Method and system of distortion compensation in a projection imaging expose system
    2.
    发明授权
    Method and system of distortion compensation in a projection imaging expose system 有权
    投影成像曝光系统中失真补偿的方法和系统

    公开(公告)号:US06580494B1

    公开(公告)日:2003-06-17

    申请号:US10198383

    申请日:2002-07-16

    IPC分类号: G03B2752

    摘要: A photolithography imaging system and method that performs the tasks of mask alignment, panel recognition, establishing position offsets and adjusting mask rotation for accurate overlay imaging of the mask onto the panel, and correctly adjusting image magnification or reduction to properly size each stepped image to the panel distortion. This invention applies more directly to substrate panels whose dimensional stability is found difficult to control, repeatedly. More specifically, it applies to panels whose X axis distortion factor varies greatly from its Y axis distortion factor and the average adjustment of the image magnification or reduction does not satisfy tight registration requirements. What is new is that the calculation of the magnification or reduction adjustment is based on the mask image dimensions.

    摘要翻译: 一种光刻成像系统和方法,其执行掩模对准,面板识别,建立位置偏移和调整掩模旋转的任务,以将掩模精确地叠加到面板上,并且正确地调整图像放大率或缩小以将每个步进图像适当地调整为 面板扭曲。 本发明更直接地应用于其尺寸稳定性难以控制的衬底面板。 更具体地说,它适用于其X轴失真因子从其Y轴失真因子变化很大的面板,并且图像放大或缩小的平均调整不满足严格的配准要求。 什么是新的是放大或缩小调整的计算是基于掩模图像尺寸。

    Multi-layered high density connections
    3.
    发明授权
    Multi-layered high density connections 失效
    多层高密度连接

    公开(公告)号:US06721187B2

    公开(公告)日:2004-04-13

    申请号:US09811101

    申请日:2001-03-16

    IPC分类号: H05K702

    摘要: A multi-layer electronic structure includes an increased capacity for the attachment of active or passive devices thereto. This is achieved by creating a three-dimensional grid of connection points to electrically couple active or passive surface mounted devices to edge mounted devices. The grid pattern is useful with any laminate including circuit cards, ceramic modules and flexible circuits. The variety of electrical devices that may be connected to the cross-sectional substrate includes, but is not limited to, chips such as semiconductor chips, diodes, resistors, capacitors and printed wiring boards. The structure can be used to more rapidly pass data, such as optical data that is transmitted from a spectroscope through a VCSEL laser and the electronic structure to a computer for diagnostics and analysis. A stepped arrangement of circuitized laminates is described for this purpose.

    摘要翻译: 多层电子结构包括用于将主动或无源装置附接到其上的增加的容量。 这通过创建连接点的三维网格来将主动或被动表面安装的装置电耦合到边缘安装的装置来实现。 网格图案对于包括电路卡,陶瓷模块和柔性电路的任何层压板都是有用的。 可以连接到横截面基板的各种电气设备包括但不限于诸如半导体芯片,二极管,电阻器,电容器和印刷线路板的芯片。 该结构可用于更快速地传递数据,例如通过VCSEL激光器从分光镜传输的光学数据,以及用于诊断和分析的电子结构到计算机。 为此目的描述了电路化层压板的阶梯式布置。

    Optical detection and measurement system

    公开(公告)号:US06657219B2

    公开(公告)日:2003-12-02

    申请号:US09781812

    申请日:2001-02-12

    IPC分类号: G01N2186

    CPC分类号: G01B11/028 G01B11/0616

    摘要: An optical detection and measurement system for selectively detecting the plane of the reflective surfaces of a workpiece. A laser source provides a low power, single wavelength collimated beam of light which is directed onto a workpiece. The beam is passed through a converging lens to a reflected focus on a quad detector. The light beams reflected from the workpiece pass through a diverging lens to the quad detector. The non-diverging optical axis center of the diverging lens is aligned with the center of the quad detector so that a reflected beam passing through the non-diverging optical axis center of the diverging lens creates equal photocurrent outputs from each of the four photosensitive elements of the quad detector to produce a null condition. Where the workpiece is made up of translucent or transparent layers which produce multiple reflected beams, reflected beams from surfaces other than the surface of interest are deflected away from the active surface of the quad detector by the diverging lens. The selectivity of beam detection of the system allows detection of the location individual reflective surface planes of the workpiece by positioning the workpiece so that each of the reflective surfaces individually pass their reflected beams through the non-diverging optical axis center of the diverging lens. Storing a numerical value indicative of the location of these planes permits calculation of layer and workpiece thickness.

    Dimensional compensating vacuum fixture
    5.
    发明授权
    Dimensional compensating vacuum fixture 失效
    尺寸补偿真空夹具

    公开(公告)号:US06173948B1

    公开(公告)日:2001-01-16

    申请号:US09233838

    申请日:1999-01-20

    IPC分类号: B25B1100

    CPC分类号: B25B11/005

    摘要: A vacuum fixture incorporating a vacuum suctioning device which may be employed in the manufacture of thin film chip carriers through the intermediary of retaining parts which are to be processed on the surface of a suction plate in a dimensionally compensating operative mode. A process is disclosed which may be employed in the manufacture of thin film chip carriers which is adhered in a dimensionally compensating manner to the surface of an interposer plate which is supported on a suction plate of a vacuum fixture.

    摘要翻译: 一种真空装置,其包括真空抽吸装置,其可以用于制造薄膜芯片载体,通过在尺寸补偿操作模式中在待加工的吸附板表面上的保持部件。 公开了可以用于制造薄膜芯片载体的方法,薄膜芯片载体以尺寸补偿的方式粘附到支撑在真空夹具的吸盘上的插入板的表面。

    Method and apparatus for forming a tubular article having a perforated
annular wall
    7.
    发明授权
    Method and apparatus for forming a tubular article having a perforated annular wall 失效
    用于形成具有穿孔环形壁的管状制品的方法和装置

    公开(公告)号:US5855802A

    公开(公告)日:1999-01-05

    申请号:US675457

    申请日:1996-05-30

    摘要: A method for forming a tubular article having a perforated annular wall, such as a surgical stent, includes coating the exterior and interior cylindrical surfaces of a tubular member with a photoresist, exposing selected portions of the photoresist coated surfaces to light, developing the coating, and then etching the coating to remove unexposed portions of the coating and immediate underlying portions of the annular wall, thereby forming a tubular article having a wall structure defined by a skeletal framework. An apparatus for exposing a light-sensitive coating to a tubular article includes means for rotating and translating the article with respect to a light source, along a longitudinal axis and simultaneously exposing aligned portions of the interior and exterior cylindrical surfaces of the tubular member. The method and apparatus embodying the present invention are particularly suitable for forming stents that support the walls of weak human arteries.

    摘要翻译: 用于形成具有诸如外科支架的穿孔环形壁的管状制品的方法包括用光致抗蚀剂涂覆管状构件的外部和内部圆柱形表面,将光刻胶涂覆表面的选定部分暴露于光,显影涂层, 然后蚀刻涂层以除去涂层的未曝光部分和环形壁的直接下面的部分,从而形成具有由骨架构架限定的壁结构的管状制品。 用于将感光涂层暴露于管状物品的装置包括用于相对于光源沿着纵向轴线旋转和平移物品并同时暴露管状构件的内部和外部圆柱形表面的对准部分的装置。 体现本发明的方法和装置特别适用于形成支撑弱人动脉壁的支架。

    Modular wire band stent
    10.
    发明授权

    公开(公告)号:US5855596A

    公开(公告)日:1999-01-05

    申请号:US670080

    申请日:1996-06-25

    IPC分类号: A61F2/90 A61F2/06

    CPC分类号: A61F2/90 B21F45/008

    摘要: A radially expandable device particularly adaptable for use as an endoprothesis is described along with a method of fabrication. The method begins by obtaining a number of individual, separate generally circular hoops by a number of ways, such as cutting a length of wire, forming it into a generally circular loop, and attaching the ends together. In another aspect of this method of fabrication, the individual, separate generally circular hoops are obtained by cutting the needed number from a tubing. Thereafter, a wave-like pattern is formed in each hoop, with a die, in a direction transverse the axis of the wire, creating a predetermined number of rings and attaching them at the crest point to form a stent that can be compressed for inserting into a lumen where it can be expanded to provided a needed support.