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23 条记录 (耗时 0.018 秒)

    Fluid control device
    1.
    发明授权
    Fluid control device 失效
    流体控制装置

    公开(公告)号：US6116283A

    公开(公告)日：2000-09-12

    申请号：US349246

    申请日：1999-07-08

    申请人： Michio Yamaji ,  Toshiro Nariai ,  Hiroshi Morokoshi

    发明人： Michio Yamaji ,  Toshiro Nariai ,  Hiroshi Morokoshi

    IPC分类号： G05D7/00 ,  F15B1/00 ,  G05D7/06 ,  F16K11/10

    CPC分类号： G05D7/0635

    摘要： A fluid control device comprises a massflow controller having an inlet channel and an outlet channel, an inlet-side lower block coupling having a channel upwardly opened and communicating with the inlet channel of the massflow controller, an inlet-side connecting member adjacent to the inlet-side lower block coupling and having a channel opened upward, an inlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the inlet-side lower block coupling in communication with the channel of the inlet-side connecting member, an outlet-side lower block coupling having a channel upwardly opened and communicating with the outlet channel of the massflow controller, an outlet-side connecting member adjacent to the outlet-side lower block coupling and having a channel opened upward, and an outlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the outlet-side lower block coupling in communication with the channel of the outlet-side connecting member.

    摘要翻译： 流体控制装置包括具有入口通道和出口通道的质量流量控制器，具有向上打开并与质量流量控制器的入口通道连通的通道的入口侧下部块联接件，与入口相邻的入口侧连接构件 下方的下部联接器，并且具有向上敞开的通道，具有倒V形通道的入口侧上部块联接件，用于保持入口侧下部块联接件的通道与入口侧连接构件的通道连通 具有向上开口并与质量流量控制器的出口通道连通的出口侧下块联接器，与出口侧下块联接件相邻并且具有向上敞开的通道的出口侧连接构件， 侧上部块联接器具有倒置的V形通道，用于保持出口侧下部块联接器的通道与ou的通道连通 小口侧连接件。

    Fluid control device
    2.
    发明授权
    Fluid control device 失效
    流体控制装置

    公开(公告)号：US6135155A

    公开(公告)日：2000-10-24

    申请号：US655022

    申请日：1996-05-29

    申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Shigeru Itoi ,  Nobukazu Ikeda ,  Tetsuya Kojima

    发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Shigeru Itoi ,  Nobukazu Ikeda ,  Tetsuya Kojima

    IPC分类号： F16K27/00 ,  G05D7/01 ,  G05D16/04 ,  F16K11/10

    CPC分类号： F16K27/003 ,  G05D16/04 ,  G05D7/01 ,  Y10T137/87885

    摘要： A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on-off valve. The upper connector is lapped over the lower connector and removably joined thereto with a screw so as to cause the downwardly opened channel to communicate with the upwardly opened channel. Accordingly, the regulator can be removed singly, for example, when malfunctioning.

    摘要翻译： 用于调节流速的调节器设置有具有与调节器连通的向下打开的通道的上连接器。 连接到调节器的开关阀设置有具有与开关阀连通的向上开口的通道的下连接器。 上连接器在下连接器上被覆盖并且用螺钉可拆卸地连接到其上，以便使向下打开的通道与向上打开的通道连通。 因此，可以单独地去除调节器，例如当故障时。

    Coupling member for use in fluid control apparatus and method of fabricating same
    7.
    发明授权
    Coupling member for use in fluid control apparatus and method of fabricating same 有权
    用于流体控制装置的联接构件及其制造方法

    公开(公告)号：US06712400B1

    公开(公告)日：2004-03-30

    申请号：US09437294

    申请日：1999-11-09

    申请人： Michio Yamaji ,  Osamu Fukata ,  Kosuke Yokoyama ,  Tadanobu Yoshida ,  Hiroshi Morokoshi

    发明人： Michio Yamaji ,  Osamu Fukata ,  Kosuke Yokoyama ,  Tadanobu Yoshida ,  Hiroshi Morokoshi

    IPC分类号： F16L4500

    CPC分类号： F16K27/003 ,  Y10T29/4981

    摘要： A method for facilitating fabrication of a coupling member includes a first step of boring one of upwardly open, passageways, a communication passageway and an auxiliary passageway in a body block, a second step of inserting a closure member into the auxiliary passageway, a third step of welding the closure member to the inner peripheral body portion defining the auxiliary passageway, and a fourth step of boring the other upwardly open passageway in the body block. The closure member is inserted in the second step so as to be positioned at least party in the portion where the other upwardly open passageway is to be formed.

    摘要翻译： 用于促进联接构件的制造的方法包括：第一步骤，将主体块中的向上开口，通道，连通通道和辅助通道中的一个钻孔;第二步骤，将闭合构件插入辅助通道;第三步骤 将闭合构件焊接到限定辅助通道的内周主体部分;以及第四步骤，将身体块中的另一个向上开放的通道钻孔。 封闭构件插入第二步骤中，以便至少定位在要形成另一个向上开口的通道的部分中。

    Tightening device
    8.
    发明授权
    Tightening device 失效
    紧固装置

    公开(公告)号：US6105475A

    公开(公告)日：2000-08-22

    申请号：US861790

    申请日：1997-05-22

    申请人： Tadahiro Ohmi ,  Eiji Ideta ,  Hiroyuki Fukuda ,  Keiji Hirao ,  Tsutomu Shinohara ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Tetsuya Kojima

    发明人： Tadahiro Ohmi ,  Eiji Ideta ,  Hiroyuki Fukuda ,  Keiji Hirao ,  Tsutomu Shinohara ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Tetsuya Kojima

    IPC分类号： B23P19/06 ,  B25B15/00 ,  B25B21/00 ,  B25B23/10 ,  B25B23/14 ,  B25B23/151

    CPC分类号： B25B23/108 ,  B23P19/066 ,  B23P19/069 ,  B25B15/008 ,  B25B21/00 ,  B25B23/101 ,  B25B23/14

    摘要： A device for tightening a plurality of threaded members at the same time with proper torque without necessitating a cumbersome procedure of rotating the members one by one through a specified small angle at a time and without unequivalent tightening of the members, the tightening device (1) comprises two rotary shafts (6) each provided at a forward end thereof with a wrench portion (8) fittable to the threaded member (44), motors (3) for individually driving the rotary shafts (6) and a control unit (9) for detecting the tightening torque of each threaded member (44) and controlling the motor (3) based on the detected value to ensure proper tightening, the control unit (9) checking the tightening torque of each threaded member (44) as to whether the torque is within a predetermined range and whether the difference in tightening torque between the threaded members (44) is within a predetermined range.

    摘要翻译： 紧固装置（1）是用于以适当的扭矩同时紧固多个螺纹构件的装置，而不需要一次一个地将构件一个一个地旋转规定的小角度的麻烦的过程，并且没有不同的紧固构件， 包括两个旋转轴（6），每个旋转轴在其前端处设有可配合到螺纹构件（44）的扳手部分（8），用于单独驱动旋转轴（6）和控制单元（9）的马达（3） 为了检测每个螺纹构件（44）的紧固扭矩并基于检测值来控制马达（3）以确保适当的紧固，控制单元（9）检查每个螺纹构件（44）的紧固扭矩，以确定是否 扭矩在预定范围内，并且螺纹构件（44）之间的紧固扭矩的差是否在预定范围内。

    Fluid control system and valve to be used therein
    9.
    发明授权
    Fluid control system and valve to be used therein 失效
    流体控制系统和阀门用于其中

    公开(公告)号：US5850853A

    公开(公告)日：1998-12-22

    申请号：US630081

    申请日：1996-04-09

    申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Hiroshi Morokoshi

    发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Nobukazu Ikeda ,  Hiroshi Morokoshi

    IPC分类号： B01J4/00 ,  C30B25/14 ,  C30B31/16 ,  F16K31/122 ,  F16K31/42

    CPC分类号： C23C16/45561 ,  B01J4/008 ,  C30B25/14 ,  C30B31/16 ,  F16K31/1226 ,  F16K31/42 ,  Y10T137/87684

    摘要： A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).

    摘要翻译： 流体控制系统及其阀门组件用于精确地控制流体的供给（通过快速准确地操作（打开和关闭）阀门），用于制造半导体，磁性薄膜，生物技术产品和其他产品。 流体控制系统包括主控制线（L）和多个分支控制线（L1，L2 ...），用于将多种类型的流体（G1，G2 ...）馈送到耦合到 主控制线和并入分支控制线（L1，L2 ...）中的多个阀组件（V），用于切换供给到处理装置（C）中的流体（G1，G2 ...）。 每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀（V“） 阀（V'）将工作流体（A）输送到流体压力致动器（1）中。