摘要:
A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.
摘要:
A packaging and filling machine that is capable of easily preforming with the forming flaps by keeping the pressure of the filled liquid food in the tube at positive pressure, capable of preventing the pressure of the liquid food from dropping to negative pressure, even if the pressure of the liquid food decreases due to the change in the liquid food pressure, and capable of preventing outside atmosphere materials from invading into the tube.A pressure flange fixed on a periphery of the filling pipe absorbs fluctuation of the pressure of the liquid food in the tube below the pressure flange, and prevents the liquid food pressure from dropping to negative pressure to keep the pressure of the liquid food in the tube below the pressure flange at a positive pressure.
摘要:
Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer.The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.
摘要:
A first expansion valve is provided in an outdoor unit, and a second expansion valve is provided in an indoor unit. A pipe line connects a first joint pipe of the first expansion valve and a second joint pipe of the second expansion valve. When a refrigerant flows in from the second joint pipe and flows out from the first joint pipe, the first and second expansion valves are in a full open state due to pressure of the refrigerant. When the refrigerant flows in from the first joint pipe and flows out from the second joint pipe, the first and second expansion valves are in semi-closed state (flow rate controlling state). In a cooling mode, the second expansion valve expands the refrigerant just before an indoor heat exchanger, and in a heating mode, the first expansion valve expands the refrigerant just before an outdoor heat exchanger. In both heating and cooling mode, a large amount of refrigerant flows through the pipe line to reduce pressure loss.
摘要:
A first expansion valve is provided in an outdoor unit, and a second expansion valve is provided in an indoor unit. A pipe line connects a first joint pipe of the first expansion valve and a second joint pipe of the second expansion valve. When a refrigerant flows in from the second joint pipe and flows out from the first joint pipe, the first and second expansion valves are in a full open state due to pressure of the refrigerant. When the refrigerant flows in from the first joint pipe and flows out from the second joint pipe, the first and second expansion valves are in semi-closed state (flow rate controlling state). In a cooling mode, the second expansion valve expands the refrigerant just before an indoor heat exchanger, and in a heating mode, the first expansion valve expands the refrigerant just before an outdoor heat exchanger. In both heating and cooling mode, a large amount of refrigerant flows through the pipe line to reduce pressure loss.
摘要:
Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer.The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.
摘要:
An apparatus for inspecting a sample using a scanning electron microscope includes a sample stage, a first electron-optical system to scan an electron beam of a first beam current on the sample, a second electron-optical system to scan an electron beam of a second beam current smaller than the first beam current on the sample, a mechanism to move the sample stage, a detector provided in each of the first and second electron-optical systems to detect a secondary electron. The first electron-optical system is operable in a first mode and the second electron-optical system is operable in a second mode with higher resolution than that of the first mode. In the first mode, the sample is observed while the sample stage is moved continuously, and in the second mode, the sample is observed by detecting a secondary electron using the detector while the sample stage is held stationary.
摘要:
So as to provide a substrate temperature control system capable of unifying the temperature of the substrate and capable of shortening the temperature elevation time (temperature lowering time), the substrate temperature control system is equipped with a temperature control plate (heating or cooling plate) having a plurality of projections on the surface and serving to set the temperature of the substrate, and a chuck mechanism to fix the substrate in contact to a plurality of the projections by chucking the substrate toward the direction of the temperature control plate.
摘要:
A control unit of a continuously variable transmission computes a speed ratio command value based on a final target ratio, a time constant representing a predetermined dynamic characteristic and a time constant representing an estimated dynamic characteristic of the transmission so that a real speed ratio approaches the final target ratio according to a running state under the predetermined dynamic characteristic. A transient target ratio is computed based on the final target ratio and time constant representing the predetermined dynamic characteristic, a correction amount of the speed ratio command value is computed based on the difference between the transient target ratio and real speed ratio, and the transmission is controlled based on the speed ratio command value after correction by this correction amount. In this way, the difference between the transient target ratio and real speed ratio is reduced and a desired speed ratio response is obtained even when the operation of a speed ratio mechanism is limited and the real speed ratio has shifted from the transient target ratio.
摘要:
A dual-stream filling system is used in a packaging machine to introduce at least two flowable materials into a plastic bottle. The dual-stream filling system defines a material flow path therethrough. The system includes a primary filling tube having an inlet end and a discharge end and defining a primary filling tube internal flow region. A secondary filling tube has an inlet end and an outlet end and defines a secondary filling tube internal flow region. The secondary filling tube is positioned at least in part within the primary filling tube internal flow region, penetrating the primary filling tube through the first opening. The dual-stream fill system includes a valve plug that includes a portion that is movable relative to the secondary filling tube between an opened state wherein flow communication is established between the internal flow regions of the primary and secondary filling tubes and a closed state wherein flow communication is terminated between the internal flow regions of the primary and secondary filling tubes. An actuator is provided for moving the valve plug portion between the opened and closed positions. The actuator is disposed fully external of the secondary filling tube flow region.