公开(公告)号：US07867636B2

公开(公告)日：2011-01-11

申请号：US11562561

申请日：2006-11-22

申请人： Osamu Nakagawara ,  Hiroyuki Seto ,  Yutaka Kishimoto

发明人： Osamu Nakagawara ,  Hiroyuki Seto ,  Yutaka Kishimoto

IPC分类号： H01B5/14

CPC分类号： C23C14/086 ,  C23C14/34 ,  Y10T428/31507

摘要： A ZnO-based transparent conductive film is produced by growing ZnO doped with a group III element oxide on a substrate and has a region with a crystal structure in which a c-axis grows along a plurality of different directions. The transparent conductive film produced by growing ZnO doped with a group III element oxide on a substrate has a ZnO (002) rocking curve full width at half maximum of about 13.5° or more. ZnO is doped with a group III element oxide so that the ratio of the group III element oxide in the transparent conductive film is about 7% to about 40% by weight. The transparent conductive film is formed on the substrate with a SiNx thin film provided therebetween. The transparent conductive film is formed on the substrate by a thin film formation method with a bias voltage applied to the substrate.

摘要翻译： 通过在衬底上生长掺杂有III族元素氧化物的ZnO并且具有其中c轴沿多个不同方向生长的晶体结构的区域来制造ZnO基透明导电膜。 通过在衬底上生长掺杂有III族元素氧化物的ZnO生长的透明导电膜具有半峰全宽为13.5°或更大的ZnO（002）摇摆曲线。 ZnO掺杂有III族元素氧化物，使得透明导电膜中III族元素氧化物的比例为约7％至约40％重量。 透明导电膜形成在衬底上，其间设置有SiNx薄膜。 透明导电膜通过薄膜形成方法在衬底上形成，其中偏置电压施加到衬底。

公开(公告)号：US20060119230A1

公开(公告)日：2006-06-08

申请号：US11295444

申请日：2005-12-07

申请人： Keiichi Umeda ,  Osamu Nakagawara

发明人： Keiichi Umeda ,  Osamu Nakagawara

IPC分类号： H01L41/08

CPC分类号： H03H9/172 ,  H03H3/04 ,  H03H9/02149 ,  H03H9/131 ,  Y10T29/42

摘要： A piezoelectric thin-film resonator includes a first excitation electrode and a second excitation electrode, the first excitation electrode being disposed opposite the second excitation electrode; a piezoelectric thin film disposed between the first excitation electrode and the second excitation electrode; and a substrate supporting the first excitation electrode, the substrate being composed of a LiTaO3 single crystal or a LiNbO3 single crystal, the first excitation electrode including an acoustic reflecting layer, the acoustic reflecting layer containing (a) at least one epitaxially grown first sublayer being composed of a conducting material and having a relatively high acoustic impedance; and (b) at least one epitaxially grown second sublayer being composed of another conducting material and having a relatively low acoustic impedance.

摘要翻译： 压电薄膜谐振器包括第一激励电极和第二激励电极，第一激励电极与第二激励电极相对设置; 设置在所述第一激励电极和所述第二激励电极之间的压电薄膜; 以及支撑所述第一激发电极的基板，所述基板由LiTaO 3单晶或LiNbO 3 N 3单晶构成，所述第一激发电极包括声反射层， 所述声反射层包含（a）由导电材料构成且具有较高声阻抗的至少一个外延生长的第一子层; 和（b）至少一个外延生长的第二子层，由另一个导电材料组成并具有较低的声阻抗。

公开(公告)号：US08148879B2

公开(公告)日：2012-04-03

申请号：US12954726

申请日：2010-11-26

申请人： Masamichi Andoh ,  Osamu Nakagawara ,  Souko Fukahori

发明人： Masamichi Andoh ,  Osamu Nakagawara ,  Souko Fukahori

IPC分类号： H01L41/047 ,  H01L41/09

CPC分类号： H01L41/0926 ,  H01L41/0471 ,  H01L41/0478 ,  H01L41/193 ,  H04R17/005 ,  H04R2499/11 ,  Y10S310/80

摘要： In a sheet-type piezoelectric vibrator provided with a piezoelectric sheet made from a transparent organic polymer and electrodes formed on respective main surfaces that are opposite to each other of the piezoelectric sheet, an electrode material that is effectively used for making the vibrator colorless is provided. The first electrodes formed on one of the main surfaces of piezoelectric sheets are made of zinc oxide electrode layers, each mainly containing zinc oxide, and second electrodes formed on the other main surface of the piezoelectric sheets include polythiophene electrode layers made from a conductive polymer containing thiophene in a molecule structure thereof. Although the zinc oxide electrode layer is transparent, it is slightly yellowish, while, on the other hand, although the polythiophene electrode layer is also transparent, it is slightly bluish. Since the spectral characteristic of light transmitted through these two electrode layers is made substantially flat in the visible region, the coloring of the transmitted light is suppressed so that the layers appear colorless and transparent.

摘要翻译： 在设置有由透明有机聚合物制成的压电片和形成在彼此相对的压电片的各个主表面上的电极的片式压电振动器中，提供有效地用于使振动器无色的电极材料 。 形成在压电片的一个主表面上的第一电极由主要含有氧化锌的氧化锌电极层制成，并且形成在压电片的另一个主表面上的第二电极包括由含导电聚合物制成的聚噻吩电极层 噻吩的分子结构。 虽然氧化锌电极层是透明的，但是它是微黄色的，而另一方面，尽管聚噻吩电极层也是透明的，但是它是微蓝色的。 由于透过这两个电极层的光的光谱特性在可见光区域基本上是平坦的，所以透射光的着色被抑制，使得层看起来无色透明。

公开(公告)号：US07213322B2

公开(公告)日：2007-05-08

申请号：US10792543

申请日：2004-03-03

申请人： Osamu Nakagawara ,  Akinori Shinoda

发明人： Osamu Nakagawara ,  Akinori Shinoda

IPC分类号： H04R31/00

CPC分类号： H03H3/08 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A piezoelectric substrate is provided with interdigital transducer electrodes including a first electrode layer, a second electrode layer, and a third electrode layer that is principally made of aluminum. The piezoelectric substrate has a stepped structure on the surface of the piezoelectric substrate, the stepped structure including terraces each having a width of about 50 nm or less and steps each having a width of a mono-molecular layer (e.g., about 14 Å).

摘要翻译： 压电基板设置有包括第一电极层，第二电极层和主要由铝制成的第三电极层的叉指式换能器电极。 压电基板在压电基板的表面上具有台阶结构，阶梯结构包括各自具有约50nm或更小的宽度的台阶以及各自具有单分子层（例如，大约）的宽度的台阶。

公开(公告)号：US07218039B2

公开(公告)日：2007-05-15

申请号：US11374784

申请日：2006-03-14

申请人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

发明人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

IPC分类号： H01L41/047 ,  H03H9/145

CPC分类号： H03H9/14538 ,  H03H9/009 ,  H03H9/02094 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/02944 ,  H03H9/25 ,  H03H9/6483

摘要： A surface acoustic wave device includes a piezoelectric substrate and interdigital electrodes disposed on the piezoelectric substrate, wherein each of the interdigital electrodes includes a main electrode layer made of Cu or an alloy that has Cu as its main component. The surface acoustic wave device also includes a tightly adhering layer which is disposed between the main electrode layer and the piezoelectric substrate and whose main component is NiCr, or a tightly adhering layer whose main component is Ti and whose film thickness is within a range of about 18 nm to about 60 nm.

摘要翻译： 表面声波装置包括压电基板和设置在压电基板上的叉指电极，其中每个叉指电极包括由Cu制成的主电极层或以Cu为主要成分的合金。 表面声波装置还包括紧密粘合层，其设置在主电极层和压电基板之间，其主要成分为NiCr，或者主要成分为Ti并且膜厚度在约 18nm至约60nm。

公开(公告)号：US07141909B2

公开(公告)日：2006-11-28

申请号：US10834596

申请日：2004-04-29

申请人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

发明人： Takuo Hada ,  Takeshi Nakao ,  Michio Kadota ,  Osamu Nakagawara

IPC分类号： H01L41/047 ,  H01L41/16 ,  H03H9/145 ,  H03H9/25 ,  H03H9/15

CPC分类号： H03H9/14538 ,  H03H9/009 ,  H03H9/02094 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/02944 ,  H03H9/25 ,  H03H9/6483

摘要： A surface acoustic wave device includes a piezoelectric substrate and interdigital electrodes disposed on the piezoelectric substrate, wherein each of the interdigital electrodes includes a main electrode layer made of Cu or an alloy that has Cu as its main component. The surface acoustic wave device also includes a tightly adhering layer which is disposed between the main electrode layer and the piezoelectric substrate and whose main component is NiCr, or a tightly adhering layer whose main component is Ti and whose film thickness is within a range of about 18 nm to about 60 nm.

摘要翻译： 表面声波装置包括压电基板和设置在压电基板上的叉指电极，其中每个叉指电极包括由Cu制成的主电极层或以Cu为主要成分的合金。 表面声波装置还包括紧密粘合层，其设置在主电极层和压电基板之间，其主要成分为NiCr，或者主要成分为Ti并且膜厚度在约 18nm至约60nm。

公开(公告)号：US20110062829A1

公开(公告)日：2011-03-17

申请号：US12954726

申请日：2010-11-26

申请人： Masamichi Andoh ,  Osamu Nakagawara ,  Souko Fukahori

发明人： Masamichi Andoh ,  Osamu Nakagawara ,  Souko Fukahori

IPC分类号： H01L41/047

CPC分类号： H01L41/0926 ,  H01L41/0471 ,  H01L41/0478 ,  H01L41/193 ,  H04R17/005 ,  H04R2499/11 ,  Y10S310/80

摘要： In a sheet-type piezoelectric vibrator provided with a piezoelectric sheet made from a transparent organic polymer and electrodes formed on respective main surfaces that are opposite to each other of the piezoelectric sheet, an electrode material that is effectively used for making the vibrator colorless is provided. The first electrodes formed on one of the main surfaces of piezoelectric sheets are made of zinc oxide electrode layers, each mainly containing zinc oxide, and second electrodes formed on the other main surface of the piezoelectric sheets include polythiophene electrode layers made from a conductive polymer containing thiophene in a molecule structure thereof. Although the zinc oxide electrode layer is transparent, it is slightly yellowish, while, on the other hand, although the polythiophene electrode layer is also transparent, it is slightly bluish. Since the spectral characteristic of light transmitted through these two electrode layers is made substantially flat in the visible region, the coloring of the transmitted light is suppressed so that the layers appear colorless and transparent.

摘要翻译： 在设置有由透明有机聚合物制成的压电片和形成在彼此相对的压电片的各个主表面上的电极的片式压电振动器中，提供有效地用于使振动器无色的电极材料 。 形成在压电片的一个主表面上的第一电极由主要含有氧化锌的氧化锌电极层制成，并且形成在压电片的另一个主表面上的第二电极包括由含导电聚合物制成的聚噻吩电极层 噻吩的分子结构。 虽然氧化锌电极层是透明的，但是它是微黄色的，而另一方面，尽管聚噻吩电极层也是透明的，但是它是微蓝色的。 由于透过这两个电极层的光的光谱特性在可见光区域基本上是平坦的，所以透射光的着色被抑制，使得层看起来无色透明。

公开(公告)号：US07146695B2

公开(公告)日：2006-12-12

申请号：US10953348

申请日：2004-09-30

申请人： Osamu Nakagawara ,  Masahiko Saeki ,  Kazuhiro Inoue

发明人： Osamu Nakagawara ,  Masahiko Saeki ,  Kazuhiro Inoue

IPC分类号： H04R17/00

CPC分类号： H03H9/02929 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49135 ,  Y10T29/49155

摘要： A surface acoustic wave device has superior electrical power resistance that is obtained by improving stress migration resistance of electrodes. In order to form at least one electrode, for example, on a θ rotation Y-cut (θ=36° to 42°) LiTaO3 piezoelectric substrate, an underlying electrode layer including Ti or Cr as a primary component is formed, and an Al electrode layer including Al as a primary component is then formed on this underlying electrode layer. The Al electrode layer is an oriented film grown by epitaxial growth and is also a polycrystalline thin film having a twin structure in which a diffraction pattern observed in an X-ray diffraction pole figure has a plurality of symmetry centers.

摘要翻译： 表面声波装置具有优异的电功率，通过提高电极的耐应力迁移阻力而获得。 为了形成至少一个电极，例如在θ旋转Y切割（θ= 36°至42°）的LiTaO 3/3压电衬底上形成至少一个电极，底层电极层包括Ti或Cr作为 形成主要成分，然后在该底层电极层上形成包括Al作为主要成分的Al电极层。 Al电极层是通过外延生长生长的取向膜，也是具有双结构的多晶薄膜，其中在X射线衍射极图中观察到的衍射图案具有多个对称中心。

公开(公告)号：US06060381A

公开(公告)日：2000-05-09

申请号：US851805

申请日：1997-05-06

申请人： Osamu Nakagawara ,  Masato Kobayashi ,  Yukio Yoshino

发明人： Osamu Nakagawara ,  Masato Kobayashi ,  Yukio Yoshino

IPC分类号： H01L21/60 ,  H01F17/00 ,  H01F41/04 ,  H01L21/48 ,  H01L21/768 ,  H01L23/538 ,  H05K1/02 ,  H05K1/11 ,  H05K3/40 ,  H05K3/46 ,  H01L21/445

CPC分类号： H01L21/4857 ,  H01F17/0006 ,  H01F41/041 ,  H01L21/7682 ,  H01L23/5381 ,  H05K3/4685 ,  H01L2224/16225

摘要： An electronic part having an air-bridge interconnection has a flat air-bridge interconnection body, no interconnection loss, high Q and low power consumption. Also disclosed is a method of manufacturing such electronic parts. The flat air-bridge interconnection body is obtained by conducting two-stage selective plating including selective plating for forming posts on post base electrodes and selective plating for forming the air-bridge interconnection body.

摘要翻译： 具有气桥互连的电子部件具有扁平的空气桥接体，无互连损耗，Q值高，功耗低。 还公开了制造这种电子部件的方法。 通过进行包括用于在后基底电极上形成柱的选择性电镀和形成气桥互连体的选择性电镀的两级选择性电镀来获得扁平空气桥互连体。

公开(公告)号：US07276836B2

公开(公告)日：2007-10-02

申请号：US11295444

申请日：2005-12-07

申请人： Keiichi Umeda ,  Osamu Nakagawara

发明人： Keiichi Umeda ,  Osamu Nakagawara

IPC分类号： H01L41/047 ,  H01L41/083 ,  H03H9/24

CPC分类号： H03H9/172 ,  H03H3/04 ,  H03H9/02149 ,  H03H9/131 ,  Y10T29/42

摘要： A piezoelectric thin-film resonator includes a first excitation electrode and a second excitation electrode, the first excitation electrode being disposed opposite the second excitation electrode; a piezoelectric thin film disposed between the first excitation electrode and the second excitation electrode; and a substrate supporting the first excitation electrode, the substrate being composed of a LiTaO3 single crystal or a LiNbO3 single crystal, the first excitation electrode including an acoustic reflecting layer, the acoustic reflecting layer containing (a) at least one epitaxially grown first sublayer being composed of a conducting material and having a relatively high acoustic impedance; and (b) at least one epitaxially grown second sublayer being composed of another conducting material and having a relatively low acoustic impedance.

摘要翻译： 压电薄膜谐振器包括第一激励电极和第二激励电极，第一激励电极与第二激励电极相对设置; 设置在所述第一激励电极和所述第二激励电极之间的压电薄膜; 以及支撑所述第一激发电极的基板，所述基板由LiTaO 3单晶或LiNbO 3 N 3单晶构成，所述第一激发电极包括声反射层， 所述声反射层包含（a）由导电材料构成且具有较高声阻抗的至少一个外延生长的第一子层; 和（b）至少一个外延生长的第二子层，由另一个导电材料组成并具有较低的声阻抗。