公开(公告)号：US5059859A

公开(公告)日：1991-10-22

申请号：US507798

申请日：1990-04-12

申请人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

发明人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

IPC分类号： H01J3/02 ,  H01J37/073

CPC分类号： H01J3/029 ,  H01J37/073

摘要： A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.

摘要翻译： 多级加速型的带电粒子束产生装置包括带电粒子束源和多级加速管，该多级加速管具有多个级联地布置在管内的多个级上的加速电极。 多个外屏蔽电极在多级加速管的径向外侧分别配置成相同的电位分别与相关的加速电极相同。 最后，将多个分压电阻器设置在多级加速管的外侧或外屏蔽电极与多级加速管之间，以分别对加速电极施加预定电位。

公开(公告)号：US4945247A

公开(公告)日：1990-07-31

申请号：US365827

申请日：1989-06-14

申请人： Takeshi Kawasaki ,  Junji Endo ,  Shigeto Isakozawa ,  Masahiro Tomita ,  Akira Tonomura

发明人： Takeshi Kawasaki ,  Junji Endo ,  Shigeto Isakozawa ,  Masahiro Tomita ,  Akira Tonomura

IPC分类号： H01J29/48 ,  H01J37/073 ,  H01J37/145

CPC分类号： H01J37/073

摘要： In a field emission electron gun system with a multi-stage acceleration tube comprising a field emission electron source, a field emission electrode for extracting the electrons, a magnetic lens having a magnetic gap between the field emission electron source and the field emission electrode or a magnetic lens having a magnetic pole which also serves as the field emission electrode, and at least two-stages of acceleration electrodes for accelerating the electrons, a magnetization current I for the magnetic lens is changed interlocking with a field emission voltage V.sub.1 applied between the field emission electron source and the field emission electrode so that IN/.sqroot.V.sub.1 (N: the number of windings of the magnetic lens) takes a predetermined value and a first acceleration voltage V.sub.2 applied between the field emission electron source and the first-stage acceleration electrode is changed interlocking with the field emission voltage V.sub.1 so that V.sub.2 /V.sub.1 takes a predetermined value.

摘要翻译： 在具有包括场发射电子源的多级加速管的场发射电子枪系统中，用于提取电子的场发射电极，在场发射电子源和场发射电极之间具有磁隙的磁透镜或 具有也用作场发射电极的磁极的磁性透镜以及用于加速电子的至少两级的加速电极，用于磁性透镜的磁化电流I与施加在磁场之间的场致发射电压V1互锁地变化 发射电子源和场发射电极，使得IN / 2ROOT V1（N：磁性透镜的绕组数）取预定值，施加在场发射电子源和第一级加速电极之间的第一加速电压V2 与场致发射电压V1互锁，使得V2 / V1取规定值。

公开(公告)号：US09097170B2

公开(公告)日：2015-08-04

申请号：US13421068

申请日：2012-03-15

申请人： Shinji Kishi ,  Yutaka Noyori ,  Takeshi Kawasaki

发明人： Shinji Kishi ,  Yutaka Noyori ,  Takeshi Kawasaki

IPC分类号： F01P1/06 ,  F01N3/05 ,  F01N13/10 ,  F01P3/12 ,  F01P7/16 ,  F01P3/20 ,  F02B3/06

CPC分类号： F01P1/06 ,  F01N3/055 ,  F01N13/10 ,  F01N2260/20 ,  F01P3/12 ,  F01P3/20 ,  F01P7/165 ,  F02B3/06 ,  Y02T10/20

摘要： An exhaust manifold is covered by a manifold heat shield cover and an exhaust pipe is directed downward from the exhaust manifold. In such an engine, a cooling fan is disposed on a front portion of the engine and the exhaust pipe is positioned on the air flow path of the cooling fan. An auxiliary component heat shielding plate is directed from the manifold heat shield cover along a back side of the exhaust pipe. An auxiliary engine component is disposed beneath the manifold heat shield cover on a back side of the auxiliary component heat shielding plate. Between the exhaust pipe and a cylinder block, an air flow guide plate provides an air flow space between the air flow guide plate and the cylinder block. A cooling air flow passing through the air flow space is thus supplied to the auxiliary engine component.

摘要翻译： 排气歧管被歧管隔热罩覆盖，排气管从排气歧管向下指向。 在这样的发动机中，在发动机的前部配置有冷却风扇，排气管位于冷却风扇的风路上。 辅助部件热屏蔽板沿着排气管的后侧从歧管隔热罩引导。 辅助发动机部件设置在辅助部件隔热板的后侧上的歧管隔热罩下方。 在排气管和气缸体之间，气流引导板在气流引导板和气缸体之间提供空气流动空间。 因此，通过空气流动空间的冷却空气流被提供给辅助发动机部件。

公开(公告)号：US20110272578A1

公开(公告)日：2011-11-10

申请号：US13143965

申请日：2010-01-14

申请人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

发明人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： H01J37/28

CPC分类号： H01J37/153 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/221 ,  H01J2237/2802

摘要： There is provided a charged particle radiation device provided with an aberration corrector capable of correcting aberration with high precision in a short time by automatically setting an aberration coefficient measuring condition to thereby realize measurement with high precision. The charged particle radiation device has a feature that a value of defocus and a value of astigma, occurring owing to aberration at the time of the beam tilting, are estimated on the basis of results of aberration measurement, thereby adjusting an electron optical system on the basis of these values.

摘要翻译： 提供一种带有像差校正器的带电粒子辐射装置，其能够通过自动设置像差系数测量条件，以高精度实现测量，从而在短时间内以高精度校正像差。 带电粒子辐射装置具有基于像差测量的结果来估计由于波束倾斜时的像差而发生的散焦值和散射值的特征，由此调整电子光学系统 这些价值的基础。

公开(公告)号：US07728353B2

公开(公告)日：2010-06-01

申请号：US11392549

申请日：2006-03-30

申请人： Seiji Yaegashi ,  Takeshi Kawasaki ,  Ken Nakata

发明人： Seiji Yaegashi ,  Takeshi Kawasaki ,  Ken Nakata

IPC分类号： H01L29/20 ,  H01L31/0328 ,  H01L31/0336 ,  H01L31/072 ,  H01L31/109

CPC分类号： H01L29/66462 ,  H01L21/28575 ,  H01L21/28581 ,  H01L29/2003 ,  H01L29/66318

摘要： A semiconductor device includes a mask layer having openings on a substrate, a GaN-based semiconductor layer selectively formed on the substrate with the mask layer that serves as a mask, a gate electrode and either a source electrode or an emitter electrode formed on the GaN-based semiconductor layer, and a drain electrode or a collector electrode connected on a surface of the first semiconductor layer that faces the GaN-based semiconductor layer or an opposite side of the first semiconductor layer.

摘要翻译： 半导体器件包括在衬底上具有开口的掩模层，在衬底上选择性地形成有用作掩模的掩模层的GaN基半导体层，栅电极以及形成在GaN上的源电极或发射极 以及连接在第一半导体层的面对GaN基半导体层或第一半导体层的相对侧的表面上的漏电极或集电极。

公开(公告)号：US07718976B2

公开(公告)日：2010-05-18

申请号：US11762802

申请日：2007-06-14

申请人： Takeshi Kawasaki ,  Mitsugu Sato ,  Makoto Ezumi ,  Tomonori Nakano

发明人： Takeshi Kawasaki ,  Mitsugu Sato ,  Makoto Ezumi ,  Tomonori Nakano

IPC分类号： G21K1/08

CPC分类号： H01J37/153 ,  H01J37/248 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/1534

摘要： The present invention provides a stable charged particle beam apparatus to enable high-resolution observation by reducing the influence of the noise of a large number of power supplies used in an aberration corrector. The charged particle beam apparatus that has: an SEM column for irradiating an electron beam onto a specimen and making the electron beam scan it; a specimen chamber for housing a specimen stage on which the specimen is placed and held; a detector for detecting secondary electrons generated by the scanning of the electron beam; display means for displaying an output signal of the detector as an SEM image; and a control unit for controlling component parts including the SEM column, the specimen chamber, and the display means. The SEM column has a pair of accelerating electrodes and an aberration corrector that is placed between the pair of accelerating electrodes and corrects aberration of the electron beam, and accelerates the electron beam during a period when being transmitted through the aberration corrector by a high voltage being impressed across the pair of accelerating electrodes.

摘要翻译： 本发明提供了一种稳定的带电粒子束装置，通过减少在像差校正器中使用的大量电源的噪声的影响来实现高分辨率观察。 具有：用于将电子束照射到试样上并使电子束扫描的SEM柱的带电粒子束装置; 用于容纳放置和保持所述试样的试样台的试样室; 用于检测由扫描电子束产生的二次电子的检测器; 用于将检测器的输出信号显示为SEM图像的显示装置; 以及用于控制包括SEM柱，样品室和显示装置的部件的控制单元。 SEM列具有一对加速电极和像差校正器，该像素校正器被放置在一对加速电极之间并校正电子束的像差，并且通过高电压透过像差校正器的期间加速电子束 穿过该对加速电极。

公开(公告)号：US20100033560A1

公开(公告)日：2010-02-11

申请号：US12535021

申请日：2009-08-04

申请人： Takeshi Kawasaki ,  Tomonori Nakano ,  Kotoko Hirose

发明人： Takeshi Kawasaki ,  Tomonori Nakano ,  Kotoko Hirose

IPC分类号： H04N7/18 ,  G01N23/00 ,  G01N23/20

CPC分类号： G01N23/203 ,  G01N2223/302

摘要： A tilted illumination observation method and observation device with easy adjustment, high speed, good reproducibility and low cost is provided. A high resolution tilt image of a specimen is obtained by extracting the blurring on the scanning spot occurring during beam tilt from the image (step 6) captured by the tilted beam, and the image (step 4) captured from directly above the standard specimen; and then deconvoluting (step 11, 12) the tilted image of the target specimen (step 10) using the extracted scanning spot from the oblique beam.

摘要翻译： 提供了一种倾斜的照明观察方法和观察装置，其调节方便，速度快，再现性好，成本低。 通过从由倾斜光束拍摄的图像（步骤6）和从标准样品的正上方捕获的图像（步骤4）提取在光束倾斜期间发生的扫描点上的模糊，获得样本的高分辨率倾斜图像。 然后使用来自倾斜光束的提取的扫描光点对目标样本的倾斜图像进行去卷积（步骤11,12）（步骤10）。

公开(公告)号：US20090212228A1

公开(公告)日：2009-08-27

申请号：US12367811

申请日：2009-02-09

申请人： Kotoko HIROSE ,  Takeshi Kawasaki ,  Tomonori Nakano

发明人： Kotoko HIROSE ,  Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： H01J3/14

CPC分类号： H01J37/28 ,  H01J37/153 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/216

摘要： A focused charged particle beam apparatus including an aberration corrector, capable of finding the absolute value of the aberration coefficient at high speed, and capable of making high-accuracy adjustments at high speed. A deflection coil tilts the input beam relative to the object point, and measures the defocus data and aberration quantity at high speed while the beam is tilted from one image, and perform least squares fitting on these results to find the absolute value of the aberration coefficient prior to tilting the beam, and to adjust the aberration corrector.

摘要翻译： 一种聚焦带电粒子束装置，包括像差校正器，能够在高速下找到像差系数的绝对值，并能够高精度地进行高精度的调整。 偏转线圈相对于物点倾斜输入光束，并且当光束从一个图像倾斜时测量散焦数据和高速的像差量，并对这些结果进行最小二乘拟合以找到像差系数的绝对值 在倾斜光束之前，并调整像差校正器。

公开(公告)号：US07504624B2

公开(公告)日：2009-03-17

申请号：US11341663

申请日：2006-01-30

申请人： Takeshi Kawasaki ,  Tomonori Nakano ,  Michio Hatano ,  Momoyo Enyama

发明人： Takeshi Kawasaki ,  Tomonori Nakano ,  Michio Hatano ,  Momoyo Enyama

IPC分类号： G21K7/00

CPC分类号： H01J37/153 ,  H01J2237/0453

摘要： A scanning charged particle microscope which facilitates adjustment, has a deep focal depth, and is provided with an aberration correction means. The state of aberration correction is judged from a SEM image by using a stop having plural openings and the judgment result is fed back to the adjustment of the aberration correction means. A stop of a nearly orbicular zone shape is used in combination with the aberration correction means.

摘要翻译： 便于调整的扫描带电粒子显微镜具有深的焦深，并且设置有像差校正装置。 通过使用具有多个开口的停止​​来从SEM图像判断像差校正的状态，并且将判断结果反馈到像差校正装置的调整。 与像差校正装置组合使用几乎轮状的区域形状的停止。

公开(公告)号：US20060220065A1

公开(公告)日：2006-10-05

申请号：US11392516

申请日：2006-03-30

申请人： Takeshi Kawasaki ,  Ken Nakata ,  Seiji Yaegashi

发明人： Takeshi Kawasaki ,  Ken Nakata ,  Seiji Yaegashi

IPC分类号： H01L31/00

CPC分类号： H01L29/7787 ,  H01L21/28587 ,  H01L29/045 ,  H01L29/0657 ,  H01L29/2003 ,  H01L29/66462

摘要： A semiconductor device includes a substrate, a GaN-based semiconductor layer formed on the substrate, a gate electrode embedded in the GaN-based semiconductor layer, a source electrode and a drain electrode formed on both sides of the gate electrode, a first recess portion formed between the gate electrode and the source electrode, and a second recess portion formed between the gate electrode and the drain electrode. The first recess portion has a depth deeper than that of the second recess portion.

摘要翻译： 半导体器件包括衬底，在衬底上形成的GaN基半导体层，嵌入GaN基半导体层中的栅电极，形成在栅电极两侧的源电极和漏电极，第一凹部 形成在栅电极和源电极之间，以及形成在栅电极和漏电极之间的第二凹部。 第一凹部的深度比第二凹部的深度深。