公开(公告)号：US20110069306A1

公开(公告)日：2011-03-24

申请号：US12994793

申请日：2009-05-29

申请人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon

发明人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon

IPC分类号： G01N21/88 ,  G01R31/26

CPC分类号： H01L21/6838

摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：US20130038866A1

公开(公告)日：2013-02-14

申请号：US13565212

申请日：2012-08-02

申请人： George J. Kren ,  Paul Doyle ,  Alexander Belyaev

发明人： George J. Kren ,  Paul Doyle ,  Alexander Belyaev

IPC分类号： G01N21/00 ,  B23B31/30 ,  B23B31/02

CPC分类号： H01L21/68735 ,  Y10T279/11 ,  Y10T279/21 ,  Y10T279/34

摘要： The present invention is directed to a high speed, spinning chuck for use in a semiconductor wafer inspection system. The chuck of the present disclosure is configured with a turbulence-reducing lip. Spinning of the chuck produces radial airflows proximal to a surface of the wafer and proximal to the bottom of the chuck. The turbulence-reducing lip of the chuck of the present disclosure directs the radial airflows off of the top surface of the wafer and the bottom surface of the chuck in a manner that minimizes the size of the low pressure zone formed between these radial airflows. The minimization of the low pressure zone reduces air turbulence about the periphery of the chuck and substrate, thereby reducing the possibility of contaminants in the system being directed onto the surface of the substrate by such air turbulence.

摘要翻译： 本发明涉及一种用于半导体晶片检查系统的高速纺丝卡盘。 本公开的卡盘配置有减少湍流的唇部。 卡盘的旋转产生靠近晶片表面并靠近卡盘底部的径向气流。 本公开的卡盘的减少湍流的唇部以使得在这些径向气流之间形成的低压区域的尺寸最小化的方式引导径向气流离开晶片的顶表面和卡盘的底表面。 低压区域的最小化减小了卡盘和基板周围的空气紊流，从而降低了系统中的污染物通过这种空气湍流被引导到基板的表面上的可能性。

公开(公告)号：US08995066B2

公开(公告)日：2015-03-31

申请号：US13226492

申请日：2011-09-06

申请人： Paul Doyle ,  Alexander Belyaev

发明人： Paul Doyle ,  Alexander Belyaev

IPC分类号： G02B7/00 ,  G01N21/95

CPC分类号： G02B7/008 ,  G01N21/9501 ,  G01N2201/021 ,  H01L21/67103 ,  H01L21/68792 ,  Y10T403/21

摘要： Disclosed herein is an apparatus for providing passive correction for thermal effects on a mounted mechanical component. Further disclosed is a wafer inspection system employing the passive thermal effect correction apparatus.

摘要翻译： 本文公开了一种用于为安装的机械部件提供热效应的被动校正的装置。 另外公开了采用无源热效应校正装置的晶圆检查系统。

公开(公告)号：US20130057855A1

公开(公告)日：2013-03-07

申请号：US13226492

申请日：2011-09-06

申请人： Paul Doyle ,  Alexander Belyaev

发明人： Paul Doyle ,  Alexander Belyaev

IPC分类号： G01N21/00 ,  F16B1/00

CPC分类号： G02B7/008 ,  G01N21/9501 ,  G01N2201/021 ,  H01L21/67103 ,  H01L21/68792 ,  Y10T403/21

摘要： Disclosed herein is an apparatus for providing passive correction for thermal effects on a mounted mechanical component. Further disclosed is a wafer inspection system employing the passive thermal effect correction apparatus.

摘要翻译： 本文公开了一种用于为安装的机械部件提供热效应的被动校正的装置。 另外公开了采用无源热效应校正装置的晶圆检查系统。

公开(公告)号：US08817250B2

公开(公告)日：2014-08-26

申请号：US13226032

申请日：2011-09-06

申请人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani ,  Carmela C. Moreno

发明人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

IPC分类号： G01N21/00

CPC分类号： H01L21/6838

摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：US20120062877A1

公开(公告)日：2012-03-15

申请号：US13226032

申请日：2011-09-06

申请人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

发明人： Paul Doyle ,  Guoheng Zhao ,  Alexander Belyaev ,  J. Rex Runyon ,  Christian H. Wolters ,  Howard W. Dando ,  Mehdi Vaez-Iravani

IPC分类号： G01N21/88 ,  G01R31/26

CPC分类号： H01L21/6838

摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：US08042254B1

公开(公告)日：2011-10-25

申请号：US11963271

申请日：2007-12-21

申请人： Alexander Belyaev ,  Christian H. Wolters ,  Aleksey Petrenko ,  Paul Doyle

发明人： Alexander Belyaev ,  Christian H. Wolters ,  Aleksey Petrenko ,  Paul Doyle

IPC分类号： B23B31/18 ,  B05C13/00

CPC分类号： H01L21/68785 ,  Y10T29/49998 ,  Y10T279/18

摘要： An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.

摘要翻译： 公开了一种边缘处理卡盘，用于高速保持和旋转测试基板的系统以及用于夹持旋转基板的方法。 卡盘包括具有中心轴线的板，流体开口和具有以围绕中心轴线对称为特征的不同形貌的顶部表面。 这种形状使得流体开口和足以抵消底物下垂的顶表面周边之间的流体的体积流速显着小于类似但平坦表面的卡盘相似地抵消这种下垂所需的体积流量。 该系统还可以包括主轴电动机和气体系统，其将气体通过流体开口提供到衬底的顶表面和后表面之间的间隙。 通过间隙的流体的径向速度近似恒定。

公开(公告)号：US08189120B2

公开(公告)日：2012-05-29

申请号：US12365274

申请日：2009-02-04

申请人： Paul Doyle

发明人： Paul Doyle

IPC分类号： H04N5/44

CPC分类号： H04N5/44582 ,  G08C17/02 ,  G08C2201/40 ,  G08C2201/41 ,  H04L12/282 ,  H04L2012/285 ,  H04N21/42206 ,  H04N21/42225

摘要： A TV detects the capabilities of connected components to respond to various function commands. Subsequently, when a non-programmable remote control is used to select a component and then generate a function command, the TV determines if the component can respond to the command and if not, the TV dynamically alters the commanded function or the selected component.

摘要翻译： 电视机检测连接的组件的功能以响应各种功能命令。 随后，当使用非可编程遥控器选择一个组件然后产生一个功能命令时，电视机确定该组件是否可以响应该命令，如果该命令无法响应，则电视机会动态地改变所命令的功能或所选择的组件。

公开(公告)号：US20100195001A1

公开(公告)日：2010-08-05

申请号：US12365274

申请日：2009-02-04

申请人： Paul Doyle

发明人： Paul Doyle

IPC分类号： H04N5/44

CPC分类号： H04N5/44582 ,  G08C17/02 ,  G08C2201/40 ,  G08C2201/41 ,  H04L12/282 ,  H04L2012/285 ,  H04N21/42206 ,  H04N21/42225

摘要： A TV detects the capabilities of connected components to respond to various function commands. Subsequently, when a non-programmable remote control is used to select a component and then generate a function command, the TV determines if the component can respond to the command and if not, the TV dynamically alters the commanded function or the selected component.

摘要翻译： 电视机检测连接的组件的功能以响应各种功能命令。 随后，当使用非可编程遥控器选择一个组件然后产生一个功能命令时，电视机确定该组件是否可以响应该命令，如果该命令无法响应，则电视机会动态地改变所命令的功能或所选择的组件。

公开(公告)号：US08625029B2

公开(公告)日：2014-01-07

申请号：US12002378

申请日：2007-12-17

申请人： Paul Doyle ,  Eiji Kono ,  Tetsuya Nomura ,  Peter Rae Shintani

发明人： Paul Doyle ,  Eiji Kono ,  Tetsuya Nomura ,  Peter Rae Shintani

IPC分类号： H04N7/00 ,  H04N11/00 ,  H04N5/44 ,  H04N3/27 ,  H04N5/46

CPC分类号： H04N5/44 ,  G09G5/006 ,  G09G2320/08 ,  G09G2370/047 ,  G09G2370/12 ,  H01R13/641 ,  H04N21/43635 ,  H04N21/44231

摘要： A circuit for detection of an HDMI source device to an HDMI sink device through an HDMI sink connector without regard for the activity state of the HDMI source device has a pull-up resistor having first and second terminals with the first terminal coupled to a DC power source. A switching device is coupled between the pull-up resistor's second terminal and ground at a circuit node. The switching device is switched on to couple the circuit node to ground when power is applied to a control terminal thereof from the HDMI sink connector power pin, and being switched off otherwise. The circuit node is coupled to a DDC/CEC GROUND pin of the HDMI sink connector. The circuit node is readable as a binary signal to indicate the presence of a source device to the HDMI sink connector, wherein the node exhibits a logic low signal when either the node is grounded by the DDC/CEC GROUND pin connection to a source device or when the switching device is switched on. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.

摘要翻译： 用于通过HDMI接收器连接器将HDMI源设备检测到HDMI信宿设备的电路不考虑HDMI源设备的活动状态，具有上拉电阻器，其具有第一和第二端子，其中第一端子耦合到DC电源 资源。 开关器件在电路节点处耦合在上拉电阻器的第二端子和地之间。 当从HDMI接收器连接器电源引脚向其控制端施加电力时，切换装置被接通以将电路节点耦合到地，否则被切断。 电路节点耦合到HDMI接收器连接器的DDC / CEC GROUND引脚。 电路节点可读取为二进制信号，以指示源设备到HDMI接收器连接器的存在，其中当节点通过DDC / CEC GROUND引脚连接到源设备接地时，节点呈现逻辑低信号，或 当开关器件接通时。 该摘要不被认为是限制性的，因为其他实施例可能偏离本摘要中描述的特征。