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    METHOD OF FABRICATING LIGHT RECEIVING ELEMENT AND APPARATUS FOR FABRICATING LIGHT RECEIVING ELEMENT
    1.
    发明申请
    METHOD OF FABRICATING LIGHT RECEIVING ELEMENT AND APPARATUS FOR FABRICATING LIGHT RECEIVING ELEMENT 审中-公开
    制造光接收元件的方法和装饰光接收元件的装置

    公开(公告)号：US20130009193A1

    公开(公告)日：2013-01-10

    申请号：US13511734

    申请日：2010-11-24

    申请人： Motoichi Ohtsu ,  Tadashi Kawazoe ,  Takashi Yatsui ,  Sotaro Yukutake

    发明人： Motoichi Ohtsu ,  Tadashi Kawazoe ,  Takashi Yatsui ,  Sotaro Yukutake

    IPC分类号： H01L31/0224 ,  C23C14/46 ,  H01L31/02

    CPC分类号： H01L31/18 ,  C23C14/3435 ,  H01L21/0237 ,  H01L21/02521 ,  H01L21/02631 ,  H01L21/02656 ,  H01L51/4213 ,  Y02E10/549 ,  Y02P70/521

    摘要： A method of fabricating a light receiving element includes depositing a material for one of a P-type semiconductor, an N--type semiconductor, and electrodes, while applying a reverse bias voltage and irradiating light of a desired wavelength longer than an absorption wavelength of the material. The deposition has a non-adiabatic flow of, at a portion where a local shape to enable generation of near field light is formed on a surface of the deposited material with the irradiation light, absorbing the irradiation light through a non-adiabatic process with the near field light, thereby generating electrons, and canceling generation of a local electric field based on the voltage, and a particle adsorbing flow of, at a portion where the shape is not formed, causing the portion where the local electric field is generated to sequentially adsorb particles forming the material, and shifting to the non-adiabatic flow when the shape is formed.

    摘要翻译： 一种制造光接收元件的方法包括：在施加反向偏置电压的同时，对P型半导体，N型半导体和电极之一沉积材料，并且将所需波长的光长于 材料。 沉积物具有非绝热的流动，在使用照射光的沉积材料的表面上形成能够产生近场光的局部形状的部分，通过非绝热过程吸收照射光， 从而产生电子，并且基于电压消除局部电场的产生，并且在未形成形状的部分处的颗粒吸附流动依次产生局部电场的部分 吸附形成材料的颗粒，并且当形成形状时转移到非绝热流。

    Compound semiconductor deposition method and apparatus
    2.
    发明授权
    Compound semiconductor deposition method and apparatus 有权
    化合物半导体沉积方法和装置

    公开(公告)号：US08912079B2

    公开(公告)日：2014-12-16

    申请号：US13266337

    申请日：2010-04-28

    申请人： Motoichi Ohtsu ,  Takashi Yatsui ,  Tadashi Kawazoe ,  Shunsuke Yamazaki ,  Koichi Kajiyama ,  Michinobu Mizumura ,  Keiichi Ito

    发明人： Motoichi Ohtsu ,  Takashi Yatsui ,  Tadashi Kawazoe ,  Shunsuke Yamazaki ,  Koichi Kajiyama ,  Michinobu Mizumura ,  Keiichi Ito

    IPC分类号： H01L21/20 ,  B05C9/08 ,  C23C16/48 ,  C23C16/30 ,  C30B25/00 ,  C30B29/40 ,  H01L21/02 ,  H01L33/00 ,  C23C14/54 ,  C23C16/52

    CPC分类号： C23C16/481 ,  C23C14/548 ,  C23C16/303 ,  C23C16/52 ,  C30B25/00 ,  C30B29/403 ,  H01L21/0237 ,  H01L21/0242 ,  H01L21/0254 ,  H01L21/0262 ,  H01L33/0062

    摘要： Provided is a compound semiconductor deposition method of adjusting the luminous wavelength of a compound semiconductor of a ternary or higher system in a nanometer order in depositing the compound semiconductor on a substrate. In the compound semiconductor deposition method of depositing a compound semiconductor of a ternary or higher system on a substrate, propagation light of a smaller energy than a desired ideal excitation energy for the compound semiconductor is irradiated onto the substrate 13 while depositing the compound semiconductor on the substrate 13, near-field light is generated based on the irradiated propagation light from fine particles of the compound semiconductor deposited on the substrate 13, new vibrational levels for the compound semiconductor are formed in multiple stages based on the generated near-field light, and a component in the compound semiconductor corresponding to the excitation energy is excited with the propagation light through a vibrational level, among the new vibrational levels, which has an excitation energy equal to or smaller than the energy of the propagation light is excited to desorb the component.

    摘要翻译： 提供一种在将化合物半导体沉积在基板上时以纳米级调节三元或更高系统的化合物半导体的发光波长的化合物半导体沉积方法。 在将三元或更高系统的化合物半导体沉积在衬底上的化合物半导体沉积方法中，将化合物半导体所需的理想激发能的能量较小的传播光照射到衬底13上，同时将化合物半导体沉积在 基板13，基于沉积在基板13上的化合物半导体的微粒的照射的传播光产生近场光，基于产生的近场光，以多个阶段形成化合物半导体的新的振动电平，以及 对应于激发能的化合物半导体中的成分被传播光激发，通过振动水平，激发能量等于或小于传播光的能量的新的振动水平被激发，从而解吸部件 。

    Photo-detection device and method
    5.
    发明授权
    Photo-detection device and method 失效
    光检测装置及方法

    公开(公告)号：US07586085B2

    公开(公告)日：2009-09-08

    申请号：US10563626

    申请日：2004-07-08

    申请人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Masato Takada

    发明人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Masato Takada

    IPC分类号： H01J3/14 ,  H01J37/00

    CPC分类号： G01Q60/22 ,  G01N21/55 ,  G02B21/002

    摘要： The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probe 13 having a light shielding coating layer 33 formed for defining a light radiating aperture D or light radiated at a core 31 of the optical probe 13 is propagated, as the optical probe 13 is moved in a direction towards and away from a surface for measurement 2a. The core of the optical probe is coated with a light shielding coating layer 33. In this manner, a spot of propagated light propagated through the core 31 or a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement 2a, and light derived from the spot of light is detected.

    摘要翻译： 利用普通传播光的宽范围测量和利用近场光的高分辨率测量模式将通过唯一的组装的光学探针来实现。 为此，通过具有形成为限定发光孔径D的光屏蔽被覆层33的光学探头13照射的光或者在光学探针13的芯31处照射的光被传播，因为光学探针13被移动到 朝向和远离用于测量的表面2a的方向。 光探头的芯部涂覆有遮光涂层33.以这种方式，通过芯31传播的传播光斑或从光辐射孔D渗透的近场光斑被形成在表面上 用于测量2a，并且检测从光斑导出的光。

    Optical fiber probe, optical detection device, and optical detection method
    6.
    发明授权
    Optical fiber probe, optical detection device, and optical detection method 失效
    光纤探头，光学检测装置和光学检测方法

    公开(公告)号：US07586084B2

    公开(公告)日：2009-09-08

    申请号：US11547032

    申请日：2006-02-02

    申请人： Izumi Itoh ,  Masato Takada ,  Taroh Terashi ,  Motoichi Ohtsu ,  Takashi Yatsui ,  Motonobu Kourogi

    发明人： Izumi Itoh ,  Masato Takada ,  Taroh Terashi ,  Motoichi Ohtsu ,  Takashi Yatsui ,  Motonobu Kourogi

    IPC分类号： G02B6/26

    CPC分类号： G01Q60/22

    摘要： An optical detection device image is disclosed that allows fast measurements using near-field light at high resolution and high efficiency but without necessity of position alignment of an optical fiber probe. The optical detection device includes an optical fiber probe having a core for propagating light with an optical probe being formed at a front end of the core; a movement control unit to move the optical fiber probe to approach or depart from a sample; and a detection unit to detect light from the sample surface, wherein on the front end surface of the core of the optical probe, there are a first exit section on a peripheral side for emitting propagating light and a second exit section for seeping out the near-field light, the first exit section and the second exit section are formed in a concentric manner, and the tilt angle of the first exit section is different from the tilt angle of the second exit section.

    摘要翻译： 公开了一种光学检测装置图像，其允许使用高分辨率和高效率的近场光进行快速测量，但不需要光纤探针的位置对准。 光学检测装置包括光纤探针，其具有用于传播光的芯，光纤探针形成在芯的前端; 移动控制单元，用于移动光纤探针以接近或离开样本; 以及检测单元，用于检测来自所述样品表面的光，其中在所述光学探针的所述芯的前端表面上，在用于发射传播光的外围侧上具有第一出射部分，以及用于渗出所述近端的第二出射部分 第一出口部和第二出口部以同心方式形成，第一出口部的倾斜角度与第二出口部的倾斜角度不同。

    Optical Fiber Probe, Optical Detection Device, And Optical Detection Method
    9.
    发明申请
    Optical Fiber Probe, Optical Detection Device, And Optical Detection Method 失效
    光纤探头，光学检测装置和光学检测方法

    公开(公告)号：US20080073518A1

    公开(公告)日：2008-03-27

    申请号：US11547032

    申请日：2006-02-02

    申请人： Izumi Itoh ,  Masato Takada ,  Taroh Terashi ,  Motoichi Ohtsu ,  Takashi Yatsui ,  Motonobu Kourogi

    发明人： Izumi Itoh ,  Masato Takada ,  Taroh Terashi ,  Motoichi Ohtsu ,  Takashi Yatsui ,  Motonobu Kourogi

    IPC分类号： G01N23/00

    CPC分类号： G01Q60/22

    摘要： An optical detection device image is disclosed that allows fast measurements using near-field light at high resolution and high efficiency but without necessity of position alignment of an optical fiber probe. The optical detection device includes an optical fiber probe having a core for propagating light with an optical probe being formed at a front end of the core; a movement control unit to move the optical fiber probe to approach or depart from a sample; and a detection unit to detect light from the sample surface, wherein on the front end surface of the core of the optical probe, there are a first exit section on a peripheral side for emitting propagating light and a second exit section for seeping out the near-field light, the first exit section and the second exit section are formed in a concentric manner, and the tilt angle of the first exit section is different from the tilt angle of the second exit section.

    摘要翻译： 公开了一种光学检测装置图像，其允许使用高分辨率和高效率的近场光进行快速测量，但不需要光纤探针的位置对准。 光学检测装置包括光纤探针，其具有用于传播光的芯，光纤探针形成在芯的前端; 移动控制单元，用于移动光纤探针以接近或离开样本; 以及检测单元，用于检测来自所述样品表面的光，其中在所述光学探针的所述芯的前端表面上，在用于发射传播光的外围侧上具有第一出射部分，以及用于渗出所述近端的第二出射部分 第一出口部和第二出口部以同心方式形成，第一出口部的倾斜角度与第二出口部的倾斜角度不同。

    Photo-detection device and method
    10.
    发明申请
    Photo-detection device and method 失效
    光检测装置及方法

    公开(公告)号：US20070018082A1

    公开(公告)日：2007-01-25

    申请号：US10563626

    申请日：2004-07-08

    申请人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Matsato Takada

    发明人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Matsato Takada

    IPC分类号： G01B9/10 ,  G02B6/00

    CPC分类号： G01Q60/22 ,  G01N21/55 ,  G02B21/002

    摘要： The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probe 13 having a light shielding coating layer 33 formed for defining a light radiating aperture D or light radiated at a core 31 of the optical probe 13 is propagated, as the optical probe 13 is moved in a direction towards and away from a surface for measurement 2a. The core of the optical probe is coated with a light shielding coating layer 33. In this manner, a spot of propagated light propagated through the core 31 or a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement 2a, and light derived from the spot of light is detected.

    摘要翻译： 利用普通传播光的宽范围测量和利用近场光的高分辨率测量模式将通过唯一的组装的光学探针来实现。 为此，通过具有形成为限定发光孔径D的光屏蔽被覆层33的光学探头13照射的光或者在光学探针13的芯31处照射的光被传播，因为光学探针13被移动到 朝向和远离用于测量的表面2a的方向。 光探头的芯部涂覆有遮光涂层33.以这种方式，通过芯31传播的传播光斑或从光辐射孔D渗透的近场光斑被形成在表面上 用于测量2a，并且检测从光斑导出的光。