Interference device and method for observing phase informalities
    1.
    发明授权
    Interference device and method for observing phase informalities 失效
    干涉装置和观察阶段非正规性的方法

    公开(公告)号:US5446589A

    公开(公告)日:1995-08-29

    申请号:US103682

    申请日:1993-08-10

    CPC分类号: G03H1/0404 G03H5/00

    摘要: An interference device and method for observing phase information, using electron or other waves with the amplitude difficult to split by a half mirror. Using an interference device comprising in combination two scattering films A1 and A2 capable of scattering incident waves randomly, first lens systems B1 and B2 that are located between said two scattering films to form the image of one scattering film A1 on the other scattering film A2, a second lens system B3 for forming on an observation surface C the image of a specimen 2 located at a position where a component going straight through said one scattering film is converged in a spot form through said first lens system or a part thereof, and means for recording an interference pattern formed on the observation surface C, an interference pattern is detected while the specimen 2 is inserted in the arrangement, and an interference pattern is detected while the specimen 2 is removed from the arrangement, so that the difference between both the interference patterns, or the sum or product of them, can be found to observe the phase information of the specimen directly as interference fringes.

    摘要翻译: 一种用于观测相位信息的干涉装置和方法,使用电子束或其他具有难以用半透半反镜分裂的波的波。 使用包括两个能够随机散射入射波的两个散射膜A1和A2的干涉装置,位于所述两个散射膜之间的第一透镜系统B1和B2,以在另一散射膜A2上形成一个散射膜A1的图像, 第二透镜系统B3,用于在观察表面C上形成位于通过所述第一透镜系统或其一部分以直线通过所述一个散射膜的部件会聚在一起的位置的样本2的图像;以及装置 为了记录形成在观察表面C上的干涉图案,在样本2被插入到该装置中时检测到干涉图案,并且在从装置移除样本2的同时检测干涉图案,从而两者之间的差异 可以发现干涉图案或其总和或乘积直接作为干涉条纹观察样本的相位信息 es。

    Field emission electron gun system
    3.
    发明授权
    Field emission electron gun system 失效
    场发射电子枪系统

    公开(公告)号:US4945247A

    公开(公告)日:1990-07-31

    申请号:US365827

    申请日:1989-06-14

    CPC分类号: H01J37/073

    摘要: In a field emission electron gun system with a multi-stage acceleration tube comprising a field emission electron source, a field emission electrode for extracting the electrons, a magnetic lens having a magnetic gap between the field emission electron source and the field emission electrode or a magnetic lens having a magnetic pole which also serves as the field emission electrode, and at least two-stages of acceleration electrodes for accelerating the electrons, a magnetization current I for the magnetic lens is changed interlocking with a field emission voltage V.sub.1 applied between the field emission electron source and the field emission electrode so that IN/.sqroot.V.sub.1 (N: the number of windings of the magnetic lens) takes a predetermined value and a first acceleration voltage V.sub.2 applied between the field emission electron source and the first-stage acceleration electrode is changed interlocking with the field emission voltage V.sub.1 so that V.sub.2 /V.sub.1 takes a predetermined value.

    摘要翻译: 在具有包括场发射电子源的多级加速管的场发射电子枪系统中,用于提取电子的场发射电极,在场发射电子源和场发射电极之间具有磁隙的磁透镜或 具有也用作场发射电极的磁极的磁性透镜以及用于加速电子的至少两级的加速电极,用于磁性透镜的磁化电流I与施加在磁场之间的场致发射电压V1互锁地变化 发射电子源和场发射电极,使得IN / 2ROOT V1(N:磁性透镜的绕组数)取预定值,施加在场发射电子源和第一级加速电极之间的第一加速电压V2 与场致发射电压V1互锁,使得V2 / V1取规定值。

    Electron holography apparatus
    4.
    发明授权
    Electron holography apparatus 失效
    电子全息设备

    公开(公告)号:US4935625A

    公开(公告)日:1990-06-19

    申请号:US238143

    申请日:1988-08-30

    摘要: An electron holography apparatus includes an electron microscope which is provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams, and further includes an image detector for detecting an electron interference fringe pattern which varies in accordance with the phase difference between the first and second electron beams, as a picture image, and an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data.

    摘要翻译: 一种电子全息摄影装置,具备:具有电子源的电子显微镜,将从电子源射出的电子束分割成第一和第二电子束的分束器,以及相位控制器,用于可控地改变第一和第二电子束之间的相位差 第二电子束,还包括用于检测根据第一和第二电子束之间的相位差而变化的电子干涉条纹图案作为图像图像的图像检测器,以及用于确定第一和第二电子束的相位分布的图像数据处理器 的来自检测到的图像数据的第一和第二电子束。

    Electron optical measurement apparatus
    5.
    发明授权
    Electron optical measurement apparatus 失效
    电子光学测量装置

    公开(公告)号:US5192867A

    公开(公告)日:1993-03-09

    申请号:US697576

    申请日:1991-05-09

    摘要: In an electron holography apparatus having an electron source, a specimen holder, an electron lens system, and an electron biprism, the electron biprism is so constructed as to be rotatable about the electron optics axis. The rotation angle about the electron optics axis is commanded by the operator of the electron holography apparatus. A central wire of the electron biprism is allowed to be translated in a direction orthogonal to the electron optics axis, thus permitting the application of the fringe scanning method. The center of an aperture is selectively allowed to be aligned with that of the electron biprism to ensure that the measurement apparatus can be used selectively as either the electron holography apparatus or an electron microscope.

    摘要翻译: 在具有电子源,样本保持器,电子透镜系统和电子双棱镜的电子全息设备中,电子双棱镜被构造成可围绕电子光轴旋转。 围绕电子光轴的旋转角度由电子全息设备的操作者命令。 允许电子双棱镜的中心线在与电子光轴垂直的方向上平移,从而允许施加边缘扫描方法。 选择性地允许孔的中心与电子双棱镜的中心对准,以确保测量装置可以选择性地用作电子全息设备或电子显微镜。

    Coherent beam device for observing and measuring sample
    6.
    发明申请
    Coherent beam device for observing and measuring sample 审中-公开
    用于观察和测量样品的相干光束装置

    公开(公告)号:US20050146730A1

    公开(公告)日:2005-07-07

    申请号:US10485541

    申请日:2002-08-02

    申请人: Junji Endo Chen Jun

    发明人: Junji Endo Chen Jun

    IPC分类号: G01B9/02

    摘要: In an interferometric device using a coherent beam and an image pickup camera, a protective glass for the detector surface is needed on the incident side of the pickup unit of the image pickup camera, and this gives rise to interference fringes which constitute noise. To solve this problem, a dustproof container is configured also to cover an imaging lens system arranged on the incident side of the pickup unit of the image pickup camera, and the pickup unit of the image pickup camera is arranged in this container. By assigning the function of the protective glass for the detector surface in the conventional configuration to the imaging lens system, the protective glass is made unnecessary.

    摘要翻译: 在使用相干光束和摄像照相机的干涉仪中,在摄像机的拾取单元的入射侧需要用于检测器表面的保护玻璃,并且这引起构成噪声的干涉条纹。 为了解决这个问题,防尘容器还被配置为覆盖设置在摄像机的拾取单元的入射侧的成像透镜系统,并且摄像相机的拾取单元布置在该容器中。 通过将传统配置中的检测器表面的保护玻璃的功能分配给成像透镜系统,不需要保护玻璃。

    Charged particle guide apparatus and image viewing apparatus for charged
particle microscope using the same
    7.
    发明授权
    Charged particle guide apparatus and image viewing apparatus for charged particle microscope using the same 失效
    带电粒子引导装置和使用其的带电粒子显微镜的图像观察装置

    公开(公告)号:US5811805A

    公开(公告)日:1998-09-22

    申请号:US702183

    申请日:1996-08-23

    CPC分类号: H01J37/22 H01J37/244

    摘要: An electron-microscope image viewing apparatus capable of measuring of a moving speed or a vibration frequency of an atomic structure, a magnetic structure, an electric structure or the like of a specimen even when the structure changes at a high rate. The apparatus includes a charged particle source for emitting charged particles, an illuminating electron lens system for illuminating a specimen with a beam of the charged particles, an image magnifying/projecting lens system for magnifying an image of the specimen formed by charged particles scattered upon transmission through the specimen and projecting the magnified image onto an image forming plane, at least one charged particle extracting means provided on the image forming plane of the image magnifying/projecting lens system for taking out the charged particles from a predetermined portion of the charged particle beam projected onto the image forming plane, at least one charged particle detector for detecting the charged particles taken out through the charged particle extracting means, and a signal processing means for processing a signal outputted from the charged particle detector.

    摘要翻译: 即使当结构以高速率变化时,也可以测量试样的原子结构,磁性结构,电结构等的移动速度或振动频率的电子显微镜图像观察装置。 该装置包括用于发射带电粒子的带电粒子源,用于用带电粒子束照射样本的照明电子透镜系统,用于放大由透射时散射的带电粒子形成的样本的图像的图像放大/投影透镜系统 通过样本并将放大图像投影到图像形成平面上,至少一个带电粒子提取装置,设置在图像放大/投影透镜系统的图像形成平面上,用于从带电粒子束的预定部分中取出带电粒子 投影到图像形成平面上的至少一个带电粒子检测器,用于检测通过带电粒子提取装置取出的带电粒子;以及信号处理装置,用于处理从带电粒子检测器输出的信号。

    Charged particle beam generating apparatus of multi-stage acceleration
type
    9.
    发明授权
    Charged particle beam generating apparatus of multi-stage acceleration type 失效
    多级加速型带电粒子束发生装置

    公开(公告)号:US5059859A

    公开(公告)日:1991-10-22

    申请号:US507798

    申请日:1990-04-12

    IPC分类号: H01J3/02 H01J37/073

    CPC分类号: H01J3/029 H01J37/073

    摘要: A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.

    摘要翻译: 多级加速型的带电粒子束产生装置包括带电粒子束源和多级加速管,该多级加速管具有多个级联地布置在管内的多个级上的加速电极。 多个外屏蔽电极在多级加速管的径向外侧分别配置成相同的电位分别与相关的加速电极相同。 最后,将多个分压电阻器设置在多级加速管的外侧或外屏蔽电极与多级加速管之间,以分别对加速电极施加预定电位。

    Fluidized bed method of forming a nitride or carbonitride layer
    10.
    发明授权
    Fluidized bed method of forming a nitride or carbonitride layer 失效
    形成氮化物或碳氮化物层的流化床方法

    公开(公告)号:US4871401A

    公开(公告)日:1989-10-03

    申请号:US123662

    申请日:1987-11-13

    IPC分类号: C23C12/02

    CPC分类号: C23C12/02

    摘要: A method of forming a nitride or carbonitride layer on the surface of an iron or iron alloy article, which comprises the steps of: (a) disposing in a fluidized bed furnace a treating agent comprising a refractory powder, a metal powder of at least one selected from the group consisting of chromium, vanadium, titanium and a metal containing at least one of the chromium, vanadium and titanium, and a halide powder; (b) introducing a nitrogen-containing gas into the fluidizied bed furnace; (c) heating the fluidized bed furnace; and (d) disposing the article in the fluidized bed furnace during or after the steps (a) to (c). In this method, the article is preferably treated at a temperature not higher than 650.degree. C. The step (c) may precede the step (b). The halide powder may be supplied to the fluidized bed furnace from outside in the form of green compact or a gas.

    摘要翻译: 一种在铁或铁合金制品的表面上形成氮化物或碳氮化物层的方法,包括以下步骤:(a)在流化床炉中设置包括耐火粉末,至少一种 选自铬,钒,钛和含有铬,钒和钛中的至少一种的金属和卤化物粉末; (b)将含氮气体引入流化床炉; (c)加热流化床炉; 和(d)在步骤(a)至(c)期间或之后将制品置于流化床炉中。 在该方法中,优选在不高于650℃的温度下进行处理。步骤(c)可以在步骤(b)之前。 卤化物粉末可以从生坯或气体的形式从外部供应到流化床炉。