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    Electron-optical corrector for aplanatic imaging systems
    8.
    发明授权
    Electron-optical corrector for aplanatic imaging systems 有权
    用于摄影系统的电子 - 光学校正器

    公开(公告)号：US07800076B2

    公开(公告)日：2010-09-21

    申请号：US12297306

    申请日：2007-03-31

    申请人： Stephan Uhlemann ,  Harald Rose ,  Heiko Müller

    发明人： Stephan Uhlemann ,  Harald Rose ,  Heiko Müller

    IPC分类号： H01J37/153

    CPC分类号： H01J37/153 ,  H01J2237/1534

    摘要： A particle-optical corrector for eliminating both the third-order aperture aberration and the third-order extra-axial coma, using circular lenses and hexapole fields, includes three coaxially arranged hexapole fields, at least one circular lens doublet being arranged between adjacent hexapole fields and adjusted so that the center hexapole field is imaged on the hexapole fields. Between the hexapole fields, an intermediate plane prevails and the intermediate planes are conjugated with one another. The three hexapole fields are identically oriented in the Larmor reference system with the intensities of the three fields being chosen so that the image aberration coefficient of the astigmatism with three-fold symmetry becomes 0. The corrective contains two hexapole fields, in which the fields of the hexapole field pair are excited anti-symmetrically to one another, and the pairs are in each case arranged around the two intermediate planes. The orientation of the hexapole field pairs is rotated with respect to the orientation defined by the hexapole fields by a sufficient angle so that the extra-axial third order coma is corrected.

    摘要翻译： 一种使用圆形透镜和六极场消除三次孔径像差和三次超外差彗差的粒子光学校正器包括三个同轴布置的六极场，至少一个圆形透镜双曲线布置在相邻的六极场之间 并调整为使六边形中心六极场成像。 在六极场之间，以中间平面为准，中间平面彼此共轭。 三个六极场在拉莫尔参考系中相同取向，选择三个场的强度，使得具有三重对称性的像散的像差系数变为0.校正包含两个六极场，其中场 六极场对被彼此反对称地激励，并且在每种情况下这些对围绕两个中间平面布置。 六极场对的取向相对于由六极场确定的取向旋转足够的角度，以便校正异轴三阶彗差。

    Lens array with a laterally movable optical axis for corpuscular rays
    9.
    发明授权
    Lens array with a laterally movable optical axis for corpuscular rays 失效
    透镜阵列具有用于红外线的横向移动的光轴

    公开(公告)号：US06995378B2

    公开(公告)日：2006-02-07

    申请号：US10499165

    申请日：2002-11-26

    申请人： Stephan Uhlemann ,  Maximilan Haider ,  Heiko Müller

    发明人： Stephan Uhlemann ,  Maximilan Haider ,  Heiko Müller

    IPC分类号： H01J37/145 ,  H01J37/153

    CPC分类号： H01J37/153 ,  H01J37/145 ,  H01J2237/3175

    摘要： Disclosed is a lens array having a laterally movable axis for corpuscular rays, particularly for transmission from areas of an object surface onto the focal plane by means of electrons. The inventive array consists of a combined lens comprising a cylinder lens and a quadrupole lens provided with slit diaphragms which can be impinged upon by electric and/or magnetic fields. The optical axis of the quadrupole lens is oriented parallel to the axis of the cylinder lens and defines the optical axis of the projection, the position of which can be altered in relation to the axis of the cylinder lens. The quadrupole lens is in focus in the sector in which the cylinder lens is not in focus and is out of focus in the section in which the cylinder lens is in focus. The inventive combined lens can be operated as an immersion lens for projecting secondary electrons. The immersion field consists of at least two adjacent axially aligned fields. The first field lies between the object and the first slit diaphragm, and the second field lies between the first slit diaphragm and the second slit diaphragm. Both fields can be focused independently from each other. The potential difference between the object and the first diaphragm is comparatively small in relation to the potential difference between the first diaphragm and the second diaphragm, and the potential course between the object and the first diaphragm has to be approximately linear. The combined lens is brought into/out of focus by superposing the immersion field, the cylinder lens field, and the quadrupole field. Alternatively, the lens array can be used as a cathode lens for a photocathode with several homogenous adjacent emission areas.

    摘要翻译： 公开了一种透镜阵列，其具有用于粒子束的横向可移动轴，特别是用于通过电子从物体表面到焦平面上的区域的透射。 本发明的阵列由包括柱面透镜和四极透镜的组合透镜组成，该四极透镜设置有可被电场和/或磁场撞击的狭缝光阑。 四极透镜的光轴定向为平行于柱面透镜的轴线并且限定投影的光轴，其位置可以相对于柱面透镜的轴线改变。 四极透镜在柱面透镜未聚焦的区域中聚焦，并且在柱面透镜聚焦的部分中不对焦。 本发明的组合透镜可以用作投影二次电子的浸没透镜。 浸入场由至少两个相邻的轴向排列的场组成。 第一场位于物体和第一狭缝光阑之间，第二场位于第一狭缝光阑和第二狭缝光阑之间。 这两个领域可以彼此独立地集中。 物体与第一膜片之间的电位差相对于第一膜片和第二膜片之间的电位差相对较小，并且物体与第一膜片之间的电位过程必须近似线性。 组合透镜通过叠加浸没场，气缸透镜场和四极场进入/离开焦点。 或者，透镜阵列可以用作具有几个均匀的相邻发射区域的用于光电阴极的阴极透镜。

    Monochromator and radiation source with monochromator
    10.
    发明申请
    Monochromator and radiation source with monochromator 有权
    单色仪和辐射源

    公开(公告)号：US20080290273A1

    公开(公告)日：2008-11-27

    申请号：US12153455

    申请日：2008-05-20

    申请人： Stephan Uhlemann

    发明人： Stephan Uhlemann

    IPC分类号： H01J47/00

    CPC分类号： H01J37/153 ,  H01J37/05 ,  H01J37/26 ,  H01J49/48 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/1538

    摘要： A monochromator (1) for a charged particle optics, in particular, for electron microscopy, comprises at least one first deflection element (2, 3) with an electrostatic deflecting field (2′, 3′) for generating a dispersion (4) in the plane (5) of a selection aperture (6) to select charged particles of a desired energy interval (7) and at least one second deflection element (8, 9) with an electrostatic deflecting field (8′, 9′) which eliminates the dispersion (4) of the at least one first deflecting field (2′, 3′). A radiation source (17) comprises such a monochromator (1). High monchromatism without intensity contrasts caused by defects of the slit aperture is thereby achieved in that the deflection elements (2, 3, 8, 9) have a design other than spherically shaped and their electrodes (24, 25) are given a potential (φ+, φ−) such that the charged particles (xα, yβ) which virtually enter the image of the radiation source (17) at different respective angles (α, β) in different sections (x, y), are differently focused such that charged particles (xα, yβ) of one energy are point focused (10, 10′, 10″) exclusively in the plane (5) of the selection aperture (6), since zero-crossings (11, 12) of the deflections (A) of the charged particles (xα, yβ) of the different sections (x, y) only coincide there at the same axial position (z, E).

    摘要翻译： 用于带电粒子光学器件的单色仪（1），特别是用于电子显微镜的装置包括至少一个具有用于产生分散体（4）的静电偏转场（2'，3'）的第一偏转元件（2,3） 选择孔径（6）的平面（5）以选择具有期望能量间隔（7）的带电粒子和至少一个具有静电偏转场（8'，9'）的第二偏转元件（8,9） 所述至少一个第一偏转场（2'，3'）的色散（4）。 辐射源（17）包括这样的单色仪（1）。 因此，由于偏转元件（2,3,8,9）具有除球形之外的设计，并且它们的电极（24,25）被赋予电位（phi + ，phi），使得在不同部分（x，y）中以不同的相应角度（α，β）实际进入辐射源（17）的图像的带电粒子（xalpha，ybeta）被不同地聚焦，使得带电 一个能量的粒子（xalpha，ybeta）专门在选择孔径（6）的平面（5）中点聚焦（10,10'，10“），因为偏转的零交叉（11,12） A）的不同部分（x，y）的带电粒子（xalpha，ybeta）仅在相同的轴向位置（z，E）处重合。