公开(公告)号：US06410149B1

公开(公告)日：2002-06-25

申请号：US09378705

申请日：1999-08-23

申请人： Neil Hendricks ,  Douglas M. Smith ,  Teresa Ramos ,  Stephen Wallace ,  James Drage

发明人： Neil Hendricks ,  Douglas M. Smith ,  Teresa Ramos ,  Stephen Wallace ,  James Drage

IPC分类号： B23B904

CPC分类号： B82Y10/00 ,  B82Y30/00 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/02359 ,  H01L21/02362 ,  H01L21/31695 ,  Y10T428/31663

摘要： Improved processes for forming hydrophobic nanoporous dielectric coatings on substrates are provided. The improved processes involve forming a reaction mixture that combines at least one mono-, di- or trifunctional precursor with at least one tetrafunctional precursor, recovering the reaction product, and then depositing the reaction product onto a suitable substrate, followed by gelling of the deposited film. Precursors include alkoxy, acetoxy and halogen leaving groups. Optional processes to enhance the hydrophobicity of a nanoporous silica film are also provided, as well as improved nanoporous silica films, coated substrates and integrated circuits prepared by the new processes

摘要翻译： 提供了在衬底上形成疏水纳米多孔介电涂层的改进方法。 改进的方法包括形成将至少一种单官能，二官能或三官能前体与至少一种四官能前体结合的反应混合物，回收反应产物，然后将反应产物沉积到合适的底物上，然后凝胶化沉积的 电影。 前体包括烷氧基，乙酰氧基和卤素离去基团。 还提供了增强纳米多孔二氧化硅膜的疏水性的可选工艺，以及改进的纳米多孔二氧化硅膜，涂覆的基底和通过新工艺制备的集成电路

公开(公告)号：US06610145B2

公开(公告)日：2003-08-26

申请号：US09956361

申请日：2001-09-19

申请人： Neil Hendricks ,  Douglas M. Smith ,  Teresa Ramos ,  James Drage

发明人： Neil Hendricks ,  Douglas M. Smith ,  Teresa Ramos ,  James Drage

IPC分类号： B05C1102

CPC分类号： H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/31695

摘要： A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.

公开(公告)号：US06335296B1

公开(公告)日：2002-01-01

申请号：US09360131

申请日：1999-07-23

申请人： Neil Hendricks ,  Douglas M. Smith ,  Teresa Ramos ,  James Drage

发明人： Neil Hendricks ,  Douglas M. Smith ,  Teresa Ramos ,  James Drage

IPC分类号： H01L2131

CPC分类号： H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/31695

摘要： A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.

公开(公告)号：US06319855B1

公开(公告)日：2001-11-20

申请号：US09718786

申请日：2000-11-22

申请人： Neil Hendricks ,  Douglas M. Smith ,  Teresa Ramos ,  James Drage

发明人： Neil Hendricks ,  Douglas M. Smith ,  Teresa Ramos ,  James Drage

IPC分类号： B05D312

CPC分类号： H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/31695

摘要： A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.

摘要翻译： 在衬底上形成均匀的纳米多孔介电膜的方法。 该方法包括将平坦基底水平定位在杯内; 将液体烷氧基硅烷组合物沉积在基材表面上; 覆盖杯子，使得衬底被封闭在其中; 旋转覆盖的杯子并将烷氧基硅烷组合物均匀地铺展在基材表面上; 将烷氧基硅烷组合物暴露于水蒸气和碱蒸汽，从而形成凝胶; 然后固化凝胶。 本发明还提供了一种用于将液体涂层旋转沉积到基底上的装置。 该装置具有一个具有敞开顶部的圆柱形杯和封闭顶部的可拆卸盖。 蒸气喷射口延伸穿过盖的中心。 合适的方法是保持在杯内的中心并旋转杯子。

公开(公告)号：US20050214188A1

公开(公告)日：2005-09-29

申请号：US10923103

申请日：2004-08-19

申请人： Ron Rohrbach ,  Dan Bause ,  Peter Unger ,  Jeff Miller ,  Neil Hendricks ,  Adel Tannous ,  Randy Le Claire ,  William McGeever

发明人： Ron Rohrbach ,  Dan Bause ,  Peter Unger ,  Jeff Miller ,  Neil Hendricks ,  Adel Tannous ,  Randy Le Claire ,  William McGeever

IPC分类号： B01D53/34 ,  B01J20/28 ,  C01C3/00 ,  D01D5/253

CPC分类号： B01D39/1623 ,  B01D39/1607 ,  B01D39/2058 ,  B01D53/34 ,  B01D53/54 ,  B01D53/58 ,  B01D2239/0407 ,  B01D2239/0464 ,  B01D2239/0492 ,  B01D2239/065 ,  B01D2251/50 ,  B01D2251/70 ,  B01J20/28014 ,  B01J20/28028 ,  B01J20/28033 ,  B01J20/28038 ,  D01D5/253

摘要： An ultra-efficient multilobal cross-sectioned fiber filter for chemical contaminant filtering applications is described. An absorptive chemically reactive reagent, preferably an acid or base and in liquid or an adsorptive chemically reactive reagent (an acid or base) in solid form, is disposed within longitudinal slots in each length of fiber. The reagent may be used alone or in conjunction with solid adsorptive particles which may also be utilized with the reagents in the longitudinal slots within the fibers. Reagents within the fibers remain exposed to a base-contaminated airstream passing through the filter. Base contaminants in the airstream, chemicals such as ammonium and amines (as well as particles), react with the acid reagent within the longitudinal slots of the fibers. As the contaminant and reagent react, the ammonium or amine becomes irreversibly absorbed (or adsorbed if reagent is a solid acid) to the liquid acid reagent and multilobal fiber.

摘要翻译： 描述了一种用于化学污染物过滤应用的超高效多叶横截面纤维过滤器。 吸收性化学反应试剂，优选酸或碱，以及固体形式的液体或吸附性化学反应试剂（酸或碱），设置在纤维长度上的纵向槽内。 试剂可以单独使用或与固体吸附颗粒结合使用，固体吸附颗粒也可以与纤维内的纵向槽中的试剂一起使用。 纤维内的试剂保持暴露于通过过滤器的受基底污染的气流。 气流中的基础污染物，诸如铵和胺（以及颗粒）的化学物质与纤维的纵向槽内的酸试剂反应。 当污染物和试剂反应时，铵或胺会变得不可逆地吸收（或者如果试剂是固体酸被吸附）到液体酸试剂和多叶纤维。

公开(公告)号：US06610114B2

公开(公告)日：2003-08-26

申请号：US09882000

申请日：2001-06-14

申请人： Dan Towery ,  Neil Hendricks ,  Paul Schilling ,  Tian-An Chen

发明人： Dan Towery ,  Neil Hendricks ,  Paul Schilling ,  Tian-An Chen

IPC分类号： C09G102

CPC分类号： H01L21/31053 ,  C09G1/02 ,  C09K3/1409 ,  C09K3/1436 ,  C09K3/1463 ,  Y10S977/775 ,  Y10S977/776 ,  Y10S977/888

摘要： An oxidizing slurry for removal of low dielectric constant materials. The slurry is formed utilizing non-oxidizing particles with a separate oxidizing agent, oxidizing particles alone or reducible abrasive particles with a compatible oxidizing agent. The particles can be formed of a metal oxide, nitride, or carbide material, by itself or mixtures thereof, or can be coated on a core material such as silicon dioxide or can be coformed therewith. A preferred oxidizing slurry is multi-modal in particle size distribution. Although developed for utilization in CMP semiconductor processing the oxidizing slurry of the present invention also can be utilized for other high precision polishing processes.

公开(公告)号：US20070003457A1

公开(公告)日：2007-01-04

申请号：US10652230

申请日：2003-08-28

申请人： Ron Rohrbach ,  Dan Bause ,  Peter Unger ,  Neil Hendricks ,  Jeff Miller ,  Adel Tannous ,  Randy LeClaire ,  William McGeever

发明人： Ron Rohrbach ,  Dan Bause ,  Peter Unger ,  Neil Hendricks ,  Jeff Miller ,  Adel Tannous ,  Randy LeClaire ,  William McGeever

IPC分类号： B01D46/00

CPC分类号： B01D39/1623 ,  B01D39/1607 ,  B01D39/2058 ,  B01D53/34 ,  B01D53/54 ,  B01D53/58 ,  B01D2239/0407 ,  B01D2239/0464 ,  B01D2239/0492 ,  B01D2239/065 ,  B01D2251/50 ,  B01D2251/70 ,  B01J20/28014 ,  B01J20/28028 ,  B01J20/28033 ,  B01J20/28038 ,  D01D5/253

摘要： An ultra-efficient multilobal cross-sectioned fiber filter for chemical contaminant filtering applications is described. An absorptive chemically reactive reagent, preferably an acid or base and in liquid or an adsorptive chemically reactive reagent (an acid or base) in solid form, is disposed within longitudinal slots in each length of fiber. The reagent may be used alone or in conjunction with solid adsorptive particles which may also be utilized with the reagents in the longitudinal slots within the fibers. Reagents within the fibers remain exposed to a base-contaminated airstream passing through the filter. Base contaminants in the airstream, chemicals such as ammonium and amines (as well as particles), react with the acid reagent within the longitudinal slots of the fibers. As the contaminant and reagent react, the ammonium or amine becomes irreversibly absorbed (or adsorbed if reagent is a solid acid) to the liquid acid reagent and multilobal fiber.

摘要翻译： 描述了一种用于化学污染物过滤应用的超高效多叶横截面纤维过滤器。 吸收性化学反应试剂，优选酸或碱，以及固体形式的液体或吸附性化学反应试剂（酸或碱），设置在纤维长度上的纵向槽内。 试剂可以单独使用或与固体吸附颗粒结合使用，固体吸附颗粒也可以与纤维内的纵向槽中的试剂一起使用。 纤维内的试剂保持暴露于通过过滤器的受基底污染的气流。 气流中的基础污染物，诸如铵和胺（以及颗粒）的化学物质与纤维的纵向槽内的酸试剂反应。 当污染物和试剂反应时，铵或胺会变得不可逆地吸收（或者如果试剂是固体酸被吸附）到液体酸试剂和多叶纤维。

公开(公告)号：US5959157A

公开(公告)日：1999-09-28

申请号：US665189

申请日：1996-06-14

申请人： Kreisler Lau ,  Neil Hendricks ,  William Wan ,  Aaron Smith

发明人： Kreisler Lau ,  Neil Hendricks ,  William Wan ,  Aaron Smith

IPC分类号： C07D309/12 ,  B01J31/02 ,  C07B61/00 ,  C07C29/09 ,  C07C29/32 ,  C07C39/21 ,  C07C41/22 ,  C07C43/225 ,  C08G65/40 ,  C08G65/48 ,  H01L21/312 ,  H01L21/768 ,  H01L23/29 ,  H01L23/31 ,  H01L23/522 ,  H01L23/532 ,  C07C37/00

CPC分类号： C08G65/4006 ,  H01L23/5329 ,  C08G2650/48 ,  C08G2650/60 ,  H01L2924/0002

摘要： A process for making ethynylated, hydroxy-substituted biphenyl compounds comprising:a) halogenating 3,3'-dimethoxybiphenyl to form 2,2'-dihalo-5,5'-dimethoxybiphenyl;b) reacting the resulting 2,2'-dihalo-5,5'-dimethoxybiphenyl with a bromide-containing compound in a chlorinated solvent to form 2,2'-dihalo-5,5'-dihydroxybiphenyl;c) reacting the resulting 2,2'-dihalo-5,5'-dihydroxybiphenyl with a hydroxyl-containing compound in the presence of a protection catalyst to form 2,2'-dihalo-5,5'-bis(tetrahydropyranoxy)biphenyl;d) ethynylating the resulting 2,2'-dihalo-5,5'-bis(tetrahydropyranoxy)biphenyl with a compound of the formulaCuC.tbd.CR'wherein R' is comprised of an alkyl group having from about 1 to about 20 carbon atoms, an alkenyl group having from about 1 to about 20 carbon atoms, an aryl group, a heteroaryl group, or mixtures thereof to form 2,2'-bis(C.tbd.CR')-5,5'-bis(tetrahydropyranoxy)biphenyl; ande) hydrolyzing the resulting 2,2'-bis(C.tbd.CR')-5,5'-bis(tetrahydropyranoxy) biphenyl to form 2,2'-bis(C.tbd.CR')-5,5'bis(dihydroxy)biphenyl.

摘要翻译： 制备乙炔化的羟基取代的联苯化合物的方法，包括：a）将3,3'-二甲氧基联苯卤化形成2,2'-二卤代-5,5'-二甲氧基联苯; b）使所得的2,2'-二卤代-5,5'-二甲氧基联苯与含溴化合物在氯化溶剂中反应形成2,2'-二卤代-5,5'-二羟基联苯; c）在保护催化剂存在下使所得的2,2'-二卤代-5,5'-二羟基联苯与含羟基化合物反应，形成2,2'-二卤代-5,5'-双（四氢吡喃氧基）联苯 ; d）使所得到的2,2'-二卤代-5,5'-双（四氢吡喃氧基）联苯与式C 3 C 3 CON CR'的化合物乙炔基化，其中R'由具有约1至约20个碳原子的烷基组成 ，具有约1至约20个碳原子的烯基，芳基，杂芳基或其混合物，以形成2,2'-双（C 3 CH 3 CR'）-5,5'-双（四氢吡喃氧基）联苯 ; 和e）水解所得的2,2'-双（C 3 -CCH'CR'）-5,5'-双（四氢吡喃氧基）联苯以形成2,2'-双（C 3 -C 10'） - 5,5'-双 二羟基）联苯。

公开(公告)号：USRE37599E1

公开(公告)日：2002-03-19

申请号：US09659380

申请日：2000-09-08

申请人： Kreisler Lau ,  Neil Hendricks ,  William Wan ,  Aaron Smith

发明人： Kreisler Lau ,  Neil Hendricks ,  William Wan ,  Aaron Smith

IPC分类号： C08G7324

CPC分类号： H01L23/5329 ,  C08G65/4006 ,  C08G2650/48 ,  C08G2650/60 ,  H01L2924/0002 ,  Y10S428/901 ,  Y10T428/24802 ,  Y10T428/24917 ,  Y10T428/3154 ,  H01L2924/00

摘要： A method is disclosed for making hydroxy-substituted ethynylated biphenyl compounds and for reacting such compounds with a family of noncross-linking thermosetting poly(arylene ethers) to produce novel poly(arylene ether) compositions which, when cured at glass transition temperatures greater than about 350° C. to form thin films, possess properties such as low dielectric constant, low moisture absorption, and high thermal stability. These films are suitable for use as intermetal dielectrics for multilevel interconnection.

摘要翻译： 公开了一种用于制备羟基取代的乙炔化联苯化合物和使这种化合物与非交联热固性聚（亚芳基醚）族的反应的方法，以产生新的聚（亚芳基醚）组合物，其在玻璃化转变温度大于约 350℃以形成薄膜，具有低介电常数，低吸湿性和高热稳定性等特性。 这些膜适用于多层互连的金属间电介质。

公开(公告)号：US5986045A

公开(公告)日：1999-11-16

申请号：US665132

申请日：1996-06-14

申请人： Kreisler Lau ,  Neil Hendricks ,  William Wan ,  Aaron Smith

发明人： Kreisler Lau ,  Neil Hendricks ,  William Wan ,  Aaron Smith

IPC分类号： C08G65/40 ,  H01L21/56 ,  H01L23/29 ,  H01L23/31 ,  H01L23/532 ,  C08G73/24

CPC分类号： H01L23/5329 ,  C08G65/4006 ,  C08G2650/48 ,  C08G2650/60 ,  H01L2924/0002 ,  Y10S428/901 ,  Y10T428/24802 ,  Y10T428/24917 ,  Y10T428/3154

摘要： A method is disclosed for making hydroxy-substituted ethynylated biphenyl compounds and for reacting such compounds with a family of noncross-linking thermosetting poly(arylene ethers) to produce novel poly(arylene ether) compositions which, when cured at glass transition temperatures greater than about 350.degree. C. to form thin films, possess properties such as low dielectric constant, low moisture absorption, and high thermal stability. These films are suitable for use as intermetal dielectrics for multilevel interconnection.

摘要翻译： 公开了一种用于制备羟基取代的乙炔化联苯化合物和使这种化合物与非交联热固性聚（亚芳基醚）族的反应的方法，以产生新的聚（亚芳基醚）组合物，其在玻璃化转变温度大于约 350℃，形成薄膜，具有低介电常数，低吸湿性，高热稳定性等特性。 这些膜适用于多层互连的金属间电介质。