HEAT STABILIZED SUB-STOICHIOMETRIC DIELECTRICS
    3.
    发明申请
    HEAT STABILIZED SUB-STOICHIOMETRIC DIELECTRICS 有权
    加热稳定的分层电介质

    公开(公告)号:US20080011408A1

    公开(公告)日:2008-01-17

    申请号:US11780531

    申请日:2007-07-20

    Inventor: Peter MASCHWITZ

    Abstract: A sub-stoichiometric oxide, nitride or oxynitride layer in an optical stack, alone or in direct contact with one or two stabilizing layers, stabilizes the optical properties of the stack. The stabilizing layer(s) can stabilize the chemistry and optical properties of the sub-stoichiometric layer during heating. The change in optical characteristics of the sub-stoichiometric layer upon heating can counter the change in optical characteristics of the rest of the optical stack.

    Abstract translation: 单独或与一个或两个稳定层直接接触的光学堆叠中的亚化学计量氧化物,氮化物或氧氮化物层稳定了堆叠的光学性质。 稳定层可以在加热期间稳定亚化学计量层的化学和光学性质。 加热时亚化学计量层的光学特性的变化可以抵消光学堆叠的其余部分的光学特性的变化。

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