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    Fuel injector holder
    3.
    发明授权
    Fuel injector holder 有权
    燃油喷射器支架

    公开(公告)号：US08813722B2

    公开(公告)日：2014-08-26

    申请号：US12852905

    申请日：2010-08-09

    申请人： William T. Harvey ,  Steven J. Miller ,  Hiroaki Saeki

    发明人： William T. Harvey ,  Steven J. Miller ,  Hiroaki Saeki

    IPC分类号： F02M61/14

    CPC分类号： F02M55/005 ,  F02M69/465 ,  F02M2200/852 ,  F02M2200/853 ,  Y10T29/53

    摘要： A fuel injector for an internal combustion engine having an elongated body with a fuel inlet end and a fuel discharge end. The injector body includes an outwardly extending plate attached at a position between its ends and this plate includes at least one radially outwardly extending tab so that the cross-sectional shape of the plate is noncircular. A fuel cup receives the fuel inlet end of the fuel injector and includes a radially inwardly extending ledge at a mid position of the cavity. This ledge includes a through bore complementary in shape to the shape of the plate so that, with the fuel injector and plate aligned at a predetermined angular assembly position, the plate passes through the ledge upon insertion of the fuel injector into the cavity. Thereafter, rotation of the fuel injector and attached plate to a locking position positions the tabs above the ledge thus locking the fuel injector to the fuel cup.

    摘要翻译： 一种用于内燃机的燃料喷射器，具有具有燃料入口端和燃料排出端的细长主体。 喷射器主体包括附接在其端部之间的位置处的向外延伸的板，并且该板包括至少一个径向向外延伸的突片，使得板的横截面形状是非圆形的。 燃料杯接收燃料喷射器的燃料入口端，并且在空腔的中间位置包括径向向内延伸的凸缘。 该凸缘包括与板的形状互补的通孔，使得当燃料喷射器和板在预定的角度组装位置对准时，板将燃料喷射器插入空腔中时通过凸缘。 此后，燃料喷射器和附接板旋转到锁定位置将突出部定位在突出部上方，从而将燃料喷射器锁定到燃料杯。

    Device for correcting reference position for transfer mechanism, and correction method
    6.
    发明申请
    Device for correcting reference position for transfer mechanism, and correction method 有权
    用于校正传送机构的参考位置的装置和校正方法

    公开(公告)号：US20060015279A1

    公开(公告)日：2006-01-19

    申请号：US10534709

    申请日：2003-11-13

    申请人： Hiroaki Saeki ,  Toshio Kamigaki

    发明人： Hiroaki Saeki ,  Toshio Kamigaki

    IPC分类号： G01P21/00

    CPC分类号： B62D57/032 ,  B25J9/1692 ,  B25J19/021 ,  H01L21/67766 ,  H01L21/681

    摘要： A conveying mechanism (22) is disposed in a conveying vessel (10). The conveying mechanism includes: a moving member (38) which can move in a horizontal moving direction; a rotary table (48) attached to the moving member such that the rotary table can turn in a horizontal turning direction and move in the vertical direction; and two arm mechanisms which can bend and stretch in a horizontal operating direction relative to the rotary table. A reference position correcting device for the conveying mechanism includes: a light emitter (66) for emitting a sensing light beam (L); a light detector (68) for receiving the sensing light beam; and correcting means (62). The light emitter and the light detector are fixedly positioned on the conveying vessel. The correcting means corrects reference positions of the rotary table in the moving, vertical, and turning directions, and corrects a reference position of each of the arm mechanisms in the operating direction, based on a detection by the light detector about a light-transmitting state and a light-shielding state of the sensing light beam switched in compliance with the movement and the turn of the rotary table. A light-shielding member is attached on the rotary table, for switching the sensing light beam between the light-transmitting state and the light-shielding state, in compliance with the movement and the turn of the rotary table.

    摘要翻译： 输送机构（22）设置在输送容器（10）中。 输送机构包括：能够沿水平移动方向移动的移动部件（38） 旋转台（48），其附接到所述移动构件，使得所述旋转台可以在水平转动方向上转动并沿垂直方向移动; 以及能够相对于旋转台在水平操作方向上弯曲和拉伸的两个臂机构。 用于输送机构的基准位置校正装置包括：用于发射感测光束（L）的光发射器（66）; 用于接收感测光束的光检测器（68）; 和校正装置（62）。 光发射器和光检测器固定地定位在输送容器上。 校正装置基于光检测器关于透光状态的检测，校正旋转台在移动，垂直和转动方向上的参考位置，并且校正每个臂机构在操作方向上的基准位置 并且所述感测光束的光屏蔽状态根据所述旋转台的移动和转动而切换。 遮光构件安装在旋转工作台上，用于根据旋转台的运动和转动将传感光束在透光状态和遮光状态之间切换。

    Teaching method and processing system
    7.
    发明申请
    Teaching method and processing system 审中-公开
    教学方法和处理系统

    公开(公告)号：US20050220582A1

    公开(公告)日：2005-10-06

    申请号：US11075707

    申请日：2005-03-10

    申请人： Motohiro Kumagai ,  Shigeru Ishizawa ,  Hiroaki Saeki

    发明人： Motohiro Kumagai ,  Shigeru Ishizawa ,  Hiroaki Saeki

    IPC分类号： B65B21/02 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68

    CPC分类号： H01L21/68 ,  H01L21/67167 ,  H01L21/67259 ,  H01L21/67778

    摘要： A teaching method for storing in a controller a target moving position of a transfer mechanism in a processing system includes the steps of temporarily stopping the transfer mechanism in the middle of a moving route to a temporary moving destination position so as to make sure that the transfer mechanism does not interfere with another members at a potential interference location where there is a possibility that the transfer mechanism interferes with said another member, resuming to move the temporarily stopped transfer mechanism by inputting a moving instruction, repeating the temporarily stopping step and the resuming step, and when the pick reaches the temporary moving destination position, storing, as the target moving position, in the controller a position of the pick after adjusting and moving or without adjusting and moving the position of the pick.

    摘要翻译： 一种用于在控制器中存储处理系统中的传送机构的目标移动位置的教学方法包括以下步骤：将移动路径中的传送机构临时停止到临时移动目的地位置，以确保传送 机构不影响潜在干扰位置处的另一构件，其中存在转印机构与所述另一构件干涉的可能性，通过输入移动指令恢复移动临时停止的转移机构，重复暂时停止步骤和恢复步骤 并且当拾取器到达临时移动目的地位置时，在调节和移动之后将控制器中的位置存储在控制器中，或者不调整和移动拾取器的位置。

    Substrate support mechanism for semiconductor processing system
    8.
    发明申请
    Substrate support mechanism for semiconductor processing system 审中-公开
    半导体处理系统的基板支撑机构

    公开(公告)号：US20050155823A1

    公开(公告)日：2005-07-21

    申请号：US10503947

    申请日：2003-01-29

    申请人： Tsutomu Hiroki ,  Hiroaki Saeki

    发明人： Tsutomu Hiroki ,  Hiroaki Saeki

    IPC分类号： B65G49/00 ,  H01L21/677 ,  H01L21/687 ,  B66B11/02

    CPC分类号： H01L21/68742 ,  H01L21/68 ,  H01L21/68714 ,  H01L21/6875 ,  Y10S414/139

    摘要： A supporting mechanism (12A) is used for transferring a target substrate (W) in cooperation with a transfer arm (32), in a semiconductor processing system. The supporting mechanism includes first and second holding portions (38A to 38C, 40A to 40C) each configured to be moved up and down and transfer a substrate to and from the transfer arm. The first and second holding portions are configured to be moved relative to each other in a vertical direction without spatially interfering with each other, and support substrates at substantially the same horizontal coordinate position. The supporting mechanism further includes first and second drives (46, 48) configured to move the first and second holding portions up and down, and a controller (68) configured to control the first and second drives. The controller is arranged to control the first and second drives to alternatively support a substrate by the first and second holding portions.

    摘要翻译： 在半导体处理系统中，支撑机构（12A）用于与传送臂（32）协作传送目标衬底（W）。 支撑机构包括构造成上下移动的第一和第二保持部分（38A至38C，40A至40C），并将基板传送到传送臂和从传送臂传送。 第一保持部和第二保持部被配置为在垂直方向上相对于彼此移动而没有彼此空间干涉，并且将基板支撑在基本上相同的水平坐标位置。 支撑机构还包括构造成使第一和第二保持部分上下移动的第一和第二驱动器（46,48）以及被配置为控制第一和第二驱动器的控制器（68）。 控制器被布置成控制第一和第二驱动器以由第一和第二保持部分交替地支撑衬底。

    Semiconductor processing system
    9.
    发明申请
    Semiconductor processing system 失效
    半导体处理系统

    公开(公告)号：US20050006230A1

    公开(公告)日：2005-01-13

    申请号：US10487241

    申请日：2002-08-29

    申请人： Masaki Narushima ,  Hiroaki Saeki

    发明人： Masaki Narushima ,  Hiroaki Saeki

    IPC分类号： B65G49/00 ,  C23C14/56 ,  H01L21/00 ,  H01L21/02 ,  H01L21/677 ,  C25B9/00 ,  H01L21/68

    CPC分类号： H01L21/67167 ,  H01L21/67017 ,  H01L21/67184

    摘要： A semiconductor processing system includes a common transfer chamber (34) having first and second compartments (46, 48) partitioned by a partition wall (44). First and second vacuum processing apparatuses (32E, 32A) are respectively connected to the first and second compartments (46, 48). A pressure control section (PCS) controls the pressures inside the first and second compartments (46, 48). The pressure control section (PCS) includes first and second vacuum pumps (68, 70) respectively connected to the first and second compartments (46, 48), and a line (76) connecting the delivery side of the second vacuum pump (70) to the suction side of the first vacuum pump (68). The pressure control section (PCS) performs a setting such that a second ultimate pressure or lowest operational pressure of the second compartment (48) is lower than a first ultimate pressure or lowest operational pressure of the first compartment (46).

    摘要翻译： 半导体处理系统包括具有由分隔壁（44）分隔开的第一和第二隔室（46,48）的公共传送室（34）。 第一和第二真空处理装置（32E，32A）分别连接到第一和第二隔室（46,48）。 压力控制部分（PCS）控制第一和第二隔室（46,48）内部的压力。 压力控制部（PCS）包括分别连接到第一和第二隔室（46,48）的第一和第二真空泵（68,70）和连接第二真空泵（70）的输出侧的管线（76） 到第一真空泵68的吸入侧。 压力控制部（PCS）执行使得第二隔室（48）的第二极限压力或最低操作压力低于第一隔室（46）的第一极限压力或最低操作压力的设定。

    Device for attaching target substrate transfer container to semiconductor processing apparatus
    10.
    发明授权
    Device for attaching target substrate transfer container to semiconductor processing apparatus 有权
    用于将目标基板转移容器附着到半导体处理装置的装置

    公开(公告)号：US06676356B2

    公开(公告)日：2004-01-13

    申请号：US09950640

    申请日：2001-09-13

    申请人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Yasushi Taniyama

    发明人： Hiroaki Saeki ,  Yoshiaki Sasaki ,  Yasushi Taniyama

    IPC分类号： H01J502

    CPC分类号： H01L21/67775

    摘要： A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to project upward from the table through the opening portion, and to engage with the first engaging portion of the transfer container. A first actuator is disposed to apply a swing-driving force to the clamp. The first actuator has a reciprocation rod pivotally connected to the clamp, and is swingably supported on the lower side of the table.

    摘要翻译： 用于转移容器的工作台设置有形成在其中的开口部分。 夹具可摆动地支撑在桌子的下侧。 夹具具有第二接合部分钩，以从桌子向上突出穿过开口部分，并与转移容器的第一接合部分接合。 第一致动器设置成向夹具施加摆动驱动力。 第一致动器具有枢转地连接到夹具的往复杆，并且可摆动地支撑在工作台的下侧。