ,  Johan Frederik Dijksman ,  Sander Frederik Wuister ,  Emiel Andreas Godefridus Peeters ,  Johan Hendrik Klootwijk ,  Roelof Koole ,  Christianus Martinus Van Heesch ,  Ruediger Guenter Mauczok ,  Jacobus Bernardus Giesbers

IPC分类号： G03F7/00 ,  B82Y10/00 ,  B82Y40/00

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： An imprint lithography method is disclosed for reducing a difference between an intended topography and an actual topography arising from a part of a patterned layer of fixed imprintable medium. The method involves imprinting an imprint lithography template into a layer of flowable imprintable medium to form a patterned layer in the imprintable medium, and fixing the imprintable medium to form a patterned layer of fixed imprintable medium. Local excitation is applied to the part of the patterned layer to adjust a chemical reaction in the part of the patterned layer to reduce the difference between the intended topography and the actual topography arising from the part of the fixed patterned layer of imprintable medium when this is subsequently used as a resist for patterning the substrate. An imprint medium suitable for imprint lithography with the method is also disclosed.

摘要翻译： 公开了一种压印光刻方法，用于减少由固定的可打印介质的图案层的一部分产生的预期形貌和实际形貌之间的差异。 该方法包括将压印光刻模板压印到可流动的可压印介质层中以在可压印介质中形成图案化层，并固定可压印介质以形成固定可压印介质的图案化层。 局部激发被施加到图案化层的部分以调整图案化层的部分中的化学反应，以减少所期望的形貌与由可压印介质的固定图案化层的部分产生的实际形貌之间的差异，当这是 随后用作图案化基板的抗蚀剂。 还公开了适用于该方法的压印光刻的压印介质。

公开(公告)号：US09417207B2

公开(公告)日：2016-08-16

申请号：US14232323

申请日：2012-07-09

申请人： Johan Marra ,  Johan Hendrik Klootwijk ,  Jacobus Bernardus Giesbers ,  Nico Maris Adriaan De Wild ,  Marcel Bulder ,  Rogier Adrianus Henrica Niessen ,  Peter Van Der Linde

发明人： Johan Marra ,  Johan Hendrik Klootwijk ,  Jacobus Bernardus Giesbers ,  Nico Maris Adriaan De Wild ,  Marcel Bulder ,  Rogier Adrianus Henrica Niessen ,  Peter Van Der Linde

IPC分类号： G01N7/00 ,  G01N9/00 ,  G01N19/10 ,  G01N27/403 ,  G01N1/22 ,  G01N27/404 ,  G01N33/00

CPC分类号： G01N27/403 ,  G01N1/2273 ,  G01N27/4045 ,  G01N33/0006

摘要： A method of selectively sensing the concentration of a target gas in polluted ambient air comprises the steps of: —providing a target gas sensor (220) sensitive to the target gas; —providing a first gas flow derived from the ambient air, from which first flow the target gas is substantially removed; —providing a second gas flow derived from the ambient air, substantially comprising the same target gas concentration as the ambient air; —exposing the target gas sensor to the first gas flow during a first time interval, and obtaining from the sensor a first output signal (Smf); —exposing the target gas sensor to the second gas flow during a second time interval not overlapping with the first time interval, and obtaining a second output signal (Smu); —calculating the difference (SΔ) between the first and the second output signals; calculating the concentration of the target gas from the calculated signal difference (SΔ).

摘要翻译： 一种选择性地感测污染环境空气中目标气体浓度的方法包括以下步骤： - 提供对目标气体敏感的目标气体传感器（220）; - 提供源自环境空气的第一气流，从其从基本上除去目标气体的第一次流动; 提供源自环境空气的第二气流，基本上包括与环境空气相同的目标气体浓度; - 在第一时间间隔内将目标气体传感器暴露于第一气体流，并从传感器获得第一输出信号（Smf）; 在不与第一时间间隔重叠的第二时间间隔内将目标气体传感器附接到第二气体流，并获得第二输出信号（Smu）; - 计算第一和第二输出信号之间的差（SΔ）; 根据计算出的信号差（SΔ）计算目标气体的浓度。

公开(公告)号：US20140174154A1

公开(公告)日：2014-06-26

申请号：US14232323

申请日：2012-07-09

申请人： Johan Marra ,  Johan Hendrik Klootwijk ,  Jacobus Bernardus Giesbers ,  Nico Maris Adriaan De Wild ,  Marcel Bulder ,  Rogie Adrianus Henrica Niessen ,  Peter Van Der Linde

发明人： Johan Marra ,  Johan Hendrik Klootwijk ,  Jacobus Bernardus Giesbers ,  Nico Maris Adriaan De Wild ,  Marcel Bulder ,  Rogie Adrianus Henrica Niessen ,  Peter Van Der Linde

IPC分类号： G01N27/403

CPC分类号： G01N27/403 ,  G01N1/2273 ,  G01N27/4045 ,  G01N33/0006

摘要： A method of selectively sensing the concentration of a target gas in polluted ambient air comprises the steps of: —providing a target gas sensor (220) sensitive to the target gas; —providing a first gas flow derived from the ambient air, from which first flow the target gas is substantially removed; —providing a second gas flow derived from the ambient air, substantially comprising the same target gas concentration as the ambient air; —exposing the target gas sensor to the first gas flow during a first time interval, and obtaining from the sensor a first output signal (Smf); —exposing the target gas sensor to the second gas flow during a second time interval not overlapping with the first time interval, and obtaining a second output signal (Smu); —calculating the difference (SΔ) between the first and the second output signals; calculating the concentration of the target gas from the calculated signal difference (SΔ).

摘要翻译： 一种选择性地感测污染环境空气中目标气体浓度的方法包括以下步骤： - 提供对目标气体敏感的目标气体传感器（220）; - 提供源自环境空气的第一气流，从其从基本上除去目标气体的第一次流动; 提供源自环境空气的第二气流，基本上包括与环境空气相同的目标气体浓度; - 在第一时间间隔内将目标气体传感器暴露于第一气体流，并从传感器获得第一输出信号（Smf）; 在不与第一时间间隔重叠的第二时间间隔内将目标气体传感器附接到第二气体流，并获得第二输出信号（Smu）; 计算第一和第二输出信号之间的差值（S＆Dgr;）; 根据计算出的信号差（S＆Dgr;）计算目标气体的浓度。

公开(公告)号：US06424698B1

公开(公告)日：2002-07-23

申请号：US09678967

申请日：2000-10-04

申请人： Johannus Wilhelmus Weekamp ,  Adrianus Cornelius Van Kasteren ,  Jacobus Bernardus Giesbers ,  Bartholomeus Petrus Hendricus Van Nunen ,  Menno Willem Jose Prins

发明人： Johannus Wilhelmus Weekamp ,  Adrianus Cornelius Van Kasteren ,  Jacobus Bernardus Giesbers ,  Bartholomeus Petrus Hendricus Van Nunen ,  Menno Willem Jose Prins

IPC分类号： G21K300

CPC分类号： G21K1/10

摘要： A filter which includes a stack of deformable foils which are locally attached to one another, and also includes comparatively rigid members which are situated to both sides of the stack of foils, extend parallel to the surface of the foils and each of which is attached to an outer surface of the stack of foils by way of a buffer member. The foils can be moved away from one another in a main direction by means of the rigid members, which main direction extends transversely of the surface, in order to form ducts between the foils. The buffer member is then contractible mainly in a direction which extends parallel to the surface and transversely of the ducts.

摘要翻译： 一种过滤器，其包括彼此局部连接的可变形箔片堆叠，并且还包括位于箔片堆叠的两侧的相对刚性的构件，其平行于箔片的表面延伸，并且每个箔片附接到 通过缓冲构件的箔片的外表面。 箔可以通过刚性构件在主方向上彼此远离，该主要方向横向于表面延伸，以便在箔之间形成管道。 然后缓冲构件主要在平行于表面并且横向于管道延伸的方向收缩。

公开(公告)号：US09362511B2

公开(公告)日：2016-06-07

申请号：US13118556

申请日：2011-05-30

申请人： Jacobus Bernardus Giesbers ,  Monique Johanna Beenhakkers ,  Cornelis Johannus Hermanus Antonius Rijpert ,  Gerwin Hermanus Gelinck ,  Fredericus Johannes Touwslager

发明人： Jacobus Bernardus Giesbers ,  Monique Johanna Beenhakkers ,  Cornelis Johannus Hermanus Antonius Rijpert ,  Gerwin Hermanus Gelinck ,  Fredericus Johannes Touwslager

IPC分类号： H01L23/495 ,  H01L23/498 ,  H01L23/538 ,  H01L51/00 ,  H01L21/762 ,  H01L51/05 ,  H01L27/12 ,  H01L29/786

CPC分类号： H01L27/1214 ,  H01L21/76251 ,  H01L23/49572 ,  H01L23/4985 ,  H01L23/5387 ,  H01L29/78681 ,  H01L51/0001 ,  H01L51/0097 ,  H01L51/052 ,  H01L51/0545 ,  H01L2924/0002 ,  Y02E10/549 ,  Y02P70/521 ,  H01L2924/00

摘要： An electrical element, such as a thin-film transistor, is defined on a flexible substrate, in that the substrate is attached to a carrier by an adhesive layer, and is delaminated after definition of the transistor. This is for instance due to illumination by UV-radiation. An opaque coating is provided to protect any semiconductor material. A heat treatment is preferably given before application of the layers of the transistor to reduce stress in the adhesive layer.

公开(公告)号：US06951818B2

公开(公告)日：2005-10-04

申请号：US10476708

申请日：2002-05-06

申请人： Michel Marcel Jose Decre ,  Andreas Hubertus Montree ,  Jacobus Bernardus Giesbers ,  Gerwin Hermanus Gelinck ,  Martin Hillebrand Blees

发明人： Michel Marcel Jose Decre ,  Andreas Hubertus Montree ,  Jacobus Bernardus Giesbers ,  Gerwin Hermanus Gelinck ,  Martin Hillebrand Blees

IPC分类号： H01L21/027 ,  H01L21/306 ,  H01L21/312 ,  H01L21/768 ,  H01L21/31 ,  H01L21/311

CPC分类号： H01L21/02118 ,  B82Y30/00 ,  H01L21/312 ,  H01L21/76802 ,  H01L21/76829 ,  H01L21/76838

摘要： A vertical interconnect (15) in an electronic device (10) is manufactured non-photolithographically. This is done by modifying a surface (20,30) of either a metal layer (3) or an intermediate layer of an electrically insulating material (21), and subsequently depositing a composition with a first and a second polymer. Phase separation of the two polymers will lead to a first (6) and a second sub-layer (7), of which the first sub-layer (6) is removed. An upper layer (9) of electrically conducting material can be deposited then or after a further etching step. This results in the vertical interconnect (15).

摘要翻译： 电子设备（10）中的垂直互连（15）被非光刻地制造。 这通过改变金属层（3）或电绝缘材料（21）的中间层的表面（20,30），随后沉积具有第一和第二聚合物的组合物来完成。 两个聚合物的相分离将导致第一子层（6）被去除的第一子层（6）和第二子层（7）。 可以在另外的蚀刻步骤之后或之后沉积导电材料的上层（9）。 这导致了垂直互连（15）。

公开(公告)号：US20110227084A1

公开(公告)日：2011-09-22

申请号：US13118556

申请日：2011-05-30

申请人： Jacobus Bernardus Giesbers ,  Monique Johanna Beenhakkers ,  Cornelis Johannus Hermanus Antonius Rijpert ,  Gerwin Hermanus Gelinck ,  Fredericus Johannes Touwslager

发明人： Jacobus Bernardus Giesbers ,  Monique Johanna Beenhakkers ,  Cornelis Johannus Hermanus Antonius Rijpert ,  Gerwin Hermanus Gelinck ,  Fredericus Johannes Touwslager

IPC分类号： H01L33/08

CPC分类号： H01L27/1214 ,  H01L21/76251 ,  H01L23/49572 ,  H01L23/4985 ,  H01L23/5387 ,  H01L29/78681 ,  H01L51/0001 ,  H01L51/0097 ,  H01L51/052 ,  H01L51/0545 ,  H01L2924/0002 ,  Y02E10/549 ,  Y02P70/521 ,  H01L2924/00

摘要： An electrical element, such as a thin-film transistor, is defined on a flexible substrate, in that the substrate is attached to a carrier by an adhesive layer, and is delaminated after definition of the transistor. This is for instance due to illumination by UV-radiation. An opaque coating is provided to protect any semiconductor material. A heat treatment is preferably given before application of the layers of the transistor to reduce stress in the adhesive layer.

摘要翻译： 在柔性基板上限定了诸如薄膜晶体管的电气元件，因为基板通过粘合剂层附着到载体上，并且在晶体管定义之后被分层。 这是因为例如由于UV辐射的照明。 提供不透明涂层以保护任何半导体材料。 在施加晶体管层之前优选进行热处理以减少粘合剂层中的应力。

公开(公告)号：US07951687B2

公开(公告)日：2011-05-31

申请号：US10551309

申请日：2004-03-30

申请人： Jacobus Bernardus Giesbers ,  Monique Johanna Beenhakkers ,  Cornelis Johannus Hermanus Antonius Rijpert ,  Gerwin Hermanus Gelinck ,  Fredericus Johannes Touwslager

发明人： Jacobus Bernardus Giesbers ,  Monique Johanna Beenhakkers ,  Cornelis Johannus Hermanus Antonius Rijpert ,  Gerwin Hermanus Gelinck ,  Fredericus Johannes Touwslager

IPC分类号： H01L21/46

CPC分类号： H01L27/1214 ,  H01L21/76251 ,  H01L23/49572 ,  H01L23/4985 ,  H01L23/5387 ,  H01L29/78681 ,  H01L51/0001 ,  H01L51/0097 ,  H01L51/052 ,  H01L51/0545 ,  H01L2924/0002 ,  Y02E10/549 ,  Y02P70/521 ,  H01L2924/00

摘要： An electrical element, such as a thin-film transistor, is defined on a flexible substrate, in that the substrate is attached to a carrier by an adhesive layer, and is delaminated after definition of the transistor. This is for instance due to illumination by UV-radiation. An opaque coating is provided to protect any semiconductor material. A heat treatment is preferably given before application of the layers of the transistor to reduce stress in the adhesive layer.

摘要翻译： 在柔性基板上限定了诸如薄膜晶体管的电气元件，因为基板通过粘合剂层附着到载体上，并且在晶体管定义之后被分层。 这是因为例如由于UV辐射的照明。 提供不透明涂层以保护任何半导体材料。 在施加晶体管层之前优选进行热处理以减少粘合剂层中的应力。

公开(公告)号：US20080280112A1

公开(公告)日：2008-11-13

申请号：US12065776

申请日：2006-08-24

申请人： Geert Langereis ,  Johannes Wilhelmus Weekamp ,  Jacobus Bernardus Giesbers

发明人： Geert Langereis ,  Johannes Wilhelmus Weekamp ,  Jacobus Bernardus Giesbers

IPC分类号： B32B7/14 ,  H01B13/00

CPC分类号： F04B43/043 ,  B01L3/502707 ,  B01L3/502738 ,  B01L2200/10 ,  B01L2200/12 ,  B01L2300/0627 ,  B01L2300/0819 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/1827 ,  B01L2400/0638 ,  B81C1/00119 ,  B81C1/00182 ,  B81C99/0095 ,  B81C2201/019 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0051 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T428/24851

摘要： The invention relates to a method of manufacturing a microsystem and further to such microsystem. With the method a microsystem can be manufactured by stacking pre-processed foils (10) having a conductive layer (11a,11b) on at least one side. After stacking, the foils (10) are sealed, using pressure and heat. Finally the microsystems are separated from the stack (S). The pre-processing of the foils (preferably done by means of a laser beam) comprises a selection of the following steps: (A) leaving the foil intact, (B) locally removing the conductive layer, (C) removing the conductive layer and partially evaporating the foil (10), and (D) removing both the conductive layer as well as foil (10), thus making holes in the foil (10). In combination with said stacking, it is possible to create cavities, freely suspended cantilevers and membranes. This opens up the possibility of manufacturing various microsystems, like MEMS devices and microfluidic systems.

摘要翻译： 本发明涉及一种制造微系统并进一步涉及这种微系统的方法。 利用该方法，可以通过在至少一侧上堆叠具有导电层（11a，11b）的预处理箔（10）来制造微系统。 堆叠后，使用压力和热量将箔（10）密封。 最后，微系统与堆栈（S）分离。 箔的预处理（优选通过激光束进行）包括以下步骤的选择：（A）完全保留箔，（B）局部去除导电层，（C）去除导电层和 部分地蒸发箔（10），以及（D）去除导电层以及箔（10），从而在箔（10）中形成孔。 结合所述堆叠，可以产生空腔，自由悬挂的悬臂和膜。 这开辟了制造各种微系统的可能性，如MEMS器件和微流体系统。

公开(公告)号：US20080247572A1

公开(公告)日：2008-10-09

申请号：US12065933

申请日：2006-08-24

申请人： Geert Langereis ,  Johannes Wilhelmus Weekamp ,  Jacobus Bernardus Giesbers

发明人： Geert Langereis ,  Johannes Wilhelmus Weekamp ,  Jacobus Bernardus Giesbers

IPC分类号： H04R25/00

CPC分类号： F04B43/043 ,  B01L3/502707 ,  B01L3/502738 ,  B01L2200/10 ,  B01L2200/12 ,  B01L2300/0627 ,  B01L2300/0819 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/1827 ,  B01L2400/0638 ,  B81B2201/0257 ,  B81C1/00119 ,  B81C1/00182 ,  B81C99/0095 ,  B81C2201/019 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0051 ,  F16K2099/008 ,  F16K2099/0084 ,  H04R19/04 ,  H04R31/00 ,  Y10T428/24851

摘要： The invention relates to a method of manufacturing a MEMS capacitor microphone and further to such MEMS capacitor microphone. With the method a MEMS capacitor microphone can be manufactured by stacking pre-processed foils (10) having a conductive layer (11a,11b) on at least one side. After stacking, the foils (10) are sealed, using pressure and heat. Finally the MEMS capacitor microphones are separated from the stack (S). The pre-processing of the foils (preferably done by means of a laser beam) comprises a selection of the following steps: (A) leaving the foil intact, (B) locally removing the conductive layer, (C) removing the conductive layer and partially evaporating the foil (10), and (D) removing both the conductive layer as well as foil (10), thus making holes in the foil (10). In combination with said stacking, it is possible to create cavities and membranes. This opens up the possibility of manufacturing MEMS capacitor microphone.

摘要翻译： 本发明涉及一种制造MEMS电容麦克风的方法，并且还涉及这种MEMS电容麦克风。 利用该方法，MEMS电容式麦克风可以通过在至少一侧上堆叠具有导电层（11a，11b）的预处理箔（10）来制造。 堆叠后，使用压力和热量将箔（10）密封。 最后，MEMS电容麦克风与堆叠（S）分离。 箔的预处理（优选通过激光束进行）包括以下步骤的选择：（A）完全保留箔，（B）局部去除导电层，（C）去除导电层和 部分地蒸发箔（10），以及（D）去除导电层以及箔（10），从而在箔（10）中形成孔。 结合所述堆叠，可以产生空腔和膜。 这开启了制造MEMS电容麦克风的可能性。