公开(公告)号：US07771561B2

公开(公告)日：2010-08-10

申请号：US11598067

申请日：2006-11-13

申请人： Naoki Suzuki ,  Kazuto Nishida ,  Kazuyuki Tomita

发明人： Naoki Suzuki ,  Kazuto Nishida ,  Kazuyuki Tomita

IPC分类号： H01L21/00 ,  C23C16/00 ,  C23C14/00

CPC分类号： H05K3/26 ,  H01J37/32009 ,  H01J37/32935 ,  H01J37/3299 ,  H05K3/323 ,  H05K2203/095

摘要： An apparatus and a method for surface treatment of substrates whereby the quality of substrates can be maintained by preventing excessive plasma treatment of substrates. In carrying out the plasma treatment on a surface of the substrate in a reaction chamber, there are provided an emission spectroscopic analysis device or a mass analyzer, and a controller, so that the energy of ions in plasma is controlled to decrease when, e.g., bromine included in the substrate is detected, and the surface treatment to the substrate is controlled to stop when the removal of impurities of the substrate is detected to end. The bromine once separated from the substrate is prevented from adhering again to the substrate and corroding the substrate. Moreover, ions are prevented from being excessively irradiated to the substrate when the removal of impurities ends, thereby reducing damage to the substrate.

摘要翻译： 用于表面处理基板的装置和方法，由此通过防止基板的过度等离子体处理可以保持基板的质量。 在反应室中对基板的表面进行等离子体处理时，设置有发光光谱分析装置或质量分析装置以及控制器，使得等离子体中的离子的能量被控制为减少，例如， 检测包含在基板中的溴，并且当检测到去除基板的杂质结束时，控制对基板的表面处理以停止。 与基板分离的溴被防止再次粘附到基板上并腐蚀基板。 此外，当去除杂质结束时，防止离子过度照射到基板，从而减少对基板的损坏。

公开(公告)号：US20070062558A1

公开(公告)日：2007-03-22

申请号：US11598067

申请日：2006-11-13

申请人： Naoki Suzuki ,  Kazuto Nishida ,  Kazuyuki Tomita

发明人： Naoki Suzuki ,  Kazuto Nishida ,  Kazuyuki Tomita

IPC分类号： B08B6/00 ,  H01B13/00

CPC分类号： H05K3/26 ,  H01J37/32009 ,  H01J37/32935 ,  H01J37/3299 ,  H05K3/323 ,  H05K2203/095

摘要： An apparatus and a method for surface treatment of substrates whereby the quality of substrates can be maintained by preventing excessive plasma treatment of substrates. In carrying out the plasma treatment on a surface of the substrate in a reaction chamber, there are provided an emission spectroscopic analysis device or a mass analyzer, and a controller, so that the energy of ions in plasma is controlled to decrease when, e.g., bromine included in the substrate is detected, and the surface treatment to the substrate is controlled to stop when the removal of impurities of the substrate is detected to end. The bromine once separated from the substrate is prevented from adhering again to the substrate and corroding the substrate. Moreover, ions are prevented from being excessively irradiated to the substrate when the removal of impurities ends, thereby reducing damage to the substrate.

摘要翻译： 用于表面处理基板的装置和方法，由此通过防止基板的过度等离子体处理可以保持基板的质量。 在反应室中对基板的表面进行等离子体处理时，设置有发光光谱分析装置或质量分析装置以及控制器，使得等离子体中的离子的能量被控制为减少，例如， 检测包含在基板中的溴，并且当检测到去除基板的杂质结束时，控制对基板的表面处理以停止。 与基板分离的溴被防止再次粘附到基板上并腐蚀基板。 此外，当去除杂质结束时，防止离子过度照射到基板，从而减少对基板的损坏。

公开(公告)号：US07635016B2

公开(公告)日：2009-12-22

申请号：US10265381

申请日：2002-10-07

申请人： Naoki Suzuki ,  Youichi Nakamura ,  Kazuyuki Tomita

发明人： Naoki Suzuki ,  Youichi Nakamura ,  Kazuyuki Tomita

IPC分类号： B29C65/00

CPC分类号： H05K3/26 ,  B08B7/0035 ,  H05K2203/095 ,  Y10S438/906 ,  Y10T156/14 ,  Y10T156/17

摘要： In a board cleaning method for dry cleaning of connection sites on resin-based boards, one or more gases selected from a group consisting of gas that contains a hydrogen element and gas that contains a fluorine element are supplied at least to the connection sites, plasma is generated from the supplied gas, and the boards are cleaned by radicals and ions that are produced by the generated plasma.

摘要翻译： 在树脂基板上的连接部位的干式清洗用电路板清洗方法中，至少选择从包含氢元素的气体和含有氟元素的气体中选择的一种或多种气体到等离子体 由所供应的气体产生，并且通过由所产生的等离子体产生的自由基和离子来清洁板。

公开(公告)号：US20060118133A1

公开(公告)日：2006-06-08

申请号：US10265381

申请日：2002-10-07

申请人： Naoki Suzuki ,  Youichi Nakamura ,  Kazuyuki Tomita

发明人： Naoki Suzuki ,  Youichi Nakamura ,  Kazuyuki Tomita

IPC分类号： B08B6/00

CPC分类号： H05K3/26 ,  B08B7/0035 ,  H05K2203/095 ,  Y10S438/906 ,  Y10T156/14 ,  Y10T156/17

摘要： In a board cleaning method for dry cleaning of connection sites on resin-based boards, one or more gases selected from a group consisting of gas that contains hydrogen element and gas that contains fluorine element are supplied at least to the connection sites, plasma is generated in the supplied gas, and the boards are cleaned by radicals and ions that are produced by the generated plasma.

摘要翻译： 在树脂基板上的连接部位的干式清洗用电路板清洗方法中，至少在连接部位供给选自含有氢元素的气体和含有氟元素的气体的一种或多种气体，产生等离子体 在所供应的气体中，并且通过由所产生的等离子体产生的自由基和离子清洁板。

公开(公告)号：US4851116A

公开(公告)日：1989-07-25

申请号：US1729

申请日：1987-01-07

申请人： Kazuyuki Tomita

发明人： Kazuyuki Tomita

IPC分类号： B03C1/28 ,  F01M11/03 ,  F16N39/06

CPC分类号： B03C1/286 ,  F16N39/06 ,  F01M2001/1042

摘要： A magnet filter for removing magnetic metal powder mixed with oil in an oil reservoir or the like which is easily mounted to and dismounted from the oil reservoir. The magnet filter includes a recess formed on a top surface of a screw head having a screw rod studded on its bottom surface and a permanent magnet piece is fitted in the recess.

摘要翻译： 一种磁铁过滤器，其用于除去容易地从储油器安装和拆卸的储油罐等中的与石油混合的磁性金属粉末。 磁体过滤器包括形成在螺钉头的顶表面上的凹部，其具有镶嵌在其底表面上的螺杆，并且永久磁体件装配在凹部中。

公开(公告)号：US4678539A

公开(公告)日：1987-07-07

申请号：US799657

申请日：1985-11-19

申请人： Kazuyuki Tomita ,  Masuo Tanno

发明人： Kazuyuki Tomita ,  Masuo Tanno

IPC分类号： H01L21/302 ,  C04B41/53 ,  C04B41/91 ,  C23F4/00 ,  H01L21/3065 ,  H01L21/311 ,  B44C1/22 ,  C03C15/00 ,  C03C25/06

CPC分类号： C04B41/5346 ,  C04B41/91 ,  H01L21/31116

摘要： A dry-etching method for etching materials of the silicon group comprises: providing the material to be etched in a reaction chamber; supplying a mixed gas as the etching gas comprising carbon fluoride, oxygen and another gas wherein the other gas is a partially halogenated hydrocarbon; and thereafter subjecting the etching gas to high frequency electric current so as to make the mixed gas into a plasma whereby the material is etched.

摘要翻译： 用于蚀刻硅基材料的干蚀刻方法包括：在反应室中提供要蚀刻的材料; 提供混合气体作为包含碳氟化物，氧气和另一种气体的蚀刻气体，其中另一种气体是部分卤化的烃; 然后对蚀刻气体进行高频电流，使混合气体成为等离子体，由此蚀刻材料。

公开(公告)号：US06596192B2

公开(公告)日：2003-07-22

申请号：US09908539

申请日：2001-07-20

申请人： Tomoharu Himeshima ,  Nahomi Aoyama ,  Syoichi Nito ,  Kazuyuki Tomita ,  Junko Baba

发明人： Tomoharu Himeshima ,  Nahomi Aoyama ,  Syoichi Nito ,  Kazuyuki Tomita ,  Junko Baba

IPC分类号： C09K1502

CPC分类号： A23L3/3436

摘要： An oxygen absorbent composition absorbing water vapor mixed a liquid mixed (A) an aliphatic compound(s) with an unsaturated group(s) and (B) a transition metal salt(s) with (C) at least one solid selected from the group consisting of calcium oxide, calcium chloride and magnesium chloride.

公开(公告)号：US4906347A

公开(公告)日：1990-03-06

申请号：US228217

申请日：1988-08-04

申请人： Kazuyuki Tomita ,  Masuo Tanno ,  Yasuo Tanaka

发明人： Kazuyuki Tomita ,  Masuo Tanno ,  Yasuo Tanaka

IPC分类号： H01L21/302 ,  H01J37/32 ,  H01L21/3065

CPC分类号： H01J37/32623 ,  H01J37/3266

摘要： The magnetron dry-etching apparatus has, behind its anode electrode (1) facing an object to be etched positioned on a cathode electrode (2), a rotatable magnet assembly comprising at least one pair of rotatable permanent magnets (12) of narrow-pie-shape, fixed on a common yoke (14) so that different polarity magnetic poles (N and S) are disposed side by side; whereby a uniform magnetic field is formed on a wafer (8) on the cathode (2) upon rotation of said magnet assembly, thereby assuring uniform etching even upon change of gas pressure of other etching conditions.

摘要翻译： 磁控干蚀刻装置在其阳极电极（1）的后方面向被定位在阴极电极（2）上的待蚀刻物体，包括至少一对狭窄的可旋转永磁体（12）的可旋转磁体组件 固定在公共轭（14）上，使得不同极性的磁极（N和S）并排设置; 由此在所述磁体组件旋转时在阴极（2）上的晶片（8）上形成均匀的磁场，从而即使在其它蚀刻条件的气体压力的变化时也可以确保均匀的蚀刻。

公开(公告)号：US5781872A

公开(公告)日：1998-07-14

申请号：US448447

申请日：1995-06-02

申请人： Masanori Konishi ,  Shinji Kubota ,  Hisatomo Ohki ,  Kazuyuki Tomita

发明人： Masanori Konishi ,  Shinji Kubota ,  Hisatomo Ohki ,  Kazuyuki Tomita

IPC分类号： G01C21/00 ,  B60K35/00 ,  B60K37/02 ,  G01D7/00 ,  G01D7/02 ,  G08G1/0962 ,  G08G1/0969 ,  B60Q9/00

CPC分类号： G01D7/002 ,  B60K35/00 ,  B60K37/02 ,  G01D7/00 ,  G01D7/02

摘要： An on-vehicle data processing system is provided which can cause the vehicle information to be displayed on a display device 10. The on-vehicle data processing system has a mode setting unit 32 for setting the running and stop modes and a data processing unit 34 for computing the mode images. The data processing unit 34 computes the running mode images representing the running states of the vehicle in real time while in the running mode and the stop mode images representing the details of the vehicle information while in the stop mode. Thus, the running mode images, more easily viewed by the driver, can be displayed on the display device in the running mode while the stop mode images, preferentially displaying the contents of the vehicle information, can be displayed on the display device in the stop mode.

摘要翻译： PCT No.PCT / JP94 / 01659 Sec。 371日期：1995年6月2日 102（e）1995年6月2日PCT PCT 1994年10月4日PCT公布。 WO95 / 10026 PCT公开号 日期1995年04月13日提供了车载数据处理系统，其能够使车辆信息显示在显示装置10上。车载数据处理系统具有用于设定运行和停止模式的模式设定单元32，以及 用于计算模式图像的数据处理单元34。 数据处理单元34在运行模式下实时地计算表示车辆的运行状态的运行模式图像，并且在停止模式中表示车辆信息的细节的停止模式图像。 因此，可以在运行模式下在显示装置上显示驾驶员更容易观看的运行模式图像，同时可以在显示装置上显示停车模式图像，优先显示车辆信息的内容，停止 模式。

公开(公告)号：US4763092A

公开(公告)日：1988-08-09

申请号：US51584

申请日：1987-05-20

申请人： Kazuyuki Tomita

发明人： Kazuyuki Tomita

IPC分类号： B03C1/28 ,  H01F7/02

CPC分类号： B03C1/286

摘要： A magnetic filter consisting of a screw plug having a recess formed at the tip end of its screw rod portion and directed in the axial direction thereof, a rod-shaped permanent magnet piece fitted in the recess, and a non-magnetic member interposed between the permanent magnet piece and an inner circumferential surface of the screw rod portion defining the recess. The rod-shaped permanent magnet piece is magnetized so that magnetic poles may appear on its circumferential surface at diametrically opposite ends of its transverse cross-section, and the rod-shaped permanent magnet piece is axially projected from the tip end surface of the screw rod portion.

摘要翻译： 一种磁性过滤器，其由具有在其螺杆部的前端形成并沿轴向方向形成的凹部的螺塞，安装在凹部中的杆状永久磁铁片，以及非磁性构件， 永磁体片和限定凹部的螺杆部的内周面。 杆状永磁体被磁化，使得磁极可能出现在其横截面的径向相对端的圆周表面上，并且杆状永磁体片从螺杆的顶端表面轴向突出 一部分。