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19 条记录 (耗时 0.026 秒)

    Gas performance control system for gas discharge lasers
    3.
    发明授权
    Gas performance control system for gas discharge lasers 失效
    气体放电激光器气体性能控制系统

    公开(公告)号：US06243406B1

    公开(公告)日：2001-06-05

    申请号：US09418052

    申请日：1999-10-14

    申请人： Peter Heist ,  Matthias Kramer ,  Jürgen Kleinschmidt ,  Sergei Govorkov

    发明人： Peter Heist ,  Matthias Kramer ,  Jürgen Kleinschmidt ,  Sergei Govorkov

    IPC分类号： H01S322

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2258

    摘要： A gas mixture of a gas discharge laser such as an excimer or molecular fluorine laser is stabilized. The gas mixture of the laser includes a constituent halogen containing molecular species such as F2 or HCl which is subject to depletion from an initial optimum concentration. When the gas mixture is energized by a pulsed discharge circuit, the amplified spontaneous emission (ASE) signal is monitored. The status of the gas mixture is determined based on the monitored ASE signal. Stimulated emission is preferably filtered or blocked for more precise ASE signal monitoring. The gas mixture is preferably replenished using small halogen injections, total pressure adjustments and mini and partial gas replacements based on the evolving gas mixture status determined from the monitored ASE signal. Another parameter may be monitored such as the driving voltage to indicate the status of another system specification such as alignment or degradation of resonator optics, synchronization of optical components, contamination within the resonator or purge conditions for a F2-laser enclosure.

    摘要翻译： 诸如准分子或分子氟激光器之类的气体放电激光器的气体混合物是稳定的。 激光的气体混合物包括含有分子物质如F2或HCl的组分卤素，其从初始最佳浓度消耗。 当气体混合物通过脉冲放电电路通电时，监测放大的自发发射（ASE）信号。 基于被监测的ASE信号确定气体混合物的状态。 刺激的发射优选地被过滤或阻挡以用于更精确的ASE信号监测。 气体混合物优选使用小型卤素注射，总压力调节和基于从监测的ASE信号确定的演变气体混合物状态的微小和部分气体替代物来补充。 可以监视另一参数，例如驱动电压以指示另一系统规范的状态，例如谐振器光学器件的对准或退化，光学部件的同步，谐振器内的污染物或用于F2激光器外壳的吹扫条件。

    Excimer laser with line narrowing
    4.
    发明授权
    Excimer laser with line narrowing 失效
    准分子激光线变窄

    公开(公告)号：US06476987B1

    公开(公告)日：2002-11-05

    申请号：US09629256

    申请日：2000-07-31

    申请人： Juergen Kleinschmidt ,  Peter Heist ,  Matthias Kramer

    发明人： Juergen Kleinschmidt ,  Peter Heist ,  Matthias Kramer

    IPC分类号： G02B504

    CPC分类号： G02B5/04 ,  H01S3/0811 ,  H01S3/223 ,  H01S3/225

    摘要： A line narrowing unit for use within an excimer or molecular fluorine laser resonator includes a dispersive prism having antireflection coatings on entrance and exit surfaces. Entrance and exit angles and an apex angle are increased to enhance the dispersive power of the prism, while the antireflective coatings limit reflective losses. Preferably, a laser beam makes a non-symmetric pass through said prism. The apex angle is preferably greater than 65°, or even 75°, and the angle of incidence and the exit angle of the beam are each preferably greater than 65°. A beam expanding prism configured for enhanced beam expansion has an apex angle between within a range of 37.5° and 42.5°, and a beam incidence angle at the entrance surface of more than 65°, and an antireflection coating on preferably both the entrance and exit surfaces.

    摘要翻译： 在准分子或分子氟激光谐振器内使用的线窄化单元包括在入射和出射表面上具有抗反射涂层的分散棱镜。 增加出入角和顶角以增强棱镜的分散力，而抗反射涂层则限制了反射损耗。 优选地，激光束使不对称通过所述棱镜。 顶角优选大于65°或甚至75°，并且梁的入射角和出射角各自优选地大于65°。 配置用于增强光束膨胀的光束扩张棱镜具有在37.5°和42.5°之间的范围内的顶角和大于65°的入射面处的光束入射角，并且优选地，入射和出射两者的抗反射涂层 表面。

    Laser wavelength and bandwidth monitor
    5.
    发明授权
    Laser wavelength and bandwidth monitor 失效

    公开(公告)号：US06597462B2

    公开(公告)日：2003-07-22

    申请号：US09791496

    申请日：2001-02-22

    申请人： Matthias Kramer ,  Marcus Serwazi

    发明人： Matthias Kramer ,  Marcus Serwazi

    IPC分类号： G01B902

    CPC分类号： G01J9/0246 ,  H01S3/1305 ,  H01S3/1392

    摘要： A first method for determining the relative wavelength shift of a laser beam away from a known reference line, such as an absorption line of a gas in an opto-galvanic cell or a reference line of reference laser uses a monitor etalon. The FSR of the etalon used to calculate the wavelength shift is determined based on a calculated gap spacing between the etalon plates, or etalon constant. The gap spacing is determined based on a fit to measured values of wavelength deviations of the FSR as a function of the relative wavelength shift. The FSR used to calculate the wavelength shift is also based on the wavelength shift itself. A second method for measuring the absolute bandwidth and spectral purity of a tunable laser beam uses an opto-galvanic or absorption cell. The laser beam is directed to interact with a gas in the cell that undergoes an optical transition within the spectral tuning range of the laser. The beam is tuned through the optical transition line of the gas in the cell, and the opto-galvanic or absorption spectrum of the line is measured. The measured bandwidth and spectral purity are convoluted or broadened by the bandwidth of the laser beam used in the measurement. The bandwidth and spectral purity of the laser beam are determined based on the bandwidth and spectral purity, respectively, of the measured spectrum and a known correspondence between the measured convoluted bandwidth and spectral purity and the bandwidth and spectral purity, respectively, of the laser beam.

    Line-narrowing optics module having improved mechanical performance
    6.
    发明授权
    Line-narrowing optics module having improved mechanical performance 失效
    线变窄的光学模块具有改进的机械性能

    公开(公告)号：US06760358B1

    公开(公告)日：2004-07-06

    申请号：US10141625

    申请日：2002-05-07

    申请人： Kay Zimmermann ,  Konstantin Aab ,  Matthias Kramer ,  Marcus Serwazi

    发明人： Kay Zimmermann ,  Konstantin Aab ,  Matthias Kramer ,  Marcus Serwazi

    IPC分类号： H01S308

    CPC分类号： H01S3/106 ,  H01S3/02 ,  H01S3/1055

    摘要： An apparatus for adjusting an orientation of an optical component mounted within a laser resonator with suppressed hysteresis includes an electromechanical device, a drive element, and a mechano-optical device coupled to the mounted optical component. The drive element is configured to contact and apply a force to the mechano-optical device in such a way as to adjust the orientation of the mechano-optical device, and thereby that of the optical component, to a known orientation within the laser resonator. The optical component is mounted such that stresses applied by the mount to the optical component are homogeneous and substantially thermally-independent.

    摘要翻译： 用于调节安装在具有抑制滞后的激光谐振器内的光学部件的取向的装置包括耦合到所安装的光学部件的机电装置，驱动元件和机械光学装置。 驱动元件被配置为以机械光学装置的方式接触和施加力，以便将机械光学装置的方位从而调整到激光谐振器内的已知取向。 安装光学部件，使得由安装件施加到光学部件的应力是均匀的并且基本上是热独立的。

    Multispectral lighting apparatus
    9.
    发明授权
    Multispectral lighting apparatus 有权
    多光照明装置

    公开(公告)号：US08203784B2

    公开(公告)日：2012-06-19

    申请号：US12445132

    申请日：2007-10-06

    申请人： Andreas Nolte ,  Matthias Kramer ,  Michael Brehm ,  Christian Boeker

    发明人： Andreas Nolte ,  Matthias Kramer ,  Michael Brehm ,  Christian Boeker

    IPC分类号： G02B21/06 ,  F21V9/00

    CPC分类号： G02B27/1006 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/10 ,  G01N21/6458 ,  G02B21/16 ,  G02B27/145

    摘要： The invention is directed to a multispectral illumination device for a microscope or for a reader. According to the invention, the illumination device comprises at least three receptacle positions for lighting modules and at least one receptacle position for coupling modules, the mechanical devices for connecting the lighting modules or coupling modules at the receptacle positions to the illumination device being designed in such a way that the lighting modules or coupling modules can be easily changed. Further, the receptacle positions are arranged in such a way that, with suitable selection of the lighting modules and coupling modules, all individual spectra of the lighting modules in a total spectrum are available simultaneously at the output of the illumination device.

    摘要翻译： 本发明涉及用于显微镜或读取器的多光谱照明装置。 根据本发明，照明装置包括用于照明模块的至少三个插座位置和用于耦合模块的至少一个插座位置，用于将插座位置处的照明模块或耦合模块连接到照明装置的机械装置被设计为 照明模块或耦合模块可以方便地更换的方式。 此外，插座位置被布置成使得通过适当地选择照明模块和耦合模块，总体光谱中的照明模块的所有单独光谱可在照明装置的输出处同时获得。

    Microscope with laser light source and protective device for preventing eye damage
    10.
    发明申请
    Microscope with laser light source and protective device for preventing eye damage 有权
    具有激光光源的显微镜和防止眼睛损伤的保护装置

    公开(公告)号：US20060109459A1

    公开(公告)日：2006-05-25

    申请号：US11254879

    申请日：2005-10-19

    申请人： Matthias Kramer ,  Bruene Venus

    发明人： Matthias Kramer ,  Bruene Venus

    IPC分类号： G01J3/44

    CPC分类号： G02B21/0076 ,  G02B5/223

    摘要： The invention is directed to a microscope in which laser light is used to irradiate a sample to be examined and which is outfitted with a protective device for preventing eye damage due to laser light. It is the object of the invention to provide a protective device for microscopes of the type described above which ensures protection against eye damage and visibility of the sample. According to the invention, the protective device has at least one area which is not transparent to harmful radiation components, but which is transparent to harmless, visible radiation components, so that an observer can see the sample through this area without risk of eye damage.

    摘要翻译： 本发明涉及一种显微镜，其中使用激光照射被检样品，并配备有用于防止由于激光引起的眼睛损伤的保护装置。 本发明的目的是提供一种用于上述类型的显微镜的保护装置，其确保防止眼睛损伤和样品的可见性。 根据本发明，保护装置具有至少一个对有害辐射部件不透明但对无害的可见辐射分量透明的区域，使得观察者可以通过该区域观察样品，而没有眼睛损伤的风险。