公开(公告)号：US20090077804A1

公开(公告)日：2009-03-26

申请号：US12201840

申请日：2008-08-29

申请人： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G.J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J.B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

发明人： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G.J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J.B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

IPC分类号： H01L31/18 ,  H01L21/304 ,  B26F3/00

CPC分类号： H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

摘要： The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.

摘要翻译： 本发明一般涉及一种位于自动化太阳能电池器件制造系统内的切片模块。 太阳能电池器件制造系统适于接收单个大型衬底并从单个大衬底形成多个硅薄膜太阳能电池器件。

公开(公告)号：US20090077805A1

公开(公告)日：2009-03-26

申请号：US12202199

申请日：2008-08-29

申请人： Robert Z. BACHRACH ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G.J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michael R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J.B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

发明人： Robert Z. BACHRACH ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G.J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michael R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J.B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

IPC分类号： H01L31/18 ,  H05K13/00

CPC分类号： H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

摘要翻译： 本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。 自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。 因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个处理室，该处理室适于在衬底的表面上沉积含硅层 ，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成 太阳能电池装置。

公开(公告)号：US08225496B2

公开(公告)日：2012-07-24

申请号：US12202199

申请日：2008-08-29

申请人： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G. J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J. B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

发明人： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G. J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J. B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

IPC分类号： H01L51/44 ,  H01L51/48 ,  H01L21/768 ,  H01L31/072

CPC分类号： H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

摘要翻译： 本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。 自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。 因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室 ，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成 太阳能电池装置。

公开(公告)号：US08466003B2

公开(公告)日：2013-06-18

申请号：US13442171

申请日：2012-04-09

申请人： Jian Li ,  James Craig Hunter ,  Nikhil Kalyankar ,  Nitin Kumar ,  Minh Anh Anh Nguyen

发明人： Jian Li ,  James Craig Hunter ,  Nikhil Kalyankar ,  Nitin Kumar ,  Minh Anh Anh Nguyen

IPC分类号： H01L21/00

CPC分类号： H01L31/0516 ,  H01L21/228 ,  H01L31/02363 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  H02S50/10 ,  Y02B10/10 ,  Y02E10/547 ,  Y02P70/521

摘要： Embodiments of the current invention describe methods of forming different types of crystalline silicon based solar cells that can be combinatorially varied and evaluated. Examples of these different types of solar cells include front and back contact silicon based solar cells, all-back contact solar cells and selective emitter solar cells. These methodologies all incorporate the formation of site-isolated regions using a combinatorial processing tool and the use of these site-isolated regions to form the solar cell area. Therefore, multiple solar cells may be rapidly formed on a single crystalline silicon substrate for use in combinatorial methodologies. Any of the individual processes of the methods described may be varied combinatorially to test varied process conditions or materials.

摘要翻译： 本发明的实施例描述了可以组合地改变和评估的不同类型的晶体硅基太阳能电池的形成方法。 这些不同类型的太阳能电池的实例包括正面和背面接触硅基太阳能电池，全背接触太阳能电池和选择性发射极太阳能电池。 这些方法都使用组合处理工具形成位点隔离区域，并且使用这些位置隔离区域形成太阳能电池区域。 因此，可以在用于组合方法的单晶硅衬底上快速形成多个太阳能电池。 可以组合地改变所描述的方法的任何单独过程以测试各种工艺条件或材料。