公开(公告)号：US09478458B2

公开(公告)日：2016-10-25

申请号：US14149965

申请日：2014-01-08

Applicant: Northrop Grumman Systems Corporation

Inventor： Chunbo Zhang ,  Peter Ngo ,  Gershon Akerling ,  Kevin M. Leong ,  Patty Chang-Chien ,  Kelly J. Hennig ,  William R. Deal

IPC: H01Q13/02 ,  H01L21/762 ,  H01L23/66 ,  H01Q23/00 ,  H01L23/055 ,  H01L23/14 ,  H01P11/00 ,  H01L23/00

CPC classification number: H01L27/14685 ,  H01L21/76254 ,  H01L23/055 ,  H01L23/147 ,  H01L23/66 ,  H01L24/13 ,  H01L24/16 ,  H01L24/81 ,  H01L24/97 ,  H01L27/14687 ,  H01L31/186 ,  H01L31/1876 ,  H01L2223/6627 ,  H01L2223/6633 ,  H01L2223/6677 ,  H01L2223/6683 ,  H01L2224/0401 ,  H01L2224/13109 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/81022 ,  H01L2224/81024 ,  H01L2224/81054 ,  H01L2224/81191 ,  H01L2224/81192 ,  H01L2224/81204 ,  H01L2224/81805 ,  H01L2224/81815 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2924/10329 ,  H01L2924/10335 ,  H01L2924/12032 ,  H01L2924/13064 ,  H01L2924/14215 ,  H01L2924/1423 ,  H01L2924/15313 ,  H01L2924/157 ,  H01L2924/37001 ,  H01P11/002 ,  H01Q13/02 ,  H01Q23/00 ,  H01L2924/00 ,  H01L2224/03 ,  H01L2224/81 ,  H01L2924/01079

Abstract: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.

Abstract translation: 公开了一种用于将单个III-V MMIC集成到微加工波导封装中的方法和装置。 MMIC在集成之前进行筛选，仅允许已知的芯片集成，从而提高产量。 该方法和装置用于实现用于亚毫米波（SMMW）相机的微集成焦平面阵列（mFPA）技术，尽管许多其他应用是可能的。 不同技术的MMIC可以集成到相同的微加工包装中，从而实现与多晶圆WLP集成相同的技术集成水平。

公开(公告)号：US20140254979A1

公开(公告)日：2014-09-11

申请号：US14149965

申请日：2014-01-08

Applicant: Northrop Grumman Systems Corporation

Inventor： Chunbo Zhang ,  Peter Ngo ,  Gershon Akerling ,  Kevin M. Leong ,  Patty Chang-Chien ,  Kelly J. Hennig ,  William R. Deal

IPC: G02B6/42 ,  G02B6/13 ,  H01L21/762

CPC classification number: H01L27/14685 ,  H01L21/76254 ,  H01L23/055 ,  H01L23/147 ,  H01L23/66 ,  H01L24/13 ,  H01L24/16 ,  H01L24/81 ,  H01L24/97 ,  H01L27/14687 ,  H01L31/186 ,  H01L31/1876 ,  H01L2223/6627 ,  H01L2223/6633 ,  H01L2223/6677 ,  H01L2223/6683 ,  H01L2224/0401 ,  H01L2224/13109 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/81022 ,  H01L2224/81024 ,  H01L2224/81054 ,  H01L2224/81191 ,  H01L2224/81192 ,  H01L2224/81204 ,  H01L2224/81805 ,  H01L2224/81815 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2924/10329 ,  H01L2924/10335 ,  H01L2924/12032 ,  H01L2924/13064 ,  H01L2924/14215 ,  H01L2924/1423 ,  H01L2924/15313 ,  H01L2924/157 ,  H01L2924/37001 ,  H01P11/002 ,  H01Q13/02 ,  H01Q23/00 ,  H01L2924/00 ,  H01L2224/03 ,  H01L2224/81 ,  H01L2924/01079

Abstract: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.

Abstract translation: 公开了一种用于将单个III-V MMIC集成到微加工波导封装中的方法和装置。 MMIC在集成之前进行筛选，仅允许已知的芯片集成，从而提高产量。 该方法和装置用于实现用于亚毫米波（SMMW）相机的微集成焦平面阵列（mFPA）技术，尽管许多其他应用是可能的。 不同技术的MMIC可以集成到相同的微加工包装中，从而实现与多晶圆WLP集成相同的技术集成水平。

公开(公告)号：US20170018597A1

公开(公告)日：2017-01-19

申请号：US15272913

申请日：2016-09-22

Applicant: Northrop Grumman Systems Corporation

Inventor： Chunbo Zhang ,  Peter Ngo ,  Gershon Akerling ,  Kevin M. Leong ,  Patty Chang-Chien ,  Kelly J. Hennig ,  William R. Deal

IPC: H01L27/146 ,  H01P11/00 ,  H01Q13/02 ,  H01L31/18

CPC classification number: H01L27/14685 ,  H01L21/76254 ,  H01L23/055 ,  H01L23/147 ,  H01L23/66 ,  H01L24/13 ,  H01L24/16 ,  H01L24/81 ,  H01L24/97 ,  H01L27/14687 ,  H01L31/186 ,  H01L31/1876 ,  H01L2223/6627 ,  H01L2223/6633 ,  H01L2223/6677 ,  H01L2223/6683 ,  H01L2224/0401 ,  H01L2224/13109 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/81022 ,  H01L2224/81024 ,  H01L2224/81054 ,  H01L2224/81191 ,  H01L2224/81192 ,  H01L2224/81204 ,  H01L2224/81805 ,  H01L2224/81815 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2924/10329 ,  H01L2924/10335 ,  H01L2924/12032 ,  H01L2924/13064 ,  H01L2924/14215 ,  H01L2924/1423 ,  H01L2924/15313 ,  H01L2924/157 ,  H01L2924/37001 ,  H01P11/002 ,  H01Q13/02 ,  H01Q23/00 ,  H01L2924/00 ,  H01L2224/03 ,  H01L2224/81 ,  H01L2924/01079

Abstract: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.

Abstract translation: 公开了一种用于将单个III-V MMIC集成到微加工波导封装中的方法和装置。 MMIC在集成之前进行筛选，仅允许已知的芯片集成，从而提高产量。 该方法和装置用于实现用于亚毫米波（SMMW）相机的微集成焦平面阵列（mFPA）技术，尽管许多其他应用是可能的。 不同技术的MMIC可以集成到相同的微加工包装中，从而实现与多晶圆WLP集成相同的技术集成水平。

公开(公告)号：US09960204B2

公开(公告)日：2018-05-01

申请号：US15272913

申请日：2016-09-22

Applicant: Northrop Grumman Systems Corporation

Inventor： Chunbo Zhang ,  Peter Ngo ,  Gershon Akerling ,  Kevin M. Leong ,  Patty Chang-Chien ,  Kelly J. Hennig ,  William R. Deal

IPC: H01Q13/02 ,  H01L27/146 ,  H01L21/762 ,  H01L23/66 ,  H01Q23/00 ,  H01P11/00 ,  H01L31/18 ,  H01L23/055 ,  H01L23/14 ,  H01L23/00

CPC classification number: H01L27/14685 ,  H01L21/76254 ,  H01L23/055 ,  H01L23/147 ,  H01L23/66 ,  H01L24/13 ,  H01L24/16 ,  H01L24/81 ,  H01L24/97 ,  H01L27/14687 ,  H01L31/186 ,  H01L31/1876 ,  H01L2223/6627 ,  H01L2223/6633 ,  H01L2223/6677 ,  H01L2223/6683 ,  H01L2224/0401 ,  H01L2224/13109 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/81022 ,  H01L2224/81024 ,  H01L2224/81054 ,  H01L2224/81191 ,  H01L2224/81192 ,  H01L2224/81204 ,  H01L2224/81805 ,  H01L2224/81815 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2924/10329 ,  H01L2924/10335 ,  H01L2924/12032 ,  H01L2924/13064 ,  H01L2924/14215 ,  H01L2924/1423 ,  H01L2924/15313 ,  H01L2924/157 ,  H01L2924/37001 ,  H01P11/002 ,  H01Q13/02 ,  H01Q23/00 ,  H01L2924/00 ,  H01L2224/03 ,  H01L2224/81 ,  H01L2924/01079

Abstract: A method and apparatus for integrating individual III-V MMICs into a micromachined waveguide package is disclosed. MMICs are screened prior to integration, allowing only known-good die to be integrated, leading to increased yield. The method and apparatus are used to implement a micro-integrated Focal Plane Array (mFPA) technology used for sub millimeter wave (SMMW) cameras, although many other applications are possible. MMICs of different technologies may be integrated into the same micromachined package thus achieving the same level of technology integration as in multi-wafer WLP integration.

公开(公告)号：US09947980B2

公开(公告)日：2018-04-17

申请号：US14996066

申请日：2016-01-14

Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION

Inventor： Shih-En Shih ,  Ben Gorospe ,  Kevin Leong ,  William R. Deal

IPC: H01P1/207 ,  H01P3/12 ,  H01P3/00

CPC classification number: H01P1/207 ,  H01P3/00 ,  H01P3/12

Abstract: A terahertz waveguide bandpass filter block assembly including a waveguide iris filter, a pedestal block having a pedestal channel including a first one-half portion of the iris filter, and a cover block having a cover channel including a second one-half portion of the iris filter, where the first and second one-half portions combine to define the iris filter having a plurality of poles when the pedestal block and the cover block are secured together. The assembly also includes first and second ribbon strips positioned on opposing sides and adjacent to the iris filter between the pedestal block and the cover block, where a compression force between the pedestal block and the cover block compresses the first and second ribbon strips and sets an “a” dimension of the iris filter to tune the filter to a frequency band of interest.