公开(公告)号：US08404502B2

公开(公告)日：2013-03-26

申请号：US13117947

申请日：2011-05-27

申请人： Tae K. Won ,  Jose Manuel Dieguez Campo ,  John M. White ,  Sanjay Yadav

发明人： Tae K. Won ,  Jose Manuel Dieguez Campo ,  John M. White ,  Sanjay Yadav

IPC分类号： H01L21/00 ,  H01L33/00

CPC分类号： H01L21/6715 ,  H01L51/5256

摘要： The present invention generally relates to organic light emitting diode (OLED) structures and methods for their manufacture. To increase the lifetime of an OLED structure, an encapsulating layer may be deposited over the OLED structure. The encapsulating layer may fully enclose or “encapsulate” the OLED structure. The encapsulating layer may have a substantially planar surface opposite to the interface between the OLED structure and the encapsulating layer. The planar surface permits successive layers to be evenly deposited over the OLED structure. The encapsulating layer reduces any oxygen penetration into the OLED structure and may increase the lifetime of the OLED structure.

摘要翻译： 本发明一般涉及有机发光二极管（OLED）结构及其制造方法。 为了增加OLED结构的寿命，可以在OLED结构上沉积封装层。 封装层可以完全包围或封装OLED结构。 封装层可以具有与OLED结构和封装层之间的界面相对的基本平坦的表面。 平面表面允许连续的层均匀地沉积在OLED结构上。 封装层减少了OLED结构中的氧渗透，并且可能增加OLED结构的寿命。

公开(公告)号：US20090200553A1

公开(公告)日：2009-08-13

申请号：US12413136

申请日：2009-03-27

申请人： Ya-Tang Yang ,  Beom Soo Park ,  Tae K. Won ,  Soo Young Choi

发明人： Ya-Tang Yang ,  Beom Soo Park ,  Tae K. Won ,  Soo Young Choi

IPC分类号： H01L29/786 ,  B32B17/06 ,  H01L21/336

CPC分类号： H01L29/78603 ,  H01L21/3145 ,  H01L21/3185 ,  H01L27/1248 ,  H01L29/518 ,  H01L29/66765 ,  Y10T428/265

摘要： The present invention generally comprises a low cost TFT and a method of manufacturing a TFT. For TFTs, soda lime glass would be an attractive alternative to non-alkali glass, but a soda lime glass substrate will permit sodium to diffuse into the active layer and degrade the performance of the TFT. Substrates comprising a polyimide, because they are flexible, would also be attractive to utilize instead of non-alkali glass substrates, but the plastic substrates permit carbon to diffuse into the active layer. By depositing a silicon oxynitride adhesion layer over the soda lime glass substrate and a silicon rich barrier layer over the adhesion layer, diffusion may be reduced and deposition may occur at high temperatures. Thus, a lower cost TFT may be produced with a soda lime glass substrate or a substrate comprising a polyimide as compared to a non-alkali glass substrate.

摘要翻译： 本发明通常包括低成本TFT和制造TFT的方法。 对于TFT，钠钙玻璃将成为非碱玻璃的有吸引力的替代品，但是钠钙玻璃基板将允许钠扩散到有源层并降低TFT的性能。 由于它们是柔性的，包含聚酰亚胺的基底也将是有吸引力的而不是使用无碱玻璃基底，但塑料基底允许碳扩散到活性层中。 通过在钠钙玻璃基板上沉积氮氧化硅粘合层，并在粘附层上沉积富硅势垒层，可能会降低扩散，并在高温下会发生沉积。 因此，与无碱玻璃基板相比，可以用钠钙玻璃基板或包含聚酰亚胺的基板制造成本较低的TFT。

公开(公告)号：US20090077804A1

公开(公告)日：2009-03-26

申请号：US12201840

申请日：2008-08-29

申请人： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G.J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J.B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

发明人： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G.J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J.B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

IPC分类号： H01L31/18 ,  H01L21/304 ,  B26F3/00

CPC分类号： H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

摘要： The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.

摘要翻译： 本发明一般涉及一种位于自动化太阳能电池器件制造系统内的切片模块。 太阳能电池器件制造系统适于接收单个大型衬底并从单个大衬底形成多个硅薄膜太阳能电池器件。

公开(公告)号：US08225496B2

公开(公告)日：2012-07-24

申请号：US12202199

申请日：2008-08-29

申请人： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G. J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J. B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

发明人： Robert Z. Bachrach ,  Yong-Kee Chae ,  Soo Young Choi ,  Nicholas G. J. De Vries ,  Yacov Elgar ,  Eric A. Englhardt ,  Michel R. Frei ,  Charles Gay ,  Parris Hawkins ,  Choi (Gene) Ho ,  James Craig Hunter ,  Penchala N. Kankanala ,  Liwei Li ,  Wing Hoo (Hendrick) Lo ,  Danny Cam Toan Lu ,  Fang Mei ,  Stephen P. Murphy ,  Srujal (Steve) Patel ,  Matthew J. B. Saunders ,  Asaf Schlezinger ,  Shuran Sheng ,  Tzay-Fa (Jeff) Su ,  Jeffrey S. Sullivan ,  David Tanner ,  Teresa Trowbridge ,  Brice Walker ,  John M. White ,  Tae K. Won

IPC分类号： H01L51/44 ,  H01L51/48 ,  H01L21/768 ,  H01L31/072

CPC分类号： H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

摘要翻译： 本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。 自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。 因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室 ，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成 太阳能电池装置。

公开(公告)号：US20090146264A1

公开(公告)日：2009-06-11

申请号：US12277921

申请日：2008-11-25

申请人： YA-TANG YANG ,  BEOM SOO PARK ,  TAE K. WON ,  SOO YOUNG CHOI ,  JOHN M. WHITE

发明人： YA-TANG YANG ,  BEOM SOO PARK ,  TAE K. WON ,  SOO YOUNG CHOI ,  JOHN M. WHITE

IPC分类号： H01L29/06 ,  H01L21/336 ,  H01L21/31

CPC分类号： H01L21/3185 ,  H01L21/0214 ,  H01L21/02164 ,  H01L21/02167 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/02274 ,  H01L27/1248 ,  H01L29/66765 ,  H01L29/78603

摘要： The present invention generally comprises a low cost TFT and a method of manufacturing a TFT. For TFTs, soda lime glass would be an attractive alternative to non-alkali glass, but a soda lime glass substrate will permit sodium to diffuse into the active layer and degrade the performance of the TFT. Substrates comprising a polyimide, because they are flexible, would also be attractive to utilize instead of non-alkali glass substrates, but the plastic substrates permit carbon to diffuse into the active layer. By depositing a silicon rich barrier layer over the soda lime glass substrate or substrate comprising a polyimide, both sodium and carbon diffusion may be reduced. Thus, a lower cost TFT may be produced with a soda lime glass substrate or a substrate comprising a polyimide as compared to a non-alkali glass substrate.

摘要翻译： 本发明通常包括低成本TFT和制造TFT的方法。 对于TFT，钠钙玻璃将成为非碱玻璃的有吸引力的替代品，但是钠钙玻璃基板将允许钠扩散到有源层并降低TFT的性能。 由于它们是柔性的，包含聚酰亚胺的基底也将是有吸引力的而不是使用无碱玻璃基底，但塑料基底允许碳扩散到活性层中。 通过在包含聚酰亚胺的钠钙玻璃基板或基底上沉积富硅势垒层，可以减少钠和碳的扩散。 因此，与无碱玻璃基板相比，可以用钠钙玻璃基板或包含聚酰亚胺的基板制造成本较低的TFT。

公开(公告)号：US20130210199A1

公开(公告)日：2013-08-15

申请号：US13768921

申请日：2013-02-15

申请人： Jrjyan Jerry CHEN ,  Tae K. WON ,  Beom Soo PARK ,  Young Jin CHOI ,  Soo Young CHOI

发明人： Jrjyan Jerry CHEN ,  Tae K. WON ,  Beom Soo PARK ,  Young Jin CHOI ,  Soo Young CHOI

IPC分类号： H01L51/52

CPC分类号： H01L51/5256 ,  C23C16/26 ,  C23C16/345

摘要： A method and apparatus for depositing a material layer, such as encapsulating film, onto a substrate is described. In one embodiment, an encapsulating film formation method includes delivering a gas mixture into a processing chamber, the gas mixture comprising a silicone-containing gas, a first nitrogen-containing gas, a second nitrogen-containing gas and hydrogen gas; energizing the gas mixture within the processing chamber by applying between about 0.350 watts/cm2 to about 0.903 watts/cm2 to a gas distribution plate assembly spaced about 800 mils to about 1800 mils above a substrate positioned within the processing chamber; maintaining the energized gas mixture within the processing chamber at a pressure of between about 0.5 Torr to about 3.0 Torr; and depositing an inorganic encapsulating film on the substrate in the presence of the energized gas mixture. In other embodiments, an organic dielectric layer is sandwiched between inorganic encapsulating layers.

摘要翻译： 描述了用于将材料层（例如封装膜）沉积到基底上的方法和装置。 在一个实施方案中，封装膜形成方法包括将气体混合物输送到处理室中，所述气体混合物包含含硅氧烷气体，第一含氮气体，第二含氮气体和氢气; 通过向位于处理室内的基板上方间隔约800密耳至约1800密耳的气体分配板组件施加约0.350瓦特/平方厘米至约0.903瓦特/平方厘米，对处理室内的气体混合物通电; 将加压气体混合物在处理室内保持在约0.5托至约3.0托之间的压力; 以及在通电的气体混合物的存在下在基底上沉积无机封装膜。 在其他实施例中，有机介电层夹在无机封装层之间。

公开(公告)号：US07951620B2

公开(公告)日：2011-05-31

申请号：US12371171

申请日：2009-02-13

申请人： Tae K. Won ,  Jose Manuel Dieguez Campo ,  Sanjay D. Yadav

发明人： Tae K. Won ,  Jose Manuel Dieguez Campo ,  Sanjay D. Yadav

IPC分类号： H01L21/00 ,  H01L33/00

CPC分类号： H01L21/6715 ,  H01L51/5256

摘要： The present invention generally relates to organic light emitting diode (OLED) structures and methods for their manufacture. To increase the lifetime of an OLED structure, an encapsulating layer may be deposited over the OLED structure. The encapsulating layer may fully enclose or “encapsulate” the OLED structure. The encapsulating layer may have a substantially planar surface opposite to the interface between the OLED structure and the encapsulating layer. The planar surface permits successive layers to be evenly deposited over the OLED structure. The encapsulating layer reduces any oxygen penetration into the OLED structure and may increase the lifetime of the OLED structure.

摘要翻译： 本发明一般涉及有机发光二极管（OLED）结构及其制造方法。 为了增加OLED结构的寿命，可以在OLED结构上沉积封装层。 封装层可以完全包围或“封装”OLED结构。 封装层可以具有与OLED结构和封装层之间的界面相对的基本平坦的表面。 平面表面允许连续的层均匀地沉积在OLED结构上。 封装层减少了OLED结构中的氧渗透，并且可能增加OLED结构的寿命。

公开(公告)号：US20130068161A1

公开(公告)日：2013-03-21

申请号：US13538389

申请日：2012-06-29

申请人： John M. White ,  Suhail Anwar ,  Jozef Kudela ,  Carl A. Sorensen ,  Tae K. Won ,  Seon-Mee Cho ,  Soo Young Choi ,  Beom Soo Park ,  Benjamin M. Johnston

发明人： John M. White ,  Suhail Anwar ,  Jozef Kudela ,  Carl A. Sorensen ,  Tae K. Won ,  Seon-Mee Cho ,  Soo Young Choi ,  Beom Soo Park ,  Benjamin M. Johnston

IPC分类号： C23C16/455 ,  B05B1/14

CPC分类号： C23C16/455 ,  C23C16/45578 ,  C23C16/4587 ,  C23C16/511 ,  C23C16/513 ,  C23C16/54

摘要： An apparatus for introducing gas into a processing chamber comprising one or more gas distribution tubes having gas-injection holes which may be larger in size, greater in number, and/or spaced closer together at sections of the gas introduction tubes where greater gas conductance through the gas-injection holes is desired. An outside tube having larger gas-injection holes may surround each gas distribution tube. The gas distribution tubes may be fluidically connected to a vacuum foreline to facilitate removal of gas from the gas distribution tube at the end of a process cycle.

摘要翻译： 一种用于将气体引入处理室的装置，包括一个或多个具有气体注入孔的气体分配管，所述气体分配管的尺寸更大，数量更多，和/或在气体导入管的部分处更靠近在一起，其中较大的气体导通通过 需要喷气孔。 具有较大气体注入孔的外管可围绕每个气体分配管。 气体分配管可以流体连接到真空前级管线，以便于在处理循环结束时从气体分配管中除去气体。

公开(公告)号：US20110297921A1

公开(公告)日：2011-12-08

申请号：US13117947

申请日：2011-05-27

申请人： Tae K. Won ,  Jose Manuel Dieguez Campo ,  John M. White ,  Sanjay Yadav

发明人： Tae K. Won ,  Jose Manuel Dieguez Campo ,  John M. White ,  Sanjay Yadav

IPC分类号： H01L51/52 ,  H01L51/56

CPC分类号： H01L21/6715 ,  H01L51/5256

摘要： The present invention generally relates to organic light emitting diode (OLED) structures and methods for their manufacture. To increase the lifetime of an OLED structure, an encapsulating layer may be deposited over the OLED structure. The encapsulating layer may fully enclose or “encapsulate” the OLED structure. The encapsulating layer may have a substantially planar surface opposite to the interface between the OLED structure and the encapsulating layer. The planar surface permits successive layers to be evenly deposited over the OLED structure. The encapsulating layer reduces any oxygen penetration into the OLED structure and may increase the lifetime of the OLED structure.

摘要翻译： 本发明一般涉及有机发光二极管（OLED）结构及其制造方法。 为了增加OLED结构的寿命，可以在OLED结构上沉积封装层。 封装层可以完全包围或“封装”OLED结构。 封装层可以具有与OLED结构和封装层之间的界面相对的基本平坦的表面。 平面表面允许连续的层均匀地沉积在OLED结构上。 封装层减少了OLED结构中的氧渗透，并且可能增加OLED结构的寿命。

公开(公告)号：US20090230425A1

公开(公告)日：2009-09-17

申请号：US12371171

申请日：2009-02-13

申请人： TAE K. WON ,  Jose Manuel Dieguez Campo ,  John M. White ,  Sanjay Yadav

发明人： TAE K. WON ,  Jose Manuel Dieguez Campo ,  John M. White ,  Sanjay Yadav

IPC分类号： H01L33/00 ,  H01L21/00

CPC分类号： H01L21/6715 ,  H01L51/5256

摘要： The present invention generally relates to organic light emitting diode (OLED) structures and methods for their manufacture. To increase the lifetime of an OLED structure, an encapsulating layer may be deposited over the OLED structure. The encapsulating layer may fully enclose or “encapsulate” the OLED structure. The encapsulating layer may have a substantially planar surface opposite to the interface between the OLED structure and the encapsulating layer. The planar surface permits successive layers to be evenly deposited over the OLED structure. The encapsulating layer reduces any oxygen penetration into the OLED structure and may increase the lifetime of the OLED structure.

摘要翻译： 本发明一般涉及有机发光二极管（OLED）结构及其制造方法。 为了增加OLED结构的寿命，可以在OLED结构上沉积封装层。 封装层可以完全包围或“封装”OLED结构。 封装层可以具有与OLED结构和封装层之间的界面相对的基本平坦的表面。 平面表面允许连续的层均匀地沉积在OLED结构上。 封装层减少了OLED结构中的氧渗透，并且可能增加OLED结构的寿命。