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公开(公告)号：US20070064992A1
公开(公告)日：2007-03-22
申请号：US11470884
申请日：2006-09-07
申请人： Michael Teich , Juliane Busch , Axel Becker , Ralf Keller , Jorg Kiesewetter , Ulf Hackius
发明人： Michael Teich , Juliane Busch , Axel Becker , Ralf Keller , Jorg Kiesewetter , Ulf Hackius
IPC分类号： G06K9/00
CPC分类号： G06T7/001
摘要： A process is provided for inspection of a variety of structures on the basis of a golden template, that was attained by recording and statistical analysis of greyscale pictures and is compared to the greyscale picture of the structure to be evaluated based on position. The underlying task is to report any such inspection process, with which a positioning of the test structure relative to the golden template and a structure detection with sub-pixel accuracy is carried out. In positioning of each further structure to be recorded, which follows a first recorded structure, the further structure is fundamentally positioned in accordance with the first positioned structure, applicable characteristic values of the greyscale picture recorded in this position are determined and hence a degree of similarity is determined. On this basis, the position of further structures relative to the primary position are determined and corrected with sub-pixel accuracy, before a new greyscale picture is recorded, which forms the basis for further analysis.
摘要翻译： 提供了一种基于黄色模板来检查各种结构的过程，这是通过记录和统计分析灰度图像而获得的，并且与基于位置的待评估结构的灰度图像进行比较。 基本任务是报告任何这样的检查过程，通过该过程，测试结构相对于黄金模板的定位和进行子像素精度的结构检测。 在按照第一记录结构进行记录的每个另外的结构的定位中，根据第一定位结构基本上定位另外的结构，确定记录在该位置的灰度图像的适用特征值，并因此确定相似度 决心，决意，决定。 在此基础上，在记录新的灰度图像之前，以子像素精度确定和校正进一步结构相对于主位置的位置，这是进一步分析的基础。
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公开(公告)号：US07573283B2
公开(公告)日：2009-08-11
申请号：US11765019
申请日：2007-06-19
申请人： Axel Schmidt , Frank Fehrmann , Ulf Hackius , Stojan Kanev , Steffen Laube , Jorg Kiesewetter
发明人： Axel Schmidt , Frank Fehrmann , Ulf Hackius , Stojan Kanev , Steffen Laube , Jorg Kiesewetter
IPC分类号： G01R31/06
CPC分类号： G01R31/2891
摘要： A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.
摘要翻译： 公开了一种用于测量探针台中的晶片和其它半导体部件的方法，其用于电子部件的检查和测试。 被测器件由卡盘和至少一个电探头通过探针支架和被测器件保持，并且探针通过具有电驱动器的定位装置相对于彼此选择性地定位，并且被测器件被接触。 定位装置的驱动器保持在准备状态，直到建立接触并且在建立接触之后和在测试装置的测量之前被关闭。
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3.发明授权Method for increasing the accuracy of the positioning of a first object relative to a second object 有权提高第一物体相对于第二物体的定位精度的方法公开(公告)号：US08094925B2
公开(公告)日：2012-01-10
申请号：US12619327
申请日：2009-11-16
CPC分类号： G06T7/74 , G06T2207/30148
摘要： A method is provided for increasing the accuracy of the positioning of a first object relative to a second object. The method overcomes the disadvantageous influence of thermal drift between a first and a second object during a positioning of a first object on a second object. The method finds applications in manufacturing, for example, in the manufacturing of semiconductor components. The method utilizes recognition of structures on the second object which have a minimum structure width. At a first instant, using one recognition procedure, the first object is positioned on the second object in a desired position. The relative displacement of the two objects is determined at the first instant and on at least one subsequent instant. A second recognition procedure may be used for this purpose. The second recognition procedure may have a resolution accuracy which is different than the resolution accuracy of the first resolution procedure. The second recognition procedure may be a pattern recognition method. The relative displacement determined at the second instant is used to correct the positioning of the first and second objects as necessary to maintain a desired position of the two objects.
摘要翻译： 提供了一种用于增加第一物体相对于第二物体的定位精度的方法。 该方法克服了在将第一物体定位在第二物体上时第一和第二物体之间的热漂移的不利影响。 该方法在例如制造半导体部件的制造中得到应用。 该方法利用具有最小结构宽度的第二物体上的结构的识别。 在第一时刻，使用一个识别过程，第一个物体位于第二个物体上所需的位置上。 两个对象的相对位移在第一时刻和至少一个后续时刻确定。 为此目的可以使用第二识别程序。 第二识别程序可以具有与第一解析过程的分辨率精度不同的分辨率精度。 第二识别程序可以是模式识别方法。 在第二时刻确定的相对位移用于根据需要校正第一和第二物体的定位，以保持两个物体的期望位置。
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4.发明申请METHOD FOR INCREASING THE ACCURACY OF THE POSITIONING OF A FIRST OBJECT RELATIVE TO A SECOND OBJECT 有权相对于第二个对象增加第一个对象定位精度的方法公开(公告)号：US20100111403A1
公开(公告)日：2010-05-06
申请号：US12619327
申请日：2009-11-16
IPC分类号： G06K9/00
CPC分类号： G06T7/74 , G06T2207/30148
摘要： A method is provided for increasing the accuracy of the positioning of a first object relative to a second object. The method overcomes the disadvantageous influence of thermal drift between a first and a second object during a positioning of a first object on a second object. The method finds applications in manufacturing, for example, in the manufacturing of semiconductor components. The method utilizes recognition of structures on the second object which have a minimum structure width. At a first instant, using one recognition procedure, the first object is positioned on the second object in a desired position. The relative displacement of the two objects is determined at the first instant and on at least one subsequent instant. A second recognition procedure may be used for this purpose. The second recognition procedure may have a resolution accuracy which is different than the resolution accuracy of the first resolution procedure. The second recognition procedure may be a pattern recognition method. The relative displacement determined at the second instant is used to correct the positioning of the first and second objects as necessary to maintain a desired position of the two objects.
摘要翻译： 提供了一种用于增加第一物体相对于第二物体的定位精度的方法。 该方法克服了在将第一物体定位在第二物体上时第一和第二物体之间的热漂移的不利影响。 该方法在例如制造半导体部件的制造中得到应用。 该方法利用具有最小结构宽度的第二物体上的结构的识别。 在第一时刻，使用一个识别过程，第一个物体位于第二个物体上所需的位置上。 两个对象的相对位移在第一时刻和至少一个后续时刻确定。 为此目的可以使用第二识别程序。 第二识别程序可以具有与第一解析过程的分辨率精度不同的分辨率精度。 第二识别程序可以是模式识别方法。 在第二时刻确定的相对位移用于根据需要校正第一和第二物体的定位，以保持两个物体的期望位置。
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公开(公告)号：US07038441B2
公开(公告)日：2006-05-02
申请号：US10677524
申请日：2003-10-02
申请人： Karsten Stoll , Stefan Kreissig , Alf Wachtveitl , Michael Teich , Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Dietmar Runge
发明人： Karsten Stoll , Stefan Kreissig , Alf Wachtveitl , Michael Teich , Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Dietmar Runge
IPC分类号： G01R31/02
CPC分类号： G01R31/2865 , G01R31/2806 , G01R31/2831 , G01R31/2887
摘要： The invention, which relates to a test apparatus with loading device which has a chuck, which is provided with a bearing surface for a test substrate and with a chuck drive, by means of which the chuck can be displaced with a working area, and which has a receiving means for receiving test substrates, which can be displaced from a working area of the chuck to a receiving position outside the working area, is based on the object of increasing the accuracy of the movement of the chuck. Moreover, in the case of test apparatus with a controlled atmosphere, a further object is to prevent the chuck from being exposed to the open-air atmosphere. This is achieved by virtue of the fact that a carriage, which can be displaced between a position close to the chuck, in which the chuck is located in a position inside the working area, and the receiving position, is provided, which carriage is provided with a holder, in which the test substrate can be at least indirectly inserted in such a way that the test substrate, when the carriage is in the position close to the chuck, is located above the chuck. The holder and the chuck can move vertically relative to one another when the carriage is in the position close to the chuck.
摘要翻译： 本发明涉及具有卡盘的装载装置的测试装置，其具有用于测试基板的轴承表面和卡盘驱动装置，通过该卡盘驱动器卡盘可以移动工作区域，并且其中 具有用于接收可以从卡盘的工作区域移动到工作区域外部的接收位置的测试基板的接收装置，其基础是提高卡盘的运动精度的目的。 此外，在具有受控气氛的测试装置的情况下，另一个目的是防止卡盘暴露于露天气氛。 这是通过以下事实来实现的：提供了可以在卡盘位于工作区域内的位置的接近卡盘的位置之间移动的托架和接收位置，该托架被设置 具有保持器，其中测试基板可以至少间接地插入，使得当托架处于靠近卡盘的位置时，测试基板位于卡盘上方。 当托架位于靠近卡盘的位置时，托架和夹头可以相对于彼此垂直移动。
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6.发明授权公开(公告)号：US06864676B2
公开(公告)日：2005-03-08
申请号：US10139735
申请日：2002-05-06
CPC分类号： G01R1/0408
摘要： A substrate-holding device is designed as a one-piece ceramic element having a number of variably heavily doped layer regions. At least one layer region is a conductive region and at least one layer region is an insulative region. A multilayer chuck structure is thereby formed which does not exhibit mechanical surface interfaces between the layers.
摘要翻译： 衬底保持装置被设计为具有多个可变重掺杂层区域的一体式陶瓷元件。 至少一个层区域是导电区域，并且至少一个层区域是绝缘区域。 由此形成多层卡盘结构，其不会在层之间表现出机械表面界面。
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7.发明申请公开(公告)号：US20080042679A1
公开(公告)日：2008-02-21
申请号：US11839899
申请日：2007-08-16
申请人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
发明人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
IPC分类号： G01R31/02
CPC分类号： G01R31/2874 , H01L21/67109
摘要： In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
摘要翻译： 在测试台中用于测量温度控制的电子部件的方法和装置中，使用卡盘来保持和定位要测量的部件，其中施加有受温度控制和定向的流体流动并且使用 探头并进行测量。 将组件的温度设定为要进行测量的温度仅仅使用在限定温度下的定向流体流进行。
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公开(公告)号：US20090021275A1
公开(公告)日：2009-01-22
申请号：US11947129
申请日：2007-11-29
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.
摘要翻译： 一种用于相对于测试基板垂直定位探针卡的方法，包括将在第一定位步骤中接近的分离位置存储为探针卡的针尖与基底之间的距离，存储在第二定位中接近的接触位置 一直到探针卡接触基板，并显示针尖的图像。 为了避免在探针卡改变之后的错误操作，当成像针尖时，存储的接触位置成像并改变，直到该接触位置的呈现对应于适合于相应探针卡的尖端的实际高度，并且该设置为 然后存储为新的联系人位置。 显示装置呈现针尖和存储的接触位置，并且连接到存储器，记录装置和改变接触位置的输入装置。
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公开(公告)号：US20050007135A1
公开(公告)日：2005-01-13
申请号：US10879622
申请日：2004-06-29
申请人： Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Stojan Kanev , Stefan Kreissig , Frank Fehrmann , Hans-Jurgen Fleischer
发明人： Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Stojan Kanev , Stefan Kreissig , Frank Fehrmann , Hans-Jurgen Fleischer
CPC分类号： G01R31/2886
摘要： A method of contacting a contact area with the tip of a contact needle (contact tip) in a prober and the arrangement of such a prober, is based on the object of ensuring reliable contacting and direct observation of the establishment of the contact between the contact tip and the contact area when contacting contact pads of small dimensions. The prober substantially includes a base frame with a movement device including a clamping fixture for receiving a semiconductor wafer and also contact needles, which are arranged opposite the free surface of the semiconductor wafer. The contacting of the contact tips initially requires a horizontal positioning of the semiconductor wafer, so that the contact area and the contact tip are one above the other and at a distance from each other, and subsequently moving vertically in the direction of the contact tip, until a contact of the contact tips with the contact area is established. The object is achieved by the vertical movement of the semiconductor wafer until the end position is reached being directly observed in a horizontal direction of observation and, for this purpose, an observation device is arranged in such a way that the observation axis runs in the spacing above the free wafer surface.
摘要翻译： 接触区域与探针中的接触针尖（接触尖端）接触的方法以及这种探测器的布置的方法基于确保可靠接触和直接观察触点之间的接触的建立的目的 接触小尺寸接触垫时的接触面和接触面积。 探测器基本上包括具有移动装置的基架，该移动装置包括用于接收半导体晶片的夹持夹具以及与半导体晶片的自由表面相对布置的接触针。 接触尖端的接触最初需要半导体晶片的水平定位，使得接触面和接触尖端彼此之间并且彼此间隔一定距离，随后沿接触尖端的方向垂直移动， 直到接触尖端与接触区域的接触被建立。 该目的是通过半导体晶片的垂直移动直到达到最终位置在水平观察方向上直接观察为目的，为此目的，观察装置以这样的方式布置，使得观察轴以间隔 在自由晶片表面上方。
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公开(公告)号：US07733108B2
公开(公告)日：2010-06-08
申请号：US12329968
申请日：2008-12-08
IPC分类号： G01R31/02
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.
摘要翻译： 一种用于相对于测试基板垂直定位探针卡的方法，包括将在第一定位步骤中接近的分离位置存储为探针卡的针尖与基底之间的距离，存储在第二定位中接近的接触位置 一直到探针卡接触基板，并显示针尖的图像。 为了避免在探针卡改变之后的错误操作，当成像针尖时，存储的接触位置成像并改变，直到该接触位置的呈现对应于适合于相应探针卡的尖端的实际高度，并且该设置为 然后存储为新的联系人位置。 显示装置呈现针尖和存储的接触位置，并且连接到存储器，记录装置和改变接触位置的输入装置。
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