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    Solid state laser and a method of adjusting the pulse energy of a solid state laser
    3.
    发明授权
    Solid state laser and a method of adjusting the pulse energy of a solid state laser 失效
    固体激光器和调整固态激光器的脉冲能量的方法

    公开(公告)号：US6028870A

    公开(公告)日：2000-02-22

    申请号：US927102

    申请日：1997-08-28

    申请人： Nils Deutsch ,  Wolfgang Zschocke ,  Uwe Stamm

    发明人： Nils Deutsch ,  Wolfgang Zschocke ,  Uwe Stamm

    IPC分类号： H01S3/0941 ,  H01S3/115 ,  H01S3/136 ,  H01S3/10

    CPC分类号： H01S3/115 ,  H01S3/136 ,  H01S3/0941 ,  H01S3/107

    摘要： A solid state laser, especially a solid state laser pumped by laser diodes (3b, 3c) comprises a polarizing beam splitter (5) to couple out from the resonant cavity some part (11) of the radiation energy. An electro-optic modulator (Pockels' cell) (4) serving as couple-out modulator is adjusted such that the ratio of the pulse energy of the laser beam pulses (10) emitted to the coupled-out part (11) of the radiation energy is variable and thus the pulse energy is adjustable by keeping the pulse duration constant.

    摘要翻译： 固体激光器，特别是由激光二极管（3b，3c）泵浦的固体激光器包括偏振分束器（5），以从谐振腔室中散出辐射能量的一部分（11）。 调整用作耦合调制器的电光调制器（Pockels'）（4），使得发射到辐射的耦合出的部分（11）的激光束脉冲（10）的脉冲能量的比率 能量是可变的，因此通过保持脉冲持续时间恒定可以调节脉冲能量。

    Precise monitor etalon calibration technique
    6.
    发明授权
    Precise monitor etalon calibration technique 失效
    精密显示器标准具校准技术

    公开(公告)号：US06807205B1

    公开(公告)日：2004-10-19

    申请号：US09903425

    申请日：2001-07-10

    申请人： Hans-Stephan Albrecht ,  Uwe Stamm ,  Wolfgang Zschocke

    发明人： Hans-Stephan Albrecht ,  Uwe Stamm ,  Wolfgang Zschocke

    IPC分类号： H01S300

    CPC分类号： H01S3/225 ,  H01S3/1303

    摘要： A method for operating an excimer or molecular fluorine laser system at a stabilized wavelength includes generating a laser beam and directing a beam portion through a wavelength measurement system, calibrating the wavelength measurement system to an absolute reference, determining the wavelength of the laser beam including figuring in a drift compensation value of the wavelength, and tuning the wavelength to a target wavelength when the determined wavelength differs from the target wavelength.

    摘要翻译： 用于以稳定的波长操作受激准分子或分子氟激光系统的方法包括产生激光束并将光束部分引导通过波长测量系统，将波长测量系统校准为绝对参考，确定激光束的波长，包括计算 在波长的漂移补偿值中，并且当所确定的波长与目标波长不同时，将波长调谐到目标波长。

    Energy stabilized gas discharge laser
    7.
    发明授权
    Energy stabilized gas discharge laser 失效
    能量稳定气体放电激光器

    公开(公告)号：US06714577B1

    公开(公告)日：2004-03-30

    申请号：US09513025

    申请日：2000-02-25

    申请人： Uwe Stamm ,  Igor Bragin ,  Wolfgang Zschocke

    发明人： Uwe Stamm ,  Igor Bragin ,  Wolfgang Zschocke

    IPC分类号： H01S322

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/104 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251

    摘要： An excimer or molecular fluorine laser, such as a KrF- or ArF-laser, or a molecular fluorine (F2) laser, particularly for photolithography applications, has a gas mixture including a trace amount of a gas additive. The concentration of the gas additive in the gas mixture is optimized for improving energy stability and/or the overshoot control of the laser output beam. The concentration is further determined and adjusted at new fills and/or during laser operation based on its effect on the output pulse energy in view of constraints and/or aging on the discharge circuit and/or other components of the laser system. Attenuation control is also provided for increasing the lifetimes of components of the laser system by controlling the concentration of the gas additive over time. A specific preferred concentration of xenon is more than 100 ppm for improving the energy stability and/or overshoot control. The laser system may be equipped with an internal gas supply unit including an internal xenon gas supply, or a xenon generator for supplying xenon gas from condensed matter xenon.

    摘要翻译： 特别是用于光刻应用的激发子或分子氟激光，例如KrF-或ArF激光，或分子氟（F2）激光，具有包含微量气体添加剂的气体混合物。 气体混合物中气体添加剂的浓度被优化以改善激光输出光束的能量稳定性和/或过冲控制。 考虑到放电电路和/或激光系统的其他部件的约束和/或老化，基于其对输出脉冲能量的影响，在新填充和/或激光操作期间进一步确定和调整浓度。 还提供衰减控制，用于通过控制气体添加剂随时间的浓度来增加激光系统的部件的寿命。 氙的特定优选浓度大于100ppm以改善能量稳定性和/或过冲控制。 激光系统可以配备有内部气体供给单元，该内部气体供给单元包括内部氙气供应源或用于从凝结物质氙提供氙气的氙气发生器。

    Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines
    8.
    发明授权
    Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines 失效
    使用原子碳和分子氧吸收线的可调谐ArF准分子激光器的内部波长校准

    公开(公告)号：US06404795B1

    公开(公告)日：2002-06-11

    申请号：US09917427

    申请日：2001-07-27

    申请人： Uwe Leinhos ,  Jürgen Kleinschmidt ,  Wolfgang Zschocke ,  Uwe Stamm

    发明人： Uwe Leinhos ,  Jürgen Kleinschmidt ,  Wolfgang Zschocke ,  Uwe Stamm

    IPC分类号： H01S313

    CPC分类号： H01S3/1392 ,  H01S3/225

    摘要： A laser is provided having a gain medium including a laser gas and a photoabsorbing species. The photoabsorbing species has at least one photoabsorption line within an output emission spectrum of the laser. When the laser is an ArF-excimer laser, the photoabsorbing species is preferably either atomic carbon or molecular oxygen, which are formed after carbon- or oxygen-containing molecules introduced into the gain medium with the laser gas interact within the gain medium. An absolute wavelength of a narrowed emission of the laser can be calibrated when a narrowed output emission of the laser is tuned through at least one photoabsorption line of the photo-absorbing species. Preferably, a processor communicates with a detector and a wavelength selection unit, as well as a power supply when output beam energy is held constant, to automatically perform the calibration. Also preferably, one of tetrafluorocarbon, trifluoromethane, difluoromethane, fluoromethane and methane molecules are selected as the carbon-containing molecules and/or one of carbon dioxide, carbon monoxide or oxygen are selected as the oxygen-containing molecules. When carbon is selected, a photoabsorption line of atomic carbon at 193.0905 nm is compared with the spectral position of the narrowed emission of the laser to determine the absolute wavelength. When oxygen is selected, a photoabsorption line of molecular oxygen at one or more of 193.114 nm, 193.292 nm or 193.493 nm is compared with the spectral position of the narrowed emission. The absolute wavelength is calibrated within an accuracy range of around ±0.1 pm.

    摘要翻译： 提供具有包括激光气体和光吸收物质的增益介质的激光器。 光吸收物质在激光器的输出发射光谱内具有至少一个光吸收线。 当激光是ArF-准分子激光器时，光吸收物质优选是原子碳或分子氧，它们是在将碳纳米或含氧分子引入增益介质中形成的，其中激光气体在增益介质内相互作用。 当通过光吸收物质的至少一个光吸收线调整激光器的变窄的输出发射时，可以校准激光器的窄化发射的绝对波长。 优选地，当输出光束能量保持恒定时，处理器与检测器和波长选择单元以及电源通信以自动执行校准。 还优选选择四氟化碳，三氟甲烷，二氟甲烷，氟甲烷和甲烷分子之一作为含碳分子，和/或选择二氧化碳，一氧化碳或氧气中的一种作为含氧分子。 当选择碳时，将193.0905nm处的原子碳的光吸收线与激光的窄发射的光谱位置进行比较以确定绝对波长。 当选择氧时，将193.114nm，193.292nm或193.493nm中的一个或多个的分子氧的光吸收谱线与变窄的发射的光谱位置进行比较。 绝对波长在±0.1 pm左右的精度范围内校准。

    Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines
    9.
    发明授权
    Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines 失效
    使用原子碳和分子氧吸收线的可调谐ArF准分子激光器的内部波长校准

    公开(公告)号：US06269110B1

    公开(公告)日：2001-07-31

    申请号：US09167657

    申请日：1998-10-05

    申请人： Uwe Leinhos ,  Jürgen Kleinschmidt ,  Wolfgang Zschocke ,  Uwe Stamm

    发明人： Uwe Leinhos ,  Jürgen Kleinschmidt ,  Wolfgang Zschocke ,  Uwe Stamm

    IPC分类号： H01S310

    CPC分类号： H01S3/1392 ,  H01S3/225

    摘要： A laser is provided having a gain medium including a laser gas and a photoabsorbing species. The photoabsorbing species has at least one photoabsorption line within an output emission spectrum of the laser. When the laser is an ArF-excimer laser, the photoabsorbing species is preferably either atomic carbon or molecular oxygen, which are formed after carbon- or oxygen-containing molecules introduced into the gain medium with the laser gas interact within the gain medium. An absolute wavelength of a narrowed emission of the laser can be calibrated when a narrowed output emission of the laser is tuned through at least one photoabsorption line of the photoabsorbing species. Preferably, a processor communicates with a detector and a wavelength selection unit, as well as a power supply when output beam energy is held constant, to automatically perform the calibration. Also preferably, one of tetrafluorocarbon, trifluoromethane, difluoromethane, fluoromethane and methane molecules are selected as the carbon-containing molecules and/or one of carbon dioxide, carbon monoxide or oxygen are selected as the oxygen-containing molecules. When carbon is selected, a photoabsorption line of atomic carbon at 193.0905 nm is compared with the spectral position of the narrowed emission of the laser to determine the absolute wavelength. When oxygen is selected, a photoabsorption line of molecular oxygen at one or more of 193.114 nm, 193.292 nm or 193.493 nm is compared with the spectral position of the narrowed emission. The absolute wavelength is calibrated within an accuracy range of around ±0.1 pm.

    摘要翻译： 提供具有包括激光气体和光吸收物质的增益介质的激光器。 光吸收物质在激光器的输出发射光谱内具有至少一个光吸收线。 当激光是ArF-准分子激光器时，光吸收物质优选是原子碳或分子氧，它们是在将碳纳米或含氧分子引入增益介质中形成的，其中激光气体在增益介质内相互作用。 当通过光吸收物质的至少一个光吸收线调整激光的变窄的输出发射时，可以校准激光器的窄发射的绝对波长。 优选地，当输出光束能量保持恒定时，处理器与检测器和波长选择单元以及电源通信以自动执行校准。 还优选选择四氟化碳，三氟甲烷，二氟甲烷，氟甲烷和甲烷分子之一作为含碳分子，和/或选择二氧化碳，一氧化碳或氧气中的一种作为含氧分子。 当选择碳时，将193.0905nm处的原子碳的光吸收线与激光的窄发射的光谱位置进行比较以确定绝对波长。 当选择氧时，将193.114nm，193.292nm或193.493nm中的一个或多个的分子氧的光吸收谱线与变窄的发射的光谱位置进行比较。 绝对波长在±0.1 pm左右的精度范围内校准。