摘要:
An apparatus for use in a crystal manufacturing system based on a floating zone method or Czochralski method, adapted to control a quantity relating to the diameter of a crystal rod at the crystallization boundary, and designed to reduce hunting in the control of the quantity relating to the crystal diameter so as to prevent disturbance in crystallization and reduce irregularities in the surface of the crystal rod even if there is a discrepancy between a predetermined pattern and the ideal pattern with respect to the quantity to be controlled. The apparatus has a controller provided with: a program setter (72) adapted to output a quantity based on a predetermined pattern written in the controller in response to a detected value of the quantity relating to the crystal diameter at the crystallization boundary (24) or to the length of the crystal rod (18); a first adjuster (84) for performing a PI or PID control action in response to the difference between the detected value and the desired value of the quantity relating to the crystal diameter at the crystallization boundary (24); a second adjuster (76) for performing, in response to the difference between the detected value and the desired value of the quantity relating to the crystal diameter at the crystallization boundary (24), I.sup.2 control action for additional time-integration of a value obtained by time-integration of this difference; and a superposer (78) for outputting, as an adjustment amount, a value of linear combination between the program setter (72), the first adjuster (84), and the second adjuster (76).
摘要:
A method of controlling a floating zone applied to a crystal manufacturing system based on the FZ method and designed to enable the diameter at the crystallization boundary and the axial length of the floating zone or other similar quantities to desired values, in which a floating zone (20) is imaged with an imaging device (30); geometric quantities of the floating zone is measured from the image thereby obtained; the electric power (P) supplied to an induction heating coil (12) and the speed (V.sub.p) at which a raw-material rod (16) is moved relative to the induction heating coil so that the geometric quantities become equal to desired values. The geometric values include one Z.sub.i of the axial length of the floating zone, the distance (L) between the induction heating coil and a crystallization boundary (24) and the diameter (D.sub.n) of a melt neck portion located on the side of the crystallization boundary at a predetermined distance from the induction heating coil, and one D.sub.i of the diameter (D.sub.s) of the crystallization boundary and the diameter (D.sub.m) of a melt shoulder portion (34) located between the crystallization boundary and the restricted portions at a predetermined distance (h.sub.m) from the crystallization boundary.
摘要:
A square substrate has a pair of opposed major surfaces and peripheral end faces therebetween, wherein a tapered edge portion is disposed between the peripheral end face and each major surface to define an inner boundary with the major surface, and has a width of 0.2–1 mm from the peripheral end face. Both or either one of the major surfaces of the substrate has a flatness of up to 0.5 μm in an outside region of the substrate that extends between a position spaced 3 mm inward from the peripheral end face and the inner boundary of the tapered edge portion.
摘要:
In a current shared memory cycle, the memory access band value of each bus master is calculated at any time and discriminated to determine the next memory cycle control before completion of the current shared memory cycle, so that the minimum memory access band value required by each bus master is maintained with the result that the shared memory can be efficiently utilized. Thus, there is provided a shared memory control apparatus and a shared memory control method, capable of realizing a memory control of an excellent efficiency by maintaining the memory access band width per unit time, required by the master.
摘要:
A method for manufacturing an optical fiber comprises setting a heating condition for heating a glass rod, which is a parent material of the optical fiber, and an elongating speed of the glass rod based on a prescribed numerical value which changes with a progress of elongation of the glass rod; heating and elongating the glass rod to generate a preform based on the heating condition and the elongating speed which are set by the setting; and drawing the preform to a filament-like form by further heating the preform to generate the optical fiber.
摘要:
At the time of forming an alloy composition gradient layer 4 of gallium arsenide phosphide GaAs.sub.x P.sub.1-x having an arsenic alloy composition x changed in such a range as not to exceed a predetermined alloy composition a with an increase of a layer thickness d between a GaP layer 3 and a composition constant layer 5 of gallium arsenide phosphide GaAs.sub.a P.sub.1-a having the predetermined alloy composition a to be grown above the GaP layer; the alloy composition x is abruptly ascended as in composition ascending zones C11 to C13 with the ascended thickness d of an epitaxial layer and then descended as in crystal stabilizing zones S11 to S13 in such a range as not to cancel the previous ascent amount. One or more combinations of such ascent and descent in the alloy composition are repeated to form as distributed in the alloy composition gradient layer 4, and then the alloy composition x is ascended to the predetermined alloy composition a. Thereby there is obtained a compound semiconductor epitaxial wafer which can effectively eliminate stresses caused by lattice mismatching, can be made thinner with an excellent productivity, and can have a high luminance due to employment of a reflective layer.
摘要:
In a method of manufacturing wrinkled sheet tobacco by wetting a raw material powder containing tobacco with water, extruding the resultant wet powder through a gap between a pair of rollers, and separating sheet tobacco attached to the surface of one roller with a doctor knife, one of the substances selected from those enumerated below is added to the raw material powder in an amount specified below: (1) 4 to 10% by weight of an .alpha.-starch or propylene glycol alginate ester, (2) 4 to 11% by weight of a hydrolyzed starch having a molecular weight of 100,000 to 900,000, gum arabic, a carboxymethyl cellulose salt having a molecular weight of 10,000 to 20,000, or a high methoxyl pectin having a degree of methoxylation of 7 to 17% and a degree of esterification of 62 to 77%, and (3) a mixture of 1.9 to 7.9% by weight of a 4,4,6-triglucosaccharide polymer and 1.3 to 3.2% by weight of sodium carboxymethyl cellulose.
摘要:
A method for manufacturing a compound semiconductor substrate includes at least the processes of epitaxially growing a quaternary light emitting layer composed of AlGaInP on a GaAs substrate; vapor-phase growing a p-type GaP window layer on a first main surface of the quaternary light emitting layer, the first main surface being opposite to the GaAs substrate; removing the GaAs substrate; and epitaxially growing an n-type GaP window layer on a second main surface of the light emitting layer, the second main surface being located at a side where the GaAs substrate is removed. The method includes the process of performing a heat treatment under a hydrogen atmosphere containing ammonia after the process of removing the GaAs substrate and before the process of epitaxially growing the n-type GaP window layer.
摘要:
A method for manufacturing an optical fiber comprises setting a heating condition for heating a glass rod, which is a parent material of the optical fiber, and an elongating speed of the glass rod based on a prescribed numerical value which changes with a progress of elongation of the glass rod; heating and elongating the glass rod to generate a preform based on the heating condition and the elongating speed which are set by the setting; and drawing the preform to a filament-like form by further heating the preform to generate the optical fiber.
摘要:
A phase shift mask blank includes a transparent substrate and a phase shift film composed primarily of a metal and silicon. The substrate has an etch rate A and the phase shift film has an etch rate B when the blank is patterned by reactive ion etching, such that the etch selectivity B/A is at least 5.0. When a phase shift mask is manufactured from the blank, the substrate is less prone to overetching, providing good controllability and in-plane uniformity of the phase shift in patterned areas. The phase shift mask can be used to fabricate semiconductor integrated circuits to a smaller minimum feature size and a higher level of integration.