公开(公告)号：US20060081776A1

公开(公告)日：2006-04-20

申请号：US11254638

申请日：2005-10-21

申请人： Yasuhiro Shimada ,  Ryo Kuroda

发明人： Yasuhiro Shimada ,  Ryo Kuroda

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G01Q60/22 ,  G02B6/10 ,  G02B6/122 ,  G02B6/241

摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever. A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.

摘要翻译： 用于检测光或照射光的探针包括在其一端由基底支撑的悬臂，形成在悬臂的自由端的中空尖端，在尖端的端部形成的微孔，以及形成在悬臂内的中空波导 。 一种用于光检测或光照射的探针的制造方法，包括以下步骤：在基板上加工形成槽，在所述槽上形成平板状的盖部，形成在其一部分具有开口部的中空波导管， 在开口上形成具有微孔的中空尖端，并通过蚀刻去除衬底的一部分，以形成悬臂。

公开(公告)号：US06408123B1

公开(公告)日：2002-06-18

申请号：US09708587

申请日：2000-11-09

申请人： Ryo Kuroda ,  Yasuhiro Shimada ,  Takako Yamaguchi

发明人： Ryo Kuroda ,  Yasuhiro Shimada ,  Takako Yamaguchi

IPC分类号： G02B610

CPC分类号： G01Q60/22 ,  Y10S977/862

摘要： A near-field optical probe comprises a micro-aperture for irradiating and/or detecting evanescent light through the front end of the probe, an elastically deformable cantilever supporting the micro-aperture at the free end thereof, and a surface plasmon polariton waveguide arranged on the cantilever to guide light from a light source to the micro-aperture and/or to guide light from a light source introduced through the micro-aperture.

摘要翻译： 近场光学探针包括用于照射和/或检测通过探针的前端的ev逝光的微孔，在其自由端支撑微孔的可弹性变形的悬臂和布置在其上的表面等离子体激元波导管 所述悬臂将光从光源引导到微孔和/或引导来自通过微孔引入的光源的光。

公开(公告)号：US06215114B1

公开(公告)日：2001-04-10

申请号：US09158494

申请日：1998-09-23

申请人： Takayuki Yagi ,  Tsutomu Ikeda ,  Ryo Kuroda ,  Yasuhiro Shimada

发明人： Takayuki Yagi ,  Tsutomu Ikeda ,  Ryo Kuroda ,  Yasuhiro Shimada

IPC分类号： H01L2100

CPC分类号： G01Q60/22 ,  Y10S977/862

摘要： An optical prove for detecting or irradiating evanescent light is manufactured by forming a film having a regulated film thickness on a substrate, then forming a recess from the rear surface of the substrate, and forming a through hole in the film from the side of the recess by etching. The obtained optical probe has a micro-aperture at the tip of the through hole and usually, a plurality of optical probes each having a micro-aperture of uniform profile are formed on a single substrate. In the recess, light-receiving or light-irradiating means may be provided.

摘要翻译： 用于检测或照射ev逝光的光学证明是通过在基片上形成具有调节膜厚的膜，然后从基片的后表面形成一个凹槽，并从该凹部的一侧形成一个通孔 通过蚀刻。 获得的光学探针在通孔的尖端处具有微孔，并且通常在单个衬底上形成各自具有均匀轮廓的微孔的多个光学探针。 在凹部中，可以设置光接收或光照射装置。

公开(公告)号：US06408122B1

公开(公告)日：2002-06-18

申请号：US09689685

申请日：2000-10-13

申请人： Yasuhiro Shimada ,  Ryo Kuroda

发明人： Yasuhiro Shimada ,  Ryo Kuroda

IPC分类号： G02B610

CPC分类号： G01Q60/22 ,  Y10S977/862

摘要： A method for manufacturing a probe for irradiating with or detecting light is disclosed, which is possible by a batch process with high productivity, has the high process reproducibility of optical micro-apertures, facilitates integration and down sizing, enables a plurality of probes to be fabricated easily, enables fabrication on compound semiconductor substrates, does not need coupling light between a wave guide layer and an optical micro-aperture, and minimize the transmission loss of light; and a probe for irradiating with or detecting light. The method comprises the steps of: (a) forming at least one recession on a first substrate; (b) fabricating a probe structure that contains a wave guide layer on the first substrate with the above recession; (c) bonding the probe structure on a second substrate; (d) transferring the probe structure that has a protrusion onto the second substrate, by peeling the probe structure off the first substrate; and (e) forming a cantilever-type probe that has a protrusion on a free end thereof by removing a part of the second substrate.

摘要翻译： 公开了用于照射或检测光的探针的制造方法，其可以通过以高生产率的间歇法生产，具有高的光学微孔的再现性，便于集成和降尺寸，使得多个探针能够 容易制造，能够在复合半导体基板上制造，不需要在波导层和光学微孔之间耦合光，并且使光的传输损耗最小化; 以及用于照射或检测光的探针。 该方法包括以下步骤：（a）在第一基底上形成至少一个凹陷; （b）制造在上述衰退的第一基板上包含波导层的探针结构; （c）将探针结构粘结在第二基底上; （d）通过将探针结构剥离第一基底将具有突起的探针结构转移到第二基底上; 以及（e）通过去除所述第二基板的一部分，形成在其自由端上具有突起的悬臂型探针。

公开(公告)号：US6046972A

公开(公告)日：2000-04-04

申请号：US825129

申请日：1997-03-27

申请人： Ryo Kuroda ,  Yasuhiro Shimada

发明人： Ryo Kuroda ,  Yasuhiro Shimada

IPC分类号： G01B11/30 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/02 ,  G01Q60/02 ,  G01Q60/16 ,  G01Q60/18 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q60/56 ,  G01Q70/06 ,  G01Q80/00 ,  G02B6/122 ,  G11B7/005 ,  G11B7/12 ,  G11B7/14 ,  G11B7/22 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/03 ,  G11B7/00

CPC分类号： G01Q60/22 ,  B82Y20/00 ,  B82Y35/00 ,  G01Q70/06 ,  G02B6/122 ,  G11B11/03 ,  G11B7/005 ,  G11B7/12 ,  G11B7/14 ,  G11B7/22 ,  G11B9/14 ,  G11B9/1409 ,  B82Y10/00 ,  G01Q80/00 ,  Y10S977/862

摘要： In a method of manufacturing a probe with a minute aperture, the probe is coated with conductive material, a tip of the probe is brought into contact with a conductive substrate and a voltage is applied between the probe and the substrate to remove the coating material at the tip of the probe and form the minute aperture at the tip of the probe. The thus-fabricated probe can be used in a scanning near-field optical microscope for observing an object on the basis of a change in intensity of near-field light and an information recording and/or reproducing apparatus for reproducing information recorded in a record medium by using near-field light.

摘要翻译： 在制造具有微小孔径的探针的方法中，探针用导电材料涂覆，探针的尖端与导电基底接触，并且在探针和基底之间施加电压以除去涂层材料 探针的尖端，并在探针的尖端形成微小的孔。 这样制造的探针可以用于扫描近场光学显微镜，用于基于近场光强度的变化来观察物体，以及用于再现记录在记录介质中的信息的信息记录和/或再现装置 通过使用近场光。

公开(公告)号：US07151250B2

公开(公告)日：2006-12-19

申请号：US11254638

申请日：2005-10-21

申请人： Yasuhiro Shimada ,  Ryo Kuroda

发明人： Yasuhiro Shimada ,  Ryo Kuroda

IPC分类号： G02B6/10

CPC分类号： G01Q60/22 ,  G02B6/10 ,  G02B6/122 ,  G02B6/241

摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever.A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.

公开(公告)号：US06982419B2

公开(公告)日：2006-01-03

申请号：US11102662

申请日：2005-04-11

申请人： Yasuhiro Shimada ,  Ryo Kuroda

发明人： Yasuhiro Shimada ,  Ryo Kuroda

IPC分类号： H01J40/14

CPC分类号： G01Q60/22 ,  G02B6/10 ,  G02B6/122 ,  G02B6/241

摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever.A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opeining, and removing a part of the substrate by etching, to form a cantilever.

公开(公告)号：US06628392B2

公开(公告)日：2003-09-30

申请号：US09931720

申请日：2001-08-20

申请人： Ryo Kuroda ,  Yasuhiro Shimada ,  Junichi Seki ,  Takako Yamaguchi ,  Yasuhisa Inao

发明人： Ryo Kuroda ,  Yasuhiro Shimada ,  Junichi Seki ,  Takako Yamaguchi ,  Yasuhisa Inao

IPC分类号： G01B1100

CPC分类号： G03F9/703 ,  G03F9/7038 ,  G03F9/7049 ,  G03F9/7088

摘要： Disclosed herein is a light modulating apparatus comprising first and second two periodic structures each having a period smaller than the wavelength of light emitted from a light source, and a moving means for relatively moving the two periodic structures, wherein the surface of the first periodic structure is brought near to the surface of the second periodic structure to a space not longer than the wavelength to arrange them in a state opposed to each other, the light incident on the first periodic structure is converted into near-field light by the first periodic structure, the converted near-field light is transmitted through the second periodic structure and converted into propagation light by scattering the near-field light on the back surface of the second periodic structure, and the intensity of the propagation light is modulated by relatively moving the two periodic structures by the moving means.

摘要翻译： 这里公开了一种光调制装置，其包括第一和第二两个周期性结构，每个周期结构的周期小于从光源发射的光的波长;以及移动装置，用于相对移动两个周期性结构，其中第一周期性结构的表面 被带到第二周期性结构的表面附近到不长于波长的空间以将它们布置成彼此相对的状态，入射到第一周期性结构的光被第一周期性结构转换成近场光 转换的近场光透过第二周期结构传播，并通过散射第二周期结构的背面上的近场光而转换为传播光，并且传播光的强度通过相对移动两个 通过移动装置的周期性结构。

公开(公告)号：US06337477B1

公开(公告)日：2002-01-08

申请号：US09353153

申请日：1999-07-14

申请人： Yasuhiro Shimada ,  Takayuki Yagi ,  Ryo Kuroda

发明人： Yasuhiro Shimada ,  Takayuki Yagi ,  Ryo Kuroda

IPC分类号： G12B2100

CPC分类号： G01Q60/22 ,  Y10S977/875 ,  Y10S977/879

摘要： A probe with a micro-projection for a near-field scanning optical microscope (NSOM) which comprises a substrate, first and second junction layers which are arranged on the substrate and electrically isolated from each other and which are made of an electroconductive material, and a micro-projection bonded to the substrate by way of the first and second junction layers and having a cavity in the inside. The micro-projection has first and second material layer made of different respective materials and laid one on the other to form a junction interlayer therebetween. The first and second material layers are electrically connected to the first and second junction layers respectively and independently.

摘要翻译： 一种具有用于近场扫描光学显微镜（NSOM）的微投影的探针，其包括衬底，布置在衬底上并彼此电隔离并且由导电材料制成的第一和第二接合层，以及 微突起通过第一和第二接合层接合到衬底并且在内部具有空腔。 微型突起具有由不同的材料制成的第一和第二材料层，并在另一个之间铺设，以在它们之间形成连接中间层。 第一和第二材料层分别和独立地电连接到第一和第二结层。

公开(公告)号：US20050247117A1

公开(公告)日：2005-11-10

申请号：US11102662

申请日：2005-04-11

申请人： Yasuhiro Shimada ,  Ryo Kuroda

发明人： Yasuhiro Shimada ,  Ryo Kuroda

IPC分类号： G01B11/30 ,  B81B1/00 ,  B81C1/00 ,  G01Q60/06 ,  G01Q60/18 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q70/12 ,  G01Q80/00 ,  G02B6/10 ,  G02B6/122 ,  G02B6/24 ,  G11B7/135 ,  G11B7/22 ,  G01B5/28

CPC分类号： G01Q60/22 ,  G02B6/10 ,  G02B6/122 ,  G02B6/241

摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever. A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.

摘要翻译： 用于检测光或照射光的探针包括在其一端由基底支撑的悬臂，形成在悬臂的自由端的中空尖端，在尖端的端部形成的微孔，以及形成在悬臂内的中空波导 。 一种用于光检测或光照射的探针的制造方法，包括以下步骤：在基板上加工形成槽，在所述槽上形成平板状的盖部，形成在其一部分具有开口部的中空波导管， 在开口上形成具有微孔的中空尖端，并通过蚀刻去除衬底的一部分，以形成悬臂。