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    Semiconductor integrated circuit device and the process of the same
    1.
    发明授权
    Semiconductor integrated circuit device and the process of the same 失效
    半导体集成电路器件及其工艺相同

    公开(公告)号：US07132341B2

    公开(公告)日：2006-11-07

    申请号：US09974814

    申请日：2001-10-12

    申请人： Masashi Sahara ,  Fumiaki Endo ,  Masanori Kojima ,  Katsuhiro Uchimura ,  Hideaki Kanazawa ,  Masakazu Sugiura

    发明人： Masashi Sahara ,  Fumiaki Endo ,  Masanori Kojima ,  Katsuhiro Uchimura ,  Hideaki Kanazawa ,  Masakazu Sugiura

    IPC分类号： H01L21/336 ,  H01L21/44

    CPC分类号： H01L29/665 ,  G11C11/412 ,  H01L21/2633 ,  H01L21/28052 ,  H01L21/28518 ,  H01L21/32132 ,  H01L27/11 ,  H01L27/1104

    摘要： In a high-performance semiconductor integrated circuit, the standby current is reduced by preventing current leakage in a semiconductor integrated circuit device, for example, the memory cell of an SRAM. A gate electrode G is formed on semiconductor substrate 1 and n+-type semiconductor regions 17 (source/drain regions) are formed in the semiconductor substrate on both sides of this gate electrode. Within the same apparatus and under near-vacuum conditions, a depth of 2.5 nm or less is etched away from the surfaces of the source/drain regions and gate electrode, a film of Co is then formed on the source/drain regions, and thermal processing is applied to form CoSi2 layer 19a. As a result, current leakage in the memory cell can be prevented and this method can be applied to semiconductor integrated circuit devices that have low current consumption or are battery-driven.

    摘要翻译： 在高性能半导体集成电路中，通过防止半导体集成电路器件例如SRAM的存储单元中的电流泄漏来降低待机电流。 栅电极G形成在半导体衬底1上，并且在该栅电极两侧的半导体衬底中形成n + +型半导体区17（源/漏区）。 在相同的装置内和在近真空条件下，从源极/漏极区域和栅极电极的表面蚀刻2.5nm或更小的深度，然后在源极/漏极区域上形成Co膜，并且热源 施加处理以形成CoSi 2层19a。 结果，可以防止存储单元中的电流泄漏，并且该方法可以应用于具有低电流消耗或电池驱动的半导体集成电路器件。

    SCANNING ELECTRON MICROSCOPE AND METHOD FOR PREPARING SPECIMEN
    4.
    发明申请
    SCANNING ELECTRON MICROSCOPE AND METHOD FOR PREPARING SPECIMEN 审中-公开
    扫描电子显微镜及其制备方法

    公开(公告)号：US20140084159A1

    公开(公告)日：2014-03-27

    申请号：US14116697

    申请日：2012-03-14

    申请人： Kaori Yaeshima ,  Satoshi Takada ,  Fumiaki Endo ,  Tetsuya Niibori

    发明人： Kaori Yaeshima ,  Satoshi Takada ,  Fumiaki Endo ,  Tetsuya Niibori

    IPC分类号： H01J37/28 ,  G01N23/225

    CPC分类号： H01J37/28 ,  G01N23/2251 ,  H01J2237/2817 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    摘要： In related art, when a location to be analyzed is selected from inspection data, a relatively highly critical defect among entire defects is not selected as a defect to be analyzed. Further, when a mark is placed in a fixed position associated with a defect, the mark affects the defect itself depending on the shape and size of the defect, which is problematic in the following analysis made in an analysis apparatus. Moreover, in the case of a wafer with no pattern, a defect invisible to a SEM cannot be marked.To select a highly critical defect as a defect to be analyzed, an automatic classification result from a review SEM is used to select a defect to be analyzed. Further, to avoid an effect on a defect itself, a mark is placed in a position associated with the defect with the distance from the defect to the marking position changed on a defect basis. To this end, the shape and size of a defect is recognized based on ADR or ADC, and a mark is placed in a position set apart from the defect by a distance in consideration of a range to be affected by the mark. Further, in the case of a defect that is not observable with a SEM, a mark is placed by using an observation result from an optical microscope.

    摘要翻译： 在相关技术中，当从检查数据中选择待分析的位置时，不会选择整个缺陷中相当高度关键的缺陷作为要分析的缺陷。 此外，当标记被放置在与缺陷相关联的固定位置时，标记根据缺陷的形状和尺寸影响缺陷本身，这在分析装置中进行的以下分析中是有问题的。 此外，在没有图案的晶片的情况下，不能对SEM不可见的缺陷进行标记。 为了选择非常关键的缺陷作为要分析的缺陷，使用复查SEM的自动分类结果来选择要分析的缺陷。 此外，为了避免对缺陷本身的影响，将标记放置在与缺陷相关联的位置中，从缺陷到标记位置的距离在缺陷的基础上改变。 为此，基于ADR或ADC识别缺陷的形状和尺寸，并且考虑到受标记影响的范围，将标记放置在与缺陷相距一定距离的位置。 此外，在通过SEM不能观察到的缺陷的情况下，通过使用光学显微镜的观察结果来放置标记。

    IMAGE CLASSIFICATION STANDARD UPDATE METHOD, PROGRAM, AND IMAGE CLASSIFICATION DEVICE
    5.
    发明申请
    IMAGE CLASSIFICATION STANDARD UPDATE METHOD, PROGRAM, AND IMAGE CLASSIFICATION DEVICE 有权
    图像分类标准更新方法，程序和图像分类装置

    公开(公告)号：US20110274362A1

    公开(公告)日：2011-11-10

    申请号：US13142812

    申请日：2009-12-28

    申请人： Yuya Isomae ,  Fumiaki Endo ,  Tomohiro Funakoshi ,  Junko Konishi ,  Tsunehiro Sakai

    发明人： Yuya Isomae ,  Fumiaki Endo ,  Tomohiro Funakoshi ,  Junko Konishi ,  Tsunehiro Sakai

    IPC分类号： G06K9/62

    CPC分类号： G06K9/6263 ,  G01N21/94 ,  G01N21/95607 ,  G01N2021/8854 ,  G06K9/033 ,  G06K9/6254 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    摘要： The objective is to improve a classification standard. Classification standard data, in which is registered image data information that is the standard when image data is classified, and classification data, in which is registered image data information that is the result when newly input image data is classified using the classification standard data, are stored in a storage unit. An image classification device is characterized in that when any image data information of the image data that is registered in the classification data is selected by means of an input unit, and an instruction to additionally register the selected image data information in the classification standard data is input by means of the input unit, the selected image data information is additionally registered in the classification standard data.

    摘要翻译： 目标是提高分类标准。 分类标准数据，其中作为分类图像数据时的标准的登记图像数据信息，以及分类数据，其中作为新输入图像数据使用分类标准数据分类的结果的登记图像数据信息是分类数据， 存储在存储单元中。 图像分类装置的特征在于，当通过输入单元选择登记在分类数据中的图像数据的任何图像数据信息，并且在分类标准数据中附加地注册所选择的图像数据信息的指令是 通过输入单元输入，所选择的图像数据信息被附加地登记在分类标准数据中。

    Method and apparatus for detecting patterns
    6.
    发明授权
    Method and apparatus for detecting patterns 失效
    用于检测图案的方法和装置

    公开(公告)号：US5153444A

    公开(公告)日：1992-10-06

    申请号：US641001

    申请日：1991-01-14

    申请人： Shunji Maeda ,  Takashi Hiroi ,  Hitoshi Kubota ,  Hiroshi Makihira ,  Fumiaki Endo

    发明人： Shunji Maeda ,  Takashi Hiroi ,  Hitoshi Kubota ,  Hiroshi Makihira ,  Fumiaki Endo

    IPC分类号： G01N21/956 ,  G06T7/00

    CPC分类号： G06T7/001 ,  G01N21/95607 ,  G01N2021/8896 ,  G01N2021/95615 ,  G06T2207/30148

    摘要： A method and apparatus for detecting a defect in a circuit pattern by detecting a gray image signal from each of a plurality of circuit patterns as objects of inspection, which circuit patterns have been fabricated so as to be identical with one another, and detecting a defect as a difference of edge position between two circuit patterns by comparing the detected gray image signal of one circuit pattern with the detected gray image signal of another circuit pattern.

    摘要翻译： 通过检测作为检查对象的多个电路图案中的每一个的灰度图像信号来检测电路图案中的缺陷的方法和装置，其中已经制造出彼此相同的电路图案，并且检测缺陷 作为两个电路图案之间的边缘位置的差异，通过将检测到的一个电路图案的灰度图像信号与另一个电路图案的检测到的灰度图像信号进行比较。

    Image classification standard update method, program, and image classification device
    7.
    发明授权
    Image classification standard update method, program, and image classification device 有权
    图像分类标准更新方法，程序和图像分类装置

    公开(公告)号：US08625906B2

    公开(公告)日：2014-01-07

    申请号：US13142812

    申请日：2009-12-28

    申请人： Yuya Isomae ,  Fumiaki Endo ,  Tomohiro Funakoshi ,  Junko Konishi ,  Tsunehiro Sakai

    发明人： Yuya Isomae ,  Fumiaki Endo ,  Tomohiro Funakoshi ,  Junko Konishi ,  Tsunehiro Sakai

    IPC分类号： G06K9/62 ,  G06K9/54

    CPC分类号： G06K9/6263 ,  G01N21/94 ,  G01N21/95607 ,  G01N2021/8854 ,  G06K9/033 ,  G06K9/6254 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    摘要： The objective is to improve a classification standard. Classification standard data, in which is registered image data information that is the standard when image data is classified, and classification data, in which is registered image data information that is the result when newly input image data is classified using the classification standard data, are stored in a storage unit. An image classification device is characterized in that when any image data information of the image data that is registered in the classification data is selected by means of an input unit, and an instruction to additionally register the selected image data information in the classification standard data is input by means of the input unit, the selected image data information is additionally registered in the classification standard data.

    摘要翻译： 目标是提高分类标准。 分类标准数据，其中作为分类图像数据时的标准的登记图像数据信息，以及分类数据，其中作为新输入图像数据使用分类标准数据分类的结果的登记图像数据信息是分类数据， 存储在存储单元中。 图像分类装置的特征在于，当通过输入单元选择登记在分类数据中的图像数据的任何图像数据信息，并且在分类标准数据中附加地注册所选择的图像数据信息的指令是 通过输入单元输入，所选择的图像数据信息被附加地登记在分类标准数据中。

    Apparatus for artificial kidney, quality evaluating device for dialyzing fluid and dialyzing means using the same, and fluid circuit
    9.
    发明授权
    Apparatus for artificial kidney, quality evaluating device for dialyzing fluid and dialyzing means using the same, and fluid circuit 失效
    用于人造肾的装置，用于透析液的质量评估装置和使用其的透析装置以及流体回路

    公开(公告)号：US06555058B2

    公开(公告)日：2003-04-29

    申请号：US09742341

    申请日：2000-12-22

    申请人： Masato Kamibayashi ,  Jiro Sawamoto ,  Shinji Motoyama ,  Fumiaki Endo

    发明人： Masato Kamibayashi ,  Jiro Sawamoto ,  Shinji Motoyama ,  Fumiaki Endo

    IPC分类号： A61M3700

    CPC分类号： A61M1/16 ,  A61M1/1609 ,  A61M1/1698 ,  A61M1/28 ,  A61M1/288 ,  A61M16/06 ,  A61M16/0672 ,  A61M16/101 ,  A61M2202/0275 ,  A61M2230/205

    摘要： An apparatus which can solve the problem of participation of NO in hypotension in dialysis, hypoxia in dialysis, and the like during artificial dialysis by continuously monitoring fluctuation in a blood gas, an ionic component, or the like in body fluid such as blood and by suppressing these diseases, and quality evaluating means of an artificial dialyzer and dialyzing fluid are provided. An apparatus for an artificial kidney comprises a measurement monitor for continuously measuring nitric oxide as a component of body fluid or liquid for treatment. Further, an apparatus for an artificial kidney comprises a measurement monitor for measuring a component of body fluid or liquid for treatment, a display means for comparing a measurement measured by the measurement monitor with a control value, and when the measurement equals the control value, displays the equality, and oxygen supplying means.

    摘要翻译： 通过连续监测血液中的血液中的血液，离子成分等的波动，通过连续监测血液等体液中的血液，离子成分等，能够解决人工透析期间透析中的低血压，透析中的缺氧等问题的装置， 抑制这些疾病，提供人造透析器和透析液的质量评价装置。 用于人造肾的装置包括用于连续测量一氧化氮作为体液或液体的组分用于治疗的测量监测器。 此外，人造肾装置包括：测量体液或液体处理用部件的测定用监视器，将由测定监视器测得的测定值与控制值进行比较的显示单元，在测定值等于控制值时， 显示相等性和氧气供给装置。

    Thermoplastic polymer composition and medical devices made of the same
    10.
    发明授权
    Thermoplastic polymer composition and medical devices made of the same 失效
    热塑性聚合物组合物和医疗器械相同

    公开(公告)号：US5417981A

    公开(公告)日：1995-05-23

    申请号：US53499

    申请日：1993-04-28

    申请人： Fumiaki Endo ,  Nobuko Saiga

    发明人： Fumiaki Endo ,  Nobuko Saiga

    IPC分类号： A61L27/18 ,  A61L29/06 ,  A61L33/00 ,  A61K9/00 ,  A61F2/06 ,  A61M25/00

    CPC分类号： A61L33/0041 ,  A61L27/18 ,  A61L29/06

    摘要： A thermoplastic polymer composition containing a protease inhibiting substance and medical devices entirely or partly made of the thermoplastic polymer composition.Various medical devices having a good compatibility with blood can be made easily by melt-molding the thermoplastic polymer composition. The anti-thrombotic property of the medical devices lasts for a longer time because the protease inhibiting substance exudes out to the surface if rubbed off.

    摘要翻译： 含有蛋白酶抑制物质和全部或部分由热塑性聚合物组合物制成的医疗器械的热塑性聚合物组合物。 通过熔融成型热塑性聚合物组合物，可以容易地制备与血液良好的相容性的各种医疗装置。 医疗器械的抗血栓形成性能持续较长时间，因为蛋白酶抑制物质如果被擦去，就会渗出到表面。