公开(公告)号：US07118943B2

公开(公告)日：2006-10-10

申请号：US10417181

申请日：2003-04-17

申请人： Ichio Yudasaka ,  Tatsuya Shimoda ,  Masahiro Furusawa

发明人： Ichio Yudasaka ,  Tatsuya Shimoda ,  Masahiro Furusawa

IPC分类号： H01L21/00 ,  H01L21/84 ,  H01L21/4763 ,  H01L21/44

CPC分类号： H01L21/288 ,  H01L21/02422 ,  H01L21/02532 ,  H01L21/02628 ,  H01L21/02639 ,  H01L21/76838 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292

摘要： In this production method of a thin film device, a thin film is formed by discharging a liquid material from a nozzle in a deposition chamber to coat the liquid material onto a substrate. The substrate is then subjected to heat treatment by a first heat treatment unit and a second heat treatment unit, thereby improving the crystallinity and fitness of the film as well as its adhesion with other films.

摘要翻译： 在这种薄膜器件的制造方法中，通过从沉积室中的喷嘴排出液体材料以将液体材料涂覆到基板上来形成薄膜。 然后通过第一热处理单元和第二热处理单元对基板进行热处理，从而提高膜的结晶度和适用性以及其与其它膜的粘合性。

公开(公告)号：US20060007552A1

公开(公告)日：2006-01-12

申请号：US11141641

申请日：2005-06-01

申请人： Atsushi Takakuwa ,  Tatsuya Shimoda ,  Masahiro Furusawa ,  Tadaoki Mitani ,  Hisato Yamaguchi

发明人： Atsushi Takakuwa ,  Tatsuya Shimoda ,  Masahiro Furusawa ,  Tadaoki Mitani ,  Hisato Yamaguchi

IPC分类号： G02B27/10

CPC分类号： G02B3/0043 ,  B82Y30/00 ,  G02B3/0012 ,  H01L27/3244 ,  H01L51/5275 ,  Y10S264/72

摘要： A method for manufacturing an organic thin film element that includes an organic thin film between a pair of thin film electrodes and at least one electrode being a transparent electrode includes forming a transparent electrode by spraying a material liquid containing a transparent electrode formation material on a base material, and forming an organic thin film on the transparent electrode. This method allows for the manufacture of the organic thin film element by which an organic thin film element with high light-extraction efficiency is simply provided. A method for manufacturing an electro-optic device and a method for manufacturing electronic equipment that utilize the method for manufacturing an organic thin film element are described.

摘要翻译： 一种制造有机薄膜元件的方法，该有机薄膜元件包括一对薄膜电极和至少一个作为透明电极的电极之间的有机薄膜，包括通过将含有透明电极形成材料的材料液体喷涂到基底上来形成透明电极 材料，并在透明电极上形成有机薄膜。 该方法允许简单地提供具有高提取光效率的有机薄膜元件的有机薄膜元件的制造。 一种电光装置的制造方法及利用该有机薄膜元件的制造方法的电子设备的制造方法。

公开(公告)号：US20060007520A1

公开(公告)日：2006-01-12

申请号：US11141108

申请日：2005-06-01

申请人： Atsushi Takakuwa ,  Tatsuya Shimoda ,  Masahiro Furusawa ,  Tadaoki Mitani ,  Hisato Yamaguchi

发明人： Atsushi Takakuwa ,  Tatsuya Shimoda ,  Masahiro Furusawa ,  Tadaoki Mitani ,  Hisato Yamaguchi

IPC分类号： G02F1/153

CPC分类号： B82Y30/00 ,  B82Y10/00 ,  H01L27/3251 ,  H01L51/5206 ,  H01L51/5215 ,  H01L2251/5315

摘要： A method of manufacturing an organic thin film element including an organic thin film between a pair of thin film electrodes with at least one transparent electrode includes forming the transparent electrode by atomizing a material liquid containing a transparent-electrode forming material onto a base material; and forming the organic thin film on the transparent electrode. The organic thin film element is capable of simply providing an organic thin film element having a long element life. A method of manufacturing an electro-optic device as well as a method of manufacturing electronic equipment by using the above method are described.

摘要翻译： 在具有至少一个透明电极的一对薄膜电极之间制造包括有机薄膜的有机薄膜元件的方法包括通过将含有透明电极形成材料的材料液雾化到基材上来形成透明电极; 并在透明电极上形成有机薄膜。 有机薄膜元件能够简单地提供具有长元件寿命的有机薄膜元件。 描述制造电光装置的方法以及通过使用上述方法制造电子设备的方法。

公开(公告)号：US06780465B2

公开(公告)日：2004-08-24

申请号：US10026635

申请日：2001-12-27

申请人： Masahiro Furusawa ,  Tatsuya Shimoda

发明人： Masahiro Furusawa ,  Tatsuya Shimoda

IPC分类号： C23C1604

CPC分类号： C23C16/04 ,  B82Y30/00 ,  C23C16/448

摘要： The present invention provides a method for forming a thin film using a CVD process in which a large-scale vacuum exhaust unit or neutralization unit is not required, and a patterning step after the formation of the film is not required. A pattern formed of a monolayer is formed using (heptadecafluoro-1,1,2,2-tetrahydro)decyl-triethoxysilane on a surface to form a thin film of a second glass substrate. Droplets formed of trimethylaluminum are placed on a plurality of parts of an upper surface of a first substrate. The droplets are placed at the positions corresponding to openings of the monolayer pattern. Both substrates are placed in parallel with a predetermined distance therebetween, and the openings and the droplets are aligned with each other. While supplying nitrogen gas between the substrates, the second substrate is heated to 300° C. and retained for 5 minutes. Thereby, the droplets are vaporized and the gas is fed into the openings. Aluminum resulting from decomposition by heat is deposited in these parts and aluminum thin films are formed.

摘要翻译： 本发明提供一种使用不需要大规模真空排气单元或中和单元的CVD工艺形成薄膜的方法，并且不需要在形成膜之后的图案化步骤。 使用（十七氟-1,1,2,2-四氢）癸基三乙氧基硅烷在表面上形成由单层形成的图案，以形成第二玻璃基板的薄膜。 由三甲基铝形成的液滴放置在第一基板的上表面的多个部分上。 液滴被放置在对应于单层图案的开口的位置。 两个基板之间以预定距离平行放置，并且开口和液滴彼此对准。 在基板之间供给氮气的同时，将第二基板加热至300℃并保持5分钟。 由此，液滴被蒸发并且气体被供给到开口中。 在这些部分中沉积由热分解产生的铝，并形成铝薄膜。

公开(公告)号：US20060213547A1

公开(公告)日：2006-09-28

申请号：US11364000

申请日：2006-03-01

申请人： Hideki Tanaka ,  Ichio Yudasaka ,  Masahiro Furusawa ,  Tsutomu Miyamoto ,  Tatsuya Shimoda

发明人： Hideki Tanaka ,  Ichio Yudasaka ,  Masahiro Furusawa ,  Tsutomu Miyamoto ,  Tatsuya Shimoda

IPC分类号： H02N6/00

CPC分类号： H01L31/125 ,  H01L31/02167 ,  H01L31/03921 ,  H01L31/046 ,  H01L31/075 ,  H01L31/202 ,  Y02E10/50 ,  Y02P70/521

摘要： A photoelectric conversion device includes a plurality of photoelectric conversion regions disposed over a substrate, and a colored region disposed among the photoelectric conversion regions over the substrate, the colored region forming an image over the substrate.

摘要翻译： 光电转换装置包括设置在基板上的多个光电转换区域和设置在基板上的光电转换区域之间的着色区域，着色区域在基板上形成图像。

公开(公告)号：US06846513B2

公开(公告)日：2005-01-25

申请号：US10028712

申请日：2001-12-28

申请人： Masahiro Furusawa ,  Satoru Miyashita ,  Ichio Yudasaka ,  Tatsuya Shimoda ,  Yasuaki Yokoyama ,  Yasuo Matsuki ,  Yasumasa Takeuchi

发明人： Masahiro Furusawa ,  Satoru Miyashita ,  Ichio Yudasaka ,  Tatsuya Shimoda ,  Yasuaki Yokoyama ,  Yasuo Matsuki ,  Yasumasa Takeuchi

IPC分类号： C23C16/24 ,  B32B9/04 ,  C23C16/04 ,  C23C16/448 ,  H01L21/205

CPC分类号： C23C16/042 ,  B82Y30/00 ,  C23C16/24 ,  C23C16/4481 ,  H01L21/0237 ,  H01L21/02422 ,  H01L21/02439 ,  H01L21/02499 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/02628 ,  H01L21/02639 ,  H01L21/02642 ,  H01L21/02661

摘要： Provided is a method of forming a silicon thin-film which comprises a step of arranging in one or more parts of a liquid arranging surface liquid which contains a silicide comprising ring silane and/or a derivative thereof, such ring silane comprising silicon and hydrogen, and a step of forming a silicon thin-film by vaporizing silicide from liquid and supplying the silicide to a thin-film-forming surface.

摘要翻译： 提供一种形成硅薄膜的方法，其包括在一个或多个部分中布置包含硅烷和/或其衍生物的硅化物的液体排列表面液体的步骤，所述硅烷包括硅和氢， 以及通过从液体中蒸发硅化物并将硅化物供给到薄膜形成表面来形成硅薄膜的步骤。

公开(公告)号：US06518087B1

公开(公告)日：2003-02-11

申请号：US09701646

申请日：2000-11-30

申请人： Masahiro Furusawa ,  Shunichi Seki ,  Satoru Miyashita ,  Tatsuya Shimoda ,  Ichio Yudasaka ,  Yasuo Matsuki ,  Yasumasa Takeuchi

发明人： Masahiro Furusawa ,  Shunichi Seki ,  Satoru Miyashita ,  Tatsuya Shimoda ,  Ichio Yudasaka ,  Yasuo Matsuki ,  Yasumasa Takeuchi

IPC分类号： H01L2100

CPC分类号： H01L31/202 ,  H01L31/046 ,  H01L31/077 ,  H01L31/1872 ,  Y02E10/50 ,  Y02P70/521

摘要： A solar battery is provided having a structure in which at least two semiconductor thin-films are disposed one over the other between a pair of electrodes, each semiconductor thin-film differing from the other in the impurity concentration thereof and/or the type of semiconductor. Formation of at least one of the semiconductor thin-films consists of coating a liquid coating composition containing a silicon compound so as to form a coating film and a step of converting the coating film into a silicon film by heat treatment and/or light treatment.

摘要翻译： 提供了一种太阳能电池，其具有这样的结构，其中至少两个半导体薄膜彼此之间设置在一对电极之间，每个半导体薄膜在其杂质浓度和/或半导体的类型中彼此不同 。 至少一个半导体薄膜的形成包括涂覆含有硅化合物的液体涂料组合物以形成涂膜和通过热处理和/或光处理将涂膜转化为硅膜的步骤。

公开(公告)号：US07951627B2

公开(公告)日：2011-05-31

申请号：US12754940

申请日：2010-04-06

申请人： Masaya Ishida ,  Masahiro Furusawa ,  Katsuyuki Morii ,  Osamu Yokoyama ,  Satoru Miyashita ,  Tatsuya Shimoda

发明人： Masaya Ishida ,  Masahiro Furusawa ,  Katsuyuki Morii ,  Osamu Yokoyama ,  Satoru Miyashita ,  Tatsuya Shimoda

IPC分类号： H01L33/00

CPC分类号： H01L27/3274 ,  H01L51/0512 ,  H01L51/0516

摘要： An organic electroluminescent device including an organic thin-film transistor element having at least an active layer made of an organic material; and an organic electroluminescent element driven by the organic thin-film transistor element.

摘要翻译： 一种有机电致发光器件，包括至少具有由有机材料制成的有源层的有机薄膜晶体管元件; 以及由有机薄膜晶体管元件驱动的有机电致发光元件。

公开(公告)号：US07718453B2

公开(公告)日：2010-05-18

申请号：US11821878

申请日：2007-06-26

申请人： Masaya Ishida ,  Masahiro Furusawa ,  Katsuyuki Morii ,  Osamu Yokoyama ,  Satoru Miyashita ,  Tatsuya Shimoda

发明人： Masaya Ishida ,  Masahiro Furusawa ,  Katsuyuki Morii ,  Osamu Yokoyama ,  Satoru Miyashita ,  Tatsuya Shimoda

IPC分类号： H01L33/00

CPC分类号： H01L27/3274 ,  H01L51/0512 ,  H01L51/0516

摘要： An organic electroluminescent device comprising: an organic thin-film transistor element including at least an active layer made of an organic material; and an organic electroluminescent element driven by the organic thin-film transistor element.

摘要翻译： 一种有机电致发光器件，包括：有机薄膜晶体管元件，至少包括由有机材料制成的有源层; 以及由有机薄膜晶体管元件驱动的有机电致发光元件。

公开(公告)号：US20070249076A1

公开(公告)日：2007-10-25

申请号：US11821878

申请日：2007-06-26

申请人： Masaya Ishida ,  Masahiro Furusawa ,  Katsuyuki Morii ,  Osamu Yokoyama ,  Satoru Miyashita ,  Tatsuya Shimoda

发明人： Masaya Ishida ,  Masahiro Furusawa ,  Katsuyuki Morii ,  Osamu Yokoyama ,  Satoru Miyashita ,  Tatsuya Shimoda

IPC分类号： H01L33/00

CPC分类号： H01L27/3274 ,  H01L51/0512 ,  H01L51/0516

摘要： An organic electroluminescent device comprising: an organic thin-film transistor element including at least an active layer made of an organic material; and an organic electroluminescent element driven by the organic thin-film transistor element.