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公开(公告)号:US06943373B2
公开(公告)日:2005-09-13
申请号:US10693987
申请日:2003-10-28
申请人: Norikatsu Takaura , Hideyuki Matsuoka , Riichiro Takemura , Kousuke Okuyama , Masahiro Moniwa , Akio Nishida , Kota Funayama , Tomonori Sekiguchi
发明人: Norikatsu Takaura , Hideyuki Matsuoka , Riichiro Takemura , Kousuke Okuyama , Masahiro Moniwa , Akio Nishida , Kota Funayama , Tomonori Sekiguchi
IPC分类号: G11C11/41 , H01L21/8234 , H01L21/8244 , H01L27/00 , H01L27/06 , H01L27/088 , H01L27/10 , H01L27/11 , H01L29/10 , H01L29/72
CPC分类号: H01L27/11 , H01L27/0688 , H01L27/1104
摘要: The invention provides a semiconductor memory device comprising a plurality of word lines, a plurality of bit lines, and a plurality of static memory cells each having a first, second, third, fourth, fifth, and sixth transistors. While each of channels of the first, second, third, and fourth transistors are formed vertical against a substrate of the semiconductor memory device. Each of semiconductor regions forming a source or a drain of the fifth and sixth transistors forms a PN junction against the substrate. According to another aspect of the invention, the SRAM device of the invention has a plurality of SRAM cells, at least one of which is a vertical SRAM cell comprising at least four vertical transistors onto a substrate, and each vertical transistor includes a source, a drain, and a channel therebetween aligning in one aligning line which penetrates into the substrate surface at an angle greater than zero degree.
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公开(公告)号:US20050253143A1
公开(公告)日:2005-11-17
申请号:US11168872
申请日:2005-06-29
申请人: Norikatsu Takaura , Hideyuki Matsuoka , Riichiro Takemura , Kousuke Okuyama , Masahiro Moniwa , Akio Nishida , Kota Funayama , Tomonori Sekiguchi
发明人: Norikatsu Takaura , Hideyuki Matsuoka , Riichiro Takemura , Kousuke Okuyama , Masahiro Moniwa , Akio Nishida , Kota Funayama , Tomonori Sekiguchi
IPC分类号: G11C11/41 , H01L21/8234 , H01L21/8244 , H01L27/00 , H01L27/06 , H01L27/088 , H01L27/10 , H01L27/11 , H01L29/10
CPC分类号: H01L27/11 , H01L27/0688 , H01L27/1104
摘要: The invention provides a semiconductor memory device comprising a plurality of word lines, a plurality of bit lines, and a plurality of static memory cells each having a first, second, third, fourth, fifth, and sixth transistors. While each of channels of the first, second, third, and fourth transistors are formed vertical against a substrate of the semiconductor memory device. Each of semiconductor regions forming a source or a drain of the fifth and sixth transistors forms a PN junction against the substrate. According to another aspect of the invention, the SRAM device of the invention has a plurality of SRAM cells, at least one of which is a vertical SRAM cell comprising at least four vertical transistors onto a substrate, and each vertical transistor includes a source, a drain, and a channel therebetween aligning in one aligning line which penetrates into the substrate surface at an angle greater than zero degree.
摘要翻译: 本发明提供一种包括多个字线,多个位线以及多个静态存储单元的半导体存储器件,每个静态存储器单元具有第一,第二,第三,第四,第五和第六和第六晶体管。 尽管第一,第二,第三和第四晶体管的每个通道与半导体存储器件的衬底垂直地形成。 形成第五晶体管和第六晶体管的源极或漏极的半导体区域形成与衬底相反的PN结。 根据本发明的另一方面,本发明的SRAM器件具有多个SRAM单元,其中至少一个是在衬底上包括至少四个垂直晶体管的垂直SRAM单元,并且每个垂直晶体管包括源极, 排水管和其间的通道在以大于零度的角度穿入衬底表面的一个对准线对中。
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公开(公告)号:US07098478B2
公开(公告)日:2006-08-29
申请号:US11168872
申请日:2005-06-29
申请人: Norikatsu Takaura , Hideyuki Matsuoka , Riichiro Takemura , Kousuke Okuyama , Masahiro Moniwa , Akio Nishida , Kota Funayama , Tomonori Sekiguchi
发明人: Norikatsu Takaura , Hideyuki Matsuoka , Riichiro Takemura , Kousuke Okuyama , Masahiro Moniwa , Akio Nishida , Kota Funayama , Tomonori Sekiguchi
IPC分类号: H01L29/72
CPC分类号: H01L27/11 , H01L27/0688 , H01L27/1104
摘要: The invention provides a semiconductor memory device comprising a plurality of word lines, a plurality of bit lines, and a plurality of static memory cells each having a first, second, third, fourth, fifth, and sixth transistors. While each of channels of the first, second, third, and fourth transistors are formed vertical against a substrate of the semiconductor memory device. Each of semiconductor regions forming a source or a drain of the fifth and sixth transistors forms a PN junction against the substrate. According to another aspect of the invention, the SRAM device of the invention has a plurality of SRAM cells, at least one of which is a vertical SRAM cell comprising at least four vertical transistors onto a substrate, and each vertical transistor includes a source, a drain, and a channel therebetween aligning in one aligning line which penetrates into the substrate surface at an angle greater than zero degree.
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公开(公告)号:US06670642B2
公开(公告)日:2003-12-30
申请号:US10051188
申请日:2002-01-22
申请人: Norikatsu Takaura , Hideyuki Matsuoka , Riichiro Takemura , Kousuke Okuyama , Masahiro Moniwa , Akio Nishida , Kota Funayama , Tomonori Sekiguchi
发明人: Norikatsu Takaura , Hideyuki Matsuoka , Riichiro Takemura , Kousuke Okuyama , Masahiro Moniwa , Akio Nishida , Kota Funayama , Tomonori Sekiguchi
IPC分类号: H01L2972
CPC分类号: H01L27/11 , H01L27/0688 , H01L27/1104
摘要: The invention provides a semiconductor memory device comprising a plurality of word lines, a plurality of bit lines, and a plurality of static memory cells each having a first, second, third, fourth, fifth, and sixth transistors. While each of channels of the first, second, third, and fourth transistors are formed vertical against a substrate of the semiconductor memory device. Each of semiconductor regions forming a source or a drain of the fifth and sixth transistors forms a PN junction against the substrate. According to another aspect of the invention, the SRAM device of the invention has a plurality of SRAM cells, at least one of which is a vertical SRAM cell comprising at least four vertical transistors onto a substrate, and each vertical transistor includes a source, a drain, and a channel therebetween aligning in one aligning line which penetrates into the substrate surface at an angle greater than zero degree.
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公开(公告)号:US20060274593A1
公开(公告)日:2006-12-07
申请号:US11501118
申请日:2006-08-09
申请人: Kenzo Kurotsuchi , Norikatsu Takaura , Osamu Tonomura , Motoyasu Terao , Hideyuki Matsuoka , Riichiro Takemura
发明人: Kenzo Kurotsuchi , Norikatsu Takaura , Osamu Tonomura , Motoyasu Terao , Hideyuki Matsuoka , Riichiro Takemura
IPC分类号: G11C17/18
CPC分类号: G11C11/56 , G11C11/5678 , G11C13/0004 , G11C13/003 , G11C13/004 , G11C13/0069 , G11C2013/0054 , G11C2013/0071 , G11C2013/0078 , G11C2013/009 , G11C2213/76 , G11C2213/79
摘要: In a non-volatile phase change memory, information is recorded by utilizing a change in resistance of a phase change portion. When the phase change portion is allowed to generate Joule's heat and is held at a specific temperature, it goes into a state of a low resistance. When the gate voltage of a memory cell selection transistor QM is controlled to afford a low resistance state, the maximum amount of current applied to the phase change portion is limited by the application of a medium-state voltage to the control gate, thereby avoiding overheating of the phase change portion.
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公开(公告)号:US07123535B2
公开(公告)日:2006-10-17
申请号:US11002245
申请日:2004-12-03
申请人: Kenzo Kurotsuchi , Norikatsu Takaura , Osamu Tonomura , Motoyasu Terao , Hideyuki Matsuoka , Riichiro Takemura
发明人: Kenzo Kurotsuchi , Norikatsu Takaura , Osamu Tonomura , Motoyasu Terao , Hideyuki Matsuoka , Riichiro Takemura
IPC分类号: G11C17/18
CPC分类号: G11C11/56 , G11C11/5678 , G11C13/0004 , G11C13/003 , G11C13/004 , G11C13/0069 , G11C2013/0054 , G11C2013/0071 , G11C2013/0078 , G11C2013/009 , G11C2213/76 , G11C2213/79
摘要: In a non-volatile phase change memory, information is recorded by utilizing a change in resistance of a phase change portion. When the phase change portion is allowed to generate Joule's heat and is held at a specific temperature, it goes into a state of a low resistance. When the gate voltage of a memory cell selection transistor QM is controlled to afford a low resistance state, the maximum amount of current applied to the phase change portion is limited by the application of a medium-state voltage to the control gate, thereby avoiding overheating of the phase change portion.
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公开(公告)号:US20050035428A1
公开(公告)日:2005-02-17
申请号:US10946000
申请日:2004-09-22
申请人: Norikatsu Takaura , Riichiro Takemura , Hideyuki Matsuoka , Shinichiro Kimura , Hisao Asakura , Ryo Nagai , Satoru Yamada
发明人: Norikatsu Takaura , Riichiro Takemura , Hideyuki Matsuoka , Shinichiro Kimura , Hisao Asakura , Ryo Nagai , Satoru Yamada
IPC分类号: H01L21/76 , H01L21/8238 , H01L21/8242 , H01L27/08 , H01L27/092 , H01L27/105 , H01L27/108 , H01L29/76
CPC分类号: H01L27/105 , H01L27/10897
摘要: A semiconductor integrated circuit device is provided, in which variation in the threshold voltage of a MISFET, for example, a MISFET pair that constitute a sense amplifier, can be reduced. In a logic circuit area over which a logic circuit such as a sense amplifier circuit required to drive a memory cell is formed, n-type active areas having no gate electrode are arranged at both edges of active areas over which a p-channel MISFET pair for constituting a sense amplifier are formed. Assuming that the width between active areas nwp1 and nw1 is L4, the width between active areas nwp2 and nw2 is L6, and the width between active areas nwp1 and nwp2 is L5, (L4-L5), (L6-L5), and (L4-L6) are set equal to almost zero or smaller than twice the minimum processing dimension, so that the variation in shape of the device isolation trenches with the widths L4, L5, and L6 can be reduced, and the threshold voltage difference in the MISFET pair can be reduced.
摘要翻译: 提供了一种半导体集成电路器件,其中可以减小MISFET的阈值电压的变化,例如构成读出放大器的MISFET对的变化。 在形成驱动存储单元所需的诸如读出放大器电路的逻辑电路的逻辑电路区域中,没有栅电极的n型有源区域被布置在有效区域的两个边缘上,p沟道MISFET对 用于构成读出放大器。 假设有效区域nwp1和nw1之间的宽度为L4,则有效区域nwp2和nw2之间的宽度为L6,有效区域nwp1和nwp2之间的宽度为L5(L4-L5),(L6-L5)和( L4-L6)设定为几乎为零或小于最小加工尺寸的两倍,使得可以减小宽度L4,L5和L6的器件隔离沟槽形状的变化,并且可以减小阈值电压差 可以减少MISFET对。
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公开(公告)号:US07489552B2
公开(公告)日:2009-02-10
申请号:US11501118
申请日:2006-08-09
申请人: Kenzo Kurotsuchi , Norikatsu Takaura , Osamu Tonomura , Motoyasu Terao , Hideyuki Matsuoka , Riichiro Takemura
发明人: Kenzo Kurotsuchi , Norikatsu Takaura , Osamu Tonomura , Motoyasu Terao , Hideyuki Matsuoka , Riichiro Takemura
IPC分类号: G11C11/34
CPC分类号: G11C11/56 , G11C11/5678 , G11C13/0004 , G11C13/003 , G11C13/004 , G11C13/0069 , G11C2013/0054 , G11C2013/0071 , G11C2013/0078 , G11C2013/009 , G11C2213/76 , G11C2213/79
摘要: In a non-volatile phase change memory, information is recorded by utilizing a change in resistance of a phase change portion. When the phase change portion is allowed to generate Joule's heat and is held at a specific temperature, it goes into a state of a low resistance. When the gate voltage of a memory cell selection transistor QM is controlled to afford a low resistance state, the maximum amount of current applied to the phase change portion is limited by the application of a medium-state voltage to the control gate, thereby avoiding overheating of the phase change portion.
摘要翻译: 在非易失性相变存储器中,利用相变部分的电阻变化来记录信息。 当相变部分产生焦耳热并保持在特定温度时,其进入低电阻状态。 当控制存储单元选择晶体管QM的栅极电压以提供低电阻状态时,通过向控制栅极施加中等电压来限制施加到相变部分的最大电流量,从而避免过热 的相变部。
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公开(公告)号:US20090014770A1
公开(公告)日:2009-01-15
申请号:US12169789
申请日:2008-07-09
申请人: Motoyasu Terao , Hideyuki Matsuoka , Naohiko Irie , Yoshitaka Sasago , Riichiro Takemura , Norikatsu Takaura
发明人: Motoyasu Terao , Hideyuki Matsuoka , Naohiko Irie , Yoshitaka Sasago , Riichiro Takemura , Norikatsu Takaura
IPC分类号: H01L29/00
CPC分类号: H01L45/145 , G11C11/5614 , G11C13/0011 , G11C2213/11 , G11C2213/79 , H01L27/2409 , H01L27/2436 , H01L27/2463 , H01L27/2481 , H01L45/085 , H01L45/1233 , H01L45/1266 , H01L45/142 , H01L45/143 , H01L45/144 , H01L45/146
摘要: A technique that can realize high integration even for multilayered three-dimensional structures at low costs by improving the performance of the semiconductor device having recording or switching functions by employing a device structure that enables high precision controlling of the movement of ions in the solid electrolyte. The semiconductor element of the device is formed as follows; two or more layers are deposited with different components respectively between a pair of electrodes disposed separately in the vertical (z-axis) direction, then a pulse voltage is applied between those electrodes to form a conductive path. The resistance value of the path changes according to an information signal. Furthermore, a region is formed at a middle part of the conductive path. The region is used to accumulate a component that improves the conductivity of the path, thereby enabling the resistance value (rate) to response currently to the information signal. More preferably, an electrode should also be formed at least in either the x-axis or y-axis direction to apply a control voltage to the electrode.
摘要翻译: 通过采用能够高精度地控制固体电解质中的离子的运动的装置结构,通过提高具有记录或切换功能的半导体器件的性能,可以以低成本实现多层次三维结构的高集成度的技术。 器件的半导体元件如下形成; 分别在垂直(z轴)方向上分开设置的一对电极之间分别沉积两层或更多层,然后在这些电极之间施加脉冲电压以形成导电路径。 路径的电阻值根据信息信号而变化。 此外,在导电路径的中间部分形成区域。 该区域用于累积改善路径的导电性的分量,从而使电阻值(速率)能够当前响应于信息信号。 更优选地,电极也应至少形成在x轴方向或y轴方向上,以向电极施加控制电压。
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公开(公告)号:US07829930B2
公开(公告)日:2010-11-09
申请号:US12169789
申请日:2008-07-09
申请人: Motoyasu Terao , Hideyuki Matsuoka , Naohiko Irie , Yoshitaka Sasago , Riichiro Takemura , Norikatsu Takaura
发明人: Motoyasu Terao , Hideyuki Matsuoka , Naohiko Irie , Yoshitaka Sasago , Riichiro Takemura , Norikatsu Takaura
IPC分类号: H01L27/108
CPC分类号: H01L45/145 , G11C11/5614 , G11C13/0011 , G11C2213/11 , G11C2213/79 , H01L27/2409 , H01L27/2436 , H01L27/2463 , H01L27/2481 , H01L45/085 , H01L45/1233 , H01L45/1266 , H01L45/142 , H01L45/143 , H01L45/144 , H01L45/146
摘要: A technique that can realize high integration even for multilayered three-dimensional structures at low costs by improving the performance of the semiconductor device having recording or switching functions by employing a device structure that enables high precision controlling of the movement of ions in the solid electrolyte. The semiconductor element of the device is formed as follows; two or more layers are deposited with different components respectively between a pair of electrodes disposed separately in the vertical (z-axis) direction, then a pulse voltage is applied between those electrodes to form a conductive path. The resistance value of the path changes according to an information signal. Furthermore, a region is formed at a middle part of the conductive path. The region is used to accumulate a component that improves the conductivity of the path, thereby enabling the resistance value (rate) to response currently to the information signal. More preferably, an electrode should also be formed at least in either the x-axis or y-axis direction to apply a control voltage to the electrode.
摘要翻译: 通过采用能够高精度地控制固体电解质中的离子的运动的装置结构,通过提高具有记录或切换功能的半导体器件的性能,可以以低成本实现多层次三维结构的高集成度的技术。 器件的半导体元件如下形成; 分别在垂直(z轴)方向上分开设置的一对电极之间分别沉积两层或更多层,然后在这些电极之间施加脉冲电压以形成导电路径。 路径的电阻值根据信息信号而变化。 此外,在导电路径的中间部分形成区域。 该区域用于累积改善路径的导电性的分量,从而使电阻值(速率)能够当前响应于信息信号。 更优选地,电极也应至少形成在x轴方向或y轴方向上,以向电极施加控制电压。
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