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235 条记录 (耗时 0.032 秒)

    Probe with hollow waveguide and method for producing the same
    4.
    发明申请
    Probe with hollow waveguide and method for producing the same 失效
    中空波导探头及其制造方法

    公开(公告)号：US20060081776A1

    公开(公告)日：2006-04-20

    申请号：US11254638

    申请日：2005-10-21

    申请人： Yasuhiro Shimada ,  Ryo Kuroda

    发明人： Yasuhiro Shimada ,  Ryo Kuroda

    IPC分类号： G01N23/00 ,  G21K7/00

    CPC分类号： G01Q60/22 ,  G02B6/10 ,  G02B6/122 ,  G02B6/241

    摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever. A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.

    摘要翻译： 用于检测光或照射光的探针包括在其一端由基底支撑的悬臂，形成在悬臂的自由端的中空尖端，在尖端的端部形成的微孔，以及形成在悬臂内的中空波导 。 一种用于光检测或光照射的探针的制造方法，包括以下步骤：在基板上加工形成槽，在所述槽上形成平板状的盖部，形成在其一部分具有开口部的中空波导管， 在开口上形成具有微孔的中空尖端，并通过蚀刻去除衬底的一部分，以形成悬臂。

    Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe
    6.
    发明授权
    Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe 失效
    用于检测或照射光的光学探针和具有这种探针的近场光学显微镜及其制造方法

    公开(公告)号：US06215114B1

    公开(公告)日：2001-04-10

    申请号：US09158494

    申请日：1998-09-23

    申请人： Takayuki Yagi ,  Tsutomu Ikeda ,  Ryo Kuroda ,  Yasuhiro Shimada

    发明人： Takayuki Yagi ,  Tsutomu Ikeda ,  Ryo Kuroda ,  Yasuhiro Shimada

    IPC分类号： H01L2100

    CPC分类号： G01Q60/22 ,  Y10S977/862

    摘要： An optical prove for detecting or irradiating evanescent light is manufactured by forming a film having a regulated film thickness on a substrate, then forming a recess from the rear surface of the substrate, and forming a through hole in the film from the side of the recess by etching. The obtained optical probe has a micro-aperture at the tip of the through hole and usually, a plurality of optical probes each having a micro-aperture of uniform profile are formed on a single substrate. In the recess, light-receiving or light-irradiating means may be provided.

    摘要翻译： 用于检测或照射ev逝光的光学证明是通过在基片上形成具有调节膜厚的膜，然后从基片的后表面形成一个凹槽，并从该凹部的一侧形成一个通孔 通过蚀刻。 获得的光学探针在通孔的尖端处具有微孔，并且通常在单个衬底上形成各自具有均匀轮廓的微孔的多个光学探针。 在凹部中，可以设置光接收或光照射装置。

    Probe with hollow waveguide and method for producing the same
    7.
    发明授权
    Probe with hollow waveguide and method for producing the same 失效

    公开(公告)号：US07151250B2

    公开(公告)日：2006-12-19

    申请号：US11254638

    申请日：2005-10-21

    申请人： Yasuhiro Shimada ,  Ryo Kuroda

    发明人： Yasuhiro Shimada ,  Ryo Kuroda

    IPC分类号： G02B6/10

    CPC分类号： G01Q60/22 ,  G02B6/10 ,  G02B6/122 ,  G02B6/241

    摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever.A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.

    Probe with hollow waveguide and method for producing the same
    8.
    发明授权
    Probe with hollow waveguide and method for producing the same 失效

    公开(公告)号：US06982419B2

    公开(公告)日：2006-01-03

    申请号：US11102662

    申请日：2005-04-11

    申请人： Yasuhiro Shimada ,  Ryo Kuroda

    发明人： Yasuhiro Shimada ,  Ryo Kuroda

    IPC分类号： H01J40/14

    CPC分类号： G01Q60/22 ,  G02B6/10 ,  G02B6/122 ,  G02B6/241

    摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever.A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opeining, and removing a part of the substrate by etching, to form a cantilever.

    Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof
    9.
    发明授权
    Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof 失效
    光调制装置和光开关，移动检测装置和距离测量装置，对准装置和半导体对准器及其处理

    公开(公告)号：US06628392B2

    公开(公告)日：2003-09-30

    申请号：US09931720

    申请日：2001-08-20

    申请人： Ryo Kuroda ,  Yasuhiro Shimada ,  Junichi Seki ,  Takako Yamaguchi ,  Yasuhisa Inao

    发明人： Ryo Kuroda ,  Yasuhiro Shimada ,  Junichi Seki ,  Takako Yamaguchi ,  Yasuhisa Inao

    IPC分类号： G01B1100

    CPC分类号： G03F9/703 ,  G03F9/7038 ,  G03F9/7049 ,  G03F9/7088

    摘要： Disclosed herein is a light modulating apparatus comprising first and second two periodic structures each having a period smaller than the wavelength of light emitted from a light source, and a moving means for relatively moving the two periodic structures, wherein the surface of the first periodic structure is brought near to the surface of the second periodic structure to a space not longer than the wavelength to arrange them in a state opposed to each other, the light incident on the first periodic structure is converted into near-field light by the first periodic structure, the converted near-field light is transmitted through the second periodic structure and converted into propagation light by scattering the near-field light on the back surface of the second periodic structure, and the intensity of the propagation light is modulated by relatively moving the two periodic structures by the moving means.

    摘要翻译： 这里公开了一种光调制装置，其包括第一和第二两个周期性结构，每个周期结构的周期小于从光源发射的光的波长;以及移动装置，用于相对移动两个周期性结构，其中第一周期性结构的表面 被带到第二周期性结构的表面附近到不长于波长的空间以将它们布置成彼此相对的状态，入射到第一周期性结构的光被第一周期性结构转换成近场光 转换的近场光透过第二周期结构传播，并通过散射第二周期结构的背面上的近场光而转换为传播光，并且传播光的强度通过相对移动两个 通过移动装置的周期性结构。

    Probe having micro-projection and manufacturing method thereof
    10.
    发明授权
    Probe having micro-projection and manufacturing method thereof 失效
    探头具有微投影及其制造方法

    公开(公告)号：US06337477B1

    公开(公告)日：2002-01-08

    申请号：US09353153

    申请日：1999-07-14

    申请人： Yasuhiro Shimada ,  Takayuki Yagi ,  Ryo Kuroda

    发明人： Yasuhiro Shimada ,  Takayuki Yagi ,  Ryo Kuroda

    IPC分类号： G12B2100

    CPC分类号： G01Q60/22 ,  Y10S977/875 ,  Y10S977/879

    摘要： A probe with a micro-projection for a near-field scanning optical microscope (NSOM) which comprises a substrate, first and second junction layers which are arranged on the substrate and electrically isolated from each other and which are made of an electroconductive material, and a micro-projection bonded to the substrate by way of the first and second junction layers and having a cavity in the inside. The micro-projection has first and second material layer made of different respective materials and laid one on the other to form a junction interlayer therebetween. The first and second material layers are electrically connected to the first and second junction layers respectively and independently.

    摘要翻译： 一种具有用于近场扫描光学显微镜（NSOM）的微投影的探针，其包括衬底，布置在衬底上并彼此电隔离并且由导电材料制成的第一和第二接合层，以及 微突起通过第一和第二接合层接合到衬底并且在内部具有空腔。 微型突起具有由不同的材料制成的第一和第二材料层，并在另一个之间铺设，以在它们之间形成连接中间层。 第一和第二材料层分别和独立地电连接到第一和第二结层。