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公开(公告)号：US11002957B2
公开(公告)日：2021-05-11
申请号：US16402958
申请日：2019-05-03
发明人： Jouni Erkkilä , Tero Sillanpää , Matti Liukku , Anssi Blomqvist
摘要： An optical device that provides a broadened circular scanning pattern. The device includes a reflector system dimensioned to form a coupled oscillator with two modes of oscillation for circular tilt motion, a first mode oscillation in a first resonance frequency and a second mode of oscillation in a second resonance frequency that is different from the first resonance frequency. A signal processing element is configured to control the actuation signals to maintain a first amplitude in the first mode of oscillation, and a second amplitude in the second mode of oscillation.
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公开(公告)号：US10137851B2
公开(公告)日：2018-11-27
申请号：US14948503
申请日：2015-11-23
发明人： Ville-Pekka Rytkönen , Matti Liukku
摘要： The MEMS sensor of the invention has movable and fixed components for measuring acceleration in a rotational mode in a direction in-plane perpendicular to spring axis. The components include an element frame, a substrate, a proof-mass a spring connected to the proof-mass and to the substrate, and comb electrodes. The MEMS sensor is mainly characterized by an arrangement of the components causing an inherent sensitivity for measuring accelerations in a range covering longitudinal and transversal accelerations. One or more of the components are tilted compared to the element frame. The semiconductor package of the invention comprises at least one MEMS sensor.
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公开(公告)号：US11796560B2
公开(公告)日：2023-10-24
申请号：US17202736
申请日：2021-03-16
发明人： Matti Liukku , Anssi Blomqvist , Hannu Vesterinen
IPC分类号： G01P15/125 , G01P15/18 , G01P1/00 , G01P15/08
CPC分类号： G01P15/125 , G01P1/00 , G01P15/18 , G01P2015/0871
摘要： The present invention relates to MEMS (microelectromechanical systems) accelerometers, in particular to an accelerometer designed to reduce error in the accelerometer output. The MEMS accelerometer includes a proof mass, which is capable of movement along at least two perpendicular axes and at least one measurement structure. The proof mass is mechanically coupled to the measurement structure along the sense axis of the measurement structure, such that movement of the proof mass along the sense axis causes the moveable portion of the measurement structure to move, and is decoupled from the measurement structures along an axis or axes perpendicular to the sense axis of the measurement structure, such that movement of the proof mass perpendicular to the sense axis of the measurement structure does not cause the moveable portion of the measurement structure to move.
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公开(公告)号：US10969575B2
公开(公告)日：2021-04-06
申请号：US16187064
申请日：2018-11-12
发明人： Altti Torkkeli , Matti Liukku
摘要： A scanning microelectromechanical reflector system comprising a reflector with a reflector body, a first cavity vertically aligned with the reflector body above the device plane and a second cavity vertically aligned with the reflector body below the device plane. The reflector also comprises a central attachment point located within a central opening in the reflector body. One or more flexures extend from the sidewalls of the central opening to the central attachment point. The flexures allow the central attachment point to remain stationary in the device plane when actuator units tilt the reflector body out of the device plane. The reflector system comprises a central support structure which extends through the cavity to the central attachment point of the reflector.
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公开(公告)号：US11820648B2
公开(公告)日：2023-11-21
申请号：US17052287
申请日：2019-05-13
发明人： Matti Liukku , Ville-Pekka Rytkönen
IPC分类号： B81B7/00 , G01P15/125 , G01P15/08
CPC分类号： B81B7/0016 , G01P15/125 , B81B2201/0235 , G01P2015/0882
摘要： A capacitive microelectromechanical acceleration sensor where one or more rotor measurement plates and one or more stator measurement plates are configured so that the movement of a proof mass in the direction of a sense axis can be measured in a capacitive measurement conducted between them. One or more first rotor damping plates and one or more first stator damping plates form a first set of parallel plates which are orthogonal to a first damping axis, and the first damping axis is substantially orthogonal to the sense axis.
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公开(公告)号：US11526000B2
公开(公告)日：2022-12-13
申请号：US16896324
申请日：2020-06-09
发明人： Matti Liukku , Altti Torkkeli , Anssi Blomqvist
摘要： The invention relates to microelectromechanical systems (MEMS), and specifically to a mirror system, for example to be used in LiDAR (Light Detection and Ranging). The MEMS mirror system of the invention uses four suspenders, each of which is connected to the reflector body at two separate connection points which can be independently displaced by piezoelectric actuators. By actuating adjacent and opposite pairs of piezoelectric actuators, the reflector body can be driven to oscillated about two orthogonal axes.
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公开(公告)号：US11296671B2
公开(公告)日：2022-04-05
申请号：US16577086
申请日：2019-09-20
发明人： Matti Liukku
摘要： A microelectromechanical system with at least one partly mobile mass element which is suspended from a fixed support by one or more suspension units. Each suspension unit comprises first springs which extend from the fixed support to the partly mobile mass element, and second springs which also extend from the fixed support to the partly mobile mass element. Each second spring is substantially parallel and adjacent to one first spring. The first springs are electrically isolated from the second springs, and the microelectromechanical system comprises a voltage source configured to apply a frequency tuning voltage between the one or more first springs and the one or more second springs.
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公开(公告)号：US10809279B2
公开(公告)日：2020-10-20
申请号：US15970962
申请日：2018-05-04
发明人： Matti Liukku , Ville-Pekka Rytkönen
IPC分类号： G01C19/5712 , G01P15/125 , G01P15/18 , G01P21/00 , G01P15/08
摘要： A micromechanical accelerometer comprises a sensor for measuring acceleration along a vertical axis perpendicular to a substrate plane, and an accelerometer package with at least one inner package plane adjacent and parallel to the substrate plane. The first sensor comprises a rotor which is mobile in relation to the substrate, a rotor suspender and one or more stators which are immobile in relation to the substrate. The rotor is a seesaw frame where longitudinal rotor bar comprise one or more first deflection electrodes, and second deflection electrodes are fixed to the inner package plane above or below each of the one or more first deflection electrodes, so that they overlap. The accelerometer can perform a self-test by applying a test voltage to at least one first deflection electrode and at least one second deflection electrode. A self-test response signal can be read with a measurement between rotor and stator electrodes.
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公开(公告)号：US11979713B2
公开(公告)日：2024-05-07
申请号：US17853979
申请日：2022-06-30
发明人： Seiji Umezawa , Matti Liukku , Ville-Pekka Rytkönen , Anssi Blomqvist , Shinsuke Ikeuchi , Fumiya Kurokawa , Masayuki Suzuki
IPC分类号： H04R17/02 , H10N30/853
CPC分类号： H04R17/02 , H10N30/8542
摘要： A piezoelectric device includes a connecting section connecting a pair of beam sections adjacent to each other. The connecting section is connected to one of the pair of beam sections at a first end portion. The connecting section is connected to another of the pair of beam sections at a second end portion. The second end portion faces the first end portion in a direction in which the pair of beam sections are aligned. A second coupling portion is located along a first coupling portion. The connecting section includes only one first end portion. The connecting section includes only one second end portion. Each of the first end portion and the second end portion is closer to a tip end portion than to a fixed end portion of each of the pair of beam sections.
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公开(公告)号：US20240051816A1
公开(公告)日：2024-02-15
申请号：US18448710
申请日：2023-08-11
发明人： Pekka LEHTINEN , Akira Konno , Matti Liukku
IPC分类号： B81B3/00
CPC分类号： B81B3/001 , B81B3/0051 , B81B2201/0235 , B81B2201/0242 , B81B2203/056
摘要： A microelectromechanical element is provided that includes a first device part and a second device part, and a motion-limiting structure having a first stopper bump and a second stopper bump. The first and second stopper bumps extend from the first device part toward the second device part. When one of the device parts moves toward the other device part in the out-of-plane direction and crosses a displacement threshold, the first stopper bump comes into contact with the second device part before the second stopper bump contacts the second device part, and the second stopper bump comes into contact with the second device part before the first device part contacts with the second device part.
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