摘要:
An operation history display device of a numerical control apparatus by which a fault causing factor can be easily specified. Key input means outputs the key signal of an operation key depressed by an operator to input a command to the numerical control apparatus. Change detection means detects a change of an output signal and outputs the signal to which the change is caused. Operation history control means stores the signal name and the like of the signal to which the change is caused to a history buffer together with a present time output from a timer as history data. Thereafter, display control means displays the history data stored in the history buffer on a display unit in response to a predetermined operation performed by the operator.
摘要:
A magnetron sputtering apparatus includes: a target provided in a sputtering chamber; a susceptor opposed to the target; a high-frequency power supply connected to the susceptor; a plate provided outside the sputtering chamber and coaxial with a central axis of the target; a rotary motion mechanism configured to rotate the plate about the central axis; S-pole magnets placed on one side of the plate with their S-pole end directed to the target; and first and second N-pole magnets placed on the one side of the plate with their N-pole end directed to the target. The first N-pole magnets are placed along a circle coaxial with the plate and opposed to an outer peripheral vicinity of the target. The S-pole magnets are placed inside the first N-pole magnets and along a circle coaxial with the plate. The second N-pole magnets are placed inside the S-pole magnets and along a circle coaxial with the plate. Magnetic flux density of the first N-pole magnets and the second N-pole magnets are higher than magnetic flux density of the S-pole magnets.
摘要:
A manufacturing method of a semiconductor device according to the present invention comprises: laminating a surface protective sheet to a circuit surface side of a wafer formed with grooves which divide each circuit wherein an adhesive film is adhered on the circuit surface of the wafer; reducing the thickness of the wafer and finally dividing the wafer into individual chips by grinding a back face of the wafer; picking up individual chips together with the adhesive film; die-bonding said individual chip to predetermined position of a chip mounting substrate via said adhesive film; fixing the chip to the chip mounting substrate by heating the die-bonded chip having the adhesive film; and applying a static pressure larger than an ambient pressure by 0.05 MPa or more to a stacked body including the adhesive film one or more times, at any point between adhering the wafer to the adhesive film and fixing the chip to the chip mounting substrate.
摘要:
An image correcting device (1) is include of a feature point detecting element (3, 4 and 5) for detecting sets of feature points (QA0, QA1, . . . ) from a plurality of images (2) picked up at a plurality of places (a, b) by a pickup element, a change detecting element (7) for detecting relative changes among images with respect to the detected sets of the feature points, and a first specifying element (8) for specifying rotation quantities of the image pickup element among the places in accordance with the detected changes. The feature point detecting element detects set of points belonging to a plane-like stationary object (310) as sets of feature points.
摘要:
A carbon monoxide removing catalyst such as a ruthenium supporting catalyst is provided for removing, through oxidation thereof, carbon monoxide from an alcohol reformed gas containing hydrogen and carbon monoxide to be supplied to a fuel cell. For its activation, the catalyst is caused to contact an inactive gas or a hydrogen-containing inactive gas consisting of less than 50 volume % of hydrogen gas and the remaining volume of inactive gas, thereby to avoid poisoning of the electrode of the fuel cell with carbon monoxide.
摘要:
Described is a sheet for forming a protective film, which can be used suitably in a process where marking is made on the protective film formed on work such as a wafer and the like. The sheet includes a release sheet and a protective film forming layer provided on the release surface of the release sheet, wherein the protective film forming layer includes 100 parts by weight of an epoxy resin, 50 to 200 parts by weight of a binder polymer, and 100 to 2,000 parts by weight of fillers, 30% by weight or more of total 100% by weight of the said epoxy resin being selected from epoxy resins represented by the following formulae (I) and (II); wherein, X's are —O—, —OCH(CH3)O— and the like; R's are a polyether skeleton and the like; and n's are in the range of 1 to 10.
摘要:
To provide with a navigation apparatus capable of efficient route guidance in which a date on which route guidance process is performed coincides with an available date and time, and in consideration with a stay length. The navigation apparatus in this implementation is provided with a GPS reception section, a sensor section, a map data storage section in which data such as map data is recorded in advance, and a system control section which generates design data and performs process management on the basis of the generated design data. The system control section searches routes on the basis of spot data groups related to an extracted destination, generates route data on the basis of the search results, the spot data and an input departure time, and manages route guidance on the basis of the generated route data.
摘要:
A fabrication method of a semiconductor device comprises the steps of forming a metal thin film Whose oxide is insulative on sidewall of a hole formed in a semiconductor substrate and forming an insulating metal oxide film by oxidizing the metal thin film.
摘要:
A management system of a machine equipped with a driving-power source reads out maintenance conditions from a storage means of maintenance management information when data and conditions, concerned about a maintenance management of a machine, the features of the machine, and so on, including the maintenance conditions, are inputted from the input means. Then, information about predicted maintenance management under a certain operation time of the machine is predicted with reference to the maintenance conditions. Subsequently, the information about the predicted maintenance management is represented on a display means. Furthermore, a maintenance predicted value is previously stored in a data base or the like with respect to the maintenance within an operation time under the contract or within a contract term for each of a plurality of contract ranks. A maintenance actual result value of the machine being entered is accumulatively stored. After a termination of the maintenance contract of the machine, the maintenance predicted value that corresponds to a model and a contract rank of the machine is read out, and simultaneously the maintenance actual result value of the machine is read out, followed by making a judgment whether the maintenance actual result value is larger or smaller than the maintenance contract predicted value.
摘要:
When the quick traverse play back command (or, quick returning play back command) of the audio information by the compression audio information is given to the play back apparatus, by the control of the control section, the special audio according to the temporarily stored data stored in the first storage means is repeatedly played back, instead of the play back of the audio by the ordinary play back operation.