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    WAVELENGTH CONVERSION APPARATUS, LASER LIGHT GENERATING APPARATUS AND WAVELENGTH CONVERSION METHOD
    1.
    发明申请
    WAVELENGTH CONVERSION APPARATUS, LASER LIGHT GENERATING APPARATUS AND WAVELENGTH CONVERSION METHOD 有权
    波长转换装置，激光发光装置和波长转换方法

    公开(公告)号：US20100008387A1

    公开(公告)日：2010-01-14

    申请号：US12498480

    申请日：2009-07-07

    申请人： Ryo Furutachi ,  Tetsuro Kuwayama ,  Hisashi Masuda

    发明人： Ryo Furutachi ,  Tetsuro Kuwayama ,  Hisashi Masuda

    IPC分类号： H01S3/10 ,  G02F1/35

    CPC分类号： G02F1/37 ,  G02F1/3501 ,  G02F1/3525 ,  G02F1/3544 ,  G02F2001/354 ,  H01S3/0092 ,  H01S3/1305

    摘要： A wavelength conversion apparatus capable of keeping high wavelength conversion efficiency for a longer time than ever before is provided. A wavelength conversion apparatus includes: a wavelength conversion section including a nonlinear optical crystal, and performing wavelength conversion of incident laser light by allowing the incident laser light to pass through the nonlinear optical crystal; and a relative position control section, when wavelength conversion is performed by the wavelength conversion section, relatively displacing the incident position of the incident laser light in an incident plane into which the incident laser light enters of the nonlinear optical crystal in a direction including a projection direction component of a +C axis to the incident plane in the nonlinear optical crystal or a direction orthogonal to the projection direction component.

    摘要翻译： 提供了能够比以往更长时间保持高波长转换效率的波长转换装置。 波长转换装置包括：包括非线性光学晶体的波长转换部分，并且通过使入射激光通过非线性光学晶体来进行入射激光的波长转换; 以及相对位置控制部，当由所述波长转换部进行波长转换时，使入射激光的入射位置相对移动，所述入射面入射到所述非线性光学晶体的入射面中，所述入射面包括投影 + C轴的方向分量与非线性光学晶体中的入射面或与投射方向分量正交的方向。

    Wavelength conversion apparatus, laser light generating apparatus and wavelength conversion method
    2.
    发明授权
    Wavelength conversion apparatus, laser light generating apparatus and wavelength conversion method 有权
    波长转换装置，激光发生装置和波长转换方法

    公开(公告)号：US07920607B2

    公开(公告)日：2011-04-05

    申请号：US12498480

    申请日：2009-07-07

    申请人： Ryo Furutachi ,  Tetsuro Kuwayama ,  Hisashi Masuda

    发明人： Ryo Furutachi ,  Tetsuro Kuwayama ,  Hisashi Masuda

    IPC分类号： H01S3/10

    CPC分类号： G02F1/37 ,  G02F1/3501 ,  G02F1/3525 ,  G02F1/3544 ,  G02F2001/354 ,  H01S3/0092 ,  H01S3/1305

    摘要： A wavelength conversion apparatus capable of keeping high wavelength conversion efficiency for a longer time than ever before is provided. A wavelength conversion apparatus includes: a wavelength conversion section including a nonlinear optical crystal, and performing wavelength conversion of incident laser light by allowing the incident laser light to pass through the nonlinear optical crystal; and a relative position control section, when wavelength conversion is performed by the wavelength conversion section, relatively displacing the incident position of the incident laser light in an incident plane into which the incident laser light enters of the nonlinear optical crystal in a direction including a projection direction component of a +C axis to the incident plane in the nonlinear optical crystal or a direction orthogonal to the projection direction component.

    摘要翻译： 提供了能够比以往更长时间保持高波长转换效率的波长转换装置。 波长转换装置包括：包括非线性光学晶体的波长转换部分，并且通过使入射激光通过非线性光学晶体来进行入射激光的波长转换; 以及相对位置控制部，当由所述波长转换部进行波长转换时，使入射激光的入射位置相对移动，所述入射面入射到所述非线性光学晶体的入射面中，所述入射面包括投影 + C轴的方向分量与非线性光学晶体中的入射面或与投射方向分量正交的方向。

    Laser beam generating apparatus and method
    5.
    发明授权
    Laser beam generating apparatus and method 有权
    激光束发生装置及方法

    公开(公告)号：US06240111B1

    公开(公告)日：2001-05-29

    申请号：US09289244

    申请日：1999-04-09

    申请人： Shigeo Kubota ,  Nobuhiko Umezu ,  Tatsuo Fukui ,  Hisashi Masuda ,  Koichi Tatsuki

    发明人： Shigeo Kubota ,  Nobuhiko Umezu ,  Tatsuo Fukui ,  Hisashi Masuda ,  Koichi Tatsuki

    IPC分类号： H01S310

    CPC分类号： G02F1/37

    摘要： A laser beam generating apparatus comprising a first laser beam source oscillating in a near infrared-ray region of, for example, an Nd:YAG laser to generate a laser beam, a second higher harmonic wave generator for generating, from the laser beam emitted from the first laser beam source, a second higher harmonic wave having a half wavelength of the laser beam emitted from the first laser beam source, a splitter for splitting the second higher harmonic wave, a second laser beam source which is supplied with a part of the second higher harmonic wave thus split is input to a Ti:Sapphire laser to be excited and oscillated, thereby generating a laser beam of substantially 700 nm in wavelength, a fourth higher harmonic wave generator for generating a fourth higher harmonic wave from the remaining part of the second higher harmonic wave thus split, a sum frequency mixing composed of a BBO crystal device to which the laser beam of substantially 700 nm in wavelength and the fourth higher harmonic wave are input, and a controller for controlling the temperature of the BBO crystal device to substantially 100K or less, thereby generating a laser beam of substantially 193 nm in wavelength as an output of the sum frequency mixing.

    摘要翻译： 一种激光束产生装置，包括：在例如Nd：YAG激光器的近红外线区域中振荡的第一激光束源，以产生激光束;第二高次谐波发生器，用于从从 第一激光束源，具有从第一激光束源发射的激光束的半波长的第二高次谐波，用于分离第二高次谐波的分离器，被提供有第一激光束的一部分的第二激光束源 将这样分割的第二高次谐波输入到激发和振荡的Ti：蓝宝石激光器中，从而产生大致为700nm的波长的激光束;第四高次谐波发生器，用于从剩余部分产生第四高次谐波 这样分裂的第二高次谐波，由BBO晶体器件组成的和频混频，其中波长大致为700nm的激光束和第四较高谐波 尼康波输入，以及用于将BBO晶体装置的温度控制在基本上为100K以下的控制器，由此产生大致193nm的波长的激光束作为和频混合的输出。

    Laser light generating apparatus
    6.
    发明授权
    Laser light generating apparatus 失效
    激光发生装置

    公开(公告)号：US5303250A

    公开(公告)日：1994-04-12

    申请号：US886091

    申请日：1992-05-21

    申请人： Hisashi Masuda ,  Kiyoshi Ohsato ,  Atsushi Fukumoto

    发明人： Hisashi Masuda ,  Kiyoshi Ohsato ,  Atsushi Fukumoto

    IPC分类号： G02F1/37 ,  H01S3/02 ,  H01S3/04 ,  H01S3/042 ,  H01S3/06 ,  H01S3/0941 ,  H01S3/101 ,  H01S3/109 ,  H01S3/131 ,  H01S3/10

    CPC分类号： H01S3/0627 ,  H01S3/02 ,  H01S3/109 ,  H01S3/1312 ,  H01S2301/02 ,  H01S3/0071 ,  H01S3/025 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0604 ,  H01S3/0615 ,  H01S3/09415 ,  H01S5/0683

    摘要： A laser light generating apparatus comprises a light source for generating an exciting light beam, a condenser lens for converging the exciting light beam from the light source, a laser medium for generating a laser light of first wavelength by the radiation of the exciting light beam supplied thereto through the condenser lens, a nonlinear optical crystal element for generating a second laser light by the radiation of the first laser light generated from the laser medium, a pair of reflecting means for constituting a laser resonator together with at least the laser medium and the nonlinear optical crystal element, a deflecting element for deflecting an optical axis of the second laser light emitted from reflecting means provided at the emitting side of the pair of reflecting means, detecting means for detecting a part of a light beam output from reflecting means disposed at the output side of the pair of reflecting means, control means for controlling the light source on the basis of a detected output from the detecting means, a base on which there are disposed at least the light source, the condenser lens, the laser medium, the nonlinear optical crystal element, the deflecting element and the detecting means and a housing for housing therein at least the light source, the condenser lens, the laser medium, the nonlinear optical crystal element, the deflecting element, the detecting means and the base.

    摘要翻译： 激光发生装置包括用于产生激发光束的光源，用于会聚来自光源的激发光束的聚光透镜，用于通过所提供的激发光束的辐射产生第一波长的激光的激光介质 通过聚光透镜，通过由激光介质产生的第一激光的辐射产生第二激光的非线性光学晶体元件，一对用于与至少激光介质一起构成激光谐振器的反射装置和 非线性光学晶体元件，用于偏转由设置在该对反射装置的发射侧的反射装置发射的第二激光的光轴的偏转元件，用于检测从设置在该反射装置的反射装置输出的光束的一部分的检测装置 一对反射装置的输出侧，用于基于的控制光源的控制装置 来自检测装置的检测输出，至少设置有光源的基座，聚光透镜，激光介质，非线性光学晶体元件，偏转元件和检测装置，以及用于容纳至少 光源，聚光透镜，激光介质，非线性光学晶体元件，偏转元件，检测装置和基座。

    Laser light generating apparatus and optical apparatus using the same
    9.
    发明授权
    Laser light generating apparatus and optical apparatus using the same 有权
    激光发生装置及使用其的光学装置

    公开(公告)号：US06714567B2

    公开(公告)日：2004-03-30

    申请号：US09955884

    申请日：2001-09-19

    申请人： Hisashi Masuda

    发明人： Hisashi Masuda

    IPC分类号： H01S310

    CPC分类号： G11B7/261 ,  G02F1/3534 ,  G02F2001/3542 ,  G11B7/125

    摘要： Provided is a small-sized laser light generating apparatus capable of oscillating continuous light with a range of wavelengths of about 200 nm or less with stability at high conversion efficiency. Light with wavelength &lgr;1 and light with wavelength &lgr;2 outputted from a first laser light generator and a second laser light generator are introduced into a first resonator and a second resonator, respectively, and then a nonlinear optical device included in both the first and second resonators generates light with wavelength &lgr;3 through sum-frequency mixing of these two incoming light beams. The light with the wavelength &lgr;1, the light with the wavelength &lgr;2 and the light with the wavelength &lgr;3, which are spatially separated from one another, enter into and exit from the nonlinear optical device and have different optical paths. The light with the wavelength &lgr;1 and the light with the wavelength &lgr;2 are set so that the optical axes thereof do not perfectly match in the nonlinear optical device, and an incident angle or an exit angle of at least one of the two light beams is set at a Brewster angle, whereby reflection loss can be further reduced.

    摘要翻译： 本发明提供能够以高转换效率稳定地振荡具有约200nm以下的波长范围的连续光的小型激光发生装置。 波长λ1的光和从第一激光发生器和第二激光发生器输出的具有波长λ2的光分别被引入到第一谐振器和第二谐振器中，然后包括在第一和第二谐振器中的非线性光学器件产生 通过这两个入射光束的和频混合，具有波长λ3的光。 具有波长λ1的光，具有波长λ2的光和波长λ3的光彼此空间分离，进入和离开非线性光学器件并具有不同的光路。 设定波长λ1的光和波长为λ2的光，使得其光轴在非线性光学装置中不完全匹配，并且设定两个光束中的至少一个的入射角或出射角 在布鲁斯特角度，由此可以进一步降低反射损失。

    Wavelength converter
    10.
    发明授权
    Wavelength converter 失效
    波长转换器

    公开(公告)号：US06249371B1

    公开(公告)日：2001-06-19

    申请号：US09264941

    申请日：1999-03-09

    申请人： Hisashi Masuda ,  Shigeo Kubota

    发明人： Hisashi Masuda ,  Shigeo Kubota

    IPC分类号： G02F135

    CPC分类号： G02F1/3534 ,  G02F1/37

    摘要： To obtain a laser beam the wavelength of 200 nm or less the repetition frequency of which is high, to reduce damage applied to mineral material such as synthetic fused silica, to extend the life of a stepper and others, to extend the life of laser parts without using toxic gas, to enhance the throughput of a stepper and others by enabling the compatibility of a high repetition frequency with the stability of a pulse, to realize an ultraviolet radiation source the whole of which is composed of a solid and to solve the problems of reliability, size, maintenance, a plumbing and others and sufficiently enhance reliability, the following procedure is taken. A second harmonic with the wavelength of 532 nm is acquired by converting the wavelength of a laser beam with the wavelength of 1.06 &mgr;m from a laser, a fourth harmonic with the wavelength of 266 nm is acquired by further converting the wavelength of the laser beam, a laser beam with the wavelength of approximately 700 nm is acquired by oscillating a titanium sapphire laser using a laser beam with the wavelength of 532 nm acquired by converting the wavelength of the above second harmonic or a laser beam from the above laser and a laser beam with the wavelength of approximately 190 nm is acquired by mixing the above laser beam and the laser beam with the wavelength of 266 nm on a nonlinear crystal in a laser to be a sum frequency.

    摘要翻译： 为了获得激光束的重复频率高的200nm或更小的激光束，减少施加到诸如合成熔凝石英等矿物材料的损伤，延长步进机等的使用寿命，延长激光部件的使用寿命 不使用有毒气体，通过实现高重复频率与脉冲稳定性的兼容性，提高步进机等的吞吐量，实现整体由固体组成的紫外线辐射源，解决问题 可靠性，尺寸，维护，管道等，并充分提高可靠性，采取以下步骤。 通过从激光器转换波长为1.06μm的激光束的波长来获得波长为532nm的二次谐波，通过进一步转换激光束的波长来获得波长为266nm的第四谐波， 通过使用通过转换上述二次谐波的波长或来自上述激光的激光束获得的波长为532nm的激光束振荡钛蓝宝石激光而获得波长为约700nm的激光束，以及激光束 通过将上述激光束和266nm波长的激光束混合在激光器中的非线性晶体上，获得约190nm的波长，作为和频。