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公开(公告)号：US06905900B1
公开(公告)日：2005-06-14
申请号：US09724820
申请日：2000-11-28
申请人： Ralph H. Johnson , Gilberto Morales
发明人： Ralph H. Johnson , Gilberto Morales
CPC分类号： H01S5/18391 , H01S5/18308 , H01S5/18311 , H01S5/18316 , H01S5/18369 , H01S5/18377 , H01S5/2063 , H01S2301/166
摘要： A system and method for providing a single mode VCSEL (vertical cavity surface emitting laser) component (100) is disclosed, comprising a semiconductor substrate (102) having a lower surface and an upper surface, a bottom electrical contact (104) disposed along the lower surface of the substrate, a lower mirror (106) formed of n-type material and disposed upon the upper surface of the substrate, an active region (108) having a plurality of quantum wells disposed upon the lower mirror portion, an upper mirror (110) formed from isotropic material and disposed upon the active region, an equipotential layer (112) disposed upon the upper mirror portion, a first upper electrical contact (120) disposed upon the equipotential layer, a second upper electrical contact (122) disposed upon the equipotential layer at a particular distance (124) from the first upper electrical contact, a first isolation region (126) disposed beneath the first upper contact and traversing the equipotential layer, the upper mirror, the active region, and the lower mirror, a second isolation region (128) disposed beneath the second upper contact and traversing the equipotential layer, the upper mirror, the active region, and the lower mirror, and an insulating layer (114, 116) interposed between the upper mirror and the equipotential layer and adapted to form therebetween an aperture (118) of smaller dimension than the particular distance between the first and second upper contacts.
摘要翻译： 公开了一种用于提供单模VCSEL（垂直腔表面发射激光）部件（100）的系统和方法，包括具有下表面和上表面的半导体衬底（102），沿着 衬底的下表面，由n型材料形成并设置在衬底的上表面上的下反射镜（106），具有设置在下反射镜部分上的多个量子阱的有源区（108），上反射镜 （110），设置在所述有源区上，设置在所述上反射镜部分上的等电位层（112），设置在所述等电位层上的第一上电接触件（120），设置在所述等电位层 在距离第一上部电接触件的特定距离（124）处的等电位层处的第一隔离区域（126），其设置在第一上部接触件下方并且穿过等式 电位层，上反射镜，有源区和下反射镜，设置在第二上触点下方并穿过等电位层，上反射镜，有源区和下反射镜的第二隔离区（128） 绝缘层（114,116），其插入在上反射镜和等电位层之间，并且适于在其间形成比第一和第二上触点之间的特定距离更小尺寸的孔（118）。
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公开(公告)号：US07308011B2
公开(公告)日：2007-12-11
申请号：US10617892
申请日：2003-07-11
申请人： Ralph H. Johnson , Gilberto Morales
发明人： Ralph H. Johnson , Gilberto Morales
IPC分类号： H01S5/00
CPC分类号： H01S5/18391 , H01S5/18308 , H01S5/18311 , H01S5/18316 , H01S5/18369 , H01S5/18377 , H01S5/2063 , H01S2301/166
摘要： A single mode VCSEL including a substrate having a lower surface and an upper surface, a bottom electrical contact disposed along the lower surface of the substrate, a lower mirror portion disposed upon the upper surface of the substrate, an active region disposed upon the lower mirror portion, an upper mirror portion disposed upon the active region, an equipotential layer disposed upon the upper mirror portion, an insulating layer interposed between the upper mirror portion and the equipotential layer and adapted to form an aperture therebetween, and an upper contact portion disposed upon the equipotential layer outside the perimeter of the aperture.
摘要翻译： 单模VCSEL，其包括具有下表面和上表面的基板，沿着基板的下表面设置的底部电触点，设置在基板的上表面上的下反射镜部分，设置在下反射镜上的有源区域 设置在有源区上的上镜部分，设置在上反射镜部分上的等电位层，插入在上反射镜部分和等电位层之间并适于在其间形成孔的绝缘层，以及设置在上反射镜部分上的上接触部分 孔径周边外的等电位层。
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公开(公告)号：US07221691B2
公开(公告)日：2007-05-22
申请号：US10617290
申请日：2003-07-10
申请人： Ralph H. Johnson , Gilberto Morales
发明人： Ralph H. Johnson , Gilberto Morales
CPC分类号： H01S5/18391 , H01S5/18308 , H01S5/18311 , H01S5/18316 , H01S5/18369 , H01S5/18377 , H01S5/2063 , H01S2301/166
摘要： A system and method for providing a single mode VCSEL (vertical cavity surface emitting laser). A lower mirror is formed on a substrate. An active region including one or more quantum wells is formed over the lower mirror. The upper mirror formed over the active region can include multiple layers and may be formed to be have substantially isotropic conductivity. The layers in the upper mirror can include a lightly doped DBR layer, a heavily doped second layer including an isolation region, and a third heavily doped DBR layer. The active region may include conduction layers, which may be periodically doped, to improve conductivity and reduce free carrier absorption.
摘要翻译： 一种用于提供单模VCSEL（垂直腔表面发射激光）的系统和方法。 下反射镜形成在基板上。 在下反射镜上形成包括一个或多个量子阱的有源区。 形成在有源区上的上反射镜可以包括多个层，并且可以形成为具有基本上各向同性的导电性。 上反射镜中的层可以包括轻掺杂DBR层，包括隔离区的重掺杂第二层和第三重掺杂DBR层。 有源区可以包括导电层，其可以是周期性掺杂的，以改善导电性并减少自由载流子吸收。
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公开(公告)号：US08297125B2
公开(公告)日：2012-10-30
申请号：US12126494
申请日：2008-05-23
CPC分类号： G01L9/0054 , G01L19/0038 , G01L19/147
摘要： A differential pressure sensor includes two pressure ports for allowing media to pass into contact with both the top and bottom sides of the diaphragm. A silicon pressure sensor die can be attached between the pressure ports using die attach materials for sensing a differential pressure between the media to evaluate media differential pressure. A cap with an opening can be placed on topside of a diaphragm formed in the silicon pressure die. The silicon pressure die can include die bond pads that can be electrically connected to the diaphragm to output electrical signals. The cap can seal the die bond pads from the harsh media and route the electrical signals therein. Media can pass through the opening in the cap such that a media path to the top of the diaphragm is not exposed to the die bond pads of the silicon pressure die to ensure long-term sensor reliability.
摘要翻译： 差压传感器包括两个压力端口，用于允许介质与隔膜的顶侧和底侧进行接触。 硅压力传感器模具可以使用管芯附接材料连接在压力端口之间，用于感测介质之间的压差以评估介质压差。 具有开口的盖可以放置在形成在硅压模中的隔膜的上侧。 硅压模可以包括可以与膜片电连接以输出电信号的管芯接合焊盘。 盖可以将密封焊盘从恶劣的介质密封并将电信号传送到其中。 介质可以穿过盖中的开口，使得到隔膜顶部的介质路径不暴露于硅压模的管芯接合焊盘，以确保长期的传感器可靠性。
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公开(公告)号：US07798010B2
公开(公告)日：2010-09-21
申请号：US11973966
申请日：2007-10-11
IPC分类号： G01L1/00
CPC分类号： G01L19/146 , G01L19/04 , H01L2924/15151
摘要： The sensor geometry for improved package stress isolation is disclosed. A counterbore on the backing plate improves stress isolation properties of the sensor. The counterbore thins the wall of the backing plate maintaining the contact area with the package. The depth and diameter of the counterbore can be adjusted to find geometry for allowing the backing plate to absorb more package stresses. Thinning the wall of the backing plate make it less rigid and allows the backing plate to absorb more of the stresses produced at the interface with the package. The counterbore also keeps a large surface area at the bottom of the backing plate creating a strong bond with the package.
摘要翻译： 公开了用于改进封装应力隔离的传感器几何形状。 背板上的沉孔提高了传感器的应力隔离性能。 沉头孔沉浸在背板的壁上，保持与包装件的接触面积。 可以调节沉孔的深度和直径以找到允许背板吸收更多包装应力的几何形状。 使背板的壁变薄使其较不刚性，并且允许背板吸收在与封装的界面处产生的更多的应力。 沉孔还在背板的底部保持较大的表面积，从而与包装形成牢固的结合。
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公开(公告)号：US07647842B1
公开(公告)日：2010-01-19
申请号：US12180070
申请日：2008-07-25
IPC分类号： G01F1/38
摘要： A volumetric fluid flow sensor (100) includes a flow channel (120) for flowing a fluid therein; and a diaphragm (110) having an outer surface within the flow channel (120). The diaphragm (110) includes at least one flow disrupting feature mechanically coupled to or emerging from the outer surface of the diaphragm (110). A sensing structure (126) is coupled to the diaphragm (110) for generating a sensing signal responsive to a pressure signal on the diaphragm (110).
摘要翻译： 体积流体流量传感器（100）包括用于在其中流动流体的流动通道（120） 以及在所述流动通道（120）内具有外表面的隔膜（110）。 隔膜（110）包括至少一个机械耦合到隔膜（110）的外表面或从隔膜的外表面出来的流动干扰特征。 感测结构（126）耦合到隔膜（110），用于响应于隔膜（110）上的压力信号产生感测信号。
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公开(公告)号：US20090288492A1
公开(公告)日：2009-11-26
申请号：US12126494
申请日：2008-05-23
CPC分类号： G01L9/0054 , G01L19/0038 , G01L19/147
摘要： A differential pressure sensor includes two pressure ports for allowing media to pass into contact with both the top and bottom sides of the diaphragm. A silicon pressure sensor die can be attached between the pressure ports using die attach materials for sensing a differential pressure between the media to evaluate media differential pressure. A cap with an opening can be placed on topside of a diaphragm formed in the silicon pressure die. The silicon pressure die can include die bond pads that can be electrically connected to the diaphragm to output electrical signals. The cap can seal the die bond pads from the harsh media and route the electrical signals therein. Media can pass through the opening in the cap such that a media path to the top of the diaphragm is not exposed to the die bond pads of the silicon pressure die to ensure long-term sensor reliability.
摘要翻译： 差压传感器包括两个压力端口，用于允许介质与隔膜的顶侧和底侧进行接触。 硅压力传感器模具可以使用管芯附接材料连接在压力端口之间，用于感测介质之间的压差以评估介质压差。 具有开口的盖可以放置在形成在硅压模中的隔膜的上侧。 硅压模可以包括可以与膜片电连接以输出电信号的管芯接合焊盘。 盖可以将密封焊盘从恶劣的介质密封并将电信号传送到其中。 介质可以穿过盖中的开口，使得到隔膜顶部的介质路径不暴露于硅压模的管芯接合焊盘，以确保长期的传感器可靠性。
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公开(公告)号：US20060157809A1
公开(公告)日：2006-07-20
申请号：US11038881
申请日：2005-01-20
申请人： Yousef Alimi , James Biard , Gilberto Morales
发明人： Yousef Alimi , James Biard , Gilberto Morales
CPC分类号： H01L43/065 , G01R33/077
摘要： A vertical Hall effect apparatus, including methods thereof. A substrate layer can be provided upon which an epitaxial layer is formed. The epitaxial layer is surrounded vertically by one or more isolation layers. Additionally, an oxide layer can be formed above the epitaxial layer. A plurality of Hall effect elements can be formed within the epitaxial layer(s) and below the oxide layer, wherein the Hall effect elements sense the components of an arbitrary magnetic field in the plane of the wafer and perpendicular to the current flow in the hall element. A plurality of field plates can be formed above the oxide layer to control the inherited offset due to geometry control and processing of the vertical Hall effect apparatus, while preventing the formation of an output voltage of the vertical Hall effect apparatus at zero magnetic fields thereof.
摘要翻译： 一种垂直霍尔效应装置，包括其方法。 可以提供形成外延层的衬底层。 外延层被一个或多个隔离层垂直包围。 另外，可以在外延层的上方形成氧化物层。 多个霍尔效应元件可以形成在外延层内并在氧化物层的下面，其中霍尔效应元件感测晶片平面中任意磁场的分量，并垂直于霍尔电流中的电流 元件。 可以在氧化物层上方形成多个场板，以控制由于垂直霍尔效应装置的几何形状控制和处理而导致的遗传偏移，同时防止垂直霍尔效应装置的输出电压在其零磁场下形成。
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公开(公告)号：US06796193B2
公开(公告)日：2004-09-28
申请号：US10346774
申请日：2003-01-17
IPC分类号： H01L2100
CPC分类号： G01L9/0042 , G01L9/0055 , G01P2015/084
摘要： A method of forming a composite diaphragm for a pressure transducer is disclosed. The method comprises providing a substrate layer having a first conductivity type and a first surface. Positive implants are deposited in the first surface of the substrate layer, and an epitaxial layer is grown on the first surface of the substrate layer so that the positive implants form positive diffusions in the epitaxial layer. An oxide pattern is formed on the epitaxial layer, and a top layer is deposited over the epitaxial layer and oxide pattern. The substrate layer and positive diffusions of the epitaxial layer are then etched to form the composite diaphragm. The positive diffusions can be patterned so that the resulting etched structure has improved diaphragm performance characteristics. For example, the remaining pattern can include a plurality of bosses and interconnecting battens so that the diaphragm has a relatively high burst pressure and a high output signal with improved linearity at low pressures.
摘要翻译： 公开了形成用于压力传感器的复合膜片的方法。 该方法包括提供具有第一导电类型和第一表面的基底层。 阳极植入物沉积在衬底层的第一表面中，并且在衬底层的第一表面上生长外延层，使得阳性植入物在外延层中形成正扩散。 在外延层上形成氧化物图案，并且在外延层和氧化物图案上沉积顶层。 然后蚀刻衬底层和外延层的正扩散以形成复合膜。 可以对正扩散进行图案化，使得所得到的蚀刻结构具有改进的隔膜性能特性。 例如，剩余的图案可以包括多个凸台和互连的板条，使得隔膜具有相对较高的爆破压力和在低压下具有改善的线性度的高输出信号。
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公开(公告)号：US06626044B1
公开(公告)日：2003-09-30
申请号：US09677895
申请日：2000-10-03
申请人： Michael J. Haji-Sheikh , Richard Alan Davis , Mark Robert Plagens , Carl Edward Stewart , Gilberto Morales
发明人： Michael J. Haji-Sheikh , Richard Alan Davis , Mark Robert Plagens , Carl Edward Stewart , Gilberto Morales
IPC分类号： G01L708
CPC分类号： G01L19/0654 , G01L19/06
摘要： A sensor having freeze resistant features is disclosed. The sensor includes a sensor die and a buffer member that are assembled for attachment to a process fluid conduit. The buffer member defines an opening in fluid communication with the process fluid. The sensor die has a flexible diaphragm, and a capillary channel establishes fluid communication between the diaphragm area of the sensor die and the opening in the buffer member.
摘要翻译： 公开了一种具有防冻特征的传感器。 传感器包括传感器管芯和缓冲构件，其被组装用于附接到过程流体管道。 缓冲构件限定与过程流体流体连通的开口。 传感器管芯具有柔性隔膜，并且毛细通道在传感器管芯的隔膜区域和缓冲构件的开口之间建立流体连通。
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